KR101464253B1 - Dispensing apparatus - Google Patents

Abstract

According to the present invention, a curtain gas module includes a plurality of gas injection units, which are provided in a number corresponding to a plurality of objects to be treated to be spaced apart from each other in one direction, are movable to be positioned between a dispensing surface of one object to be treated and a dispensing surface of another object to be treated in a process of dispensing adhesives, and form a curtain made of a gas in both directions crossing the dispensing surface of each of the objects to be treated by injecting the gas. Therefore, according to embodiments of the present invention, the curtain made of a gas is formed on upper and lower sides of each of the objects to be treated in the dispensing process. As a result, faults which may occur in the dispensing process can be reduced by blocking an adhesive, which is separated from another object to be treated positioned on an upper side of the one object to be treated, from being attached to an upper surface of the one object to be treated positioned on a lower side, and blocking an adhesive, which is separated from another object to be treated positioned on a lower side of one object to be treated, from being attached to a lower surface of the one object to be treated positioned on an upper side.

Description

Dispensing apparatus

The present invention relates to a coating apparatus, and more particularly, to a coating apparatus capable of preventing a bonding agent scattered on a surface other than the coated surface or other objects to be treated from being adhered to the object to be treated when the bonding agent is applied .

As shown in FIG. 1, an organic light emitting diode generally includes a first substrate on one side of which an organic light emitting layer composed of upper and lower electrodes and an organic material layer, a transistor (TFT) and the like are stacked, a second substrate And a substrate S2. A bonding agent is applied between the upper surface of the first substrate S1 and the lower surface of the second substrate S2 so that the first substrate S1 and the second substrate S2 are bonded to each other.

On the other hand, the organic material layer constituting the organic light emitting diode is very vulnerable to moisture and oxygen, and when moisture and oxygen enter the organic light emitting diode, there arises a problem that the light emitting characteristic and the lifetime are reduced. In addition to the primary coating step of applying the bonding agent along the upper edge of the first substrate S1 and the lower edge of the second substrate S2, the first substrate S1 and the second substrate S2 ) Is further applied to the side surface of the base material to reinforce the bonding.

As described above, the coating apparatus for applying the bonding agent further along the side surfaces of the first substrate S1 and the second substrate S2, which are primarily bonded together, includes a loading section for holding a plurality of panels, And a coating unit provided on the opposite side of the panel, that is, a side of the panel, which is an object to be coated, with a nozzle for applying a bonding agent.

On the other hand, when the bonding agent is applied to a plurality of panels spaced apart from each other by using the application unit, the bonding agent is scattered and adhered to other surfaces other than the application surface of the panel or other objects to be treated and contaminated. Therefore, conventionally, as disclosed in Korean Unexamined Patent Publication No. 2002-0021862, a decontamination means having an inlet for sucking fine particles scattered around the application portion is provided to prevent contamination due to a bonding agent.

However, with the inhalation method, it was impossible to completely block the scattered fine particles from adhering to the upper surface of the panel. Accordingly, one gas injection member for spraying air onto the upper surface of the panel and forming an air curtain on the upper surface of the panel was mounted on the application portion. Here, the gas injection member can move upward and downward and horizontally, and is located on the upper side of the panel to be coated in the bonding agent application process. Thus, the air curtain can block that the adhesive agent scattered in the application process for one panel is attached to the upper surface of the one panel.

However, as described above, a plurality of panels are spaced apart from each other in the loading section, and the bonding agent is applied to each of the plurality of panels while the application section is moved in sequence. In the application step, To form an air curtain, and no air curtain is formed in the other panels. As a result, there is a problem that the adhesive agent that is scattered during the application process of one panel is adhered to the upper and lower surfaces of the other panels, which causes product defects.

Korea Published Patent 2012-0021862

The present invention provides a coating apparatus for preventing a bonding agent scattered at the time of applying a bonding agent from adhering to an area other than the coated surface of the article to be treated.

In addition, the present invention provides a coating device capable of preventing a bonding agent applied to a workpiece from being adhered to another workpiece.

A curtain gas module according to the present invention is provided in a number corresponding to a plurality of to-be-processed objects and is spaced apart from each other in one direction. During the applying process of the bonding agent, each curtain gas module is provided between a surface to be treated And a plurality of gas injection portions which are movable to correspond to each other and form a gas curtain in both directions intersecting with the application surface of each of the objects to be processed by injecting gas.

A first target to be processed is located on one side of each of the plurality of gas spraying portions and a second target to be treated is located on the other side of the plurality of gas spraying portions, the gas injecting portion includes a first slit for spraying gas toward the first target object, And a second slit for spraying the gas toward the object to be treated.

Wherein each of the plurality of gas spraying portions comprises: a first gas injection member for spraying gas onto a surface crossing the application surface of the first target object; A second gas injection member which is located at one side of the first gas injection member and intersects with a coating surface of the second target to spray a gas for spraying gas on a surface facing the first target object; .

The first and second gas injection members are plate-shaped. The first gas injection member is provided with a first slit for injecting and discharging gas on one side thereof. The gas is injected into one side of the second gas injection member, A second slit is provided.

One side of the first gas injection member provided with the first slit is inclined in a direction in which the first object to be processed is placed and one side of the second gas injection member provided with the second slit is inclined And is inclined in a direction in which the object to be processed is located.

Wherein one side of the first gas injection member provided with the first slit has an inclined shape having a curvature in a direction in which the first object to be processed is located and one side of the second gas injection member provided with the second slit And has an inclined shape having a curvature in a direction in which the second object to be processed is located.

Wherein the first gas injection member has a larger volume than the first slit and is provided with a first channel for temporarily storing gas and supplying gas to the first slit, The first slit is communicated with a part of the region adjacent to the first object to be processed and the second gas injection member is formed to have a larger volume than the second slit so as to temporarily store the gas, A second channel for supplying gas to the second slit is provided and a portion of the second channel region adjacent to the second target object communicates with the first slit.

The length of the first gas injection member facing the object to be processed in the length of the first gas injection member and the second gas injection member is longer than the length of the second gas injection member.

Each of the plurality of gas-sprayed parts is horizontally disposed and spaced apart in the vertical direction, and each of the plurality of gas-sprayed parts is horizontally disposed and vertically spaced.

The first gas injection member injects gas to the upper surface of the first object to be processed, and the second gas injection member injects gas to the lower surface of the second object to be processed.

Wherein a region of the one side surface of the first gas injection member provided with the first slit has a shape in which a lower region of the first slit is inclined downward toward an upper surface of a workpiece, Of the areas on one side of the gas injection member, the upper area of the second slit is shaped upwardly toward the lower surface of the other workpiece positioned above the one to be treated.

Wherein a region of the one side surface of the first gas injection member provided with the first slit is a curved surface having a curvature inclined downward toward an upper surface of an object to be processed, The upper region of the second slit is inclined upward toward the lower surface of the other workpiece positioned above the one workpiece in a region on one side of the provided second gas injection member, to be.

A loading section for holding a plurality of objects to be processed, the loading section being spaced apart in one direction and having a seating member on which the article to be processed is seated; A coating module having a coating unit for applying a bonding agent to a coating surface of each of a plurality of objects to be processed supported by the loading unit; Each of which is provided so as to correspond to a plurality of the objects to be processed and arranged so as to be spaced apart from each other in one direction so as to be positioned so as to correspond to each other between a coating surface of a workpiece and a coating surface of another workpiece, And a plurality of gas injection portions that form curtains made of gas in both directions intersecting with the application surfaces of the respective objects to be processed.

Wherein the gas injection unit includes a plurality of gas injection units extending in a direction aligned in one direction and connected to the plurality of gas injection units, wherein the gas injection unit includes a plurality of gas injection units, And a slit is provided on one side of the direction in which the loading part is located, for discharging the gas and injecting the gas.

Wherein the injection body has a center region opened so that a coating surface of each of the plurality of target objects is exposed toward the coating portion when the gas injection portion is moved to be positioned between the target object and the target object during the coating process Shape.

A plurality of loading portions are arranged and arranged in one direction,

And a plurality of loading portions extending in a direction in which the plurality of loading portions are arranged and arranged to horizontally move the gas injection unit to the position of each of the plurality of loading portions.

And a loading section feeding means extending from the rear of the curtain gas module at least to the position of the applying section to allow the loading section to horizontally move back and forth from a rear position of the gas injection unit to at least a position of the position of the application section do.

A first target to be processed is located on one side of each of the plurality of gas spraying portions and a second target to be treated is located on the other side of the plurality of gas spraying portions, the gas injecting portion includes a first slit for spraying gas toward the first target object, And a second slit for spraying the gas toward the object to be treated.

Wherein each of the plurality of gas spraying portions comprises: a first gas injection member for spraying gas onto a surface crossing the application surface of the first target object; A second gas injection member which is located at one side of the first gas injection member and intersects with a coating surface of the second target to spray a gas for spraying gas on a surface facing the first target object; .

The first and second gas injection members are plate-shaped. The first gas injection member is provided with a first slit for injecting and discharging gas on one side thereof. The gas is injected into one side of the second gas injection member, A second slit is provided.

One side of the first gas injection member provided with the first slit is inclined in a direction in which the first object to be processed is placed and one side of the second gas injection member provided with the second slit is inclined And is inclined in a direction in which the object to be processed is located.

Wherein one side of the first gas injection member provided with the first slit has an inclined shape having a curvature in a direction in which the first object to be processed is located and one side of the second gas injection member provided with the second slit And has an inclined shape having a curvature in a direction in which the second object to be processed is located.

The length of the first gas injection member facing the object to be processed in the length of the first gas injection member and the second gas injection member is longer than the length of the second gas injection member.

Each of the plurality of gas-sprayed parts is horizontally disposed and spaced apart in the vertical direction, and each of the plurality of gas-sprayed parts is horizontally disposed and vertically spaced.

The first gas injection member injects gas to the upper surface of the first object to be processed, and the second gas injection member injects gas to the lower surface of the second object to be processed.

Wherein a region of the one side surface of the first gas injection member provided with the first slit is a curved surface having a curvature inclined downward toward an upper surface of an object to be processed, The upper region of the second slit is curved upwardly inclined toward the lower surface of the other workpiece positioned above the upper surface of the workpiece to be processed and has a curvature .

According to the embodiments of the present invention, a plurality of gas injection portions composed of the first and second gas injection members are provided, and a curtain made of gas is formed on the upper side and the lower side of each of a plurality of objects to be processed in the coating step. Therefore, it is possible to prevent the bonding agent, which has been separated from other objects to be processed located on the upper side of the workpiece to be treated, from being attached to the upper surface of the lower side of the material to be processed, It is possible to cut off the adhesion to the lower surface of the object to be processed, which is caused in the coating step.

BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a view for explaining a process for applying and bonding a bonding agent to a material to be processed according to an embodiment of the present invention;
2 is a block diagram of a coating facility according to an embodiment of the present invention.
3 is a perspective view of a coating device according to an embodiment of the present invention.
FIG. 4 is a perspective view of the inlet module, the inlet buffer module, the curtain gas module, the application module, and the outlet module according to the embodiment of the present invention.
5 is a view illustrating a loading unit according to an embodiment of the present invention.
6 is a view for explaining a coating unit according to the first embodiment of the present invention;
FIG. 7 is a view showing a baseline drawn on the display unit of the image analysis unit according to the embodiment of the present invention and a photograph
8 is a view for explaining the operation of the application control unit and the application unit according to the embodiment of the present invention
FIG. 9A is a view showing a coating unit according to a second embodiment of the present invention, and FIG. 9B is a view showing a coating unit according to a modification of the second embodiment
10 is a view showing the state of the loading section, the gas injection unit, the coating unit, and the image pick-up unit at the time of applying the bonding agent in the coating apparatus according to the embodiment of the present invention
11 is a perspective view of a gas injection unit according to an embodiment of the present invention.
12 is a view showing the carry buffer module and the carry-out unit according to the embodiment of the present invention

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. It should be understood, however, that the invention is not limited to the disclosed embodiments, but is capable of other various forms of implementation, and that these embodiments are provided so that this disclosure will be thorough and complete, It is provided to let you know completely.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view for explaining a process of applying a joining agent to a material to be treated and bonding the material to be processed according to an embodiment of the present invention. Fig. 2 is a block diagram of a coating facility according to an embodiment of the present invention. 3 is a perspective view showing a coating apparatus according to an embodiment of the present invention. FIG. 4 is a perspective view showing the inlet module, the inlet buffer module, the curtain gas module, the dispensing module, and the dispensing module according to the embodiment of the present invention, respectively. 5 is a view illustrating a loading unit according to an embodiment of the present invention. 6 is a view for explaining a coating unit according to an embodiment of the present invention. 7 is a photograph showing an image of a base line and an object to be processed in a display unit of an image analysis unit according to an embodiment of the present invention. 8 is a view for explaining the operation of the application control unit and the application unit according to the embodiment of the present invention. 10 is a view showing states of a loading section, a gas injection unit, a coating unit, and an image pickup unit at the time of applying a bonding agent in the coating apparatus according to the embodiment of the present invention. 11 is a perspective view showing a gas injection unit according to an embodiment of the present invention. 12 is a diagram illustrating an export buffer module and an export unit according to an embodiment of the present invention.

In the embodiment of the present invention, the object P to which the coating process is performed may be, for example, a display panel in which a pair of glass substrates are mutually bonded and emit light. 1, a target substrate P according to the present invention includes a first substrate S1 on which a thin film transistor (TFT) and an organic light emitting layer are formed on one surface of the active matrix organic light emitting diode, , And a second substrate (S1) covering the first substrate (S1). The bonding agent D1 is applied and bonded to the edge of one surface of the first substrate S1 and the edge of the second substrate S1 on the surface facing the first substrate S1, The material D1 may be, for example, a frit.

The coating facility according to the present invention is a facility for applying a coating agent (D2) to a side surface of a material to be treated. Hereinafter, a bonding agent (D2) will be described as an example of a coating agent. Of course, the coating agent applied to the object to be treated is not limited to the bonding agent, and various materials to be coated can be applied.

The coating apparatus according to the present invention applies a bonding agent to a side surface of a panel made of a first substrate S1 and a second substrate S2 which are primarily bonded. At this time, the application equipment is caused to apply the bonding agent (D2) to the center position in the vertical direction on the side surface of the article to be treated. 1A, at the side of the first substrate S1 and the second substrate S2, the position of a junction or a gap between the first substrate S1 and the second substrate S2 The bonding agent D2 is applied. The first and second substrates S1 and S2 are first bonded by a bonding agent D1 applied along the edge of one surface of the first substrate S1 and the edge of one surface of the second substrate S2 facing each other, S2) side is further coated with the bonding agent (D2), the bonding is reinforced. At this time, the bonding agent D2 applied to the side surfaces of the first and second substrates S1 and S2 penetrates into the gap between the first substrate S1 and the second substrate S2 by osmotic pressure (FIG. 1B) When the bonding agent S2 is cured, the bonding between the first substrate S1 and the second substrate S2 is strengthened. Therefore, penetration of water and oxygen into the organic light emitting diode can be more effectively blocked.

As shown in FIG. 2, the coating apparatus according to the present invention includes a coating apparatus 20 for applying a bonding agent to a material P to be processed, a coating apparatus 20 for positioning the coating apparatus 20 on one side of the coating apparatus 20, A transfer device 40 for transferring the object P to be processed to the outside and a dispensing device 20 for transferring the object P to the outside are provided on the other side of the application device 20, And a curing machine 30 located between the transfer device 40 and the take-out device 40 for curing the bonding agent applied to the article P to be processed. Here, the bonding agent may be a material that is cured by UV, and the curing device 30 may be a device that emits UV.

The dispensing apparatus 10 transfers the object P horizontally to the dispensing apparatus 20 and the dispensing apparatus 10 according to the embodiment dispenses the object P placed on the tray to the dispensing apparatus 20, (20). In addition, the take-out device 40 also transfers the article P in a horizontal state and takes it out to the outside. The take-out device 40 according to the embodiment places the completed article P on the tray, As shown in Fig.

Of course, the dispensing apparatus 10 and the dispensing apparatus 40 are not limited to the above-described example, and the object P can be put into the dispensing apparatus 20, and the object to be processed P of the dispensing apparatus 20 Various means, such as a cassette-type means, can be applied to take out the water P to the outside.

Hereinafter, a coating apparatus according to an embodiment of the present invention will be described with reference to FIGS. 3 to 12. FIG. At this time, a panel to which the first substrate S1 and the second substrate S2, which are the objects to be coated, are bonded to each other is referred to as an "object to be processed S". The direction in which the objects P are successively transferred for the application process is referred to as the Y axis direction, the direction intersecting or orthogonal to the Y axis direction as the X axis direction, and the up and down direction as the Z axis direction. The direction in which the article P is conveyed at a position in a Y-axis direction is defined as forward and the opposite direction is defined as the rear.

The application device 20 applies a bonding agent to the object P to be introduced, which is transferred from the charging device 10. The applicator 20 according to the present invention is a horizontal type applicator for transferring the object P in a horizontal state and applying a coating process to the object P arranged in a horizontal state . Further, a plurality of objects P arranged in a horizontal state are provided and are vertically spaced from each other, and a coating process is sequentially performed on a plurality of objects P to be processed which are stacked in multiple layers.

The coating apparatus 20 includes a plurality of draw-in buffers 3100a and 3100b which are horizontally and vertically movable with a plurality of workpieces P stacked in the vertical direction, The first and second drawing buffer modules 3000a and 3000b and the object P delivered from the feeding device 10 are supported and the drawing buffer 3100a of each of the first and second drawing buffer modules 3000a and 3000b The transfer module 2000 receives the object P from the first transfer buffer module 3000a and transfers the object P to the transfer chamber P in a direction in which the coating unit 5100, A plurality of objects P are received and supported from the first loading unit 4000a and the second loading buffer module 3000b having one loading unit 4100a to form a horizontal A second loading unit 4000 having a second loading portion 4100b capable of moving and rotating, An application module 5000 installed in front of the per module modules 3000a and 3000b for performing an application process on the object P transferred by the first and second loading units 4000a and 4000b, And the second loading buffer module 3000a and 3000b and the coating module 5000 so that a gas is curtained by spraying gas to at least an upper side of a plurality of objects P to be coated, A curtain gas module 6000 for preventing adhering substances or impurities from adhering to at least the upper portion of the article P to be processed by the first loading From the first take-out buffer module 7000a, 7000b and the second loading unit 4000b which receive a plurality of objects P to which the coating process has been completed from the unit 4000a and load them in the vertical direction, A second take-out buffer module for receiving a plurality of to-be-processed objects P and stacking them in the vertical direction 7000b.

The lead-in module 2000 draws a plurality of to-be-processed objects P to be applied to the first lead-in buffer module 3000a and the second lead-in buffer module 3000b, respectively. As shown in FIGS. 3 and 4, the lead-in module 2000 according to the embodiment includes a first and a second lead- The first and second drawing buffer modules 3000a and 3000b extend in the direction in which the first and second drawing buffer modules 3000a and 3000b are arranged in the rear of the first and second drawing buffer modules 3000a and 3000b, A guide member (hereinafter referred to as a pulling guide member 2300) for guiding each of the first and second draw support portions 2100 and 2200 to move in the X axis, And the other part of which is connected to the lead-in guide member 2300 so that the first lead-in support part 2100 is moved forward or backward in the Y-axis direction, And is spaced apart from the first forward / rearward shifting member 2400 in the X-axis direction, A second forward / backward movement member 2500 connected to the two-support support portion 2200 and the other portion connected to the insertion guide member 2300 so as to move the second support support portion 2100 back and forth in the Y- .

Here, each of the first and second forward / backward moving members 2400 and 2500 is connected to the first and second receiving supports 2100 and 2200, and the other is connected to the receiving guide member 2300, And can be conveyed in the X-axis direction along the draw-in guide member 2300. [ Each of the pulling guide member 2300 and the first and second forward and backward moving members 2400 and 2500 may be an LM guide and the pulling guide member 2300 and the first forward / A separate horizontal movement block may be provided between the pulling guide member 2300 and the second forward / backward moving member 2500, and the horizontal movement block may be provided between the first and second forward / 2400, and 2500, and horizontally moves along the lead-in guide member 2300. A horizontal movement block may be provided between the first forward / backward movement member 2400 and the first reception support portion 2100 and between the second forward / backward movement member 2500 and the second reception support portion 2200, The horizontal moving block may be an LM block.

The first and second receiving supports 2100 and 2200 can be inserted into the receiving buffers 3100a and 3100b constituting the first and second receiving buffer modules 3000a and 3000b, As shown in Fig. The first and second receiving supports 2100 and 2200 according to the embodiment are formed in a bar shape extending in one direction and inserted into the receiving buffers 3100a and 3100b of the receiving buffer modules 3000a and 3000b It has a possible width. In addition, means capable of supporting and fixing the object P is provided at least at a part of the first and second draw-in supporting portions 2100 and 2200. For example, the object to be processed P is supported It may be a vacuum adsorption hole.

Of course, the pull-in module 2000 is not limited to the above-described configuration, and various means capable of loading the object P into the pull-in buffers 3100a and 3100b can be used.

The coating apparatus 20 according to the embodiment of the present invention is provided with a plurality of drawing buffer modules 3000a and 3000b which are stacked and queued before the object P is conveyed to the coating module 5000, The incoming buffer modules 3000a and 3000b may be provided. At this time, the first and second inlet buffer modules 3000a and 3000b are located in front of the inlet module 2000, and are spaced apart from each other in the X axis direction. In order to support the first input buffer modules 3000a and 3000b and the second input buffer modules 3000a and 3000b, the first input buffer modules 3000a and 3000b are extended in the Y axis direction, And the first to third buffer supports 3510, 3520, and 3530 are spaced apart from each other.

3 and 4, each of the first and second drawing buffer modules 3000a and 3000b includes draw-in buffers 3100a and 3100b in which a plurality of workpieces P are stacked in the vertical direction, The transfer buffer horizontal moving parts 3300a and 3300b for transferring the transfer buffers 3100a and 3100b in the Y axis direction and the transfer buffer vertical transfer parts 3300a and 3300b for transferring the transfer buffers 3100a and 3100b in the Y axis direction, 3200b and the input buffer horizontal drive units 3300a and 3300b so as to be horizontally movable in the Y axis direction by the input buffer horizontal drive units 3300a and 3300b do.

The input buffers 3100a and 3100b are arranged to face each other in the X-axis direction, and a pair of support blocks 3111, which are capable of supporting a plurality of the processed products P, At least one of the buffer member 3110 and the buffer member connection portion 3120 is connected to an upper portion of the pair of buffer members 3110 to face each other and the pair of buffer members 3110 moves in the X- And a buffer member horizontally moving part 3130 that enables alignment of the stacked object P to be processed. The image forming apparatus further includes a driving unit for operating the pull-in buffer horizontal driving units 3300a and 3300b such that the pull-in buffer horizontal moving units 3400a and 3400b can horizontally move forward and backward by the pull-in buffer horizontal driving units 3300a and 3300b, The drive unit of the first input buffer module 3000a may be installed on the first buffer support 3510 and the drive unit of the second input buffer module 3000b may be installed on the third buffer support 3530. [

Each of the pair of buffer members 3110 is extended in the vertical direction, and each of the inner side surfaces of the buffer member 3110 facing each other is provided with the support block 3111 as described above. In other words, a plurality of grooves for inserting one end and the other end edge of the object P are provided on the inner side surface of the pair of buffer members 3110. The pair of buffer members 3110 are connected to each other by a buffer member connection portion 3120. The buffer member connection portion 3120 extends in the left-right direction or the X-axis direction, As shown in FIG.

The buffer member horizontal moving part 3130 includes a buffer member guide part 3131 extending along the buffer member connecting part 3120 and installed on the buffer member connecting part 3120, And a buffer member moving block 3132 installed to connect between the upper portion of the buffer member guide portion 3131 and the buffer member guide portion 3131 and horizontally moving along the buffer member guide portion 3131. Here, the buffer member guide portion 3131 may be, for example, a ball screw.

Some of the incoming buffer ascending and descending parts 3200a and 3200b are connected to the input buffers 3100a and 3100b and the other part is connected to the buffer horizontal shifting parts 3400a and 3400b. The loading buffer lifting / lowering parts 3200a and 3200b according to the embodiment are provided as a pair, and are connected to the pair of buffering parts 3110, respectively. The LM rail may be an LM rail extended in the vertical direction, for example, and the LM rail may be provided between the inlet buffer up / down sections 3200a and 3200b and the inlet buffers 3100a and 3100b. A rising / falling block that slides in the vertical direction may be provided.

The input buffer horizontal drive units 3300a and 3300b are provided on the buffer support base 3520 and are connected to the buffer horizontal movement units 3400a and 3400b with a buffer guide member 3310 extending in the Y axis direction, And a buffer member moving block 3320 connected to the guide member 3310 and capable of horizontally moving back and forth along the buffer guide member 3310 while supporting the buffer horizontal movements 3400a and 3400b.

The input buffer horizontal shifters 3400 and 3400b are coupled with the pair of input buffer uprising portions 3200a and 3200b and are moved in the Y axis direction along the buffer guide member 3310 by the buffer movement block 3320. [ The pull-in buffer horizontal shifters 3400a and 3400b according to the embodiment may have a lower open shape, for example, 'П' shape.

According to the draw-in buffer modules 3000a and 3000b, the draw-in buffers 3100a and 3100b are moved up and down by the draw-in buffer ascending and descending parts 3200a and 3200b. When the workpiece P is aligned, At the time of changing the size of the water P, at least one of the pair of buffer members 3110 is moved in the X-axis direction by the buffer member horizontal shifting portion 3130. At this time, when at least one of the pair of buffer members 3110 is moved, the pair of buffer members 3110 can be moved so as to approach each other or away from each other. The inlet buffer horizontal movement units 3400a and 3400b are movable in the Y axis direction by the inlet buffer horizontal drive units 3300a and 3300b so that the inlet buffer vertical movement units 3300a and 3300b are connected to the inlet buffer horizontal movement units 3300a and 3300b, 3200a and 3200b and the inlet buffers 3100a and 3100b connected to the inlet and outlet ascending and descending parts 3200a and 3200b horizontally move together along the buffer guide member 3310 in the Y axis direction.

Of course, the draw-in buffer modules 3000a and 3000b are not limited to the above-described configuration, and a plurality of to-be-processed objects P may be stacked in the horizontal direction, ) Can be used.

The first loading units 4000a and 4000b receive the object P supported in the first loading buffer 3100a and transfer the objects P to the coating module 5000. To this end, the first loading units 4000a and 4000b Is provided in front of the first input buffer 3100a. The second loading unit 4000b receives the object P supported by the second loading buffer 3100b and transfers the object P to the coating module 5000. The second loading unit 4000b transfers the object P, And is opposed to the front of the buffer 3100b.

Each of the first and second loading units 4000 4000a and 4000b includes loading units 4100a and 4100b, rotating tables 4200 and 4200a and 4200b and loading unit transfer means 4300 4300a and 4300b .

More specifically, the first loading unit 4000a includes a first loading unit 4100a provided with a plurality of seating members 4110, which are spaced apart from each other in the vertical direction and on which the articles P are placed, A first rotating table 4200a installed at a lower portion of the first loading portion 4100a and rotating the first loading portion 4100a; a first rotating table 4200b rotating from the first receiving buffer 3100a to the coating module 5000 in the Y- A first rotating table 4200a is coupled to an upper portion of the first rotary table 4200a and conveying means for conveying the first loading portion 4100a coupled with the first rotary table 4200a in the Y axis direction Transfer means 4300a).

The second loading unit 4000b includes a second loading unit 4100b provided with a plurality of seating members 4110 that are spaced apart from each other in the vertical direction and on which the articles P are placed, A second rotating table 4200b installed below the second loading part 4100b for rotating the second loading part 4100b and extending from the second loading buffer 3100b to the coating module 5000 in the Y axis direction, The second rotating table 4200b is coupled to the second rotating table 4200b to transfer the second loading unit 4100b coupled to the second rotating table 4200b in the Y axis direction )).

Each of the first and second loading portions 4100a and 4100b may include a body 4120 extending in the up and down direction and a plurality of seats 415a and 415b connected to the body 4120, Member 4110 as shown in FIG. Each of the plurality of seating members 4110 may be in the form of a bar extending in one direction and may be disposed between a pair of buffer members 3110 constituting the first and second inlet buffers 3100a and 3100b It can be provided so as to have an insertable area. Each of the seating members 4110 is provided with a means for supporting and fixing the article P, for example, a vacuum suction hole for sucking and fixing the article by vacuum suction force.

The first and second rotary tables 4200a and 4200b may be connected to the lower portion of the body 4120 of the first and second loading portions 4100a and 4100b and may be rotating means having a motor. The lower portions of the rotary tables 4200a and 4200b are fastened to the loading portion transfer means 4300a and 4300b extending in the Y axis direction and are transferred along the Y axis direction along the loading portion transfer means 4300a and 4300b. for teeth. The loading unit transporting means 4300a and 4300b according to the embodiment may be an LM rail and may include a horizontal moving block connecting the rotary tables 4200a and 4200b and the LM rail and slidable in the Y axis direction along the LM rail And the horizontal moving block may be an LM block.

In order to place a plurality of objects P on the first and second loading portions 4100a and 4100b, first and second loading portions 4100a and 4100b are respectively inserted into the first and second loading buffers 3100a, and 3100b so that a plurality of seating members 4110 are fed into the space between the pair of buffer members 3110. At this time, each of the plurality of seating members 4110 is inserted so as to be positioned below the article P to be processed. Then, when the inlet buffers 3100a and 3100b are lowered, the article P descends, And is seated on the seating member 4110 of the loading sections 4100a and 4100b. Next, the first and second loading unit feeding means 4300a and 4300b are operated to move the first and second loading units 4100a and 4100b in the direction in which the application module 5000 is positioned, Is rotated so as to face the application module (5000).

The operations of the first and second loading sections 4100a and 4100b are preferably carried out alternately. For example, the first loading section 4100a moves backward toward the first loading buffer 3100a by the first loading section transporting means 4300a, and the plurality of piles And receives the processed product P. At this time, the second loading section 4100b is transported by the second loading section transporting means 4300b in the direction in which the coating module 5000 is positioned, and the plurality of articles P ) Is applied to each of the first and second substrates. When the application of the bonding agent to the article P is completed in the second loading section 4100b, the article P is transferred to the first take-out buffer 7100a and then transferred to the empty second loading section 4100b move backward toward the second drawing buffer 3100b to receive a plurality of workpieces P loaded in the first drawing buffer 3100a. At this time, the first loading section 4100a is transported by the first loading section transporting means 4300a in the direction in which the coating module 5000 is located, and the plurality of objects P ) Is applied to each of the first and second substrates.

Of course, the draw-in buffer modules 3000a and 3000b are not limited to the above-described configuration and shapes, and can be configured to be capable of stacking a plurality of objects P and transferring a plurality of objects to be processed to the loading sections 4100a and 4100b Various configurations and shapes of means are applicable.

The dispensing module 5000 is disposed between the curtain gas module 6000 and the first and second take-out buffer modules 7000a and 7000b and is provided with a plurality of blood vessels 7000a and 7000b delivered by the first and second loading units 4000a and 4000b. A bonding agent is sequentially applied to each of the treatments (P).

The application module 5000 according to the embodiment is disposed between the curtain gas module 6000 and the first and second take-out buffer modules 7000a and 7000b as shown in FIGS. 3 to 6, 2 loading units 4000a and 4000b sequentially apply the bonding agent to each of the plurality of the objects P to be processed. The application module 5000 according to the present invention includes a coating unit 5100 having a coating unit 5110 for discharging and applying a bonding agent to each of a plurality of objects P to be processed, An image pickup unit 5210 for obtaining an image of a side of the coating unit 5100 to detect whether or not each of the plurality of the target objects P is parallel or inclined, The application control unit 5200, the application unit 5100, and the image pickup unit 5210, which allow the bonding agent to be applied to the center of the application surface in the vertical direction on the surface to be treated P by controlling the movement operation, (Hereinafter referred to as an applied horizontal moving part 5300) which horizontally moves in the axial direction.

6, the coating unit 5100 according to the first embodiment includes a coating unit 5110 for discharging and applying a bonding agent toward a coating surface of a material P to be processed, a coating unit 5110 mounted on one surface of the coating unit 5100, And an application head 5120 capable of horizontally moving along the application horizontal moving part 5300. The application head 5120 is provided with a lifting member (hereinafter referred to as a first lifting member 5121) capable of moving up and down the application part 5110, .

The application portion 5110 includes nozzles 5111a and 5111b for discharging the bonding agent toward the coated surface of the object P and a plurality of nozzles 5111a and 5111b connected to the nozzles 5111a and 5111b at one end, And nozzle support blocks 5112a and 5112b fastened to the ascending / descending member 5121 and movable up and down along the first ascending / descending member 5121 while supporting the nozzles 5111a and 5111b.

The nozzles 5111a and 5111b are disposed such that one end of the bonding agent is discharged toward the rear surface of the gas injection unit 6100 and the application surface of the object P supported by the loading portions 4100a and 4100b. The nozzles 5111a and 5111b according to the embodiment are provided in a plurality and are spaced apart from each other in the vertical direction. At this time, nozzle support blocks 5112a and 5112b corresponding to the nozzles 5111a and 5111b are provided, do. For example, two nozzles 5111a and 5111b (hereinafter referred to as first and second nozzles 5111a and 5111b) are provided, and nozzle support blocks 5112a and 5112b are also provided with two nozzles 5111a and 5111b (Hereinafter referred to as first and second nozzle support blocks 5112a and 5112b). Of course, the nozzle and nozzle support block can be provided in a plurality of two or more, and by providing a plurality of nozzles, the coating process can be performed on a plurality of the objects P to be processed at one time, have. Further, each of the nozzles and the nozzle support blocks may be provided with a single nozzle.

The coating head 5120 according to the embodiment of the present invention extends vertically and is provided with a first ascending / descending member 5121 extending in the vertical direction on one surface thereof to which the applying unit 5110 is fastened, (5300). Here, the first ascending / descending member 5121 may be an LM rail.

The application unit 5110 according to the embodiment of the present invention is configured to dispense the bonding agent intermittently while moving along the coated surface of the object P when applying the bonding agent to the coated surface of the object P, It is possible to apply the bonding agent in the form of a dot (DOT), or to apply the bonding agent continuously in the form of a line by applying the bonding agent continuously along the coated surface of the to-be-

The application control unit 5200 controls the application unit 5100 in accordance with the parallel or inclined state of the object P when the application unit P applies the bonding agent to the object P while horizontally moving the application unit 5100. [ As shown in FIG. The application control unit 5200 includes an imaging unit 5210 having an imaging unit 5211 that acquires an image while moving along the coated surface, that is, the extending direction of the side surface of the object P, an imaging unit 5210, An image pickup motion control unit 5230 that controls the image pickup unit 5210 to move along the center of the water (the center in the vertical direction or the height direction) And an application movement control unit 5220 for controlling the movement of the application unit 5100 using the analysis result.

The image pickup unit 5210 includes an image pickup section 5211 for obtaining an image of a coated surface and an image pickup head 5213 for supporting the image pickup section 5211. [ Here, the image pickup section 5211 includes image pickup devices 5211a and 5211b for picking up an image of the object P to be processed and one end connected to the image pickup devices 5211a and 5211b and the other end connected to the image pickup head 5213 And image pickup device support blocks 5212a and 5212b that are coupled to the second ascending / descending member 5213a and movable along the second ascending and descending member 5213a while supporting the image pickup head 5213. [ The image pickup devices 5211a and 5211b may be, for example, a configuration including a CCD camera, illumination, and a lens.

The image pickup devices 5211a and 5211b are provided in plural numbers and are spaced apart from each other in the vertical direction and are provided with the image pickup device support blocks 5212a and 5212b corresponding to the image pickup devices 5211a and 5211b. For example, two image pickup devices 5211a and 5211b (hereinafter, first and second image pickup devices 5212a and 5212b) are provided, and the image pickup device support blocks 5212a and 5212b are also provided with the image pickup devices 5211a and 5211b (Hereinafter referred to as first and second image pickup device support blocks 5212a and 5212b) are provided. Of course, the image pickup devices 5211a and 5211b and the image pickup device support blocks 5212a and 5212b may be provided in a plurality of two or more, and a plurality of image pickup devices 5211a and 5211b may be provided, ) Can be obtained, and the yield of the coating process can be improved. In addition, each of the image pickup devices 5211a and 5211b and the image pickup device support blocks 5212a and 5212b may be provided with one but not a plurality.

The imaging head 5213 according to the embodiment is vertically extended. A second ascending / descending member 5213a extending in the vertical direction is provided on one surface of the imaging unit 5211 to which the imaging unit 5211 is fastened. (5300). Here, the second ascending / descending member 5213a may be an LM rail.

The imaging movement control unit 5230 is interlocked with the second horizontal movement member 5213a of the application horizontal movement unit 5300 and the imaging unit 5210 to move the imaging unit 5211 horizontally in the X- Control the height. Here, the imaging section 5211 horizontally moves along the side surface of the object P to pick up an image of the side surface which is the coated surface of the object P, and the imaging section 5211 according to the present invention has the angle And moves horizontally along the center in the vertical direction of the side surface of the object P to be processed. In other words, the center of the imaging section 5211 horizontally moves in the coating advancing direction along the vertical direction center of the side of the object P, and the height of the imaging section 5211 Height) does not change. Here, the height of the imaging unit 5211 is controlled so that the imaging unit 5211 moves along the center of the side surface of the object P to be processed by the mechanical design values of the coating equipment or the loading units 4000a and 4000b Adjustable.

This is because a plurality of objects P are stacked on a plurality of seating members 4110 constituting the loading sections 4100a and 4100b and the height of the object P to be processed, When the workpiece P is seated in parallel (not tilted) on the one seating member 4110, the height of the imaging unit 4110 and the spacing distance between the seating members 4110 are determined, 5211 is positioned at the center in the vertical direction of the workpiece P is the height of the imaging section 5211 for imaging the workpiece P to be processed. As the image pickup is progressed with respect to the side surfaces of each of the plurality of the objects P to be processed, the center position of the object P to be seated on each of the seating members 4110 and the center of the imaging unit 5211, And the height value of the image pickup section 5211 is stored or set in the image pickup motion control unit 5230 so that the height of the image pickup section 5211 is controlled .

In the embodiment, a plurality of objects P are stacked in the loading sections 4100a and 4100b in the vertical direction. For example, when the first to tenth objects P to be processed are placed on each of the first to 10th placing members 4110 of the loading sections 4100a and 4100b, And is stored in the movement control unit 5230. For example, a plurality of seating members 4110 of the loading units 4100a and 4100b may be referred to as first to tenth seating members in the upward direction from below, and a plurality of to-be-processed And the water is named as the first to tenth objects P to be processed from the lower side to the upper side. At this time, the first object P to be processed is placed so as to be parallel to the first placing member 4110, and the center of the imaging section 5211 is aligned with the center of the first object P to be processed. The position of the imaging section 5211 where the center of the imaging section 5211 coincides with the center of the second object to be processed which is located above the first object to be processed is the second imaging height, The position of the imaging section 5211 whose center of the imaging section 5211 coincides with the center of the third target object located above the second object to be processed is the third imaging height. Although not described, the fourth to tenth imaging heights can also be obtained by the methods described above, and the first to tenth imaging heights are set in the imaging motion control unit 5230. [ Then, in order for the imaging unit 5210 to move along the side surfaces of the first to tenth objects to be processed for the actual application process, the imaging unit 5211 is controlled to the positions of the first to tenth imaging heights, do.

The application horizontal moving part 5300 horizontally moves the application unit 5110 and the image pickup unit 5210 in the application advancing direction, that is, the X axis direction. The application horizontal moving part 5300 includes a horizontal movement guide member 5310 extended on the third gantry G3 and horizontal movement blocks 5320a and 5320b horizontally movable along the horizontal movement guide member 5310. [ . The horizontal movement blocks 5320a and 5320b are provided to connect between the application head 5120 and the horizontal movement guide member 5310 and between the imaging head 5213 and the horizontal movement guide member 5310. [

The coating motion control unit 5220 receives an image picked up by the image pick-up unit 5210, and based on the analysis results in the image analyzing unit 5221 and the image analyzing unit 5221 for analyzing the position value on the basis of the reference data, And a movement control section 5222 for instructing to control the movement of the application section 5110. [

The image analysis unit 5221 includes a display unit 5211a for displaying a reference line having an image obtained by the imaging unit 5211 and reference data on one coordinate, a reference line on one coordinate point displayed on the display unit 5221a, And a calculating unit 5221b that calculates the distance between the images and calculates the degree of parallelism and inclination of the object P to be processed. The image picked up by the image pickup unit is displayed on the display portion 5221a together with the reference line as shown in Fig.

The reference line indicates that the image pickup unit 5210 does not tilt on the mounting member 4110 of the loading units 4100a and 4100b and that the image pickup unit 5210 does not tilt on the application surface 4110 of the loading units 4100a and 4100b, A straight line extending parallel to the center of the image of the picked up object P moving along the in-plane side or another straight line parallel to the straight line is a reference line, and the position data of the reference line is reference data. For example, when the to-be-processed object P is not tilted on the mounting member 4110 and is placed parallel to the X-axis direction, the center of the coated object P in the up-down direction is connected in the extending direction of the coated surface A straight line on the coordinate of the display portion 5221a is a reference line, and a position in the Z-axis direction along the X-axis position of the reference line is reference data. At this time, since the object P is not tilted to one side but lies in parallel, the position in the Z-axis direction according to the X-axis position of the reference line is the same.

When the imaging unit 5210 horizontally moves along the extension direction of the object P to set the reference data and the reference line as described above, In the vertical direction. The reason why the imaging unit 5210 can be horizontally moved along the vertical center of the coated surface is that the imaging movement control unit 5230 can adjust the height of the imaging unit 5211 to the mechanical design value of the coating equipment or the loading units 4000a and 4000b .

The calculating unit 5221b calculates parallelism and inclination of the article P using the preset reference line and reference data as described above.

To this end, a distance between a straight line (hereinafter referred to as an extension line) extending in the direction in which the application continues in the imaging image on the coordinate and a reference line is calculated at a plurality of points. At this time, an extension line on the captured image to be used for calculating the separation distance from the reference line may be a line passing through the center of the acquired image, or a center line, either outermost line on both sides (i.e., a boundary line) of the captured image. The center line is a line located at the center of both outermost lines on both sides, detecting both outermost lines on both sides of the captured image.

For example, when a plurality of to-be-processed objects P are stacked on each other in the Z-axis direction and each object P is horizontally arranged to lie in the X-axis direction, as shown in Fig. 7, The separation distance between the extending line in the X-axis direction, which is the coating advancing direction, and the reference line extending in the X-axis direction, on the image. At this time, a change in the separation distance in the Z-axis direction according to the extension line of the object to be processed and the X-axis position of the reference line is calculated. As a result of the calculation, when the distance in the Z-axis direction between the extension line of the object P and the reference line in the Z-axis direction increases or decreases in either direction, it is determined that the object is inclined do.

The movement control unit 5222 controls the movement of the coating unit 5100 according to the analysis result of the image analysis unit 5221. [ That is, in the application operation, the position of the application unit 5110 in the Z axis direction is controlled according to the result of the analysis performed by the image analysis unit 5221 while moving the application unit 5100 in the X axis direction. The coating unit 5110 gradually moves up or down while the coating unit 5110 moves in the coating direction, that is, in the X-axis direction, when it is determined that the object P is tilted to one side.

Hereinafter, the operation of the application module 5000 according to the embodiment of the present invention will be described with reference to FIG. To this end, a plurality of seating members 4110 of the loading units 4100a and 4100b are referred to as first to tenth seating members in the upward direction from below, And the treated product P is referred to as the first to tenth processed product P from the lower side to the upper side.

First, the imaging section 5211 is moved along the imaging head 5213 to move the imaging section 5211 to the height of the first target object P positioned at the lowermost position, that is, the first imaging height. Then, the image of the side of the first target object P is picked up while horizontally moving the imaging unit 5211 in the x-axis direction at the first imaging height, for example, from left to right. At this time, the imaging unit 5211 horizontally moves in the X-axis direction without changing the height as shown in Fig. 8A. The image thus picked up may be, for example, as shown in FIG. 8B, and the picked-up image is transmitted to the image analyzer 5221. The calculation unit 5221b of the image analysis unit 5221 calculates the separation distance between the extension line on the captured image and the reference line at a plurality of positions. In this case, when the separation distance gradually increases in the imaging progressing direction as shown in FIG. 8B, the calculating unit 5221b judges that the coating progression direction, that is, the object P is disposed in an upward inclined state from left to right And is transmitted to the movement control unit 5222. Thereafter, the application portion 5110 is raised along the application head 5120 to apply the bonding agent to the first object P to be processed, and the application portion 5110 applies the bonding agent to the first object P Facing the side. At this time, the movement control unit 5222 moves the coating unit 5100 horizontally from the left to the right to increase the height of the adhesion, Respectively. That is, the movement control unit 5222 controls the application unit 5100 to move the first workpiece P in an inclined state or a path as shown in FIG. 8C. Therefore, the bonding agent can be applied to the center of the side surface of the first object P to be processed.

Thus, while the application unit 5100 applies the bonding agent to the first object P to be processed, the image pickup unit 5211 picks up the second object P (P) positioned on the upper side of the first object P ) Side image. To this end, the imaging section 5211 is moved so as to come to the height of the second target object P, that is, the second imaging height. Then, the image of the side of the second target object P is picked up while horizontally moving the imaging unit 5211 from the left to the right at the second imaging height. At this time, the imaging unit 5211 horizontally moves in the X-axis direction without changing the height, as shown in Fig. 8C. The image thus picked up may be, for example, as shown in FIG. 8D, and the picked-up image is transmitted to the image analyzing unit 5221. The calculation unit 5221b of the image analysis unit 5221 calculates the distance between the extension line on the captured image and the reference line at a plurality of positions. At this time, in the case where there is no change in the separation distance in the imaging progressing direction as shown in Fig. 8D, the calculating unit 5221b judges the coating advancing direction, that is, the object P in a parallel state without being inclined to either side, This is transferred to the movement control unit 5222. Thereafter, the application portion 5110 is raised along the application head 5120 so as to apply the bonding agent to the second target object P, and the application portion 5110 applies the bonding agent to the second target P Facing the side. Then, the bonding agent is dispensed and applied while horizontally moving the coating unit 5200 in the X direction, and the movement control unit 5222 gradually moves the coating unit 5100 horizontally from the left side to the right side so that the height does not change. That is, the movement control unit 5222 controls the application unit 5100 to move along the path in which the second target object P is arranged as shown in FIG. 8E. Therefore, the bonding agent can be applied to the center of the side surface of the second target P to be processed.

Subsequently, similarly, while the application unit 5100 applies the bonding agent to the second target object P, the imaging unit 5211 applies the bonding agent to the third target object P positioned on the upper side of the second target object P P) side, and moves horizontally in the X-axis direction without changing the height, as shown in Fig. 8E. The image thus picked up may be as shown in Fig. 8F, for example. As a result of the calculation by the calculation unit 5211, if the separation distance gradually decreases in the imaging progressing direction as shown in FIG. 8F, it is determined that the image of the third object P to be processed is inclined downward And is transmitted to the movement control unit 5222. Thereafter, the applying unit 5110 is moved to apply the bonding agent to the side surface of the third object P to be processed. At this time, the movement control unit 5222 controls the application unit 5100 to move along the downward inclination of the third target object P as shown in FIG. 8G.

While the application unit 5100 applies the bonding agent to the third object P to be processed, the image pickup unit 5211 causes the fourth object P to be positioned above the third object P to be processed, As shown in Fig. 8G, the image is horizontally moved in the X-axis direction without changing the height. The image thus picked up may be, for example, as shown in Fig. 8H.

Thereafter, although not separately shown, the image picked up by the image pickup section 5211 is transmitted to the image analysis section and analyzed, and then the movement of the application unit 5100 is controlled.

The data measured or calculated by the image pickup unit 5210 and the application movement control unit 5220 of the application control unit 5200 in the above-described manner is stored in a separate storage unit according to year, month, day, and time, Can be stored. This is because the movement path for picking up the object P while the image pickup unit 5210 moves is a value fixed by the design value and the movement of the coating unit at the time of application of the coating unit 5100 It does not affect movement.

The imaging head 5213 for moving the imaging section 5211 and the application head 51200 for moving the application section 5110 are separately provided so that the imaging section 5211 and the application section 5110 Z-axis direction. The imaging unit 5211 always obtains an image of each of the objects P while moving horizontally so as to face the center position of each object P and the application unit 5110 controls the application movement control unit 5220 according to the analysis result of the object P to be processed. That is, the application unit 5110 moves separately from the imaging unit 5211, and the application unit 5110 moves along the path in which the articles to be processed are inclined. Therefore, it is possible to apply the bonding agent to the center position of the side surface of each article P to be processed.

That is, conventionally, the imaging unit and the coating unit are connected to one head, so that the imaging unit and the coating unit always move simultaneously in the vertical direction. Therefore, the position of the application portion can not be controlled according to the degree of inclination of each object to be processed. Further, when the side of the object to be processed is imaged, the imaging section is moved along the inclined path of the previous object. Therefore, even if the object to be imaged currently is not tilted, it is recognized as inclined, Even if the degree of difference is different, it is tilted equally. Therefore, the bonding agent can not be applied to the center position of the article to be treated, and the more the application is continuously performed on the article to be treated that has been held, the more the error is accumulated, thereby increasing the defect occurrence rate.

However, in the present invention, as described above, the imaging head 5213 for moving the imaging section 5211 and the application head 5120 for moving the application section 55110 are separately provided, so that the application section 5120 It is possible to cause the bonding agent to be applied to the center position of the side surface of each article P to be processed by moving the respective articles P along the inclined path.

The application head 5120 for adjusting the height of the application portion 5510 in the vertical direction or the thickness direction of the object P and the imaging head 5213 for moving the imaging portion 5211 are separately provided, The present invention is not limited to the first embodiment and may be modified so that the application heads 5510a and 5510b and the imaging heads 5613a and 5613b are separately formed in one head (i.e., the main head 5700) You may.

That is, as shown in FIG. 9A, the application module according to the second embodiment includes coating units 5500a and 5500b each having a coating unit 5510 for discharging and applying a bonding agent to each of a plurality of objects P, And imaging units 5610a and 5610b for acquiring images of the sides of the plurality of the objects P to be processed so as to obtain images of the objects to be processed so as to determine whether each of the plurality of objects P is parallel or inclined And controls the movement of the coating units 5500a and 5500b in accordance with the results to control the application movement control unit 5200 so that the bonding agent can be applied to the center of the coating surface in the vertical direction of the coating surface of the object P A moving unit (hereinafter, a coating horizontal moving unit 5300) that horizontally moves the coating units 5500a and 5500b and the image pick-up units 5610a and 5610b in the X-axis direction and the coating horizontal moving unit 5300 Coating units 5500a and 5500b and imaging units 5610a and 5610b are supported on one surface, A port unit (5500a, 5500b) and an image pickup unit (5610a, 5610b) comprises a main head (5700) for moving up and down.

The coating units 5500a and 5500b and the image pickup units 5610a and 5610b are supported by the main head and are composed of one pair of the application units 5500a and 5500b and one image pickup unit 5610a and 5610b The applicator may be provided in a plurality of two or more as shown in FIG. 9A, as shown in FIG. 9A or FIG. 9B, and spaced apart in a direction in which a plurality of objects to be processed are arranged.

That is, the coating module 5000 according to the second embodiment and the coating module 5000 according to the modification include a plurality of coating units 5500a and 5500b and imaging units 5610a and 5610b.

Each of the plurality of imaging units according to the second embodiment includes imaging units 5611a and 5611b for obtaining an image of a coated surface and imaging heads 5613a and 5613b for supporting imaging units 5611a and 5611b. The image pickup units 5611a and 5611b include an image pickup unit 5611 for picking up the image of the object P to be processed and one end connected to the image pickup unit 5611 and the other end to the image pickup heads 5613a and 5613b And an image pickup device support block 5612 connected to the image pickup device and capable of ascending and descending by the image pickup heads 5613a and 5613b.

The image pickup heads 5613a and 5613b are mounted on the one surface with imaging sections 5611a and 5611b and the other surface is fastened to the main head 5700 to be slidable along the main lifting member 5700a provided on the main head 5700 Do. The imaging heads 5613a and 5613b may have a smaller area than that of the main head 5700 and may have a cross section in the shape of a rectangular sphere and the other surfaces of the imaging heads 5613a and 5613b and the main head 5700, (Not shown) that slides along the main lifting member 5700a.

Each of the plurality of application units 5500a and 5500b according to the second embodiment includes application units 5510a and 5510b, application units 5510a and 5510b, and application units 5510a and 5510b for ejecting and applying a bonding agent toward the application surface of the object P And coating heads 5520a and 5520b connected to the coating units 5510a and 5510b so that the coating units 5510a and 5510b can be vertically or horizontally adjustable in height.

The application portions 5510a and 5510b are provided with a nozzle 5511 for discharging the bonding agent toward the coated surface of the object P, one end connected to the nozzle 5511 and the other end connected to the application heads 5520a and 5520b, And a nozzle support block 5512 capable of moving upward and downward by the application heads 5520a and 5520b.

The application heads 5520a and 5520b according to the second embodiment are mounted on the imaging heads 5613a and 5613b and are connected to the nozzle support block 5512 so as to move up and down the coating support 5512 A member 5521, and a coating drive unit 5522 for driving the application up / down member 5521. [ Here, the application up / down member 5521 may be a rotatable ball screw, and the nozzle support block 5512 may be configured to be coupled to the application up / down member 5521, which is a ball screw, The motor 5522 may be a motor.

In the application module according to the second embodiment, the application position control of the application unit using the application movement control unit is the same as that in the first embodiment, and a detailed description of the operation will be omitted.

The application module 5000 for applying a bonding agent to each of a plurality of objects to be processed P which are stacked in the vertical direction and in which a plurality of the objects P to be processed are stacked has been described as an example.

However, the present invention is not limited to this, and each of the plurality of objects P may be supported vertically erected, and the application module 500 may apply a bonding agent to the application surfaces of a plurality of vertically erected objects to be processed.

The coating head 5120 is configured to move the coating portion 5120 in the extending direction of the coating surface of the object P and the imaging head 5213 is also configured so that the imaging portion 5211 can move the object P And is configured to move in the extending direction.

That is, the application unit 5110 is located at one side or the other side of the imaging unit 5211, and the application head 5120 is configured to apply the application unit 5110 to the plurality of the objects P to be processed, And the object P moves along the inclined path while horizontally moving along the extending direction of the coated surface of each of the objects 5211 to be processed, The position in the thickness direction is adjusted so as to move horizontally along the center in the thickness direction of the coating surface of the object P to be processed.

The image analyzing unit 5221 calculates the positional change in the thickness direction of the object P along the extending direction of the object P to be processed and the movement controlling unit 5222 The position change calculation value in the thickness direction of the object P to be processed along the extending direction of the application surface is received and the position of the object to be processed P in accordance with the movement of the coating unit 5100 in the extending direction of the object P ([] Controls the movement in the thickness direction).

The curtain gas module 6000 is supported by any one of the first and second loading portions 4100b to spray gas to a plurality of objects P to be coated, A curtain made of gas is formed on the upper side and the lower side of the substrate P so as to prevent the bonding agent from adhering to the upper surface and the lower surface of the object P to be processed.

The curtain gas module 6000 includes a gas injecting unit 6100 for injecting gas in the upper and lower directions of each of a plurality of the objects P to be processed, a direction in which the first and second loading units 4100a and 4100b are arranged , And a transfer unit (hereinafter referred to as a jetting unit horizontal transfer unit 6200) which extends in the X-axis direction and horizontally feeds the gas jetting unit 6100 in the X-axis direction.

As shown in Figs. 10 and 11, each of the gas injection units 6100 is extended in one direction and is spaced apart in the vertical direction. The gas injection unit 6100 is connected to a plurality of gas- And a jetting body 6120 extending in the vertical direction and supporting the plurality of gas jetting portions 6110. The gas jetting portion 6110 includes a plurality of gas jetting portions 6110, Here, the injection body 6120 is installed to support the opposite surface, that is, the rear surface, of the gas injection portion 6110 through which the gas is injected, and the upper portion is connected to the injection unit horizontal transfer portion 6200.

The gas injector 6110 injects gas in the upper and lower directions of the object P to be processed. That is, the gas injector 6110 according to the present invention injects gas to the upper side and the lower side of the upper surface of the object to be processed P, And the gas is injected to the upper side and the lower side of each of the plurality of the objects P to be processed.

As shown in FIG. 11, each of the plurality of gas injecting sections 6110 according to the embodiment includes a first gas injection member 6111 for injecting gas onto the upper surface of a workpiece P, 1 gas injection member 6111 for spraying the gas to the lower side of the lower surface of another workpiece P located on the upper side of the workpiece P 6112).

The first gas injection member 6111 may be in the shape of a plate having a predetermined width (area) and a height and may be formed at one end or one side of the first gas injection member 6111 along the extension direction of the P (Hereinafter, referred to as a first slit 6111a) for spraying a gas or a target P to be processed. In the first gas injection member 6111, a channel (hereinafter referred to as a first channel 6111b) for temporarily supplying gas supplied from the outside and supplying gas to the first slit 6111a is provided, A first gas supply means connected to the first channel 6111b and supplying gas to the first channel 6111b is provided outside the gas injection member 6111. [

Here, the first channel 6111b is located in the rear of the first slit 6111a inside the first gas injection member 6111, and is arranged to communicate with the first slit 6111a. The first channel 6111b according to the embodiment may have a shape of an empty space extending along the extending direction of the first slit 6111a in the first gas injection member 6111. However, 6111a of the first embodiment of the present invention.

The first gas injection member 6111 is located on the upper side of the workpiece P and injects the gas toward the upper side of the workpiece P to be processed. In order for the gas injected from the first gas injection member 6111 located above the workpiece P to be sprayed toward the upper side of the workpiece P, the first gas injection member It is necessary to guide the gas injected from the first slit 6111a of the first slit 6111 to the lower side where the workpiece is located. Accordingly, in the present invention, the first slit 6111a and the first channel 6111b are connected and communicated, and the lower region of the first channel 6111b is connected to the first slit 6111a.

One side surface of the first gas injection member 6111 provided with the first slit 6111a is inclined downward at a predetermined angle not perpendicular to the upper surface thereof, It may be a curved surface having curvature while being inclined downward. More specifically, the lower region of the first slit 6111a to which the first channel 6111b is connected is inclined downward in the vertical direction of the one side region of the first gas injection member 6111, and more preferably, . Therefore, the gas injected from the first slit 6111a is injected downward toward the upper side of the object P, diffused along the upper surface of the object P, A curtain is formed on the upper side. At least a portion of the gas may be directed toward the first gas injection member 6111. At this time, the flow is induced along the inclined surface formed on one side of the first gas injection member 6111, Out of the curtain gas module 6000 through the lower space of the curtain gas module 6111.

When one side of the first gas injection member 6111 is perpendicular to the upper surface of the first gas injection member 6111, the gas moves back to the first slit 6111a by the vortex, So that the formation of the air curtain is not easy. Thus, as described above, one side of the first gas injection member 6111 through which the gas is injected is inclined downward, thereby preventing the gas from entering the first slit 6111a again by the vortex, So that it can be discharged in the direction in which the body 6120 is located.

The second gas injection member 6112 is in the form of a plate having a predetermined width and height and is formed at one end or one side of the gas injection member 6112 along the extension direction of the target P to generate gas (Hereinafter referred to as a second slit 6112a) is provided. The length of the second gas injection member 6112 is smaller than that of the first gas injection member 6111. More specifically, the length of the second gas injection member 6112 in the direction in which the second slit 6112b is provided is shorter than that of the first gas injection member 6111, And the length of the side intersecting or orthogonal to the direction in which the second slit 6112a is provided is shorter than that of the first gas injection member 6111. [

In the second gas injection member 6112, a channel (hereinafter referred to as a second channel 6112b) for temporarily supplying gas supplied from the outside and supplying gas to the second slit 6112a is provided, A second gas supply means connected to the second channel 6112b and supplying gas to the second channel 6112 is provided outside the gas injection member 6112. [

Here, the second channel 6112b is located in the rear of the second slit 6112 inside the second gas injection member 6112, and is arranged to communicate with the second slit 6112a. The second channel 6112b according to the embodiment is not limited to the shape of the empty space formed inside the second gas injection member 6112 along the extending direction of the second slit 6112b, 6112a, 6112a.

The second gas injection member 6112 is located below the workpiece P and injects gas toward the lower side of the workpiece P to be processed. In order for the gas injected from the second gas injection member 6112 located above the workpiece P to be injected toward the lower side of the workpiece P, the second gas injection member It is necessary to guide the gas injected from the second slit 6112a of the workpiece 6112 to the upper side where the workpiece P is located. Accordingly, in the present invention, the second slit 6112a and the second channel 6112b are connected and communicated, and the upper region of the second channel 6112b is connected to the second slit 6112a.

One side of the second gas injection member 6112 provided with the second slit 6112a may be a sloped surface inclined upwards at a predetermined angle and an upper region of the sloped surface may be a curved surface having an upward inclination and a curvature. More specifically, in the vertical direction of the one side region of the second gas injection member 6112, the upper region of the second slit 6112a connected to the second channel 6112b is inclined upward, and more preferably, . The gas injected from the second slit 6112a is injected downward toward the lower side of the lower surface of the workpiece P and diffused along the lower surface of the material P to be processed, P) to form a curtain on the right side. At the same time, at least some of the gas is directed again toward the second gas injection member 6112, at which time the flow is induced along the inclined surface formed on one side of the second gas injection member 6112, 6112 to the outside of the curtain gas module 6000 through the upper space.

On the other hand, when one side of the second gas injection member 6112 is at right angles, there is a problem that the gas moves back to the second slit 6112a by the vortex, So that the formation of the air curtain is not easy. Thus, as described above, one side of the second gas injection member 6112 through which the gas is injected is inclined downward, thereby preventing the gas from entering the second slit 6112a again by the vortex, So that it can be discharged in the direction in which the body 6120 is located.

The first gas injection member 6111 and the second gas injection member 6112 may be integrally connected to each other in the vertical direction. For example, the other end facing the one end of the first gas injection member 6111 provided with the first slit 6111a and the other end facing the end of the second gas injection member 6112 provided with the second slit 6112a And the other end of the first slit 6111a and the other end of the second slit 6112a are connected to the injection body 6120.

A plurality of gas injection portions 6110 composed of the first gas injection member 6111 and the second gas injection member 6112 are provided so as to be vertically spaced apart from the injection body 6120. After a workpiece P is positioned between the gas spraying section 6110 and the gas spraying section 6110 which are vertically spaced apart from each other when the bonding agent is applied to each of the plurality of the objects P to be processed, Spray gas.

In the above description, the gas injector 6110 has been described as an integral type in which the first gas injection member 6111 and the second gas injection member 6112 are coupled to each other. However, the present invention is not limited to this, and may be a separate gas injection unit 6110 in which the first gas injection member 6111 and the second gas injection member 6112 are not coupled to each other.

The injection unit horizontal feed portion 6200 is disposed in the direction intersecting the moving direction of the first and second loading portions 4100a and 4100b or in the direction in which the first loading portion 4100a and the second loading portion 4100b are arranged, And horizontally moves the gas injection unit 6100 in the X-axis direction. The injection unit horizontal transfer part 6200 may be an LM rail mounted and supported on the second gantry G2 extending in the X axis direction and the injection unit horizontal transfer part 6200 may be provided on the injection body 6120 of the gas injection unit 6100, A horizontal movement block slidable along the horizontal movement block 6200 may be provided, and the horizontal movement block may be, for example, an LM block.

In the above description, a plurality of gas jetting parts 6100 of the curtain gas module 6000 are arranged in the vertical direction and spaced apart from each other. However, the present invention is not limited to this, and a plurality of objects P to be processed are arranged in the vertical direction and a plurality of objects P arranged in the vertical direction are arranged in the horizontal direction, for example, from left to right or right to left Can be loaded. At this time, the plurality of gas injectors 6110 are arranged in a direction corresponding to the direction in which the plurality of the objects P are arranged. That is, each of the plurality of gas spraying units 6110 is arranged in the vertical direction, and a plurality of the objects P arranged in the vertical direction are spaced apart from one another in the horizontal direction, for example, from the left to the right or from the right to the left.

A plurality of take-out buffer modules 7000a and 7000b are provided in the coating apparatus 20 according to the present invention. The take-out buffer modules 7000a and 7000b wait until the object P to which the bonding agent has been applied is delivered to the take- Out buffer modules 7000a and 7000b may be provided. The first take-out buffer module 7000a and the second take-out buffer module 7000b are located in front of the application module 5000 and are spaced apart from each other in the X axis direction. In order to support the first take-out buffer module 7000a and the second take-out buffer module 7000b, the first take-out buffer module 7000a and the second take-out buffer module 7000b are extended in the Y axis direction, (Hereinafter, fourth to sixth buffer supports 4510, 4520 and 4530) are provided.

Each of the first and second carry buffer modules 7000a and 7000b has the same shape and configuration as the first and second fetch buffer modules 3000a and 3000b described above. 3 and 4, the first and second carry buffer modules 7000a and 7000b will be described in detail. Each of the first and second carry buffer modules 7000a and 7000b includes a plurality of The carry-out buffers 7100a and 7100b for lifting the carry-out buffers 7100a and 7100b up and down and the carry-out buffers 7100a and 7100b for lifting and lowering the take-out buffers 7100a and 7100b to Y 7300b and the carry-out buffer horizontal drive units 7300a, 7300b, which are provided to connect the carry-out buffer horizontal drive units 7300a, 7300b, 7300b, Output buffer horizontal shifters 7400a and 7400b horizontally movable in the Y-axis direction.

The carry-out buffers 7100a and 7100b are arranged so as to be opposed to each other in the X-axis direction, and a pair of support blocks 7111 capable of supporting a plurality of to-be- At least one of the buffer member 7110 and the buffer member connection portion 7120 and the pair of buffer members 7110 connected to the upper portion of the pair of buffer members 7110 facing each other are moved in the X- And a buffer member horizontal shifting portion 7130 for enabling alignment of the stacked object P to be processed. It also includes a drive unit for operating the take-out buffer horizontal drive units 7300a and 7300b such that the take-out buffer horizontal movement units 7400a and 7400b can horizontally move forward and backward by the take-out buffer horizontal drive units 7300a and 7300b, The drive unit of the first take-out buffer module 7000a may be installed on the fourth buffer support platform 7510 and the drive unit of the second take-out buffer module 7000b may be installed on the sixth buffer support platform 7530. [

Each of the pair of buffer members 7110 extends in the vertical direction, and each of the inner side surfaces of the buffer member 7110 facing each other is provided with the support block 7111 as described above. That is, a plurality of grooves for inserting one end and the other end edge of the object P are provided on the inner side surface of the pair of buffer members 7110. The pair of buffer members 7110 are connected to each other by a buffer member connection portion 7120. The buffer member connection portion 7120 extends in the left-right direction or the X-axis direction, As shown in FIG.

The buffer member horizontal moving part 7130 includes a buffer member guide part 7131 extending along the buffer member connecting part 7120 and installed on the buffer member connecting part 7120 and a pair of buffer members 7110 And a buffer member moving block 7132 which moves horizontally along the buffer member guide portion 7131 to connect the buffer member guide portion 7131 with the upper portion of the buffer member guide portion 7131. Here, the buffer member guide portion 7131 may be, for example, a ball screw.

Some of the carry-out buffer ascending / descending parts 7200a and 7200b are connected to the carry-out buffers 7100a and 7100b, and a part of them are connected to the buffer horizontal moving parts 7400a and 7400b. The carry-out buffer ascending / descending sections 7200a and 7200b according to the embodiment are provided as a pair, and are connected to a pair of buffer members 7110, respectively. The take-out buffer ascending and descending sections 7200a and 7200b according to the embodiment can be, for example, LM rails extended in the vertical direction. An LM rail is provided between the carry-out buffer ascending / descending sections 7200a and 7200b and the carry out buffers 7100a and 7100b A rising / falling block that slides in the vertical direction may be provided.

The unloading buffer horizontal driving units 7300a and 7300b are provided on the fifth buffer supporting base 7520 and are connected to the buffer horizontal moving units 7400a and 7400b with one end thereof being connected to the buffer guide member 7310 extending in the Y axis direction, And a buffer member moving block 7320 connected to the buffer guide member 7310 and capable of horizontally moving back and forth along the buffer guide member 7310 while supporting the buffer horizontal movements 7400a and 7400b.

The unloading buffer horizontal moving parts 7400 and 7400b are coupled with the pair of unloading buffer ascending and descending parts 7200a and 7200b and are moved in the Y axis direction along the buffer guide member 7310 by the buffer moving block 7320. [ The unloading buffer horizontal shifters 7400a and 7400b according to the embodiment may have a lower open shape, for example, 'П' shape.

According to the export buffer modules 7000a and 7000b, the carry-out buffers 7100a and 7100b move in the vertical direction by the carry-out buffer ascending / descending sections 7200a and 7200b, and when aligning the object P, At the time of changing the size of the water P, at least one of the pair of buffer members 7110 is moved in the X-axis direction by the buffer member horizontal shifting portion 7130. At this time, when at least one of the pair of buffer members 7110 is moved, the pair of buffer members 7110 can be moved so as to approach each other or to move away from each other. The unloading buffer horizontal moving units 7400a and 7400b are movable in the Y axis direction by the unloading buffer horizontal driving units 7300a and 7300b so that the unloading buffer moving units 7300a and 7300b are connected to the unloading buffer horizontal moving units 7300a and 7300b, Out buffers 7100a and 7100b connected to the carry-off buffer ascending and descending parts 7200a and 7200b horizontally move together along the buffer guide member 7310 in the Y axis direction.

The carry-out units 8000a and 8000b transfer the object P loaded in the carry-out buffers 7100a and 7100b to the carry-out apparatus 40. [ A plurality of, for example, two carry-out units (hereinafter referred to as first and second carry-out units 8000a and 8000b) are provided in front of the first carry-out buffer 7100a and the second take-out buffer 7100b Respectively. That is, it includes a first take-out unit 8000a provided in front of the first take-out buffer 7100a and a second take-out unit 8000b provided in front of the second take-out buffer 7100b.

The first unloading unit 8000a is provided with a first unloading robot 8100a and a first unloading robot 8100a which receive and deliver the object P to which the bonding agent has been applied from the first unloading buffer 7100a (Hereinafter, referred to as a first carry-out section 8200a) for transferring from the first carry-out buffer 7100a to the carry-out apparatus 40. [ The first take-out unit 8000a according to the embodiment is provided with a plurality of (for example, two) first take-out robots 7100a so as to be able to carry out the object P alternately or alternately from the first take- And the pair of first carry-out robots 8100a move forward or backward alternately or alternately on the first carry-out section 8200a.

The first carry-out conveying portion 8200a is located below the first curing unit 30a and includes a first carry-out conveying support 8210a extending from the first take-out buffer 7100a to the conveying unit 40 in the Y axis direction, A pair of first carry-out guide members (8100a) extending along the extending direction of the first carry-out conveying support 8210a on the first carry-out conveying support 8210a and horizontally moving the pair of first take-out robots 8100a, 8220a.

Each of the pair of first take-out robots 8100a includes a support portion (hereinafter referred to as a first take-out supporting portion 8110a) that receives and receives the object P to which the bonding agent has been applied from the first take-out buffer 7100a, A first take-out horizontal moving block 8110c which is fastened to the first carry-out guide member 8220a and slides along the Y-axis direction along the first carry-out guide member 8220a, and a first take- And the other end is connected to the first take-out horizontal moving block 8110c. Here, the first carry-out supporting portion 8110a may be, for example, in the form of a bar extending in one direction, and may include means for supporting and fixing the object P at least at a part where the object P is supported A vacuum suction hole may be provided.

The second unloading unit 8000b transfers the object P to which the bonding agent has been applied from the second unloading buffer 7100b to the unloading unit 40. The first unloading unit 8000b And have the same configuration and shape. That is, the second take-out unit 8000b includes a second take-out robot 8100b and a second take-out robot 8100b which receive and deliver the object P to which the bonding agent has been applied from the second take-out buffer 7100b (Hereinafter, referred to as a second carry-out conveyance section 8200b) for conveying the sheet S from the second take-out buffer 7100b to the carry-out apparatus 40. [ The second take-out unit 8000b according to the embodiment is provided with a plurality of (for example, two) second take-out robots 830b so that the object P can be taken out from the second take-out buffer 7100b alternately or alternately. And the pair of second carry-out robots 8100b move forward or backward alternately or alternately on the second carry-out transfer portion 8200b.

The second carry-out conveying portion 8200b is located below the second curing unit 30b and includes a second carry-out conveying support 8210b extending in the Y-axis direction from the second carry-out buffer 7100b to the carry- A pair of second carry-out guide members (8100b) extending along the extending direction of the second carry-out conveying support 8210b on the second carry-out conveying support base 8210b and horizontally moving the pair of second take-out robots 8100b 8220b.

Each of the pair of second take-out robots 8100b includes a support portion (hereinafter referred to as a second take-out supporting portion 8110b) that receives and receives the object P to which the bonding agent has been applied from the second take-out buffer 7100b, A second carrying-out horizontal moving block 8210c which is installed to be engaged with the second carrying-out guide member 8220b and slides along the Y-axis direction along the second carrying-out guide member 8220b, And a second connecting member 8210b connected to the second take-out guide member 8220b and the other end connected to the second take-out horizontal moving block 8210c. Here, the second carry-out supporting portion 8110b may be, for example, in the form of a bar extending in one direction, and at least a part for supporting the object P may include means for supporting and fixing the object P A vacuum suction hole may be provided.

The first and second carry-out guide members 8220a and 8220b of the first and second carry-outs 8200a and 8200b according to the embodiment are connected to the LM rail, the first carry-out robot 8100a and 8100b, Horizontal movement blocks 8110c and 8210c0 may be LM blocks. However, the present invention is not limited to this, and various means for horizontally moving the first and second take-out robots 8100a and 8100b in the Y-axis direction can be used for the first and second carry-out guide members 8220a and 8220b, Various means capable of sliding along the first carry-out guide members 8220a and 8220b can be used for the first and second unloading horizontal movement blocks 8110c and 8210c.

Of course, the take-out buffer modules 7000a and 7000b are not limited to the above-described configuration and shape, and can be loaded with a plurality of objects P transferred to the loading sections 4100a and 4100b, Can be applied to the take-out device (40).

Each of the first and second curing units 30a and 30b cures the bonding agent applied to the side surface of the article P, that is, the bonding agent. Here, the first curing unit 30a is located in front of the first carry-out buffer 7100a and is provided on the movement path of the first carry-out support unit 8100a, which will be described later, And is provided on the movement path of the second carry-out supporting portion 8100b, which will be described later. That is, the first curing unit 30a and the second curing unit 30b are spaced apart from each other in the X axis direction in the front area of the first and second carry-out buffers 7100a and 7100b, (8000a, 8000b). In order to support the first and second curing units 30a and 30b, the first and second curing units 30a and 30b are disposed on the third table 53 in the direction in which the first and second curing units 30a and 30b are arranged, A tree G3 may be provided and the first and second curing units 30a and 30b may be fixedly installed in the third gantry G3.

The first and second curing units 30a and 30b according to the embodiment are means for radiating light, for example UV (ultraviolet ray), which can harden the bonding agent in the direction in which the article to be processed is transported, for example, downward. Various means for curing the bonding agent to be applied to the object P may be used. For example, when the bonding agent applied to the object P is a thermosetting material, the first and second curing units 30a and 30b may be means for radiating heat.

Hereinafter, the operation of the application device 20 according to the embodiment of the present invention will be described with reference to FIGS. 1 to 12. FIG. At this time, the contents overlapping with the above contents will be omitted or briefly explained.

A plurality of objects P to be processed provided from the charging device 10 are led into the drawing buffers 3100a and 3100b of the coating device 20. [ To this end, first, the inlet module 2000 of the applicator 20, more specifically, the first inlet support portion 2100 and the second inlet support portion 2200, are alternately seated. That is, the dispensing apparatus draws the object P into any one of the first drawing buffer 3100a or the second drawing buffer 3100b of the coating apparatus 20, for example, the first drawing buffer 3100a .

To this end, the first pull-in buffer 3100a is moved rearward through the first pull-in buffer horizontally moving part 3400a to the positions where the first and second pull-tabs 2100 and 2200 are located. Thereafter, the lead-in guide member 2300 and the first and second forward / backward movement members 2400 and 2500 are operated to move the first draw-in support portion 2100 and the second draw-in support portion 2200 in the X-axis direction, The first pulling-in support part 2100 and the second pulling-up support part 2200 are horizontally moved so as to be positioned behind the first pulling-in buffer 3100a. The first retractable support 2100 is operated through the first retractable member 2400 to retract the first retractable support 2100 in the direction in which the closing device 10 is positioned. Then, the object P is placed on the first receiving support 2100 and the first receiving support 2100 is moved forward toward the first receiving buffer 3100a to form the first receiving buffer 3100a, Respectively. At this time, the to-be-processed object P placed on the first draw-in support part 2100 is positioned on the upper side of the support block 3111, for example, the uppermost support block 3111. Next, when the first drawing buffer 3100a is lowered, the article P placed on the first drawing supporting portion 2100 is placed on the uppermost supporting block 3111 of the first drawing buffer 3100a, And the first receiving support portion 2100 moves backward in the direction of the transfer supporting portion 1310.

As described above, the to-be-processed object P is placed on the first draw-in support portion 2100, and the object P is fed into the first draw-in buffer 3100a through the first draw-in support portion 2100 The second loading support portion 2200 is moved rearward to the position of the loading device 40 and the loading device 10 places the article P on the second loading supporting portion 2200. Thereafter, the second forward / backward movement member 2500 is operated to advance the second pulling support portion 2200 toward the first pulling-in buffer 3100a so that the second pulling support portion 2200 is moved to the first pulling-in buffer 3100a, The second receiving support portion 2200 is inserted to be positioned above the empty supporting block 3111 located below the uppermost supporting block 3111 on which the object P is placed . Thereafter, when the first drawing buffer 3100a is lowered, the article P placed on the second drawing supporting portion 2200 is placed on the supporting block 3111 of the first drawing buffer 3100a, The second loading support portion 2200 moves backward in the direction of the charging device 10. [

As described above, in the present invention, the operations of the first and second draw-in support portions 2100 and the first draw-in buffer 3100a are repeatedly performed to form a plurality of objects to be processed 3100a in the first draw- P in the vertical direction.

When a plurality of objects P are loaded on the first loading buffer 3100a, the plurality of objects P are transferred to the first loading unit 4100a and the plurality of objects P are loaded on the first loading unit 4100a. Toward the curtain gas module (6000) and the application module (5000). The first loading portion 4300a is rotated using the first rotating table 4200a so that the mounting member 4110 is not the body 4120 of the first loading portion 4100a but the first loading portion 4300b And is rotated to face the buffer 3100a. The first loading unit 4100a moves the first loading unit 4100a toward the first loading buffer 3100a by operating the first loading unit transporting unit 4300a to move the first loading unit 4100a to the first loading buffer 3100a, Respectively. At this time, each of the plurality of seating members 4110 constituting the first loading unit 4100a is positioned below each of the plurality of the objects P supported by the first receiving buffer 3100a. When the first receiving buffer 3100a is lowered, a plurality of objects P that are seated in the supporting block 3111 of the first receiving buffer 3100a are transferred to a plurality of seats of the first loading portion 4100a Member 4110, respectively.

On the other hand, in the present invention, in the quadrangular-shaped article P having four sides (i.e., the first to fourth sides), the bonding agent is applied to the first to third sides, Do not apply the agent. Therefore, when a plurality of the objects P to be processed are loaded in the first drawing buffer 4100a, the fourth side of each article P is directed to the direction in which the first loading portion 4100a is located. When the first loading portion 4100a is inserted into the first loading buffer 3100a and a plurality of the objects P are placed on the first loading portion 4100a in this state, The fourth side faces the body 4120 of the first loading portion 4100a, and the other first to third side surfaces are exposed.

Next, the first loading portion transporting means 4300a is operated to advance the first loading portion 4100a so that the first loading portion 4100a is positioned between the gas injection unit 6100 and the application unit 5100 . At this time, the injection unit transfer section 6200 is operated so that the gas injection unit 6100 horizontally moves to be positioned in front of the first loading buffer 3100a or the first loading section 4100a, To horizontally move the coating unit 5100 so as to be positioned behind the first loading buffer 3100a, the first loading unit 4100a and the gas injection unit 6100. [ Thereafter, the first loading portion 4100a is rotated through the first rotating table 4200a so that the mounting member 4110, which is not the body 4120 of the first loading portion 4100a, See you. At this time, the gas injection unit 6110 of the gas injection unit 6100 is positioned above and below each of the plurality of target objects P tired by the first loading unit 4100a, and the first loading unit 4100a The one side surface, that is, one side surface of the plurality of workpieces P tired by the gas discharge unit 6100 is exposed to the outside of the jetting body 6120 of the gas jetting unit 6100, See you.

The bonding agent is applied to one side (hereinafter, referred to as a first side) of each of the plurality of the processed products P stacked on the first loading portion 4100a through the coating unit 5100, (P) located on the lowermost side of the workpiece (4100a). To this end, the placement state of the object P positioned at the lowermost position is first analyzed through the imaging unit 5210 and the coating motion control unit 5220. [

That is, the imaging section 5211 is moved along the imaging head 5213 to move the imaging section 5211 to the height of the first target object P positioned at the lowermost position, that is, the first imaging height. Then, the image of the first side face of the first object P is picked up while horizontally moving the imaging unit 5211 from the left to the right at the first imaging height. At this time, the imaging unit 5211 horizontally moves in the X-axis direction without changing the height as shown in Fig. 8A. The image thus picked up may be, for example, as shown in FIG. 8B, and the picked-up image is transmitted to the image analyzer 5221. The calculation unit 5221b of the image analysis unit 5221 calculates the separation distance between the extension line on the captured image and the reference line at a plurality of positions. In this case, when the separation distance gradually increases in the imaging progressing direction as shown in FIG. 8B, the calculating unit 5221b judges that the coating progression direction, that is, the object P is disposed in an upward inclined state from left to right And is transmitted to the movement control unit 5222. Thereafter, the application portion 5110 is raised along the application head 5120 to apply the bonding agent to the first object P to be processed, and the application portion 5110 applies the bonding agent to the first object P Let's face the first aspect. At this time, the movement control unit 5222 moves the coating unit 5100 horizontally from the left to the right to increase the height of the adhesion, Respectively. That is, the movement control unit 5222 controls the application unit 5100 to move the first workpiece P in an inclined state or a path as shown in FIG. 8C. Therefore, the bonding agent can be applied to the center of the first side face of the first object to be processed (P).

Thus, while the application unit 5100 applies the bonding agent to the first object P to be processed, the image pickup unit 5211 picks up the second object P (P) positioned on the upper side of the first object P ) Image of the first side face, and analyzes the arrangement state of the second target object P. The image picked up by the image pickup section 5211 may be, for example, as shown in FIG. 8D, and the picked-up image is transmitted to the image analyzing section 5221. The calculation unit 5221b of the image analysis unit 5221 calculates the distance between the extension line on the captured image and the reference line at a plurality of positions. At this time, in the case where there is no change in the separation distance in the imaging progressing direction as shown in Fig. 8D, the calculating unit 5221b judges the coating advancing direction, that is, the object P in a parallel state without being inclined to either side, This is transferred to the movement control unit 5222. Thereafter, the application portion 5110 is raised along the application head 5120 so as to apply the bonding agent to the second target object P, and the application portion 5110 applies the bonding agent to the second target P Let's face the first aspect. Then, the bonding agent is dispensed and applied while horizontally moving the coating unit 5200 in the X direction, and the movement control unit 5222 gradually moves the coating unit 5100 horizontally from the left side to the right side so that the height does not change. That is, the movement control unit 5222 controls the application unit 5100 to move along the path in which the second target object P is arranged as shown in FIG. 8E. Therefore, the bonding agent can be applied to the center of the first side face of the second object P to be processed.

Thereafter, by the same method as the above-described method, the arrangement states of the third to eighth objects are analyzed to control the movement of the application unit, and the bonding agent is applied to the first side of the third to tenth objects to be processed. That is, when the imaging unit 5211 picks up an object P to be processed among a plurality of the objects P to be processed, the application unit 5110 located on the upper side or the lower side of the imaging unit 5211, Applies the bonding agent to the object P to be processed one layer above or one layer below the object P to be processed which is picked up by the image pickup unit.

The imaging head 5213 for moving the imaging unit 5211 and the application head 5120 for moving the application unit 55110 are separately provided so that the application unit 5120 can move the object to be processed P are moved along the inclined path, the bonding agent can be applied to the central position of the side surface of each article P to be processed.

While the bonding agent is applied to each of the first to tenth objects P to be processed in the above-described manner, each of the plurality of gas injecting sections 6110 of the gas injecting unit 6100 applies a plurality of to-be- And a curtain made of a gas is formed at least on the upper side of the plurality of the objects P to be processed. In the embodiment, a curtain made of gas is formed on the upper side and the lower side of each of the plurality of the objects P to be processed.

More specifically, when air is supplied to the first channel 6111b provided in the first gas injection member 6111 positioned above each of the plurality of the objects P, the air is supplied to the first slit 6111a. Here, the first slit 6111a communicates with the lower region of the first channel 6111b, and one side of the first gas injection member 6111 provided with the first slit 6111a is inclined downward at a predetermined angle Slope. Thus, the air discharged through the first slit 6111a is sprayed downward, diffused from above the workpiece P to form an air curtain. Part of the air injected from the first slit 6111a of the first gas injection member 6111 flows on one side or curved surface of the first gas injection member 6111 and flows along the curved surface of the first gas injection member 6111 The ejection body 6120 located at the outer side, that is, the direction opposite to the ejection direction, is located. When the air is supplied to the second channel 6112b provided inside the twelfth gas injection member 6112 located below each of the plurality of the objects P to be processed, the air is supplied to the second slit 61112 through the second slit 61112 . Here, the second slit 6112a is in communication with the upper region of the second channel 6112b, and one side of the second gas injection member 6112 provided with the second slit 6112a is inclined upward Slope. Thus, the air discharged through the second slit 6112a is sprayed upward, diffused from below the workpiece P to form an air curtain. Part of the air injected from the first slit 6111a of the second gas injection member 6112 flows along one side or curved surface of the first gas injection member 6111 and flows along the curved surface of the second gas injection member 6112 The ejection body 6120 located at the outer side, that is, the direction opposite to the ejection direction, is located.

As described above, in the present invention, a plurality of gas injection portions 6110 composed of the first and second gas injection members 6111 and 6112 are provided, Thereby forming a curtain made of gas. Therefore, it is possible to prevent the bonding agent, which is separated from the other object P located on the upper side of the object P, from being attached to the upper surface of the object P located on the lower side, It is possible to prevent the bonding agent separated from the other object P located below the object P from being adhered to the lower surface of the object P located on the upper side.

When all of the bonding agents are applied to the first side of each of the plurality of articles P placed on the first loading section 4100a, the first loading section 4100a is rotated through the first rotating table 4200a, So that the second side faces of the plurality of objects P face the application unit 5200. After the gas injection unit 6100, the coating unit 5100 and the image pickup unit 5230 are horizontally moved to be separated from the first loading unit 4100a before rotating the first loading unit 4100a, The first loading section 4100a may be rotated and then returned. Thereafter, the bonding agent is applied to the second side surfaces of the plurality of target objects P by the same method as described above, and then the bonding agent is applied to the third side surface by the same method.

When the application of the bonding agent is finished to the first to third sides of the respective objects P to be placed on the first loading section 4100a, the plurality of objects P are transferred into the first carry-out buffer 7100a . That is, the first take-out buffer horizontal moving section 7400a is operated through the first take-out horizontal drive section 7300a to move back the first take-out buffer 7100a toward the first loading section 4100a, The first loading section 4100a is moved forward toward the first take-out buffer 7100a in a state in which the seating member 4110 of the loading section 4100a faces the first take-out buffer 7100a, And inserts the portion 4100a into the first carry-out buffer 7100a. At this time, while the positions of the plurality of objects P placed on the first loading section 4100a are adjusted so as to be positioned above the support blocks 7111 of the first take-out buffer 7100a, 7100a. Thereafter, when the first carry-out buffer 7100a is lifted by using the take-up / dropping portion 7200a, the to-be-processed P which has been seated on the seat 4110 of the first loading portion 4100a, And is placed in the support block 7111 of the main body 7100a.

When a plurality of the objects P to be processed are loaded and supported in the first unloading buffer 7100a, the plurality of objects P are transferred to the unloading device 40 by using the first unloading unit 8000a . That is, the first carry-out conveying portion 8200a is operated to move the first carry-out supporting portion 8100a backward so as to be inserted into the first carry-out buffer 7100a. At this time, after the first carry-out supporting portion 8100a is inserted below any one of the plurality of the objects P, for example, the object P located at the uppermost side of the first carry-out buffer 7100a , The first carry-out buffer 7100a is lowered. The object P positioned at the uppermost position of the first take-out buffer 7100a is seated on the first take-out supporting portion 8100a and the first take-out supporting portion 8100a advances toward the take-out device 40. [ At this time, the first carry-out supporting portion 8100a moves in the direction of the carry-out device 40 along the extending direction of the first carry-out guide member 8210a of the first carry-out portion 8200a, 30a. ≪ / RTI > Thus, the bonding agent applied to the object P placed on the first carry-out supporting portion 8100a is moved toward the transporting device 40 while being cured by the light emitted from the first curing unit 30a, that is, UV .

The delivering device 40 receives the coated object P from the first and second take-out units 8000a and 8000b and takes it out to the outside.

The second fetching buffer module 3000b, the second fetching buffer unit 3000b, the second fetching buffer module 7000b and the second fetching unit 8000b are connected to the first fetching buffer module 3000b, Unit 4000a, the first carry-out buffer module 7000a, and the first carry-out unit 8000a. Each of the second fetching buffer module 3000b, the second fetching buffer unit 3000b, the second fetching buffer module 7000b and the second fetching unit 8000b includes a first fetching buffer module 3000b, The first carry-out buffer module 7000a, the first carry-out buffer module 7000a, and the first carry-out unit 8000a.

That is, while the first loading unit 4000a is operated to perform the coating process on the plurality of the objects P to be loaded on the first loading section 4100a, the second inlet of the second inlet buffer module 3000b A plurality of the objects P to be processed are loaded in the buffer 3100b. The bonding agent application process is completed for a plurality of the objects P to be placed on the first loading section 4100a to load the object P in the first delivery buffer 7100a, A plurality of the objects P to be loaded in the second drawing buffer 3100b are transferred to the transporting device 40 while the transporting object P of the first transporting buffer 7100a is transported to the transporting device 40 by the transporting unit 8000a Is loaded on the second loading portion 4100b of the second loading unit 4000b, and then the bonding agent applying process is performed.

As described above, in the present invention, the imaging head for supporting the imaging section so as to be movable upward and downward, and the application head for supporting the application section for moving up and down are separately formed, and each of the imaging head and the application head is horizontally moved by the application horizontal moving section . Therefore, by allowing the applying unit 5120 to move along the inclined path of each object P, the bonding agent can be applied to the central position of the side surface of each object P to be processed.

It is also possible to provide a plurality of gas injection portions 6110 composed of the first and second gas injection members 6111 and 6112 so as to form a plurality of gas- To form a curtain. Therefore, it is possible to prevent the bonding agent, which is separated from the other object P located on the upper side of the object P, from being attached to the upper surface of the object P located on the lower side, It is possible to prevent the bonding agent separated from the other object P located below the object P from being adhered to the lower surface of the object P located on the upper side.

10: input device 1100: alignment stage
1200: input module 1300: transmission unit
20: Coating device 2000: Inlet module
3000a, 3000b: Retrieval buffer module 3100a, 3100b: Retrieval buffer
4000a and 4000b: loading units 4100a and 4100b:
5000: dispensing module 5100: dispensing unit
5110: Application part 5120: Application head
5200: application control unit 5210: image pickup unit
5211: imaging section 5213: imaging head
5220: Coating movement control unit 5300: Coating horizontal movement unit
6000: Curtain gas module 6100: Gas injection unit
6110: Gas injecting part 7000a, 7000b: Export buffer module
7100a, 7100b: Export buffer 8000a, 8000b: Export unit
9000: Export module 90: Bad check unit

Claims (26)

Each of which is provided so as to correspond to a plurality of the objects to be processed and arranged so as to be spaced apart from each other in one direction so as to be positioned so as to correspond to each other between a coating surface of a workpiece and a coating surface of another workpiece, A gas injection unit having a plurality of gas injection units which form curtains made of gas in both directions intersecting the application surfaces of the respective objects to be processed;
/ RTI >
Wherein the gas injection unit includes a plurality of gas injection units extending in a direction arranged in one direction and connected to the plurality of gas injection units,
Wherein the gas injection unit is formed extending from the injection body in a direction in which a loading part for supporting the plurality of objects to be processed is located and a slit for spraying gas by discharging gas on one side in a direction in which the loading part is located. The method according to claim 1,
A first object to be processed is positioned on one side of each of the plurality of gas jetting portions, a second object to be processed is positioned on the other side,
Wherein the gas injection portion includes a first slit for injecting gas toward the first object to be processed and a second slit for injecting gas toward the second object to be processed. The method of claim 2,
Wherein each of the plurality of gas jetting portions comprises:
A first gas injection member that injects gas onto a surface crossing the application surface of the first object to be processed;
A second gas injection member located at one side of the first gas injection member and intersecting the application surface of the second target object and injecting a gas injecting gas onto a surface facing the first target object;
The curtain gas module comprising: The method of claim 3,
Wherein the first and second gas injection members are plate-
A first slit is provided on one side of the first gas injection member for injecting and discharging a gas, and a second slit is provided on one side of the second gas injection member for injecting and spraying gas. The method of claim 4,
One side of the first gas injection member provided with the first slit is shaped to be inclined in a direction in which the first target object is placed,
Wherein one side of the second gas injection member provided with the second slit is shaped to be inclined in a direction in which the second target object is placed. The method of claim 5,
Wherein one side surface of the first gas injection member provided with the first slit has a sloped shape having a curvature in a direction in which the first target object is located,
Wherein one side of the second gas injection member provided with the second slit is an inclined shape having a curvature in a direction in which the second object to be processed is located. The method of claim 6,
Wherein the first gas injection member has a larger volume than the first slit and is provided with a first channel for temporarily storing gas and supplying gas to the first slit, The first slit is communicated with a part of the area adjacent to the first object to be processed,
A second channel formed in the second gas injection member so as to have a larger volume than the second slit for temporarily storing gas and supplying gas to the second slit, And the first slit communicates with a part of the area adjacent to the second object to be processed. The method of claim 3,
In the lengths of the first gas injection member and the second gas injection member,
Wherein a length of the first gas injection member facing the object to be processed is longer than a length of the second gas injection member. The method according to any one of claims 3 to 8,
Wherein each of the plurality of objects to be processed is arranged in a horizontal direction and is vertically spaced apart,
Wherein each of the plurality of gas ejecting portions is disposed horizontally and is vertically spaced apart. The method of claim 9,
Wherein the first gas injection member injects gas to an upper surface of the first object to be processed and the second gas injection member injects gas to a lower surface of the second object to be processed. The method of claim 10,
Of the areas on one side of the first gas injection member provided with the first slit, the area below the first slit is inclined downward toward the upper surface of the workpiece,
An upper region of the one side surface of the second gas injection member provided with the second slit has an upwardly inclined shape toward a lower surface of another workpiece positioned above the upper side of the workpiece, In curtain gas module. The method of claim 11,
The lower region of the first slit is inclined downward toward the upper surface of the workpiece to be processed and is a curved surface having curvature, of the region on one side of the first gas injection member provided with the first slit,
An upper region of the second slit is inclined upward toward a lower surface of another workpiece located above the one object to be processed, the region being on one side of the second gas injection member provided with the second slit, A curtain gas module having a curved surface shape having a curvature. A loading section for holding a plurality of objects to be processed, the loading section being spaced apart in one direction and having a seating member on which the article to be processed is seated;
A coating module having a coating unit for applying a bonding agent to a coating surface of each of a plurality of objects to be processed supported by the loading unit;
Each of which is provided so as to correspond to a plurality of the objects to be processed and arranged so as to be spaced apart from each other in one direction so as to be positioned so as to correspond to each other between a coating surface of a workpiece and a coating surface of another workpiece, A curtain gas module including a gas injection unit provided with a plurality of gas injection units which form curtains made of gas in both directions intersecting the application surfaces of the respective objects to be processed;
/ RTI >
Wherein the curtain gas module includes a plurality of gas injection portions extending in one direction and connected to the plurality of gas injection portions,
Wherein the gas injection unit is formed extending from the injection body in a direction in which the loading unit is located and a slit is provided for discharging gas by discharging gas on one side in the direction in which the loading unit is located. delete 14. The method of claim 13,
Wherein the injection body is configured such that when the gas injection part is moved to be positioned between the object to be treated and the object to be processed in the application step, And 14. The method of claim 13,
A plurality of loading portions are arranged and arranged in one direction,
And a plurality of loading portions extending in a direction in which the plurality of loading portions are arranged and arranged to horizontally move the gas injection unit to each of the plurality of loading portions. 14. The method of claim 13,
And a loading section feeding means extending from the rear of the curtain gas module at least to the position of the applying section to allow the loading section to horizontally move back and forth from a rear position of the gas injection unit to at least a position of the position of the application section . 14. The method of claim 13,
A first object to be processed is positioned on one side of each of the plurality of gas jetting portions, a second object to be processed is positioned on the other side,
Wherein the gas injecting section includes a first slit for injecting gas toward the first object to be processed and a second slit for injecting gas toward the second object to be processed. 19. The method of claim 18,
Wherein each of the plurality of gas jetting portions comprises:
A first gas injection member that injects gas onto a surface crossing the application surface of the first object to be processed;
A second gas injection member located at one side of the first gas injection member and intersecting the application surface of the second target object and injecting a gas injecting gas onto a surface facing the first target object;
. The method of claim 19,
Wherein the first and second gas injection members are plate-
Wherein a first slit is provided on one side of the first gas injection member for injecting and discharging gas, and a second slit is provided on one side of the second gas injection member for injecting gas and injecting the gas. The method of claim 19,
One side of the first gas injection member provided with the first slit is shaped to be inclined in a direction in which the first target object is placed,
And one side surface of the second gas injection member provided with the second slit is shaped to be inclined in a direction in which the second target object is placed. 23. The method of claim 21,
Wherein one side surface of the first gas injection member provided with the first slit has a sloped shape having a curvature in a direction in which the first target object is located,
And one side surface of the second gas injection member provided with the second slit is a sloped shape having a curvature in a direction in which the second to-be-processed object is placed. The method of claim 19,
In the lengths of the first gas injection member and the second gas injection member,
The length of the first gas injection member facing the object to be processed is longer than the length of the second gas injection member. The method of any one of claims 18 to 23,
Wherein each of the plurality of objects to be processed is arranged in a horizontal direction and is vertically spaced apart,
Wherein each of the plurality of gas spraying portions is horizontally arranged and vertically spaced apart from each other. 23. The method of claim 21,
Wherein the first gas injection member injects gas to the upper surface of the first object to be processed and the second gas injection member injects gas to the lower surface of the second object to be processed. 26. The method of claim 25,
The lower region of the first slit is inclined downward toward the upper surface of the workpiece to be processed and is a curved surface having curvature, of the region on one side of the first gas injection member provided with the first slit,
An upper region of the second slit is inclined upward toward a lower surface of another workpiece located above the one object to be processed, the region being on one side of the second gas injection member provided with the second slit, A curved surface having a curvature.

Images