KR101466590B1 - Pre-piping type rack modules and construction method using the same - Google Patents

Abstract

The present invention relates to a pre-assembled rack module and a clean room building method using the pre-assembled rack module. The present invention can easily and efficiently build basic pipe lines by transporting the pre-assembled rack module, which is manufactured through producing a rack and installing various pipes and additional equipment in advance, to a construction site to connect and assemble the pre-assembled rack module. Accordingly, a hook up line can be efficiently built to make the required constant quality control easy while dramatically reducing the construction time and formalizing the pipes and equipment frames. The present invention is also compact and takes small amount of space to significantly enhance the efficiency of the construction and maintenance work.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a pre-piping type rack module and a clean room construction method using the same,

More particularly, the present invention relates to a silicon wafer manufacturing facility, a thin film transistor-liquid crystal display (TFT-LCD) manufacturing facility, a PDP a predetermined rack module preliminarily piped in the construction of a clean room, which is essential for maintaining a clean state, such as a fab (Fabrication facility) such as a plasma display panel manufacturing facility, a pharmaceutical facility or a precision optical product manufacturing facility, The piping is installed in the rack module and efficiently hooked up to the work equipment, the support equipment or the auxiliary equipment, and the air by air saving Which can shorten the cost, reduce the cost, secure the work space easily, improve the safety, simplify complicated and cumbersome piping work, and ease the quality control. A tubular rack module, and a clean room construction method using the tubular rack module.

Generally, a clean or super-clean state, such as a semiconductor fab, a TFT-LCD fab or PDP fab, or a pharmaceutical or food manufacturing plant, or a workshop or operating room that produces or assembles optical products, Since fine or ultrafine dust or mist has a great influence on the quality of the product, it is strictly cut off from the outside, and the temperature and humidity are kept within a predetermined range through constant temperature and humidity control A clean room for preventing vibration is provided.

In particular, the semiconductor fab 100 for producing silicon wafers is a large-scale facility with a super clean state. The general construction of the semiconductor fab 100 will be described with reference to FIG. 7, and is divided into a fab layer 110 and a sub- A waffle-slab (not shown), which is a lattice-structured concrete slab on which a porous grating panel 111 or a steel grating panel (not shown) for supporting equipment is placed, is installed between the fab layer 110 and the sub- 130 may be formed. In some cases, the semiconductor fab 100 may be formed in a multi-layer structure.

Here, the sub-fab layer 120 may be divided into a clean sub-fab layer 140 and a facility sub-fab layer 150 where the pipe rack 10 'is installed, as shown in FIGS. 13A and 13B.

In the conventional piping operation of the semiconductor fab 100, the pipe rack 10 'is installed in the floor in the above-described clean sub-fab layer 140, and then the installation, (Not shown) for supplying various gas and liquid conveying pipes 141 'and an air conditioning duct 142' to the above-mentioned multiple-layer pipe racks 10 ' (CMP) (chemical and mechanical planarization), which is located in the fabric layer 110 from the point of connection of the basic tubing, (Etching) region, a WET (wet etching) region, a TF (thin film) formation region, an oxide layer Region, an MP (metal deposition) region, an IMP implant (POC) of the basic piping and various auxiliary facilities located in the subfilm layer 150 of the main piping, in addition to the connection of various devices located in the area of diffusion (DIFF), diffusion (DIFF) and integration (INT) , A pump, a VMP (valve manifold box), a cabinet, and the like.

In addition, the above-mentioned line or hook up operation performed after the basic piping operation described above can be applied to various electrical and fluid connection operations .

In semiconductor fabs, TFT-LCD fabs, or PDP fabs, the basic piping operations and mooring operations described above can be used for electrical and electronic mooring and process cooling water piping, ultrapure water piping, argon, nitrogen, oxygen, helium, liquefied natural gas, For example, fluorine gas, various kinds of wet etching liquid piping, and / or air conditioning / air conditioning piping.

Therefore, in the conventional semiconductor fab construction method, even if the construction management cooperation is effectively performed among engineers of various technical areas, installation and penetration work of hanger, support, etc., in addition to expensive lifting work, Problems such as delay in collaboration, confusion in wiring and pipeline selection, duplication of workforce, frequent workplace accidents, frequent safety accidents, risk of fire in welding, difficulty in constant quality control, etc. It is difficult to make efficient construction and accordingly it is difficult to effectively shorten the length of air.

These problems are becoming a serious problem in terms of securing competitiveness in the semiconductor industry and the TFT-LCD industry, which are the timing industries in intense competition.

Accordingly, it is a first object of the present invention to provide a pre-piped rack module that can achieve remarkable shortening of air by efficiently performing basic piping work and laying work in a clean room construction.

The second object of the present invention is to minimize the lifting work in the clean room construction, simplify the field piping work by eliminating or minimizing the installation and hitching work of hanger and support, The present invention is to provide a pre-piped rack module with high economical efficiency which can reduce the construction cost by minimizing the possibility of duplication of labor.

A third object of the present invention is to provide an effective pre-piped rack module capable of minimizing the delay in collaboration on construction management for piping work in various technical fields in a clean room construction and the possibility of confusion on the selection of a pipeline route.

A fourth object of the present invention is to provide a pre-piped rack module that can reduce the risk of a safety accident by avoiding a variety of work areas in a clean room construction, thereby enhancing safety due to improvement of work environment.

A fifth object of the present invention is to provide a pre-piped rack module capable of effectively and easily performing quality control on piping and piping work in a clean room.

The sixth object of the present invention is to provide an efficient clean room construction method using the pre-piped rack module according to the above-mentioned objects.

According to a preferred embodiment of the present invention for achieving the above-mentioned first to fifth objects of the present invention, a cubic longitudinal frame forming a pipe receiving portion and a cubic transverse lower frame forming a pipe auxiliary receiving portion A rack formed by a deck disposed on the transverse lower frame; A plurality of pipes which are fixed in the longitudinal direction by clamps in the pipe receiving portion and to which a branching device can be installed and at least one pipe arranged in the pipe auxiliary receiving portion; There is provided a pre-piped rack module formed to be constructed and interconnected in the field to construct a base pipe line.

At least one pipe may be piped to the upper or lower end of the longitudinal frame by a through clamp or a clamping clamp.

At least one intermediate bar may be formed on each of at least one side surface and the upper surface side of the longitudinal frame.

On the other hand, a carrier provided with a plurality of casters may be located in the lower portion of the rack.

In addition, a first subframe that is laterally divided by a plurality of intermediate bars may be connected to the upper portion of the longitudinal frame of the mainframe along the longitudinal direction.

Here, the duct mounting tray may be provided in the partition by the plurality of intermediate bars.

The tray may be a roller tray.

On the other hand, on the outer side of the transverse lower frame of the main frame, a support frame and a second subframe having an extension frame are connected to each other along the longitudinal direction. On the support frame and the extension frame, The pipe to which the instrument can be installed may be piped.

Here, at least one intermediate bar may be formed in the support frame of the second sub-frame, and the intermediate bar may be provided with a pipe through which a branching mechanism can be installed by a through clamp or a clamping clamp.

On the other hand, at the upper end of the second sub-frame, a cubic horizontal frame for accommodating a wire, a cable, or a hose is extended outward, and a third sub-frame connected to the first sub- .

Here, the through-hole clamp may have a pipe through-hole formed at the center thereof and a tightening knob formed at the outer side thereof.

In addition, the above-mentioned clamping clamp may be formed so as to be clamped by a pair of clamping pieces (inner clamping pieces) formed in a semicircular shape on the inner side and clamping screws.

In addition, the above-mentioned clamping clamp may be one in which the reinforcing strip is fastened to the outside of the pair of clamping pieces.

The length of the aforementioned pre-piped rack module may be between 6 and 12 M, in particular between 6 and 8 M.

According to a preferred embodiment of the present invention for accomplishing the sixth object of the present invention, there is provided a method of manufacturing a rack module, comprising the steps of: (A) pre-fabricating a pre-piped rack module as described above; (B) transporting the pre-piped rack module to a clean room construction site; (C) lifting the pre-piped rack module to a clean sub-fab formed on a floor rack installed in a column of the sub-fab for clean room installation and locating the pre-piped rack module in a predetermined place; (D) repeating the above-described step (C), wherein the pre-piped rack modules are connected to each other, and the pipes connected to each other are interconnected to form a basic pipeline step; And (E) supporting a facility subfϊff layer under the floor rack of the fab from the basic pipeline line, and hooking up through an auxiliary facility and point of connection (POP). / RTI >

The transportation in the above step (B) can be carried out by a container truck or a trailer.

In addition, the loading and loading operation for the transportation in the step (B) can be performed by a feeding slope having a slope capable of adjusting the height of one side by the hydraulic cylinder.

Here, it is possible to use the above-mentioned conveying slope having a plurality of castor mounted lower frames and rails provided on the slopes.

The lifting in the above steps (C) and (D) may be performed using a rail mounting slope having a plurality of castor mounted lower frames and being adjustable in height by one side by a hydraulic cylinder.

Also, the lifting in the step (C) may be performed using a lifting device such as a crane or a forklift.

In addition, positioning of the pre-piping rack module in the above-mentioned step (C) at a predetermined position can be performed by using a rail provided on the floor rack.

The pre-piping type rack module according to the present invention is manufactured in a predetermined form by previously preparing pipes and auxiliary facilities required in the fab to manufacture racks of a predetermined type, which are main frames and subframes, Pre-fabricated pre-piping rack modules are transported to the site so that the basic piping lines can be efficiently constructed in a short period of time by simply assembling and connecting the modules with each other. Therefore, the pipelines from the basic piping line can be efficiently constructed in a short period of time There is a number.

Therefore, in the method of constructing the clean room using the pre-piped rack module according to the present invention, the basic piping work and the laying work can be performed efficiently, thereby remarkably shortening the air can be achieved. In addition, minimization of the lifting work, And simplification of site piping work by eliminating or minimizing the necessity of piercing work, minimization of possibility of duplication of labor force due to piping works of different technical areas, delay of collaboration on construction management for piping works of various technical fields, It has high economic efficiency due to the reduction of construction cost by minimizing the possibility of crossing route selection. By reducing the risk of safety accidents by avoiding the number of workplaces, safety is improved by improvement of working environment. In addition, We can effectively manage our quality, and we can provide racks and piping You can make money and compact installation can greatly improve the efficiency of the mooring operation and maintenance tasks.

1 is a perspective view of a pre-piped rack module according to a preferred embodiment of the present invention.
2 is a perspective view of a prefabricated pipe rack that can be applied to the pre-piped rack module of the present invention.
3 is a perspective view of a pre-piped rack module according to another preferred embodiment of the present invention.
Figure 4 is a side view of Figure 3;
Fig. 5 is an explanatory diagram showing a clamping structure applicable to Fig. 3;
Fig. 6 is a perspective view showing a basic piping installation state by interconnection of the pre-piped rack modules of Fig. 3; Fig.
Fig. 7 is a schematic perspective view of a semiconductor fab showing the installation state of the pre-piped rack module of Fig. 3 in the sub-fab layer. Fig.
FIG. 8 is a diagram illustrating the transportation load of the pre-piped rack module according to the present invention. FIG.
Fig. 9 is a perspective view of the transport slope in Fig. 8; Fig.
FIG. 10 is an explanatory diagram of installation and installation in a sub-fab of a pre-piped rack module according to the present invention.
11A and 11B are a front view and a side view, respectively, showing the installation state of the pre-piping type rack module according to the present invention in a sub-fab.
12A and 12B are a front view and a side view, respectively, showing the installation state of a conventional pipe and a pipe rack.

First, the term " Fab (Fabrication facility) " used throughout this specification refers not only to the meaning of the discussion such as semiconductor fabs, TFT-LCD fabs or PDP fabs, but also to pharmaceutical equipment and precision optical product manufacturing facilities, Is defined herein in the broad sense to mean broadly the generic term for a manufacturing or working facility having a clean room that is essential for maintenance of a clean state, such as an operating room.

Also, in this specification, the sub-fab layer is divided into a clean sub-fab layer in which a pipe rack is located and a sub-fab layer in which support and ancillary facilities are located in a structure that is divided into a fab layer and a sub- It is to be understood that the present invention is not limited thereto, and the present invention is not limited thereto.

The term " pre-piped rack module " used throughout this specification is also referred to as a " pre-piped rack module " which is pre-manufactured at a separate location adjacent to a rack or PAM construction site, Refers to a rack in the main pipe piping state and refers to a module capable of forming a basic piping line in connecting a plurality of rack modules in the pre-manufactured main pipe piping state, and at least one Means a pipe-mounted rack module having a predetermined size and shape that can be directly hooked up to the equipment of the fab layer or the subfab layer of the fab, Is defined.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

1 is a perspective view of a pre-piping type rack module 1 according to a preferred embodiment of the present invention. The basic structure thereof is a cubic longitudinal frame 21 forming a pipe accommodating portion 26, A main frame 20 constituted by a cubic transverse lower frame 22 forming a receiving portion 27 and a rack 25 formed by a deck 25 disposed on the transverse lower frame 22 10); A plurality of pipes 70 (which are longitudinally fixed by clamps (see reference numeral 80 in FIG. 4)) and branch devices (branch ports) 77 may be installed in at least one place in the pipe accommodating portion 26 71, 73) and at least one pipe (72) disposed in the pipe auxiliary receiving portion (27).

The pre-piping rack module 1 according to the present invention is formed in advance in a factory and interconnected in the field to form a base pipe line, and the pre-piping rack module 1 May be performed by welding, screwing, or a fixing means such as a separate connecting clamp or fastener.

The main frame 20 constituting the rack 10 may be formed of a round or rectangular steel pipe, a stainless steel pipe, or a metal material such as an angle.

At least one pipe 73 is fixed to the upper end and / or the lower end of the longitudinal frame 21 by a through clamp (see reference numeral 81 in FIG. 4) or a clamping clamp (refer to reference numeral 82 in FIG. 4) And may be piped by various clamps.

At least one intermediate bar 23 and 24 may be formed on at least one side face and the upper face side of the longitudinal frame 21, respectively.

Further, the deck 25 forms a passage used for inspection, driving operation, maintenance, or the like.

Next, Fig. 2 is a perspective view of a prefabricated rack 10 that can be applied to the pre-piped rack module 1, 1a of the present invention as shown in Figs. 1 and 3. In the illustrated example, And FIG. 3 shows a case where the main frame 20 and the first, second, and third sub frames 40, 50, and 60 are connected to each other.

3 is a perspective view of a rack module 1a of a pre-piping type according to another preferred embodiment of the present invention, and Fig. 4 is a side view of Fig. 3, .

Since the main frame 20 and the pipes 70, 71, 72, and 73 previously installed in the main frame 20 and the pipes 70, 71, Will be mainly described.

In the illustrated example, the first sub-frame 40 is connected to the upper end of the longitudinal frame 21 of the main frame 20 along the longitudinal direction, and the side of the first sub- And a tray 42 such as a roller tray may be installed in each of the compartments formed by the plurality of intermediate bars 41. In this case, have.

The air conditioning duct (not shown) may be installed in each of the compartments of the first sub-frame 40, but the present invention is not limited thereto and various kinds of pipelines may be installed , Which is optional in the present invention.

In the illustrated example, the second sub-frame 50 may be connected to the outside of the upper end of the transverse lower frame 22 of the main frame 20 along the longitudinal direction, The support frame 50 has a support frame 51 extending along the longitudinal direction at the upper end of the upper end of the transverse lower frame 22 and an extension frame 53 extending outwardly from the support frame 51, A plurality of support bars 62 may be formed along the longitudinal direction of the support frame 51.

Pipes 75 and 76 provided with a distributing mechanism 77 on at least one or more positions on the support frame 51 and the extension frame 53 are inserted into the through clamp 81 or the clamping clamp 82 And can be piped.

At least one intermediate bar 52 is formed in the support frame 51 of the second subframe 50 and the intermediate bar 52 is fixed to the support frame 51 by a through clamp 81 or clamping clamp 82 The pipes 75 and 76, which may be provided with the distributing mechanism 77 at least at one or more positions, may be piped.

In the illustrated example, a cubic horizontal frame 61 for accommodating a wire, a cable, or a hose is extended outward from the upper end of the second sub-frame 50, and the first sub- And a third sub-frame 60 connected by a support bar 62 may be connected.

As shown in Fig. 3, the carrier 30 provided with a plurality of casters 31 may be positioned below the rack 10 as required.

In the pre-piping type rack module (1, 1a) according to the present invention, the type or use of the piped pipe is not limited to the present invention, and can be variously modified depending on the type and use of the fab 3 and 4, for example, the pipe 70 may be a process cooling water pipe, the pipe 71 may be an ultra-pure water pipe, and the pipe 72 may be a waste water pipe or drain pipe The pipe 73 may be a process air pipe or a neutral water supply pipe or a drinking water supply pipe and the pipes 74 and 75 may be a high purity argon, nitrogen, oxygen, helium supply pipe or a refrigerant pipe, Pipe or the like.

Fig. 5 is an explanatory view showing a clamping structure applicable to the rack 10 of Figs. 1 and 3, and a mounting state of the clamping clamp 82 will be described.

In the illustrated example, a clamping clamp 82 is used for clamping the pipe 75 to the elongated frame 53 of the second sub-frame 50, wherein the clamping clamp 82 Are formed so as to be coupled to each other by a pair of clamping pieces 82a and a tightening screw 82d formed of a resin material or a metal material whose inside is formed in a semicircular shape and the pair of clamping pieces 82a And the reinforcing strips 82b may be fastened to the outer side.

In the drawing, reference numeral 82c denotes a washer.

4, the through-hole clamp 81 may be formed with a pipe through-hole (not shown) at the center thereof and a tightening knob 81a formed on the outer side thereof.

6 is a perspective view showing that a basic piping line can be installed simply and efficiently by connecting a plurality of pre-piping rack modules 1a according to the present invention as shown in Fig. 3, Shaped rack module 1a are integrally connected to each other by the joint fixing section 2. The joint fixing section 2 is provided between the racks 10 and the pipes 70, 72, 73, 74, 75, 76) of the pipe (70, 71, 72, 73, 74, 75, 76) is connected by any of various known methods such as welding, screw fixing, clamping, fastener fixing, It is of course also possible to use a suitable seal to ensure that no leakage or leakage occurs during the interconnection.

The length of the pre-piping type rack module (1, 1a) according to the present invention is large enough to be easily transported by being loaded on a container truck or a trailer, and may be generally 6 to 12M, specifically 6 to 8M.

7 is a schematic perspective view of a semiconductor fab 100 showing a state in which a pre-piping type rack module 1a as shown in Fig. 3 is installed in a sub-fab layer 120. The semiconductor fab 100 includes a fab layer 110, A waffle slab 130 is formed between the subfam layers 120 and the subfam layers 120. The waffle slab 130 is formed between the subfam layers 120 and the subfam layers 120. In this case, Accordingly, the illustrated structure may be formed as a multi-layer structure formed by two upper and lower portions.

Only the floor rack 141 of a single plane formed by the longitudinal frame 141a and the transverse frame 141b is used as the column 160 The subfam layer 120 is installed in the floor rack 141. The clean subfam layer 140 in which the pipe rack 10 is installed and the installation subfam layer 150 ).

Therefore, as shown in Fig. 7, the basic piping line formed horizontally is connected to a plurality of the pre-piped rack modules 1 or 1a according to the present invention, so that they can be efficiently and efficiently arranged in a very compact manner in a short period of time The branch mechanism 77 formed in the pre-piping type rack module 1 or 1a according to the present invention can be constructed as a POC (point of connection) (chemical etching) equipment, OX (oxidation) equipment, LITHO (photolithography) equipment, ETCH (dry etching) equipment, wet etching equipment, TF (thin film) equipment, (POC) of the basic piping line and various auxiliary equipment located in the sub-fab layer 150 of the main pipeline, a pump (not shown) , A VMP (valve manifold box), a cap And it performs the field lines (hook up) operation to connect with and support auxiliary equipment 157, such as the units effectively and efficiently.

The above-described deck 25 is used as a passage for inspection, driving operation, maintenance, and the like.

Therefore, in the construction method according to the present invention, since the pre-piping type rack module 1 or 1a according to the present invention is used, the construction management collaboration between engineers in various technical fields is facilitated, Much removed, minimizing expensive lifting operations. It is possible to minimize installation and penetration work such as hangers and supports, and to effectively solve the problems of cooperative delay, overlapping of wiring or pipeline selection and overlapping of labor force, and prevention of safety accidents And it is possible to efficiently construct a desired level of quality control and to make it possible to shorten a considerable amount of air accordingly. Therefore, it is possible to enhance the competitiveness of the semiconductor industry, the TFT-LCD or the PDP industry, which is a timing industry .

Next, a construction method of the clean room using the pre-piped rack module (1, 1a) according to the present invention will be described below with reference to the accompanying drawings at necessary places.

The method of constructing a clean room according to the present invention basically includes the following steps.

(A) Pre-piping rack module production stage:

The pre-piping type rack module (1 or 1a) according to the present invention is previously prepared at a place remote from the site or at an adjacent site.

(B) Transportation phase:

The aforementioned pre-piped rack module 1 or 1a is transported to a clean room construction site, for example, using a container truck or a trailer (see FIG. 8).

In the example shown in Fig. 8, it is exemplified that the pre-piped rack module 1 or 1a can be loaded and unloaded onto the container truck using the conveying slope 90.

As shown in FIG. 9, the conveying slope 90 has a slope 92, which is adjustable in height by a hydraulic cylinder 93. In the illustrated example, the conveying slope 90 There is illustrated a case where a lower frame 91 on which a plurality of casters 91a are mounted is formed. The slope 92 may be provided with rails 92a for ease of loading and dropping.

(C) Lifting and installation steps:

The clean subfab 140 formed of the longitudinal frame 141a and the transverse frame 141b and formed above the bottom rack 141 installed on the column 160 of the subfab by the bracket 142 A pre-piped rack module (1 or 1a) is lifted and placed in a pre-planned installation location.

The above lifting may be performed by using a lifting device such as a crane or a forklift. However, it may be preferable to perform the lifting using the transporting slope 90 as shown in FIG. 9 from the viewpoint of convenience of operation Reference).

(D) Repeat step:

(C) is repeated to connect the pre-piped rack modules (1) and (1a), and at the same time, the pipes (70, 71, 72, 73, 74, 75, 76) are interconnected to form a basic pipeline (see Figure 6)

(E) Hook up step:

(See reference numeral 111 in Fig. 6) of the fabric layer 110 from the basic piping line and support of the facility sub-fab layer (see reference numeral 150 in Fig. 6) below the floor rack 141 and auxiliary equipment (See reference numeral 151 in Fig. 6) and POP (point of connection).

Here, in order to install the aforementioned piping-type rack module 1 or 1a in the above-mentioned steps (C) and (D), a rail 143 is provided on the above-mentioned floor rack 141, It may be desirable to carry out the process.

11A and 11B are a front view and a side view respectively showing the installation state of the pre-piped rack module 1 or 1a according to the present invention in the clean sub-fab 140, It is shown that modules 1 or 1a are installed in rows or columns arranged in a compact manner on the bottom rack 141, indicating that basic piping lines can be efficiently installed, thus enabling shortening of the air by minimizing field work (See Figs. 12A and 12B as a conventional example in contrast thereto).

Although the pre-piped rack module 1 or 1a according to the present invention is shown in a vertically erected form in the drawing, it is also possible to arrange it in a laterally laid-out form or vertically standing if necessary , Which is also within the scope of the present invention.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.

1, 1a: a pre-piping type rack module according to the present invention
2:
10: rack
20: Main frame
21: longitudinal frame 22: transverse lower frame
23, 24: intermediate bar, 25: deck,
26: pipe receiving portion 27: pipe supporting portion
28: passage
30: carrier 31: caster
40: first subframe
41: Middle bar 42:
50: second subframe
51: support frame 52: intermediate bar
53: Extension frame
60: third subframe
61: horizontal frame 62: support bar
70, 71, 72, 73, 74, 75, 76: Pipe 77:
80: Clamp
81: through clamp 81a: tightening knob
82: Nipper clamp 82a: Nipper
82b: reinforcing strip 82c: washer
82d: Securing screw
90: Feed slope
91: Lower frame 91a: Caster
92: slope 92a: rail
93: Hydraulic cylinder
100: Semiconductor fab (clean room)
110: Fab layer
111: Function area equipment 112: Grating panel
113:
120: Sub-
130: waffle-slab 131: lattice sphere
140: clean sub-fab layer 141: bottom rack
141a: longitudinal frame 141b: transverse frame
142: Bracket 143: Rail
150: Equipment sub-fab layer 151: Auxiliary and supporting equipment
160: Column

Claims (21)

A main frame having a cubic longitudinal frame forming a pipe receiving portion and a cubic transverse lower frame forming a pipe auxiliary receiving portion; a rack formed of a deck arranged on the transverse lower frame;
A plurality of pipes which are longitudinally fixed by clamps in the pipe receiving portion and to which a branching device can be installed and at least one pipe disposed in the pipe auxiliary receiving portion,
They are prefabricated in the factory and are interconnected in the field to form a base pipe line
Pre-piped rack module. The rack module according to claim 1, wherein at least one pipe is piped by a through clamp or a clamping clamp at an upper end portion or a lower end portion of the longitudinal frame. The rack module of claim 1, wherein at least one intermediate bar is formed on each of at least one side surface and the upper surface side of the longitudinal frame. The rack module according to claim 1, wherein a carrier provided with a plurality of casters is disposed at a lower portion of the rack. The rack module of claim 1, wherein the first subframe is laterally divided by a plurality of intermediate bars connected to the upper portion of the longitudinal frame of the mainframe. The rack module according to claim 5, wherein a duct mounting tray is provided in the partition by the plurality of intermediate bars. The rack module of claim 6, wherein the tray is a roller tray. [7] The apparatus of claim 5, wherein a support frame and a second subframe having an extension frame are connected to the outside of the transverse lower frame of the main frame along the longitudinal direction, and the support frame and the extension frame are provided with through- A pre-piped rack module with piping piping that can be installed by a clamp. 9. The apparatus as claimed in claim 8, wherein at least one intermediate bar is formed in the support frame of the second subframe, and a pre-piping type pipe in which a pipe capable of installing a branching mechanism by means of a through- Rack module. [9] The apparatus of claim 8, wherein a cubic horizontal frame for accommodating electric wires, cables, or hoses is formed at the upper end of the second subframe and extended to the third subframe Pre-plumbed rack module with frame connection. The rack module according to claim 2, 8, or 9, wherein the through-hole clamp is formed with a pipe through-hole at the center thereof and a tightening knob is formed at the outer side thereof. The rack module of a pre-piping type according to claim 2, 8, or 9, wherein the clamping clamp is formed so as to be fastened by a pair of clamping pieces (clamping pieces) whose inside is formed in a semicircular shape and a tightening screw. The rack module of the pre-piping type according to claim 12, wherein the clamping clamp is fastened to a reinforcing strip outside the pair of clamping pieces. The pre-piping type rack module according to claim 1, wherein the length of the pre-piping rack module is 6 to 12M. A method of constructing a clean room comprising the steps of:
(A) pre-fabricating the pre-piped rack module according to claim 1 or 5, 8 or 10;
(B) transporting the pre-piped rack module to a clean room construction site;
(C) lifting the pre-piped rack module to a clean sub-fab formed on a floor rack installed in a column of the sub-fab for clean room installation and locating the pre-piped rack module in a predetermined place;
(D) repeating the above-described step (C), wherein the pre-piped rack modules are connected to each other, and the pipes connected to each other are interconnected to form a basic pipeline step;
(E) hooking up the equipment of the fab from the basic piping line described above, the facility sub-fab layer under the floor rack, and auxiliary equipment and point of connection (POP). 16. The method of claim 15, wherein the transportation in step (B) is carried out by a container truck or a trailer. 17. The method of claim 16, wherein the loading and loading operations for transportation are performed by a hydraulic slurry conveying slope having a height adjustable by a hydraulic cylinder. 18. The method of claim 17, wherein the conveying slope has a plurality of castor mounted lower frames and rails are provided on the slopes. The method according to claim 15, wherein the lifting in the steps (C) and (D) is performed using a rail mounting slope having a plurality of castor mounted lower frames and adjustable height of one side by a hydraulic cylinder Construction method. 16. The method of claim 15, wherein the lifting in step (C) is performed using a dipping machine. The method of claim 15, wherein the pre-piping rack module in the step (C) is performed at a predetermined position using a rail provided on the floor rack.

Images