KR101497695B1 - 분광기를 이용한 위상차 측정 장치 - Google Patents

분광기를 이용한 위상차 측정 장치 Download PDF

Info

Publication number
KR101497695B1
KR101497695B1 KR1020080031148A KR20080031148A KR101497695B1 KR 101497695 B1 KR101497695 B1 KR 101497695B1 KR 1020080031148 A KR1020080031148 A KR 1020080031148A KR 20080031148 A KR20080031148 A KR 20080031148A KR 101497695 B1 KR101497695 B1 KR 101497695B1
Authority
KR
South Korea
Prior art keywords
wavelength
phase difference
polarizer
measurement
sample
Prior art date
Application number
KR1020080031148A
Other languages
English (en)
Korean (ko)
Other versions
KR20080091002A (ko
Inventor
이치로 아미모리
후미오 오바타
고우키 다카하시
Original Assignee
후지필름 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 후지필름 가부시키가이샤 filed Critical 후지필름 가부시키가이샤
Publication of KR20080091002A publication Critical patent/KR20080091002A/ko
Application granted granted Critical
Publication of KR101497695B1 publication Critical patent/KR101497695B1/ko

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41Refractivity; Phase-affecting properties, e.g. optical path length
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/60Specific applications or type of materials
    • G01N2223/605Specific applications or type of materials phases
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/01Indexing codes associated with the measuring variable
    • G01N2291/012Phase angle

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
KR1020080031148A 2007-04-06 2008-04-03 분광기를 이용한 위상차 측정 장치 KR101497695B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2007-00100363 2007-04-06
JP2007100363A JP5116346B2 (ja) 2007-04-06 2007-04-06 分光器を用いた位相差測定装置

Publications (2)

Publication Number Publication Date
KR20080091002A KR20080091002A (ko) 2008-10-09
KR101497695B1 true KR101497695B1 (ko) 2015-03-02

Family

ID=39980292

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080031148A KR101497695B1 (ko) 2007-04-06 2008-04-03 분광기를 이용한 위상차 측정 장치

Country Status (3)

Country Link
JP (1) JP5116346B2 (zh)
KR (1) KR101497695B1 (zh)
CN (1) CN101281091A (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6167920B2 (ja) * 2014-01-31 2017-07-26 株式会社島津製作所 分光光度計
CN106525720B (zh) * 2016-11-17 2019-03-29 常熟理工学院 采用双波长拟合相邻单波长实现食品安全快速检测的方法
US10732336B2 (en) * 2017-02-02 2020-08-04 Corning Incorporated Method of assembling optical systems and minimizing retardance distortions in optical assemblies
US11029253B2 (en) * 2017-03-30 2021-06-08 Applied Materials Israel Ltd. Computerized method for configuring an inspection system, computer program product and an inspection system
JP7349908B2 (ja) * 2019-12-27 2023-09-25 住友化学株式会社 画像表示装置
CN111537065A (zh) * 2020-04-30 2020-08-14 桂林电子科技大学 一种用于空间调制全偏振成像系统的带宽设计方法
CN111580290B (zh) * 2020-05-18 2022-07-12 北京兆维科技开发有限公司 一种无上偏光膜半导体显示面板的显示缺陷修复方法
CN113425252B (zh) * 2021-06-18 2023-03-17 耀视(苏州)医疗科技有限公司 一种眼球扫描图像阴暗不均的处理方法以及处理系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10332533A (ja) * 1997-06-03 1998-12-18 Unie Opt:Kk 複屈折評価装置
JP2000509830A (ja) * 1997-04-04 2000-08-02 ジェイ・エイ・ウーラム・カンパニー・インコーポレイテッド フォトアレイ検出器を備える回帰較正による回転補正器型分光エリプソメータシステム
JP2001165809A (ja) * 1999-12-03 2001-06-22 Nec Corp 液晶表示素子評価法及び評価装置
JP2005257508A (ja) * 2004-03-12 2005-09-22 Nokodai Tlo Kk 複屈折特性測定装置および複屈折特性測定方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3414156B2 (ja) * 1996-09-06 2003-06-09 王子製紙株式会社 複屈折測定装置
JP2001511514A (ja) * 1997-07-28 2001-08-14 ハインズ インスツルメンツ インコーポレイテッド 光弾性変調器を用いる波長板リターデーションの測定方法及び装置
JP2001141602A (ja) * 1999-11-12 2001-05-25 Unie Opt:Kk 複屈折評価装置および複屈折評価方法
EP1191320B1 (en) * 2001-06-07 2007-03-07 Agilent Technologies, Inc. Measurement of polarization dependent characteristic of optical components

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000509830A (ja) * 1997-04-04 2000-08-02 ジェイ・エイ・ウーラム・カンパニー・インコーポレイテッド フォトアレイ検出器を備える回帰較正による回転補正器型分光エリプソメータシステム
JPH10332533A (ja) * 1997-06-03 1998-12-18 Unie Opt:Kk 複屈折評価装置
JP2001165809A (ja) * 1999-12-03 2001-06-22 Nec Corp 液晶表示素子評価法及び評価装置
JP2005257508A (ja) * 2004-03-12 2005-09-22 Nokodai Tlo Kk 複屈折特性測定装置および複屈折特性測定方法

Also Published As

Publication number Publication date
JP5116346B2 (ja) 2013-01-09
KR20080091002A (ko) 2008-10-09
JP2008256591A (ja) 2008-10-23
CN101281091A (zh) 2008-10-08

Similar Documents

Publication Publication Date Title
KR101460802B1 (ko) 위상차 측정 방법 및 장치
KR101497695B1 (ko) 분광기를 이용한 위상차 측정 장치
JP3909363B2 (ja) 分光偏光計測方法
Snik et al. Spectral modulation for full linear polarimetry
US4668086A (en) Stress and strain measuring apparatus and method
De Martino et al. General methods for optimized design and calibration of Mueller polarimeters
US6353477B1 (en) Regression calibrated spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system
JP4779124B2 (ja) 光学特性計測装置及び光学特性計測方法
US5638207A (en) Flare-prevention optical system, flare-prevention method, and flying height tester
Boulbry et al. Improved method for calibrating a Stokes polarimeter
Jellison Jr Generalized ellipsometry for materials characterization
EP0737856B1 (en) A method of investigating samples by changing polarisation
TWI615604B (zh) 寬波段消色差複合波片的定標方法
JP3285365B2 (ja) フォトアレイ検出器を備える回帰較正による回転補正器型分光エリプソメータシステム
JP5115928B2 (ja) 位相差分布測定装置
US7233395B2 (en) Performing retardation measurements
KR20030074779A (ko) 액정 셀의 갭 측정 방법
Liu et al. Measuring phase retardation of wave plate based on normalized polarization modulation and error analysis
Weng et al. A novel filter wheel for multi-channel switching and polarization rotation
CZ20001015A3 (en) Analysis method of spectral distribution of light and apparatus for making the same
WO2015014709A1 (en) A polarimeter based on conical refraction and a method for determining the polarization state of an input electromagnetic radiation
Kushnir et al. Null-polarimetric studies of waveplate parameters
CN210863099U (zh) 一种利用aotf单色光测量宽波段波片性能的装置
Utkin et al. Spectropolarimetric device for determination of optical anisotropic parameters of crystals
JP2010271279A (ja) 計測装置及び計測方法

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
LAPS Lapse due to unpaid annual fee