KR102049892B1 - Moudles for utilities in mechanical room and ditch of fab and method thereof - Google Patents

Abstract

The present invention relates to a machine room module of a fab and a construction method thereof, wherein the module is manufactured by dividing the module into transportable subunits in a factory so as to install various pipes, including large diameter pipes, for installation in the machine room of the fab. Sub unit factory production stage, on-site transportation stage to transport the sub units manufactured in the factory to the on-site vehicle, the transported sub unit is assembled on the support part (9) in the on-site workshop to the machine room of the fab A module assembly step of assembling the module 100 to be installed, a module transfer step of transferring the module 100 to an installation site of a fab machine room, a mount 20 in which the module 100 transferred in the transfer step is previously installed on the machine room floor. By including a module installation step of aligning and fixing the lower end of the support portion (9) to the anchor of the), to divide the large module By expanding production in the factory with rack modules, workers can be efficiently distributed and pre-unit production can be shortened on-site construction time, and by reducing on-site welding points, scaffold installation cost is reduced on site, material movement and equipment use on site There is an effect that can prevent the stenosis caused by the reduction.

Description

Construction method of fab machine room {MOUDLES FOR UTILITIES IN MECHANICAL ROOM AND DITCH OF FAB AND METHOD THEREOF}

The present invention relates to a machine room module of a fab and a method for constructing the same, and in particular, in a semiconductor fab, a TFT-LCD fab, or a PDP fab, an improved machine room module is constructed so that various pipes can be modularized in a machine room of a concrete structure to be quickly and safely installed. It is about a method.

In general, in semiconductor fabs, TFT-LCD fabs or PDP fabs, electrical and electronic mooring and process cooling water piping, ultrapure water piping, argon, nitrogen, oxygen, helium, liquefied natural gas, vacuum piping, various dry etching fluorine gases, and various wet etching solutions. Various pipes such as pipes, and / or air conditioning and heating pipes are installed in the machine room of the concrete structure.

Pipe construction in such a machine room is conventionally performed by installing a rail and a bogie in a machine room, lifting pipes using a forklift truck, moving the pipe to a position, placing it in place, installing a scaffold, and performing pipe joint welding. It was.

 However, the construction of the various pipes in the conventional manner has a problem in that it takes a lot of construction time due to the difficulty of carrying in materials, and the construction cost is also increased because the auxiliary equipment is required to bring in materials, and safety accidents in the process There were a lot of problems.

In order to solve such a problem, the present applicant manufactures a rack at a factory in Korea Patent Registration No. 10-1466590 (registered on November 24, 2014), and then installs a pre-piped rack module manufactured by installing various pipes and accessories in advance. We proposed a pre-piped rack module and a clean room construction method that can be used to construct basic piping lines simply and efficiently by transporting them together and to build hook-up lines efficiently. have.

However, even if a pre-piped rack module is manufactured at the factory, the Road Traffic Law stipulates a violation of the law if the total weight of the vehicle including the load exceeds 40 tons, axle weight of 10 tons, the length of the load including 16.7m, the width of 2.5 and the height of 4m. In the case of a rack module for a machine room with a large diameter and a large number of pipes, the pipe installed in the machine room may have a weight of 30 tons, a length of 12 m, a width of 5.98 m, and a height of 5.5 m. The rack module of the road traffic law standards in width and height in violation of the law is difficult to transport problems.

In addition, the production of large rack modules in the shop floor requires 4 ~ 5 months due to space constraints and the lifting and rail demolition work following the rail installation for moving the rack modules. There was a need for improvements to shorten the air.

Korea Patent Registration No. 10-1466590 (registered 24/2014)

An object of the present invention is to provide a machine room module of the fab improved to be easily assembled by dividing the large rack module in the factory to solve the problems of the prior art for installing a large rack module in the conventional machine room.

Another object of the present invention, the large machine room module is manufactured in the factory and transported to the site, and then assembled in the field to move to the installation position by a truck to install and fix, can be easily performed by connecting the modules It is to provide the construction method of fab machine room module.

In order to achieve the above object, the machine room module of the fab according to the present invention includes a plurality of sub-units to be installed in combination in the machine room,

The sub unit,

It includes a plurality of spaced apart and the support portion for entering the transfer device, and at least one sub-rack modules are arranged adjacent to each other on the horizontal members of the support portion, the plurality of pipes of various diameters are installed It is composed.

Each of the support parts of the sub-rack modules is formed by connecting the upper ends of the support parts spaced to both sides by a horizontal member, the shape of the "c" rotated 90 degrees, the transfer device enters between the support members of the support portion.

In addition, in order to achieve another object of the present invention, the machine room module construction method of the fab according to the present invention,

Subunit factory manufacturing step of dividing the module into transportable subunits in a factory to install various pipes including modules, including large diameter pipes for installation in a machine room of a fab,

On-site transportation step of transporting sub-units manufactured at the factory to the on-site workshop

Module assembly step of assembling the module to be installed in the machine room of the fab by assembling the transported sub-unit on the support in the workplace of the site,

A machine room transfer step of transferring the module to an installation site of a fab machine room,

And a module installation step of aligning and fixing the lower end of the support portion to the anchors of the mounts previously installed on the machine room floor in the transfer step.

The sub unit is composed of at least two sub rack modules, which are coupled adjacent to each other on a plurality of support parts and installed with a plurality of pipes of a required diameter.

By connecting the upper ends of the support parts spaced to both sides by a horizontal member, each of the support parts is formed in a form rotated 90 degrees "C", it is formed so that the transfer device enters between the support members of the support part.

In the module transfer step, the transfer device enters the space between the support portions of the support portions, and then transfers the lower portion of the support portion to the installation position in the fab machine room in a state in which it lifts up from the ground.

Subsequent to the transfer step of the module, further comprises a module coupling step of connecting and integrating the modules subsequently brought into the installation place with each other.

The plurality of vertical members spaced apart in the lengthwise direction of the respective sub rack modules are connected to each other in the longitudinal direction by horizontal connecting members, connecting the opposite vertical members, while supporting a plurality of pipes installed thereon Consists of horizontal support members.

In the subunit manufacturing stage, each rack module that modularizes a variety of pipes, including large diameter pipes for installation in the machine room, is manufactured at the factory as small subunits that can be transported to a size that does not violate the transport regulations.

In the module coupling step, the modules brought into the installation place are mounted on the mount at the correct installation position of the machine room and fixed to the anchor, and then the pipes of adjacent modules are welded together, and the side of the support part and the sub rack modules are connected to each other. Connect with each other to integrate.

In accordance with the present invention, by dividing the large module of the machine room in the factory to expand the production in the sub-modules to reduce the construction schedule in the site by efficient distribution of workers, pre-unit production, scaffold installation in the site by reducing the site welding point It is effective in preventing stenosis due to cost reduction, material movement on site and reduced use of equipment.

1 is a schematic front view of a machine room formed in a semiconductor fab or a TFT-LCD fab or a PDP fab.
Figure 2 is a schematic process diagram of a machine room module construction method of manufacturing in the factory as a sub-unit in the factory according to the present invention, assembled and transported to the installation place.
Figure 3 is a schematic perspective view of one rack module of the sub unit manufactured in the factory of Figure 2;
Figure 4 is a schematic perspective view of another rack module of the sub unit manufactured in the factory of Figure 2;
5 is a perspective view of a state in which support units for assembling the rack modules of FIGS.
Figure 6 is a perspective view of the rack module of Figure 4 installed on the support portion of Figure 5 in the field.
7 is a perspective view of a module for mounting in a machine room with the rack module of FIG. 3 mounted on the support parts of FIG. 6 in the field;
8 is a perspective view of a state in which the transfer device is arranged to transfer the module of FIG. 7 assembled at the site to the installation site of the machine room.
9 is a perspective view showing the transfer of modules between pillars by means of a transfer device into the machine room of the fab.
10 is a perspective view illustrating the installation of the module by fixing the support portion of the module to the mount in the module installation place of the machine room.
11 is a view showing the operation of installing the machine room piping of the machine room by connecting another module subsequent to FIG.
12 is a schematic perspective view of a state in which the modular construction of the machine room in accordance with the present invention.

Hereinafter, with reference to the accompanying drawings showing an embodiment of the present invention will be described in more detail the present invention.

In the machine room of the semiconductor fab, the TFT-LCD fab or the PDP fab, a plurality of zones, in the embodiment shown in FIG. Racks should be installed in confined spaces between the columns in the fab machine room. In particular, in machine room zones it is convenient for the rack to be constructed in such a way that the support is modularized so that the width between the pillars is smaller than the spacing between the pillars.

However, while it is convenient to modularize the pipe rack in the zones in Figure 1 above, because the module size is a large module of a size that violates the transport regulations, it is necessary to solve this problem and modular construction of the machine room.

2 schematically shows a construction process for the modularization of the machine room.

First, as a sub-unit manufacturing step, a rack module that modularizes a variety of pipes, including large diameter pipes for installation in the machine room is a small sub-unit that can transport the rack module in order to solve the problem of violating the regulations when transporting large Made in the factory.

3 and 4, the sub unit includes at least two rack modules (1, 2) configured by installing a plurality of pipes having a diameter required for a plumbing facility installed in a machine room, and the rack modules include a plurality of rack modules. Both ends of the supporting members formed in the stage are fixed to the posts on both sides, and are configured to support the pipes 6 of various diameters installed thereon.

The rack modules (1, 2), as shown in Figure 5, is formed by connecting the upper end of the support member 7 spaced apart on both sides by a transverse member 8, spaced as a form of rotating the "c" rule 90 degrees It is composed of a module 100 assembled on a plurality of support parts 9 (see FIG. 6) and installed in the machine room as shown in FIG. 7.

As shown in FIG. 7, the support unit 9 having a “c” shape is a module 100 assembled to transport a module 100, which is finally assembled at a workplace in a field, to a common tool which is an installation place in a machine room. The conveying device enters the bottom to convey in a lifted state. The transfer of the module 100 by the transfer device will be described later.

Each of the rack modules 1 and 2 is connected to each other in the longitudinal direction by the horizontal connecting members 12 and 22 as the vertical members 11 and 21 as a plurality of posts spaced in the longitudinal direction. It consists of horizontal support members (13, 23) as a support member for connecting the members (11, 21) and for supporting a plurality of pipes (6) installed thereon, and the connecting members (12, 22) and The horizontal support members 13 and 23 are each provided in plural.

Each rack module (1, 2) is fixedly arranged a pipe 6 of various diameters in a plurality of stages. The rack module 1 may be composed of, for example, 2,835 mm (W) × 3,900 (H) × 12,000 (L) in width, height, and length so as not to violate transportation regulations, and the rack module 2 is 3,150. mm (W) × 3,900 (H) × 12,000 (L), but of course, it may be configured differently depending on the construction site. In this way, the size of the rack module is formed so as not to violate the transport regulations to solve the problems caused by transportation due to the violation of the conventional large rack module.

Thus, as a transportation step, as described above, the rack modules 1 and 2 of FIGS. 3 and 4 and the support part 9 of FIG. 5 manufactured in the factory are loaded onto a transport vehicle and transported to a workplace on site.

Then, as a module assembling step, in the workshop of the site, the transported rack modules (1, 2) by lifting the crane and assembled on the transverse member (8) of the support portion 9 to the machine room cavity of the fab shown in FIG. Complete the module 100 to be installed.

In the step of transferring the module 100 to the machine room cavity, the module 100 is transferred to the installation site of the fab machine room cavity, and as shown in FIGS. 8 and 9, the transfer device 150 is connected to the support part. After entering the space between the supports (7) of the (9), it is transported through the multiple pillars of the fab machine room with the bottom of the support raised from the ground and transported to the installation location in the fab machine cavity. . The conveying device is electrically driven, the wheels can be freely rotated, and the trolley is remotely controlled to raise.

As the installation step of the module 100, after transferring the module 100 to the installation place in the fab machine room cavity by the transfer device, as shown in Figure 10 of the mounts 20 previously installed on the machine room floor The lower end of the support part 9 is aligned with the anchor and fixed. Then, the conveying device moves backward and then laterally, and then moves to the space between the pillars, so that the subsequent device 100 by another conveying device is not prevented from being brought into the installation place. This allows the module to be continuously brought into the installation site, allowing quick installation of the module.

Like the transfer step of the above module, the module 100 'subsequently brought into the installation place is also mounted on the mount 20 at the correct installation position of the machine room and fixed to the anchor, and then the adjacent module 100 is placed. The pipes of the 100 'are welded, and the support parts 9 and the sides of the rack modules 1 and 2 are connected to each other by the connecting member 30 to integrate them (FIGS. 11 and 12).

In this way, by installing and installing the pipe rack modules in the machine room to be installed in the machine room of the fab, it is possible to modularize the machine room easily and quickly.

The present invention can be used to install a variety of piping required in the machine room of the semiconductor fab, TFT-LCD fab or PDP fab.

1.2: rack module 6: piping
7: support part 8: horizontal member
9; Support part 11, 21: vertical member
12,22 connection member 13,23 horizontal support member
20: mount 30: connecting member
100), 100 ': module 150: feeder

Claims (10)

delete delete Various pipes, including large diameter pipes for installation in the machine room of the fab, are installed in the factory as sub-units containing at least two rack modules (1, 2), which are small and transportable in a size which does not violate the transport regulations. Sub-unit factory production stage
Transport stage in which the sub unit manufactured in the factory is loaded on the transport vehicle and transported to the workplace of the site,
Module assembly step of assembling the rack module (1, 2) of the transported sub-unit as a module 100 to be installed in the machine room of the fab by assembling in the workplace of the site,
Module transfer step of transferring the module 100 assembled in the field workshop to the installation site of the fab machine room, and
In the machine room module construction method of the fab having a module installation step of installing the module 100 transferred in the module transfer step in the machine room,
In the module assembly step, the rack modules 1 and 2 of the transported sub-unit are connected to the upper ends of the support parts 7 spaced to both sides by a horizontal member 8 at a workplace in the field to rotate the "c" letter by 90 degrees. Assembled on the plurality of support portion 9 formed in the form, but is formed so that the transfer device enters between the support members (7) of the support portion (9),
In the module transfer step, the transfer device 150 enters the space between the support portions 7 of the support portions 9, and then lifts the lower portion of the support portion from the ground to the installation position in the fab machine room. Transporting,
In the module installation step, the lower end of the support part 9 of the module 100 transferred by the transfer device 150 in the module transfer step is aligned and fixed to the anchors of the mounts 20 installed in the machine room floor in advance.
Further comprising a module coupling step of connecting and integrating the modules (100 ') that are subsequently brought into the installation place,
In the module coupling step, the modules 100 'brought into the place of installation are seated on the mount 20 at the correct installation position of the machine room and fixed to the anchors, and then the pipes of the adjacent modules 100 and 100' are welded. Joining, the support unit (9) and the side of the rack modules (1,2) by connecting to each other by connecting members 30, the machine room module construction method of the fab, characterized in that to integrate.
















delete delete delete delete delete delete delete

Images