KR101567994B1 - 변형된 반도체 더블-헤테로구조체 및 양자점들을 포함하는 메모리 디바이스 - Google Patents
변형된 반도체 더블-헤테로구조체 및 양자점들을 포함하는 메모리 디바이스 Download PDFInfo
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- KR101567994B1 KR101567994B1 KR1020137011088A KR20137011088A KR101567994B1 KR 101567994 B1 KR101567994 B1 KR 101567994B1 KR 1020137011088 A KR1020137011088 A KR 1020137011088A KR 20137011088 A KR20137011088 A KR 20137011088A KR 101567994 B1 KR101567994 B1 KR 101567994B1
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- energy
- double
- energy states
- memory
- holes
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- 239000002096 quantum dot Substances 0.000 title claims abstract description 61
- 239000004065 semiconductor Substances 0.000 title claims abstract description 44
- 230000015654 memory Effects 0.000 claims abstract description 42
- 230000004888 barrier function Effects 0.000 claims abstract description 20
- 239000002800 charge carrier Substances 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims description 22
- 230000005669 field effect Effects 0.000 claims description 16
- 239000004047 hole gas Substances 0.000 claims description 15
- 239000003362 semiconductor superlattice Substances 0.000 claims description 10
- 230000005641 tunneling Effects 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 10
- 229910000673 Indium arsenide Inorganic materials 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 230000005684 electric field Effects 0.000 description 6
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 4
- 230000037230 mobility Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000000969 carrier Substances 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 230000001052 transient effect Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000004807 localization Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003446 memory effect Effects 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229910005542 GaSb Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910001297 Zn alloy Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000001773 deep-level transient spectroscopy Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/81—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
- H10D30/47—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 2D charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/80—FETs having rectifying junction gate electrodes
- H10D30/801—FETs having heterojunction gate electrodes
- H10D30/803—Programmable transistors, e.g. having charge-trapping quantum well
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
- H10D48/30—Devices controlled by electric currents or voltages
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
- H10D48/30—Devices controlled by electric currents or voltages
- H10D48/32—Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/0411—Manufacture or treatment of FETs having insulated gates [IGFET] of FETs having floating gates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/68—Floating-gate IGFETs
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
- Junction Field-Effect Transistors (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/970,744 | 2010-12-16 | ||
| US12/970,744 US8331142B2 (en) | 2010-12-16 | 2010-12-16 | Memory |
| PCT/EP2011/072181 WO2012080076A1 (en) | 2010-12-16 | 2011-12-08 | Memory device comprising a strained semiconductor double-heterostructure and quantum dots |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20140027904A KR20140027904A (ko) | 2014-03-07 |
| KR101567994B1 true KR101567994B1 (ko) | 2015-11-10 |
Family
ID=45476459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020137011088A Active KR101567994B1 (ko) | 2010-12-16 | 2011-12-08 | 변형된 반도체 더블-헤테로구조체 및 양자점들을 포함하는 메모리 디바이스 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8331142B2 (enExample) |
| EP (1) | EP2652789B1 (enExample) |
| JP (1) | JP5689540B2 (enExample) |
| KR (1) | KR101567994B1 (enExample) |
| WO (1) | WO2012080076A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9082637B2 (en) * | 2012-08-17 | 2015-07-14 | The University Of Connecticut | Optoelectronic integrated circuit |
| JP6415956B2 (ja) | 2014-12-09 | 2018-10-31 | 東芝メモリ株式会社 | 半導体記憶装置及びその制御方法 |
| GB201907540D0 (en) | 2019-05-29 | 2019-07-10 | Univ Of Lancaster | Improvements relating to electronic memory devices |
| CN116867276B (zh) * | 2023-06-07 | 2023-12-12 | 合肥美镓传感科技有限公司 | 氮化镓非挥发性存储器件及其制备方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4116722B2 (ja) | 1998-12-28 | 2008-07-09 | 富士通株式会社 | 量子半導体記憶装置および量子半導体記憶装置の読み出し方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3672678B2 (ja) * | 1996-04-05 | 2005-07-20 | 富士通株式会社 | 量子半導体装置およびその製造方法 |
| US6281519B1 (en) * | 1997-08-13 | 2001-08-28 | Fujitsu Limited | Quantum semiconductor memory device including quantum dots |
| KR100377498B1 (ko) * | 2000-09-09 | 2003-03-26 | 한국과학기술연구원 | 양자점 구조 반도체 소자의 제조 방법 및 이에 의해 제조된 반도체 소자 |
| EP2192617B1 (en) * | 2002-05-22 | 2012-02-01 | Fujitsu Limited | Quantum Semiconductor Device and Method for Fabricating the Same |
| US7750425B2 (en) * | 2005-12-16 | 2010-07-06 | The Trustees Of Princeton University | Intermediate-band photosensitive device with quantum dots embedded in energy fence barrier |
| DE102006059110A1 (de) | 2006-12-08 | 2008-06-12 | Technische Universität Berlin | Speicherzelle und Verfahren zum Speichern von Daten |
-
2010
- 2010-12-16 US US12/970,744 patent/US8331142B2/en active Active
-
2011
- 2011-12-08 WO PCT/EP2011/072181 patent/WO2012080076A1/en not_active Ceased
- 2011-12-08 JP JP2013543654A patent/JP5689540B2/ja active Active
- 2011-12-08 KR KR1020137011088A patent/KR101567994B1/ko active Active
- 2011-12-08 EP EP11807878.1A patent/EP2652789B1/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4116722B2 (ja) | 1998-12-28 | 2008-07-09 | 富士通株式会社 | 量子半導体記憶装置および量子半導体記憶装置の読み出し方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20120155165A1 (en) | 2012-06-21 |
| WO2012080076A1 (en) | 2012-06-21 |
| KR20140027904A (ko) | 2014-03-07 |
| EP2652789B1 (en) | 2020-07-08 |
| JP2014506002A (ja) | 2014-03-06 |
| EP2652789A1 (en) | 2013-10-23 |
| US8331142B2 (en) | 2012-12-11 |
| JP5689540B2 (ja) | 2015-03-25 |
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