KR101525736B1 - Multilayered electronic component and manufacturing method thereof - Google Patents

Multilayered electronic component and manufacturing method thereof Download PDF

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Publication number
KR101525736B1
KR101525736B1 KR1020140054422A KR20140054422A KR101525736B1 KR 101525736 B1 KR101525736 B1 KR 101525736B1 KR 1020140054422 A KR1020140054422 A KR 1020140054422A KR 20140054422 A KR20140054422 A KR 20140054422A KR 101525736 B1 KR101525736 B1 KR 101525736B1
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KR
South Korea
Prior art keywords
inner coil
ferrite
oxidation preventing
magnetic
coil pattern
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Application number
KR1020140054422A
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Korean (ko)
Inventor
안진모
Original Assignee
삼성전기주식회사
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Publication date
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Priority to KR1020140054422A priority Critical patent/KR101525736B1/en
Priority to JP2014150459A priority patent/JP5932913B2/en
Priority to CN201410396519.6A priority patent/CN105097185A/en
Application granted granted Critical
Publication of KR101525736B1 publication Critical patent/KR101525736B1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/08Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • H01F17/0006Printed inductances
    • H01F17/0013Printed inductances with stacked layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • H01F27/2804Printed windings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/041Printed circuit coils
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F5/00Coils
    • H01F5/003Printed circuit coils
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • H01F27/2804Printed windings
    • H01F2027/2809Printed windings on stacked layers

Abstract

The present invention relates to a multilayer electronic component and a manufacturing method thereof and, more particularly, to a multilayer electronic component and a manufacturing method thereof, capable of preventing the reduction of electrical conductivity due to the oxidation of an internal coil part even though a plastic operation is performed in a weak reduction atmosphere. The embodiment of the present invention relates to the multilayer electronic component and the manufacturing method thereof, capable of preventing the reduction of the electrical conductivity due to the oxidation of the internal coil part.

Description

Technical Field [0001] The present invention relates to a multilayered electronic component and a manufacturing method thereof,

The present invention relates to a multilayer electronic component and a manufacturing method thereof.

An inductor, which is one of electronic components, is a typical passive element that removes noise by forming an electronic circuit together with a resistor and a capacitor. The inductor is a passive element that amplifies a signal of a specific frequency band in combination with a capacitor by using electromagnetic characteristics. And is used for a configuration such as a filter circuit.

BACKGROUND ART [0002] In recent years, the demand for miniaturization and high performance of electronic devices has increased, and power consumption has been increasing. As the power consumption increases, a power management integrated circuit (PMIC) or a DC-DC converter (DC-DC converter) used in a power circuit of an electronic device has a high switching frequency and an increased output current And the use of power inductors used for stabilizing the output current of a PMIC or a DC-DC converter is increasing.

As a power inductor used in a DC-DC converter circuit in such a flow, a wire-wound inductor in which a wire is wound around a metal-based magnetic material has been widely used. However, this type of inductor has a fundamental limitation in miniaturization. Therefore, in recent years, the use of a multilayer inductor has been increasing in place of a wound-type inductor.

The multilayer inductor is manufactured by printing an internal conductor on a magnetic material sheet, and through a series of steps such as via hole punching, lamination and firing.

In this case, when the heat treatment and sintering process is performed in a reducing atmosphere such as N 2 and H 2 in order to prevent the oxidation of the internal conductor, there is a problem that the magnetic properties are deteriorated due to the reduction of ferrite as a magnetic material. Therefore, the ferrite laminated inductor should be fired in a weak reducing atmosphere such as Ni / NiO equilibrium oxygen partial pressure.

However, when firing is performed in a weakly reducing atmosphere in order to prevent deterioration of magnetic properties due to reduction of ferrite, there is a problem in that the outgoing portion of the inner coil comes into contact with oxygen to cause oxidation and decrease the electric conductivity.

Particularly, in order to reduce the manufacturing cost, there is a tendency to replace the internal coil with expensive silver (Ag) to less expensive copper (Cu). Since copper is oxidized more easily than silver (Ag) It is necessary to solve the oxidation problem of the inner coil in such a weakly reducing atmosphere.

Korea Patent Publication No. 2011-0128554

An embodiment of the present invention relates to a multilayer electronic component and a method of manufacturing the multilayer electronic component that can prevent problems such as reduction of electrical conductivity due to oxidation of an internal coil portion even if firing proceeds in a weakly reducing atmosphere.

According to an aspect of the present invention, there is provided a magnetic head comprising: a magnetic body formed by stacking a plurality of magnetic layers; an inner coil formed inside the magnetic body by electrically connecting a plurality of inner coil patterns formed on the plurality of magnetic layers; And an outer electrode formed on an end surface of the magnetic body body and connected to the inner coil portion, wherein an oxidation preventing portion is formed on the inner coil pattern including the lead portion of the inner coil portion among the plurality of inner coil patterns, And the porosity of the oxidation preventing portion is 3% to 25%.

The oxidation preventing portion may be formed only in a portion of the inner coil pattern including the lead portion of the inner coil portion, including the lead portion of the inner coil portion.

The oxidation preventing portion may be formed on the entire inner coil pattern including the lead portion of the inner coil portion.

The porosity of the oxidation preventing portion may be 3% to 25% larger than the porosity of the inner coil pattern where the oxidation preventing portion is not formed.

The diameter of the air gap of the oxidation preventing portion may be 0.3 탆 to 15 탆.

The inner coil portion may include copper (Cu).

The magnetic body may include at least one selected from the group consisting of Mn-Zn ferrite, Ni-Zn ferrite, Ni-Zn-Cu ferrite, Mn-Mg ferrite, Ba ferrite and Li ferrite .

According to another aspect of the present invention, there is provided a magnetic recording medium comprising: a plurality of magnetic sheet sheets; Forming an inner coil pattern on the magnetic sheet; Forming a magnetic material body having an inner coil portion by laminating magnetic material sheets on which the inner coil pattern is formed, and sintering the magnetic material body; And forming an outer electrode connected to a lead portion of the inner coil portion on an end face of the sintered magnetic body body, wherein the inner coil pattern includes a lead portion of the inner coil portion, A method of manufacturing a multilayer electronic component which forms a part is provided.

The oxidation preventing portion may be formed only in a portion of the inner coil pattern including the lead portion of the inner coil portion, including the lead portion of the inner coil portion.

The oxidation preventing portion may be formed on the entire inner coil pattern including the lead portion of the inner coil portion.

The inner coil pattern may be formed of a conductive paste containing copper (Cu).

The antioxidant may be formed of a conductive paste containing copper (Cu) and at least one reducing agent selected from the group consisting of carbon, graphene, boron nitride (BN), and sodium hydrogen sulfide have.

The conductive paste forming the antioxidant may contain the reducing agent in an amount of 0.1 wt% to 30 wt%.

The reducing agent may be pyrolyzed through the sintering step to form a gap in the oxidation preventing part.

The porosity of the oxidation preventing portion may be 3% to 25%.

The magnetic body may include at least one selected from the group consisting of Mn-Zn ferrite, Ni-Zn ferrite, Ni-Zn-Cu ferrite, Mn-Mg ferrite, Ba ferrite and Li ferrite .

The sintering may be performed at 850 ° C to 1100 ° C.

According to one embodiment of the present invention, it is possible to prevent problems such as reduction in electrical conductivity due to oxidation of the inner coil portion even if firing proceeds in a weakly reducing atmosphere.

In addition, since firing proceeds in a weakly reducing atmosphere, it is possible to prevent reduction of magnetic characteristics due to reduction of ferrite and to replace costly copper (Cu) with internal copper, thereby reducing manufacturing cost.

1 is a perspective view of a multilayer electronic component according to an embodiment of the present invention.
2 is a sectional view taken along the line A-A 'in Fig.
3 is an exploded perspective view of a multilayer electronic component according to an embodiment of the present invention shown in Fig.
4 is a cross-sectional view of a multilayer electronic component according to an embodiment of the present invention.
5 is an exploded perspective view of a multilayer electronic component according to an embodiment of the present invention shown in Fig.
6 is a process diagram showing a method of manufacturing a multilayer electronic component according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to specific embodiments and the accompanying drawings. However, the embodiments of the present invention can be modified into various other forms, and the scope of the present invention is not limited to the embodiments described below. Furthermore, embodiments of the present invention are provided to more fully explain the present invention to those skilled in the art. Accordingly, the shapes and sizes of the elements in the drawings may be exaggerated for clarity of description, and the elements denoted by the same reference numerals in the drawings are the same elements.

It is to be understood that, although the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, Will be described using the symbols.

Throughout the specification, when an element is referred to as "comprising ", it means that it can include other elements as well, without excluding other elements unless specifically stated otherwise.

Laminated type  Electronic parts

Hereinafter, a multilayer electronic device according to an embodiment of the present invention will be described, but is not particularly limited to, a stacked inductor.

Fig. 1 is a perspective view of a multilayer electronic component according to an embodiment of the present invention, and Fig. 2 is a sectional view taken along the line A-A 'in Fig.

1 and 2, a multilayer electronic component 100 according to an embodiment of the present invention includes a magnetic body 110, an inner coil portion 120, and an outer electrode 130.

A plurality of magnetic material layers forming the magnetic material body 110 are sintered, and a boundary between adjacent magnetic material layers is formed by scanning electron microscopy (SEM) Electron Microscope) without using it.

In order to clearly explain the embodiment of the present invention, when the direction of the hexahedron is defined, L, W, and T shown in FIG. 1 indicate the longitudinal direction, the width direction, and the thickness direction .

The magnetic body 110 may include known ferrites such as Mn-Zn ferrite, Ni-Zn ferrite, Ni-Zn-Cu ferrite, Mn-Mg ferrite, Ba ferrite and Li ferrite .

The inner coil part 120 may include an inner coil pattern 121 formed by printing a conductive paste containing a conductive metal to a predetermined thickness on a plurality of magnetic material layers forming the magnetic body 110.

A via is formed at a predetermined position in each magnetic layer on which the inner coil pattern 121 is printed, and the inner coil patterns 121 formed in the respective magnetic layer layers through the vias are electrically interconnected to form one coil .

The conductive metal forming the inner coil pattern 121 is not particularly limited as long as it is a metal having excellent electrical conductivity. For example, silver (Ag), palladium (Pd), aluminum (Al), nickel (Ni) ), Gold (Au), copper (Cu), platinum (Pt), or the like. Copper (Cu) can be used most preferably when both the improvement of the electrical conductivity and the reduction of the manufacturing cost are taken into consideration.

The oxidation preventing portion 125 is formed on the inner coil pattern 121 including the lead portion 123 of the inner coil portion 120 among the plurality of inner coil patterns 121 forming the inner coil portion 120 .

When the heat treatment firing process is performed in the weakly reducing atmosphere, the outgoing portion 123 of the inner coil portion 120 exposed to the outside is oxidized, thereby decreasing the electrical conductivity. In particular, when the inner coil part 120 is made of copper (Cu), it is more easily oxidized.

Therefore, according to one embodiment of the present invention, even if firing is performed in a weak reducing atmosphere by forming the oxidation preventing portion 125 on the inner coil pattern 121 including the lead portion 123 of the inner coil portion 120, It is possible to prevent a reduction in the electrical conductivity due to the oxidation of the coil part 120. [

The oxidation preventing portion 125 may be formed by adding any one or more reducing agents selected from the group consisting of carbon, graphene, boron nitride, and sodium hydrogen sulfide (NaHS) to a conductive paste containing a conductive metal And then printed. The reducing agent may be pyrolyzed in the firing process to form voids. Accordingly, the porosity of the oxidation preventing portion 125 may be 3% to 25%.

The porosity can be measured using a transmission electron microscope (TEM), a scanning electron microscope (SEM), or the like. In the case of measurement with an electron microscope, an electron microscope photograph can be taken and the analysis on the cross section can be used. The porosity in the case where the pore size is smaller than 100 nm can be measured by observing with a transmission electron microscope by thinning the porosity by an ultramicrotome method or an ion milling method.

If the porosity of the oxidation preventing portion 125 is less than 3%, the reducing agent for preventing the oxidation of the inner coil portion 120 is insufficient so that the lead portion 123 of the inner coil portion 120 is oxidized and the electrical conductivity is decreased If the porosity exceeds 25%, the resistance value may increase.

The porosity of the oxidation preventing portion 125 may be 3% to 25% larger than the porosity of the inner coil pattern 121 where the oxidation preventing portion 125 is not formed.

The gap formed in the oxidation preventing portion 125 may have a diameter of 0.3 to 15 탆.

3 is an exploded perspective view of a multilayer electronic component according to an embodiment of the present invention shown in Fig.

Referring to FIG. 3, the oxidation preventing portion 125 may be formed on the entire inner coil pattern including the lead portion 123 of the inner coil portion 120. For example, the oxidation preventing portion 125 may be formed on the inner coil pattern of the outermost layer of the inner coil portion 120 including the lead portion 123.

FIG. 4 is an exploded perspective view of a multilayer electronic component according to an embodiment of the present invention, and FIG. 5 is an exploded perspective view of a multilayer electronic component according to an embodiment of the present invention shown in FIG.

4 and 5, the antioxidant portion 125 may include a lead portion 123 of the inner coil portion 120 of the inner coil pattern 121 including the lead portion 123 of the inner coil portion 120 123 may be formed only in a part of the region.

The oxidation preventing portion 125 is formed only in a portion of the inner coil pattern 121 including the lead portion 123 of the inner coil portion 120 exposed to the outside, thereby preventing oxidation of the inner coil portion 120, The increase in resistance due to the formation of the prevention part 125 can be minimized.

The external electrodes 130 may be formed on both end faces of the magnetic body 110 so as to connect to the lead portions 123 of the internal coil 120 exposed at both end faces of the magnetic body 110.

The external electrodes 130 may be formed on both end faces of the magnetic body 110 in the longitudinal direction and may extend to both end faces and / or both end faces in the width direction of the magnetic body 110 in the thickness direction.

The outer electrode 130 may include a metal having excellent electrical conductivity. For example, the outer electrode 130 may be formed of a metal such as Ni, Cu, Sn, or Ag, As shown in FIG.

Laminated type  Manufacturing method of electronic parts

6 is a process diagram showing a method of manufacturing a multilayer electronic component according to an embodiment of the present invention.

Referring to FIG. 6, first, a plurality of magnetic sheet 111 'can be provided.

The magnetic material used for producing the magnetic sheet 111 'is not particularly limited and examples thereof include Mn-Zn ferrite, Ni-Zn ferrite, Ni-Zn-Cu ferrite, Mn-Mg ferrite, Ba ferrite, Li ferrite and the like can be used.

A plurality of magnetic material sheets 111 'may be provided by applying and drying a slurry formed by mixing the magnetic material and the organic material onto a carrier film.

Next, the inner coil pattern 121 may be formed on the magnetic substance sheet 111 '.

The inner coil pattern 121 can be formed by applying a conductive paste containing a conductive metal onto the magnetic substance sheet 111 'by printing or the like. The conductive paste may be printed by a screen printing method or a gravure printing method, but the present invention is not limited thereto.

The conductive metal is not particularly limited as long as it is a metal having an excellent electrical conductivity. Examples of the conductive metal include silver (Ag), palladium (Pd), aluminum (Al), nickel (Ni), titanium (Ti) Cu) or platinum (Pt), or the like. Copper (Cu) can be used most preferably when both the improvement of the electrical conductivity and the reduction of the manufacturing cost are taken into consideration.

At this time, the inner coil pattern 121 including the lead portion 123 of the inner coil portion 120 among the plurality of inner coil patterns 121 formed on the plurality of magnetic substance sheets 111 ' ) Can be formed.

When the heat treatment firing process is performed in the weakly reducing atmosphere, the outgoing portion 123 of the inner coil portion 120 exposed to the outside is oxidized, thereby decreasing the electrical conductivity. In particular, when the inner coil part 120 is made of copper (Cu), it is more easily oxidized.

Therefore, according to one embodiment of the present invention, even if firing is performed in a weak reducing atmosphere by forming the oxidation preventing portion 125 on the inner coil pattern 121 including the lead portion 123 of the inner coil portion 120, It is possible to prevent a reduction in the electrical conductivity due to the oxidation of the coil part 120. [

The oxidation preventing portion 125 may be formed by adding any one or more reducing agents selected from the group consisting of carbon, graphene, boron nitride, and sodium hydrogen sulfide (NaHS) to a conductive paste containing a conductive metal And then printed.

The conductive paste forming the oxidation preventing part 125 may contain the reducing agent in an amount of 0.1 to 30% by weight.

When the reducing agent is contained in an amount of less than 0.1% by weight, the reducing agent for preventing oxidation of the inner coil part 120 is insufficient, so that the lead part 123 of the inner coil part 120 is oxidized, the electrical conductivity may be reduced, Exceeds 30% by weight, the resistance value may increase.

The oxidation preventing portion 125 may be formed on the entire inner coil pattern including the lead portion 123 of the inner coil portion 120. For example, the oxidation preventing portion 125 may be formed on the inner coil pattern of the outermost layer of the inner coil portion 120 including the lead portion 123.

The oxidation preventing portion 125 may be formed in a portion of the inner coil pattern 121 including the lead portion 123 of the inner coil portion 120 and including the lead portion 123 of the inner coil portion 120, .

The oxidation preventing portion 125 is formed only in a portion of the inner coil pattern 121 including the lead portion 123 of the inner coil portion 120 exposed to the outside, thereby preventing oxidation of the inner coil portion 120, The increase in resistance due to the formation of the prevention part 125 can be minimized.

Next, the magnetic body 110 having the inner coil part 120 formed thereon can be formed and sintered by laminating the magnetic sheet 111 'having the inner coil pattern 121 and the oxidation preventing part 125 thereon.

At this time, the magnetic body 110 having the ferrite-containing magnetic substance sheet 111 laminated thereon may be deteriorated in magnetic properties due to the reduction of ferrite when the firing is performed in a reducing atmosphere, Can be sintered in a weakly reducing atmosphere. The sintering temperature may be 850 캜 to 1100 캜.

In the sintering process, the reducing agent included in the oxidation preventing part 125 may be pyrolyzed to form a void. Accordingly, the porosity of the oxidation preventing portion 125 may be 3% to 25%.

Next, an outer electrode 130 connected to the lead-out portion 123 of the inner coil portion 120 may be formed on an end face of the sintered magnetic body body 110.

The outer electrode 130 may be formed using a conductive paste containing a metal having excellent electrical conductivity. For example, the outer electrode 130 may be formed of a metal such as nickel (Ni), copper (Cu), tin (Sn) Or an alloy thereof, or the like. The outer electrode 130 may be formed by performing a dipping process as well as printing according to the shape of the outer electrode 130.

In addition, the same features as those of the above-described multilayer electronic component according to the embodiment of the present invention will be omitted here.

The present invention is not limited to the above-described embodiment and the accompanying drawings, but is intended to be limited by the appended claims.

It will be apparent to those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. something to do.

100: Multilayer electronic component 121: Inner coil pattern
110: magnetic body main body 123: internal coil part withdrawal part
111 ': magnetic substance sheet 125: antioxidant part
120: internal coil part 130: external electrode

Claims (17)

A magnetic body body formed by stacking a plurality of magnetic body layers;
A plurality of inner coil patterns formed on the plurality of magnetic body layers, the inner coil portions being electrically connected to each other and formed in the magnetic body body;
And an outer electrode formed on an end surface of the magnetic body body and connected to the inner coil portion,
Wherein an oxidation preventing portion is formed in an inner coil pattern including a lead portion of the inner coil portion among the plurality of inner coil patterns, and a porosity of the oxidation preventing portion is 3% to 25%.
The method according to claim 1,
Wherein the oxidation preventing portion is formed only in a portion of the inner coil pattern including the lead portion of the inner coil portion including the lead portion of the inner coil portion.
The method according to claim 1,
Wherein the oxidation preventing portion is formed on the entire inner coil pattern including the lead portion of the inner coil portion.
The method according to claim 1,
Wherein the porosity of the oxidation preventing portion is 3% to 25% larger than the porosity of the internal coil pattern in which the oxidation preventing portion is not formed.
The method according to claim 1,
And the diameter of the gap of the oxidation preventing portion is 0.3 mu m to 15 mu m.
The method according to claim 1,
And the inner coil portion includes copper (Cu).
The method according to claim 1,
Wherein the magnetic body is made of a multilayer electronic device including at least one selected from the group consisting of Mn-Zn ferrite, Ni-Zn ferrite, Ni-Zn-Cu ferrite, Mn-Mg ferrite, Ba ferrite, part.
Providing a plurality of magnetic sheet sheets;
Forming an inner coil pattern on the magnetic sheet;
Forming a magnetic material body having an inner coil portion by laminating magnetic material sheets on which the inner coil pattern is formed, and sintering the magnetic material body; And
Forming an outer electrode connected to a lead portion of the inner coil portion on an end face of the sintered magnetic body body,
Wherein an oxidation preventing portion is formed on an inner coil pattern including a lead portion of the inner coil portion among the inner coil patterns.
9. The method of claim 8,
Wherein the oxidation preventing portion is formed only in a portion of the inner coil pattern including the lead portion of the inner coil portion including the lead portion of the inner coil portion.
9. The method of claim 8,
Wherein the oxidation preventing portion is formed on the entire inner coil pattern including the lead portion of the inner coil portion.
9. The method of claim 8,
Wherein the inner coil pattern is formed of a conductive paste containing copper (Cu).
9. The method of claim 8,
Wherein the oxidation preventing portion is formed of a conductive paste containing at least one reducing agent selected from the group consisting of copper (Cu) and carbon, graphene, boron nitride (BN), and sodium hydrogen sulfide A method of manufacturing an electronic component.
13. The method of claim 12,
Wherein the conductive paste forming the antioxidant portion comprises 0.1 wt% to 30 wt% of the reducing agent.
13. The method of claim 12,
Wherein the reducing agent is pyrolyzed through a sintering step to form a gap in the oxidation preventing portion.
9. The method of claim 8,
And the porosity of the oxidation preventing portion is 3% to 25%.
9. The method of claim 8,
Wherein the magnetic body is made of a multilayer electronic device including at least one selected from the group consisting of Mn-Zn ferrite, Ni-Zn ferrite, Ni-Zn-Cu ferrite, Mn-Mg ferrite, Ba ferrite and Li ferrite. A method of manufacturing a component.
9. The method of claim 8,
Wherein the sintering step is performed at 850 캜 to 1100 캜.
KR1020140054422A 2014-05-07 2014-05-07 Multilayered electronic component and manufacturing method thereof KR101525736B1 (en)

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KR1020140054422A KR101525736B1 (en) 2014-05-07 2014-05-07 Multilayered electronic component and manufacturing method thereof
JP2014150459A JP5932913B2 (en) 2014-05-07 2014-07-24 Multilayer electronic component and manufacturing method thereof
CN201410396519.6A CN105097185A (en) 2014-05-07 2014-08-13 Multilayered electronic component and manufacturing method thereof

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JP6863244B2 (en) * 2017-11-20 2021-04-21 株式会社村田製作所 Electronic components and manufacturing methods for electronic components

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