JP5689540B2 - 半導体歪みダブルへテロ構造及び量子ドットを備えるメモリデバイス - Google Patents
半導体歪みダブルへテロ構造及び量子ドットを備えるメモリデバイス Download PDFInfo
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/802—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with heterojunction gate, e.g. transistors with semiconductor layer acting as gate insulating layer, MIS-like transistors
- H01L29/803—Programmable transistors, e.g. with charge-trapping quantum well
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
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- H—ELECTRICITY
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
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Description
[1] P. Pavan, R. Bez, P. Olivo, and E. Zanoni, Proc. IEEE 85, 1248 (1997).
[2] R. Waser, Nanoelectronics and Information Technology _Wiley, Weinheim, 2003.
[3] G. W. Burr, B. N. Kurdi, J. C. Scott, C. H. Lam, K. Gopalakrishnan, and R. S. Shenoy, IBM J. Res. Dev. 52, 449 (2008).
[4] J. J. Finley, M. Skalitz, M. Arzberger, A. Zrenner, G. Bohm, and G. Abstreiter, Appl. Phys. Lett. 73, 2618 _1998_.
[5] K. Koike, K. Saitoh, S. Li, S. Sasa, M. Inoue, and M. Yano, Appl. Phys. Lett. 76, 1464 (2000).
[6] H. Pettersson, L. Baath, N. Carlson, W. Seifert, and L. Samuelson, Appl. Phys. Lett. 79, 78 (2001).
[7] C. Balocco, A. M. Song, and M. Missous, Appl. Phys. Lett. 85, 5911 (2004).
[8] D. Nataraj , N. Ooike, J. Motohisa, and T. Fukui, Appl. Phys. Lett. 87,193103 (2005).
[9] C. R. Muller, L. Worschech, J. Heinrich, S. Hofling, and A. Forchel, Appl. Phys. Lett. 93, 063502 (2008).
[10] A. Marent, M. Geller, A. Schliwa, D. Feise, K. Potschke, and D. Bimberg, N. Akcay and N. Oncan, Appl. Phys. Lett. 91, 242109 (2007).
[11] T. Nowozin, A. Marent, M. Geller, N. Akcay, N. Oncan, D. Bimberg, Appl. Phys. Lett. 94, 4, 042108 (2009)
15 基板
20 層
25 スペーサー層
30 量子井戸
35 層
40 QD層
45 キャップ
50 ソース
55 ドレイン
60 オーム接触
65 ゲート
105 メモリ
110 歪みダブルへテロ構造
115 内側半導体層
120 外側半導体層
125 外側半導体層
130 二次元正孔ガス層
135 ゲート電極
140 中間層
185 正孔
186 エネルギー状態
190 エネルギー障壁
200 半導体超格子
210 量子井戸
220 量子井戸
230 エネルギー状態
ΔEL 伝導帯不連続
EF フェルミエネルギー
EV 価電子帯
EL 伝導帯
ΔWb エネルギーバンド
Claims (18)
- 2つの外側半導体層の間に挟み込まれた内側半導体層を有する歪みダブルへテロ構造を備えるメモリであって、
− 前記内側半導体層の格子定数は前記外側半導体層の格子定数とは異なっており、その結果として生じる前記ダブルへテロ構造における格子歪みが、前記内側半導体層の内部において少なくとも1つの量子ドットの形成を誘導し、前記少なくとも1つの量子ドットはその中に電荷キャリアを蓄えることが可能であり、
− 前記格子歪みにより、前記少なくとも1つの量子ドットは、1.15eV以上の放出障壁を有し、かつ、1000nm3毎の少なくとも3つのエネルギー状態のエネルギー状態密度をもたらし、前記少なくとも3つのエネルギー状態は全て、50meV以下のエネルギーバンド内に位置づけられる、メモリ。 - 前記少なくとも3つのエネルギー状態の各々が2つの電荷キャリアを蓄えることが可能な、請求項1に記載のメモリ。
- 前記少なくとも3つのエネルギー状態の各々が正孔を蓄え、かつ、2つの正孔を蓄えることが可能な、請求項2に記載のメモリ。
- 前記少なくとも3つのエネルギー状態は正孔を蓄えることが可能であり、かつ、前記歪みダブルへテロ構造にバイアスが与えられていない場合、エネルギー的にフェルミ準位よりも上に位置づけられる、請求項1に記載のメモリ。
- 前記メモリが、前記少なくとも1つの量子ドットを充電又は放電するために正孔を輸送することが可能な二次元正孔ガス層を備える、請求項1に記載のメモリ。
- 前記二次元正孔ガス層と前記少なくとも1つの量子ドットの間に、半導体超格子が配置される、請求項5に記載のメモリ。
- 前記半導体超格子が少なくとも2つの量子井戸を備え、その各々が少なくとも1つのエネルギー状態をもたらす、請求項6に記載のメモリ。
- 前記2つの量子井戸の前記正孔エネルギー状態が、前記歪みダブルへテロ構造にバイアスが与えられていない場合、フェルミ準位よりも上に位置づけられる、請求項7に記載のメモリ。
- 前記少なくとも2つの量子井戸の前記エネルギー状態のエネルギー的な位置が、前記歪みダブルへテロ構造にバイアスが与えられていない場合、互いに異なっている、請求項7に記載のメモリ。
- 前記歪みダブルへテロ構造に外部バイアス電圧を印加することにより、前記少なくとも2つの量子井戸の前記エネルギー状態を、互いに対して、及び前記少なくとも1つの量子ドットの前記エネルギー状態に対してシフトすることが可能な、請求項9に記載のメモリ。
- − 前記歪みダブルへテロ構造に消去電圧を印加することにより、前記少なくとも2つの量子井戸の前記エネルギー状態を整列させることが可能であるため、共鳴トンネル効果により、前記半導体超格子を通して、正孔が前記少なくとも1つの量子ドットからトンネルすることが可能であり、
− バイアスを与えられていない状態においては、前記少なくとも2つの量子井戸の前記エネルギー準位は不整合であり、正孔の共鳴トンネル効果は不可能とされる、
請求項10に記載のメモリ。 - 前記二次元正孔ガス層が前記メモリの電界効果トランジスタの一部であり、前記電界効果トランジスタのゲート電極が、前記歪みダブルへテロ構造に対して電圧を印加することを可能とする、請求項11に記載のメモリ。
- 前記電界効果トランジスタの前記ゲート電極と前記歪みダブルへテロ構造との間に中間層が配置され、前記中間層は、隣接する前記歪みダブルへテロ構造の外側半導体層よりも小さなバンドギャップを有する、請求項12に記載のメモリ。
- 前記中間層と前記隣接する外側半導体層との接合部分における伝導帯不連続を特徴とする、請求項13に記載のメモリ。
- − 前記電界効果トランジスタのゲート接触がオーム接触であり、
− 前記中間層がn型にドープされる、
請求項12に記載のメモリ。 - 前記電界効果トランジスタの前記ゲート接触がショットキー接触である、請求項13に記載のメモリ。
- 内側半導体層及び2つの外側半導体層が、それぞれGa(As,Sb)及び(Al,Ga)As、又はそれぞれGa(As,Sb)及びGaPで構成される、請求項1に記載のメモリ。
- 前記内側半導体層における前記量子ドットが規則的配列構造で配置される、請求項1に記載のメモリ。
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US12/970,744 US8331142B2 (en) | 2010-12-16 | 2010-12-16 | Memory |
US12/970,744 | 2010-12-16 | ||
PCT/EP2011/072181 WO2012080076A1 (en) | 2010-12-16 | 2011-12-08 | Memory device comprising a strained semiconductor double-heterostructure and quantum dots |
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GB201907540D0 (en) * | 2019-05-29 | 2019-07-10 | Univ Of Lancaster | Improvements relating to electronic memory devices |
CN116867276B (zh) * | 2023-06-07 | 2023-12-12 | 合肥美镓传感科技有限公司 | 氮化镓非挥发性存储器件及其制备方法 |
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US8331142B2 (en) | 2012-12-11 |
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