KR101445744B1 - Dispensing apparatus and method for dispensing using the same - Google Patents
Dispensing apparatus and method for dispensing using the same Download PDFInfo
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- KR101445744B1 KR101445744B1 KR1020140047591A KR20140047591A KR101445744B1 KR 101445744 B1 KR101445744 B1 KR 101445744B1 KR 1020140047591 A KR1020140047591 A KR 1020140047591A KR 20140047591 A KR20140047591 A KR 20140047591A KR 101445744 B1 KR101445744 B1 KR 101445744B1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
Abstract
Description
TECHNICAL FIELD The present invention relates to a coating apparatus and a coating method using the same, and more particularly, to a coating apparatus and a coating method using the same, in which a bonding agent is easily applied to a coating position of each of a plurality of articles to be processed.
As shown in FIG. 1, an organic light emitting diode generally includes a first substrate on one side of which an organic light emitting layer composed of upper and lower electrodes and an organic material layer, a transistor (TFT) and the like are stacked, a second substrate And a substrate S2. A bonding agent is applied between the upper surface of the first substrate S1 and the lower surface of the second substrate S2 so that the first substrate S1 and the second substrate S2 are bonded to each other.
On the other hand, the organic material layer constituting the organic light emitting diode is very vulnerable to moisture and oxygen, and when moisture and oxygen enter the organic light emitting diode, there arises a problem that the light emitting characteristic and the lifetime are reduced. In addition to the primary coating step of applying the bonding agent along the upper edge of the first substrate S1 and the lower edge of the second substrate S2, the first substrate S1 and the second substrate S2 ) Is further applied to the side surface of the base material to reinforce the bonding.
As described above, the coating apparatus further applying the bonding agent along the side surfaces of the first substrate S1 and the second substrate S2, which are primarily bonded together, An image pickup unit for picking up the object to be processed, an application unit for applying a bonding agent to the object to be processed while moving according to image data of the object to be processed picked up by the image pickup unit, And a horizontal moving unit connected to the head unit and horizontally moving the head unit in a coating advancing direction of the object to be processed.
On the other hand, in the general coating apparatus, the image pickup unit and the coating unit are connected to the same head portion and are connected together, as disclosed in Korean Patent No. 0987944. The image pickup unit and the coating unit are vertically spaced. At this time, for example, the application unit may be located on the lower side of the image pickup unit. Thus, the imaging unit and the coating unit are moved up and down together and horizontally by one head.
Hereinafter, with reference to FIG. 13, an application process in a case where the imaging unit and the coating unit are connected to one head unit will be described. At this time, in the actual arrangement state of the first to fourth objects to be processed in the vertical direction, the first to-be-processed object is inclined upward from the left to the right, the second to-be-processed object is parallel without being inclined, Is inclined downward from the left side to the right side, and the fourth article to be processed has an upwardly inclined arrangement state from the left side to the right side.
First, as shown in FIG. 13A, the first object to be processed located at the lowermost one of the plurality of objects to be processed is picked up. At this time, the imaging unit is located opposite to the side face of the first object to be coated, to which the bonding agent is to be applied, and horizontally moves according to a mechanical design value. Then, the image picked up by the image pick-up unit is analyzed to recognize or judge that the first object to be processed is inclined. Thereafter, the image pickup unit and the coating unit are raised by using the head portion so that the imaging unit comes to the position of the second object to be processed, and the coating unit comes to the position of the first object to be processed. Next, while the imaging unit and the coating unit are horizontally moved, the coating unit applies the bonding agent to the side surface of the first object to be processed, and the imaging unit picks up the second object to be processed. As a result of the image analysis of the first object to be processed, it is determined that the object to be processed is inclined, so that the application unit applies the bonding agent while horizontally moving so that the first object to be processed tilts upward from the inclined path, that is, from left to right. At this time, the image pick-up unit picks up the second object to be processed, and the image pick-up unit moves together with the coat unit by one head unit, so that the coating unit moves the first object to be processed along the inclined path And picks up the second object to be processed while moving to the path. That is, as shown in Fig. 13B, the image pick-up unit picks up the second object to be processed while moving so as to be inclined upward from the left side to the right side. However, the actual second target to be processed is not tilted to one side but is arranged in parallel, but as the imaging unit moves to be inclined upward, the second target to be processed is recognized as being arranged to be inclined. That is, in analyzing the arrangement state of the second to-be-processed object, an arrangement error and an arrangement state of the actual second to-be-processed object are generated.
Subsequently, the image pickup unit and the coating unit are raised by using the head portion so that the image pickup unit comes to the position of the third target object, and the coating unit comes to the position of the second target object. Next, while the imaging unit and the coating unit are horizontally moved, the coating unit applies the bonding agent to the side surface of the second object to be processed, and the imaging unit picks up the image of the third object to be processed.
It is determined that the second object to be processed has been tilted as a result of image analysis of the second object to be processed so that the coating unit moves to the value compensated for the tilted value of the second object to be processed recognized at the inclined value of the first object, The bonding agent is applied. In this case, as described above, since the second object to be processed is not actually tilted but is arranged in parallel or inclined, it is possible to reduce the difference between the arrangement state of the second object to be processed and the arrangement state, There is a difference from the target position for applying the bonding agent of the object to be processed.
While the application unit applies the bonding agent to the second object to be processed, the image pickup unit picks up the third object to be processed, and as shown in Fig. 13C, the application unit moves to apply the bonding agent to the second object to be processed The image of the third object to be processed is picked up while moving to the same path as the path. Therefore, in analyzing the arrangement state of the third to-be-processed object, an actual arrangement state of the third to-be-processed object and an error are generated.
Thereafter, the imaging unit and the coating unit are raised by using the head unit, so that the imaging unit comes to the position of the fourth object to be processed, and the coating unit comes to the position of the third object to be processed. Next, while the imaging unit and the coating unit are moved horizontally, the coating unit applies the bonding agent to the side surface of the third target object, and the imaging unit picks up the fourth target object. Here, the application unit
The bonding agent is applied to the third object to be processed while moving to a value compensated for the tilted value of the third object to be processed recognized at the inclined value of the second object to be processed. At this time, the target position for applying the bonding agent of the third target object by a value obtained by accumulating the error of the arrangement state of the second target object in the previous step to the value of the arrangement state having the error and the arrangement state of the actual third target object A difference occurs.
Therefore, when applying the bonding agent to the side surfaces of each of the plurality of the objects to be processed, it is impossible to apply the bonding agent to the center position in the vertical direction of the side surface of the article to be treated by the above- More specifically, the bonding agent is not applied to the gap between the first substrate and the second substrate, and bonding failure occurs.
Such a coating position error or deviation is further accumulated as the number of the objects to be processed increases, and the deviation becomes large. In addition, the thinner the thickness of the object to be processed, the greater the influence of the defective coating position of the bonding agent on the bonding failure, which leads to deterioration of the product quality and productivity.
The present invention provides a coating apparatus which can easily apply a bonding agent to each coating position of a plurality of objects to be processed, and a coating method using the same.
Further, the present invention provides a coating apparatus which can easily control the position of a coated portion to apply a bonding agent to each of a plurality of objects to be coated, and a coating method using the same.
The coating module according to the present invention is characterized in that the coating module is provided with an image pickup section for picking up and acquiring an image of a plurality of spaced-apart objects arranged in one direction and the image pickup section is supported on one side, An imaging unit including an imaging head for moving the object to be processed so as to correspond to each of the processed objects; A coating unit for coating the bonding agent on the coating surface of each of the plurality of target objects, the coating unit being disposed on one side of the coating unit, And the coated portion moves horizontally along the extending direction of the coated surface of each of the objects to be processed and moves along the tilted path of the processed object, An application unit having an application head for adjusting a position in a thickness direction so as to horizontally move along a center in the thickness direction of the water application surface; And an application horizontal moving unit connected to the application unit and the image pickup unit, respectively, for guiding the application unit and the image pickup unit so as to horizontally move each of the application unit and the image pickup unit in the extending direction of the object to be processed.
And a controller for analyzing an arrangement state of the object to be processed in cooperation with the imaging unit and the coating unit and using the image and the reference data captured and obtained by the imaging unit to determine an operation of the application head according to the arrangement state of the object to be processed To control the application agent to be applied to the center position in the coating thickness direction along the extending direction of the to-be-coated object by changing the position of the coating unit in accordance with the horizontal movement of the coating unit, .
Wherein the coating movement control unit compares and analyzes image coordinate values of the object to be processed obtained and captured by the image pickup unit by using the reference data which is a coordinate value of a reference line in cooperation with the image pickup unit, An image analyzer for expressing a degree of separation of an image of an object to be processed and calculating a positional change in a thickness direction of the object to be processed along an extending direction of the coated surface through spacing data; The position of the object to be processed in the thickness direction of the object to be processed in accordance with the movement of the coating unit in the extending direction of the object to be processed in the thickness direction of the object to be processed in accordance with the extending direction of the coated surface from the image analysis unit, And a movement control unit for controlling the movement.
Wherein the reference data is a position value of a reference line, and the reference line is a straight line on a path that is horizontally moved in parallel at a position of each of the plurality of objects to be processed.
Wherein the image analyzing unit includes: a display unit for displaying an image of the object to be captured obtained by the imaging unit and the reference line on a single screen; And a calculation unit for calculating a distance between a coordinate value of the reference line displayed on the display unit and a coordinate value of the image of the object to be processed, wherein the calculation unit calculates, on the object image displayed on the display unit, Wherein the calculating unit calculates a distance between one extension of the image of the object to be processed and a position in the extending direction of the reference line, In the thickness direction.
Wherein the one extension line extends on an outermost line extending in a direction corresponding to the reference line on the object image displayed on the display unit or in a direction corresponding to the reference line on the object image, Is a center line passing through the center of the thickness direction on the object image.
Wherein when the imaging unit picks up an object to be processed of any one of a plurality of objects to be processed, the application unit is configured such that the imaging unit captures an image of the object to be processed, Is installed.
Wherein each of the application head and the imaging head is extended in a direction in which a plurality of objects to be processed are arranged and is fastened to the application horizontal moving part so as to be spaced apart in the extending direction of the application horizontal moving part, A first upward and downward member that extends in a direction corresponding to a direction in which the plurality of objects to be processed are stacked and that guides the application unit so as to be slidable is provided on one surface of the imaging head on which the imaging unit is mounted And a second ascending / descending member extending in a direction corresponding to the direction in which the plurality of the objects to be processed are stacked and guiding the scraper so as to be slidable.
A main head which is extended in a direction in which a plurality of to-be-processed objects are arranged, and which is fastened to the applied horizontal moving portion, the imaging head being fastened to the main head, A main lifting member for guiding the imaging head so as to be slidable is provided and the application portion of the application unit is connected to the imaging head and moves together when the imaging head slides along the main lifting member.
Each of the application portion and the image pickup portion is provided with a plurality of spaced apart portions, and the plurality of application portions are spaced apart from each other in the direction in which the plurality of the objects to be processed are arranged.
Wherein each of the plurality of objects to be processed is arranged in a horizontal direction and a plurality of objects to be processed arranged in a horizontal direction are vertically spaced from each other and the imaging section picks up a plurality of objects to be processed stacked in the vertical direction Wherein the image pickup head is moved up and down so as to correspond to each of the plurality of objects to be processed which are stacked in the vertical direction, and wherein the application unit is located on either the upper side or the lower side of the image pickup unit, The object moves up and down in correspondence with each of the plurality of objects to be processed stacked in the vertical direction and moves along the inclined path of the object while horizontally moving along the extending direction of the coated surface of each object to be processed , The height is adjusted so as to horizontally move along the center of the vertical direction of the coated object surface.
The coating motion control unit controls the bonding agent to be applied to the center position in the vertical direction of the coating surface in accordance with the extending direction of the coating target surface by changing the height of the coating unit according to the horizontal movement of the coating unit.
Wherein the image analysis unit calculates a positional change of the object to be processed in the vertical direction along the extending direction of the coated surface in calculating the positional change in the thickness direction of the object to be processed along the extending direction of the coated surface, Controls the vertical movement of the coating unit according to the horizontal movement according to the calculated value.
The change in height along the extending direction of the to-be-coated object surface is calculated in calculating the positional change in the thickness direction along the extending direction of the to-be-processed object.
Wherein when the imaging section picks up an object to be processed out of a plurality of objects to be processed, the application section picks up an image of the object to be processed on the object to be processed on one layer or one layer below the object, And the application portion is spaced apart in the vertical direction.
The coating method according to the present invention includes the steps of disposing a plurality of objects to be coated with a bonding agent in a single direction and spaced apart from each other; Positioning an image pickup unit at an application start position of at least one object to be coated with the bonding agent to image the object to be processed to obtain an image of the object to be processed; Analyzing an arrangement state of the object to be processed using the acquired image of the object to be processed; Adjusting a position of the coated portion to a target position at which the object to be processed is analyzed; And applying a bonding agent while horizontally moving a coating part separately adjustable in position from the imaging part along the extending direction of the to-be-treated coated surface, wherein in the step of applying the bonding agent, And applying a bonding agent to the coated surface of the article to be treated while varying the position of the coating unit in the thickness direction of the coated surface in accordance with the horizontal movement of the coated article in the direction of extension of the coated surface of the article to be treated .
A step of moving the imaging unit to position the object to be imaged so as to face the object to be imaged in the process of acquiring the image of the object to be processed by imaging the object to be processed; And a step of imaging the coated object surface while horizontally moving the imaging unit at a position of the object to be imaged.
And comparing the coordinate value of the image of the object to be processed and the reference data, which is the coordinate value of the reference line, with the coordinate data of the image of the object to be processed and obtaining the thickness of the object to be processed along the extending direction of the coated surface And the baseline is a straight line on a path that is horizontally moved in parallel at the position of each of the plurality of target objects in the imaging section.
Displaying an image of the object to be processed imaged by the imaging unit and the reference line on a screen of the display unit; Calculating a distance between a coordinate value of the reference line displayed on the display unit and a coordinate value of the image of the object to be processed; And calculating a distance between a reference line and an extended line extending in a direction opposite to the reference line on the object image in the process of calculating a distance between coordinate values of the object to be processed, The position of the object to be processed in the thickness direction of the object to be processed due to the horizontal movement of the applying unit is adjusted during the application step of the bonding agent in accordance with the position change value in the thickness direction of the object to be processed along the extending direction of the application face.
Wherein when the imaging section picks up an object to be processed of any one of a plurality of objects to be processed, a coating section located on one side or the other side of the imaging section is placed on a side of the object to be processed Apply the bonding agent.
A process for separating and arranging a plurality of objects to be coated with a bonding agent in a single direction, comprising the steps of: stacking a plurality of objects to be processed arranged in a horizontal direction in a vertical direction; A step of adjusting the height of the coated portion to a position where the coated state of the object is dispensed starting from a position where the coated state is analyzed by raising or lowering the coated portion in a process of adjusting a position of the coated portion to a position where the coated object is dispensed, In the process of applying the bonding agent to the coated surface of the object to be treated while varying the position of the coating unit in the thickness direction of the coated surface in accordance with the horizontal movement of the coated object in the extending direction of the object, And a bonding agent is applied to the coated surface of the object to be treated while changing the height of the coating unit according to the horizontal movement of the application unit The.
And controls the height of the applying unit in accordance with the horizontal movement according to a positional change calculation value in the thickness direction of the object to be processed along the extending direction of the coated surface.
Wherein when the image pick-up section is located on the upper side of the applying section, imaging of the object to be processed and application of the bonding agent sequentially proceed from the lower side to the upper side sequentially in a plurality of the objects to be processed stacked in the vertical direction, When the object to be processed is placed on the lower side, imaging of the object to be processed and application of the bonding agent are sequentially progressed from the upper side to the lower side in a plurality of the objects to be processed stacked in the vertical direction.
The coating apparatus according to the present invention comprises a draw-in buffer module having a draw-in buffer for receiving a plurality of to-be-processed objects, An application module located at one side of the loading unit and applying a bonding agent to each of a plurality of objects to be processed supported by the loading unit; And a loading unit which is located at one side of the pull-in buffer and which receives the plurality of the processed objects from the pull-in buffer, and which loads and supports the target in a predetermined direction, and the loading unit includes: An image pickup section for picking up and acquiring images of a plurality of objects to be picked-up so as to be spaced apart from each other, and an image pick-up section for picking up an image of the plurality of objects to be processed An image pickup unit comprising: A coating unit which is disposed on one side of the imaging unit and on the other side of the imaging unit, the coating unit applying the bonding agent to the coating surface of each of the plurality of the target objects, and the coating unit supported on one side, And the coated portion moves horizontally along the direction of extension of the coated surface of each of the objects to be processed and moves along the tilted path of the object to be processed, And an application unit for adjusting the position in the thickness direction so as to horizontally move along the center of the coating unit.
And a carry-out buffer module which is disposed in front of the coating unit and which separates a plurality of objects to be processed, which have been subjected to the coating process, in one direction.
And a controller for analyzing an arrangement state of the object to be processed in cooperation with the imaging unit and the coating unit and using the image and the reference data captured and obtained by the imaging unit to determine an operation of the application head according to the arrangement state of the object to be processed To control the application agent to be applied to the center position in the coating thickness direction along the extending direction of the to-be-coated object by changing the position of the coating unit in accordance with the horizontal movement of the coating unit, .
Wherein the drawing buffer is capable of horizontal movement and up-and-down movement of the coating unit in the position direction and the opposite direction in which the coating unit is located. Wherein the coating movement control unit compares and analyzes image coordinate values of the object to be processed obtained and captured by the image pickup unit by using the reference data which is a coordinate value of a reference line in cooperation with the image pickup unit, An image analyzer for expressing a degree of separation of an image of an object to be processed and calculating a positional change in a thickness direction of the object to be processed along an extending direction of the coated surface through spacing data; The position of the object to be processed in the thickness direction of the object to be processed in accordance with the movement of the coating unit in the extending direction of the object to be processed in the thickness direction of the object to be processed in accordance with the extending direction of the coated surface from the image analysis unit, And a movement control unit for controlling the movement.
Wherein the image analyzing unit comprises: a display unit for displaying an image of the object to be captured obtained by the imaging unit and the reference line on a single screen; And a calculation unit for calculating a distance between a coordinate value of the reference line displayed on the display unit and a coordinate value of the image of the object to be processed, wherein the calculation unit calculates, on the object image displayed on the display unit, Wherein the calculating unit calculates a distance between one extension of the image of the object to be processed and a position in the extending direction of the reference line, In the thickness direction.
Each of the pull-in buffer, the loading unit, and the take-out buffer places the object to be processed in the horizontal direction, and supports the plurality of objects in a stacked manner in the vertical direction.
Each of the pull-in buffer and the pull-out buffer is provided so as to extend in the up-and-down direction so as to face each other and face each other, A pair of buffer members provided with a plurality of support blocks for horizontally supporting the processed object; A buffer member connection portion connected to connect the upper portions of the pair of buffer members; A buffer member horizontally moving unit connected to at least one of the pair of buffer members to horizontally move at least one of the pair of buffer members to horizontally move the pair of buffer members toward or away from each other; .
Wherein the imaging unit picks up and acquires a plurality of objects to be processed in a vertical direction and the imaging head moves up and down so that the imaging unit is positioned corresponding to each of the plurality of objects to be processed stacked in the vertical direction, Wherein the coating head is positioned at one of the upper and lower sides of the image pickup section and the coating section is moved up and down so as to correspond to each of the plurality of target articles stacked in the vertical direction, The height of the object to be processed moves horizontally along the inclined path so as to horizontally move along the vertical center of the object to be processed.
The coating motion control unit controls the bonding agent to be applied to the center position in the vertical direction of the coating surface in accordance with the extending direction of the coating target surface by changing the height of the coating unit according to the horizontal movement of the coating unit, Wherein the image analysis unit calculates a positional change of the object to be processed in the vertical direction along the extending direction of the coated surface in calculating the positional change in the thickness direction of the object to be processed along the extending direction of the coated surface, Controls a vertical movement of the coating unit in accordance with the horizontal movement of the coating unit according to the calculated value and calculates a change in height along the extending direction of the coating surface of the object to be processed in calculating the positional change in the thickness direction along the extending direction of the coated object surface .
Wherein when the imaging section picks up an object to be processed out of a plurality of objects to be processed, the application section picks up an image of the object to be processed on the object to be processed on one layer or one layer below the object, And the application portion is spaced apart in the vertical direction.
According to the embodiments of the present invention, an imaging head that supports the imaging section so as to be movable upward and downward, and an application head that supports the application section to move up and down are separately formed. The application unit is configured to move along the inclined path of the object to be processed by the application head to adjust the height so as to move horizontally along the center in the vertical direction of the object to be processed.
Therefore, the bonding agent can be applied along the extending direction of the surface to be treated, and can be applied to the center of the applied surface in the vertical direction. More specifically, in a to-be-processed object in which a pair of substrates are vertically bonded, the center position of the side faces of the bonded substrates becomes a gap between the pair of substrates. As described above, The joining agent can be applied to the center of the pair of substrates, that is, the gap, by allowing the application portion to move along the inclined path of the object to be processed. Therefore, it is possible to prevent the occurrence of bonding defects due to the problem that the bonding agent is not applied to the gap between the pair of substrates.
BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a view for explaining a process for applying and bonding a bonding agent to a material to be processed according to an embodiment of the present invention;
2 is a block diagram of a coating facility according to an embodiment of the present invention.
3 is a perspective view of a coating device according to an embodiment of the present invention.
FIG. 4 is a perspective view showing a stereoscopic view showing an infeed module, a loading unit, a draw-in buffer module, a curtain gas module, a dispensing module, a carry-out buffer module,
5 is a view illustrating a loading unit according to an embodiment of the present invention.
6 is a view for explaining a coating unit according to the first embodiment of the present invention;
FIG. 7 is a view showing a baseline drawn on the display unit of the image analysis unit according to the embodiment of the present invention and a photograph
8 is a view for explaining the operation of the application control unit and the application unit according to the embodiment of the present invention
FIG. 9A is a view showing a coating unit according to a second embodiment of the present invention, and FIG. 9B is a view showing a coating unit according to a modification of the second embodiment
10 is a view showing the state of the loading section, the gas injection unit, the coating unit, and the image pick-up unit at the time of applying the bonding agent in the coating apparatus according to the embodiment of the present invention
11 is a perspective view of a gas injection unit according to an embodiment of the present invention.
12 is a diagram showing an export buffer module and an export unit according to an embodiment of the present invention;
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. It should be understood, however, that the invention is not limited to the disclosed embodiments, but is capable of other various forms of implementation, and that these embodiments are provided so that this disclosure will be thorough and complete, It is provided to let you know completely.
BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view for explaining a process of applying a joining agent to a material to be treated and bonding the material to be processed according to an embodiment of the present invention. Fig. 2 is a block diagram of a coating facility according to an embodiment of the present invention. 3 is a perspective view showing a coating apparatus according to an embodiment of the present invention. FIG. 4 is a perspective view showing the inlet module, the inlet buffer module, the curtain gas module, the dispensing module, and the dispensing module according to the embodiment of the present invention, respectively. 5 is a view illustrating a loading unit according to an embodiment of the present invention. 6 is a view for explaining a coating unit according to an embodiment of the present invention. 7 is a photograph showing an image of a base line and an object to be processed in a display unit of an image analysis unit according to an embodiment of the present invention. 8 is a view for explaining the operation of the application control unit and the application unit according to the embodiment of the present invention. 10 is a view showing states of a loading section, a gas injection unit, a coating unit, and an image pickup unit at the time of applying a bonding agent in the coating apparatus according to the embodiment of the present invention. 11 is a perspective view showing a gas injection unit according to an embodiment of the present invention. 12 is a diagram illustrating an export buffer module and an export unit according to an embodiment of the present invention.
In the embodiment of the present invention, the object P to which the coating process is performed may be, for example, a display panel in which a pair of glass substrates are mutually bonded and emit light. 1, a target substrate P according to the present invention includes a first substrate S1 on which a thin film transistor (TFT) and an organic light emitting layer are formed on one surface of the active matrix organic light emitting diode, , And a second substrate (S1) covering the first substrate (S1). The bonding agent D1 is applied and bonded to the edge of one surface of the first substrate S1 and the edge of the second substrate S1 on the surface facing the first substrate S1, The material D1 may be, for example, a frit.
The coating facility according to the present invention is a facility for applying a coating agent (D2) to a side surface of a material to be treated. Hereinafter, a bonding agent (D2) will be described as an example of a coating agent. Of course, the coating agent applied to the object to be treated is not limited to the bonding agent, and various materials to be coated can be applied.
The coating apparatus according to the present invention applies a bonding agent to a side surface of a panel made of a first substrate S1 and a second substrate S2 which are primarily bonded. At this time, the application equipment is caused to apply the bonding agent (D2) to the center position in the vertical direction on the side surface of the article to be treated. 1A, at the side of the first substrate S1 and the second substrate S2, the position of a junction or a gap between the first substrate S1 and the second substrate S2 The bonding agent D2 is applied. The first and second substrates S1 and S2 are first bonded by a bonding agent D1 applied along the edge of one surface of the first substrate S1 and the edge of one surface of the second substrate S2 facing each other, S2) side is further coated with the bonding agent (D2), the bonding is reinforced. At this time, the bonding agent D2 applied to the side surfaces of the first and second substrates S1 and S2 penetrates into the gap between the first substrate S1 and the second substrate S2 by osmotic pressure (FIG. 1B) When the bonding agent S2 is cured, the bonding between the first substrate S1 and the second substrate S2 is strengthened. Therefore, penetration of water and oxygen into the organic light emitting diode can be more effectively blocked.
As shown in FIG. 2, the coating apparatus according to the present invention includes a
The dispensing
Of course, the dispensing
Hereinafter, a coating apparatus according to an embodiment of the present invention will be described with reference to FIGS. 3 to 12. FIG. At this time, a panel to which the first substrate S1 and the second substrate S2, which are the objects to be coated, are bonded to each other is referred to as an "object to be processed S". The direction in which the objects P are successively transferred for the application process is referred to as the Y axis direction, the direction intersecting or orthogonal to the Y axis direction as the X axis direction, and the up and down direction as the Z axis direction. The direction in which the article P is conveyed at a position in a Y-axis direction is defined as forward and the opposite direction is defined as the rear.
The
The coating apparatus 20 includes a plurality of draw-in buffers 3100a and 3100b which are horizontally and vertically movable with a plurality of workpieces P stacked in the vertical direction, The first and second drawing buffer modules 3000a and 3000b and the object P delivered from the feeding device 10 are supported and the drawing buffer 3100a of each of the first and second drawing buffer modules 3000a and 3000b The transfer module 2000 receives the object P from the first transfer buffer module 3000a and transfers the object P to the transfer chamber P in a direction in which the coating unit 5100, A plurality of objects P are received and supported from the first loading unit 4000a and the second loading buffer module 3000b having one loading unit 4100a to form a horizontal A second loading unit 4000 having a second loading portion 4100b capable of moving and rotating, An application module 5000 installed in front of the per module modules 3000a and 3000b for performing an application process on the object P transferred by the first and second loading units 4000a and 4000b, And the second loading buffer module 3000a and 3000b and the coating module 5000 so that a gas is curtained by spraying gas to at least an upper side of a plurality of objects P to be coated, A curtain gas module 6000 for preventing adhering substances or impurities from adhering to at least the upper portion of the article P to be processed by the first loading From the first take-out buffer module 7000a, 7000b and the second loading unit 4000b which receive a plurality of objects P to which the coating process has been completed from the unit 4000a and load them in the vertical direction, A second take-out buffer module for receiving a plurality of to-be-processed objects P and stacking them in the vertical direction 7000b.
The lead-in
Here, each of the first and second forward / backward moving
The first and second receiving supports 2100 and 2200 can be inserted into the receiving
Of course, the pull-in
3 and 4, the
3 and 4, each of the first and second
The input buffers 3100a and 3100b are arranged to face each other in the X-axis direction, and a pair of
Each of the pair of
The buffer member horizontal moving
Some of the incoming buffer ascending and descending
The input buffer
The input buffer
According to the draw-in
Of course, the draw-in
The
Each of the first and
More specifically, the
The
Each of the first and second loading portions 4100a and 4100b may include a
The first and second rotary tables 4200a and 4200b may be connected to the lower portion of the
In order to place a plurality of objects P on the first and second loading portions 4100a and 4100b, first and second loading portions 4100a and 4100b are respectively inserted into the first and
The operations of the first and second loading sections 4100a and 4100b are preferably carried out alternately. For example, the first loading section 4100a moves backward toward the
Of course, the draw-in
The
Referring to FIG. 6, The
The
The
The
The
The application control unit 5200 controls the
The
The
The
The imaging
This is because a plurality of objects P are stacked on a plurality of
In the embodiment, a plurality of objects P are stacked in the loading sections 4100a and 4100b in the vertical direction. For example, when the first to tenth objects P to be processed are placed on each of the first to
The application horizontal moving
The coating
The
The reference line indicates that the
When the
The calculating
To this end, a distance between a straight line (hereinafter referred to as an extension line) extending in the direction in which the application continues in the imaging image on the coordinate and a reference line is calculated at a plurality of points. At this time, an extension line on the captured image to be used for calculating the separation distance from the reference line may be a line passing through the center of the acquired image, or a center line, either outermost line on both sides (i.e., a boundary line) of the captured image. The center line is a line located at the center of both outermost lines on both sides, detecting both outermost lines on both sides of the captured image.
For example, when a plurality of objects P are horizontally arranged so as to be spaced apart from each other in the Z-axis direction and each of the objects P to be placed in the X-axis direction, as shown in Fig. 8, The separation distance between the extending line in the X-axis direction, which is the coating advancing direction, and the reference line extending in the X-axis direction, on the image. At this time, a change in the separation distance in the Z-axis direction according to the extension line of the object to be processed and the X-axis position of the reference line is calculated. As a result of the calculation, when the distance in the Z-axis direction between the extension line of the object P and the reference line in the Z-axis direction increases or decreases in either direction, it is determined that the object is inclined do.
The
The operation of the
First, the
Thus, while the
Subsequently, similarly, while the
While the
Thereafter, although not separately shown, the image picked up by the
The data measured or calculated by the
The
That is, conventionally, the imaging unit and the coating unit are connected to one head, so that the imaging unit and the coating unit always move simultaneously in the vertical direction. Therefore, the position of the application portion can not be controlled according to the degree of inclination of each object to be processed. Further, when the side of the object to be processed is imaged, the imaging section is moved along the inclined path of the previous object. Therefore, even if the object to be imaged currently is not tilted, it is recognized as inclined, Even if the degree of difference is different, it is tilted equally. Therefore, the bonding agent can not be applied to the center position of the article to be treated, and the more the continuous application of the article to be processed is carried out, the more the deviation is accumulated and the defective occurrence rate increases.
However, in the present invention, as described above, the
The
That is, as shown in FIG. 9A, the application module according to the second embodiment includes a
The
That is, the
Each of the plurality of imaging units according to the second embodiment includes
The image pickup heads 5613a and 5613b are mounted on the one surface with
Each of the plurality of
The
The application heads 5520a and 5520b according to the second embodiment are mounted on the imaging heads 5613a and 5613b and are connected to the
In the application module according to the second embodiment, the application position control of the application unit using the application movement control unit is the same as that in the first embodiment, and a detailed description of the operation will be omitted.
The
However, the present invention is not limited to this, and each of the plurality of objects P may be supported vertically erected, and the application module 500 may apply a bonding agent to the application surfaces of a plurality of vertically erected objects to be processed.
The
That is, the
The
The
The
As shown in Figs. 10 and 11, each of the
The
As shown in FIG. 11, each of the plurality of
The first
Here, the
The first
One side surface of the first
When one side of the first
The second
In the second
Here, the
The second
One side of the second
On the other hand, when one side of the second
The first
A plurality of
In the above description, the
The injection unit
In the above description, a plurality of
A plurality of take-out
Each of the first and second
The carry-out
Each of the pair of buffer members 7110 extends in the vertical direction, and each of the inner side surfaces of the buffer member 7110 facing each other is provided with the
The buffer member horizontal moving
Some of the carry-out buffer ascending / descending
The unloading buffer
The unloading buffer horizontal moving
According to the
The carry-out
The
The first carry-out conveying
Each of the pair of first take-out
The
The second carry-out conveying
Each of the pair of second take-out
The first and second carry-out
Of course, the take-out
Each of the first and
The first and
Hereinafter, the operation of the
A plurality of objects P to be processed provided from the charging
To this end, the first pull-in
As described above, the to-be-processed object P is placed on the first draw-in
As described above, in the present invention, the operations of the first and second draw-in
When a plurality of objects P are loaded on the
On the other hand, in the present invention, in the quadrangular-shaped article P having four sides (i.e., the first to fourth sides), the bonding agent is applied to the first to third sides, Do not apply the agent. Therefore, when a plurality of the objects P to be processed are loaded in the first drawing buffer 4100a, the fourth side of each article P is directed to the direction in which the first loading portion 4100a is located. When the first loading portion 4100a is inserted into the
Next, the first loading portion transporting means 4300a is operated to advance the first loading portion 4100a so that the first loading portion 4100a is positioned between the
The bonding agent is applied to one side (hereinafter, referred to as a first side) of each of the plurality of the processed products P stacked on the first loading portion 4100a through the
That is, the
Thus, while the
Thereafter, by the same method as the above-described method, the arrangement states of the third to seventh objects are analyzed to control the movement of the application unit, and the bonding agent is applied to the first sides of the third to tenth objects to be processed. That is, when the
As described above, in the present invention, the
While the bonding agent is applied to each of the first to tenth objects P to be processed in the above-described manner, each of the plurality of
More specifically, when air is supplied to the
As described above, in the present invention, a plurality of
When all of the bonding agents are applied to the first side of each of the plurality of articles P placed on the first loading section 4100a, the first loading section 4100a is rotated through the first rotating table 4200a, So that the second side faces of the plurality of objects P face the application unit 5200. After the
When the application of the bonding agent is finished to the first to third sides of the respective objects P to be placed on the first loading section 4100a, the plurality of objects P are transferred into the first carry-out
When a plurality of the objects P to be processed are loaded and supported in the
The delivering
The second
That is, while the
As described above, in the present invention, the imaging head for supporting the imaging section so as to be movable upward and downward, and the application head for supporting the application section for moving up and down are separately formed, and each of the imaging head and the application head is horizontally moved by the application horizontal moving section . Therefore, by allowing the applying
10: input device 1100: alignment stage
1200: input module 1300: transmission unit
20: Coating device 2000: Inlet module
3000a, 3000b:
4000a and 4000b: loading units 4100a and 4100b:
5000: dispensing module 5100: dispensing unit
5110: Application part 5120: Application head
5200: application control unit 5210: image pickup unit
5211: imaging section 5213: imaging head
5220: Coating movement control unit 5300: Coating horizontal movement unit
6000: Curtain gas module 6100: Gas injection unit
6110:
7100a, 7100b:
9000: Export module 90: Bad check unit
Claims (33)
A coating unit for coating the bonding agent on the coating surface of each of the plurality of target objects, the coating unit being disposed on one side of the coating unit, And the coated portion moves horizontally along the extending direction of the coated surface of each of the objects to be processed and moves along the tilted path of the processed object, An application unit having an application head for adjusting a position in a thickness direction so as to horizontally move along a center in the thickness direction of the water application surface;
A coating horizontal moving unit connected to the coating unit and the image pick-up unit, respectively, for guiding the coating unit and the image pick-up unit so as to horizontally move each of the coating units and the image pick-
And a controller for analyzing an arrangement state of the object to be processed in cooperation with the imaging unit and the coating unit and using the image and the reference data captured and obtained by the imaging unit to determine an operation of the application head according to the arrangement state of the object to be processed To control the application agent to be applied to the center position in the coating thickness direction along the extending direction of the to-be-coated object by changing the position of the coating unit in accordance with the horizontal movement of the coating unit, ;
Containing application module.
Wherein the coating movement control unit comprises:
And an image processing unit which is interlocked with the image pickup unit and compares and analyzes image coordinate values of the object to be picked up and obtained by the image pickup unit using reference data which is a coordinate value of a reference line, An image analyzing unit for calculating a change in position in the thickness direction of the object to be processed along the extending direction of the coated surface through the separation data;
The position of the object to be processed in the thickness direction of the object to be processed in accordance with the movement of the coating unit in the extending direction of the object to be processed in the thickness direction of the object to be processed along the extending direction of the coated surface from the image analysis unit, A movement controller for controlling movement;
≪ / RTI >
The reference data is a position value of a reference line,
Wherein the reference line is a straight line on a path that is horizontally moved in parallel at a position of each of the plurality of target objects.
The image analysis unit
A display unit for displaying an image of the object to be captured obtained by the imaging unit and the reference line on a single screen;
A calculating unit for calculating a distance between a coordinate value of the reference line displayed on the display unit and a coordinate value of the image of the object to be processed;
Lt; / RTI >
Wherein the calculation unit calculates a separation distance between an extension line extending in a direction opposite to the reference line and the reference line on the object image displayed on the display unit,
Wherein the calculating section calculates the positional change in the thickness direction along the extension direction of the coated object surface by calculating a distance between one extension of the image of the object to be processed and a position in the extending direction of the reference line.
The one extension line on the image of the object to be processed displayed on the display unit
An outermost line extending in a direction corresponding to the reference line on the object to be processed or a center line extending in a direction corresponding to the reference line on the object to be processed and passing through the center of the thickness direction on the object to be processed module.
Wherein when the imaging unit picks up an object to be processed of any one of a plurality of objects to be processed, the application unit is configured such that the imaging unit captures an image of the object to be processed, Installed application module.
Wherein each of the application head and the imaging head is extended in a direction in which a plurality of objects to be processed are arranged and fastened to the application horizontal moving part so as to be spaced apart in the extending direction of the application horizontal moving part,
A first lifting member is provided on one surface of the application head on which the application portion is mounted and extends in a direction corresponding to a direction in which the plurality of objects are stacked so as to guide the application portion to be slidable,
And a second rising and descending member extending in a direction corresponding to a direction in which the plurality of to-be-processed objects are stacked and guiding the image pickup section so as to be slidable, on one surface of the image pickup head on which the image pickup section is mounted, .
A main head extending in a direction in which a plurality of objects to be processed are arranged and fastened to the coated horizontal moving portion,
Wherein the imaging head is fastened to the main head,
A main lifting member for guiding the imaging head so as to be slidable is provided on one surface of the main head to which the imaging head is fastened,
Wherein an application portion of the application unit is connected to the imaging head and moves together when the imaging head slides along the main lifting member.
Wherein each of the application portion and the image pickup portion is provided with a plurality of spaced-
Wherein the plurality of application portions are spaced apart in a direction in which the plurality of the objects to be processed are arranged and arranged.
Each of the plurality of objects to be processed is arranged in a horizontal direction, a plurality of objects to be processed arranged in a horizontal direction are vertically stacked,
Wherein the image pickup unit picks up and acquires a plurality of objects to be processed stacked in the vertical direction and the image pickup head is moved up and down so that the image pickup unit is positioned corresponding to each of the plurality of objects to be processed stacked in the vertical direction,
Wherein the application unit is located on either the upper side or the lower side of the image pickup unit,
Wherein the application head moves up and down in such a manner that the application unit is positioned corresponding to each of the plurality of objects to be processed stacked in the vertical direction and while the application unit horizontally moves along the extending direction of the coated surface of each object to be processed, And adjusts the height to move horizontally along the center of the object to be processed in the vertical direction.
The coating motion control unit controls the application of the bonding agent to the center position in the vertical direction of the coated surface in accordance with the extending direction of the coated object surface by changing the height of the coated unit in accordance with the horizontal movement of the coated unit module.
Wherein the image analyzing unit calculates a positional change in the thickness direction of the object to be processed along the extending direction of the coated surface by calculating a change in position of the object to be processed in the vertical direction along the extending direction of the coated surface,
And the movement control unit controls up-and-down movement according to the horizontal movement of the coating unit according to the calculated value.
Wherein the change in height along the extending direction of the surface to be treated is calculated in calculating the positional change in the thickness direction along the extending direction of the object to be processed.
Wherein when the imaging section picks up an object to be processed out of a plurality of objects to be processed, the application section picks up an image of the object to be processed on the object to be processed on one layer or one layer below the object, And a coating unit which is vertically spaced apart.
Positioning an image pickup unit at an application start position of at least one object to be coated with the bonding agent to image the object to be processed to obtain an image of the object to be processed;
Analyzing an arrangement state of the object to be processed using the acquired image of the object to be processed;
Adjusting a position of the coated portion to a target position at which the object to be processed is analyzed;
Applying a bonding agent while horizontally moving an application portion capable of adjusting a position separately from the imaging portion along an extending direction of the object to be processed;
/ RTI >
In the process of capturing the object to be processed and acquiring an image of the object to be processed,
Moving the imaging unit to face the object to be imaged;
Capturing an image of the object to be processed with the object moving horizontally at a position of the object to be imaged;
/ RTI >
In the process of applying the bonding agent,
The bonding agent is applied to the coated surface of the article to be treated while changing the position in the thickness direction of the coated surface in accordance with the result of the analysis of the arrangement state of the article to be processed so that the applying section is horizontally moved in the extending direction of the to- Process;
≪ / RTI >
In the process of analyzing the arrangement state of the object to be processed,
And comparing the coordinate value of the image of the object to be processed and the reference data that is the coordinate value of the reference line with the coordinate value of the image of the object to be processed to calculate a positional change in the thickness direction of the object to be processed along the extending direction of the coated surface,
Wherein the reference line is a straight line on a path that is horizontally moved in parallel at a position of each of the plurality of target objects.
Displaying an image of the object to be processed imaged by the imaging unit and the reference line on a screen of the display unit;
Calculating a distance between a coordinate value of the reference line displayed on the display unit and a coordinate value of the image of the object to be processed;
Calculating a distance between coordinate values of the image of the object to be processed,
Calculating a separation distance between an extended line extending in a direction opposite to the reference line on the object image and the reference line;
/ RTI >
Wherein the position of the article to be processed in the thickness direction of the article to be processed is adjusted in accordance with a horizontal positional change of the article to be processed during the application step of the bonding agent according to the positional change calculation value of the article in the thickness direction along the extending direction of the coated surface.
Wherein when the imaging section picks up an object to be processed of any one of a plurality of objects to be processed, a coating section located on one side or the other side of the imaging section is placed on a side of the object to be processed A method of applying a bonding agent.
A process for aligning a plurality of objects to be coated with a bonding agent in a single direction so as to be spaced apart from each other, the plurality of objects to be processed arranged in the horizontal direction are stacked in the vertical direction,
The height of the coated portion may be adjusted to a position where the coated state of the coated object is to be analyzed by moving the coated portion upward or downward in the process of adjusting the position of the coated portion to the coated object starting position, ,
The bonding agent is applied to the coated surface of the article to be treated while changing the position in the thickness direction of the coated surface in accordance with the result of the analysis of the arrangement state of the article to be processed so that the applying section is horizontally moved in the extending direction of the to- Wherein the bonding agent is applied to the coated surface of the object to be treated while changing the height of the coated portion in accordance with the horizontal movement of the coated portion.
And controlling the height of the applying unit in accordance with a horizontal movement according to a positional change calculation value in the thickness direction of the object to be processed along the extending direction of the coated surface.
Wherein when the image pickup section is located on the upper side of the applying section, imaging of the object to be processed and application of the bonding agent sequentially proceed from the lower side to the upper side in a plurality of the objects to be processed stacked in the vertical direction,
Wherein the imaging of the article to be treated and the application of the bonding agent are progressed sequentially from the upper side to the lower side in the plurality of the objects to be processed stacked in the vertical direction when the imaging section is located below the application section.
A loading unit which is located at one side of the pull-in buffer and receives the plurality of the processed objects from the pull-in buffer,
An application module located at one side of the loading unit and applying a bonding agent to each of a plurality of objects to be processed supported by the loading unit;
/ RTI >
The coating module includes:
An image pickup apparatus comprising: an image pickup section for picking up and acquiring images of a plurality of spaced-apart objects to be processed arranged in one direction; and an image pickup section for picking up an image of the plurality of to-be- An imaging unit having an imaging head for moving the imaging unit;
A coating unit which is disposed on one side of the imaging unit and on the other side of the imaging unit, the coating unit applying the bonding agent to the coating surface of each of the plurality of the target objects, and the coating unit supported on one side, And the coated portion moves horizontally along the direction of extension of the coated surface of each of the objects to be processed and moves along the tilted path of the object to be processed, A coating unit for adjusting a position in a thickness direction so as to horizontally move along a center of the coating unit;
/ RTI >
And a controller for analyzing an arrangement state of the object to be processed in cooperation with the imaging unit and the coating unit and using the image and the reference data captured and obtained by the imaging unit to determine an operation of the application head according to the arrangement state of the object to be processed To control the application agent to be applied to the center position in the coating thickness direction along the extending direction of the to-be-coated object by changing the position of the coating unit in accordance with the horizontal movement of the coating unit, ;
.
And a carry-out buffer module which is disposed in front of the coating unit and which holds a plurality of objects to be coated, which have been subjected to the coating process, in a single direction.
Wherein the drawing buffer is capable of horizontal movement and upward and downward movement of the coating unit in the position direction and the opposite direction in which the coating unit is located,
Wherein the coating movement control unit comprises:
And an image processing unit which is interlocked with the image pickup unit and compares and analyzes image coordinate values of the object to be picked up and obtained by the image pickup unit using reference data which is a coordinate value of a reference line, An image analyzing unit for calculating a change in position in the thickness direction of the object to be processed along the extending direction of the coated surface through the separation data;
The position of the object to be processed in the thickness direction of the object to be processed in accordance with the movement of the coating unit in the extending direction of the object to be processed in the thickness direction of the object to be processed along the extending direction of the coated surface from the image analysis unit, A movement controller for controlling movement;
.
The image analysis unit
A display unit for displaying an image of the object to be captured obtained by the imaging unit and the reference line on a single screen;
A calculating unit for calculating a distance between a coordinate value of the reference line displayed on the display unit and a coordinate value of the image of the object to be processed;
Lt; / RTI >
Wherein the calculation unit calculates a separation distance between an extension line extending in a direction opposite to the reference line and the reference line on the object image displayed on the display unit,
Wherein the calculating unit calculates the positional change in the thickness direction along the extending direction of the coated object surface by calculating a distance between one extension of the image of the object to be processed and a position in the extending direction of the reference line.
Wherein each of the pull-in buffer, the loading unit, and the take-out buffer places the to-be-processed object in a horizontal direction so as to support the plurality of to-be-processed objects in a vertical direction.
Each of the pull-in buffer and the pull-
Each of which extends in the vertical direction and is arranged to face each other and face each other and is spaced apart in the vertical direction on each of the mutually facing inner sides so as to support the edge of the object to be processed, A pair of buffer members provided with a support block;
A buffer member connection portion connected to connect the upper portions of the pair of buffer members;
A buffer member horizontally moving unit connected to at least one of the pair of buffer members to horizontally move at least one of the pair of buffer members to horizontally move the pair of buffer members toward or away from each other;
.
Wherein the image pickup unit picks up and acquires a plurality of objects to be processed stacked in the vertical direction and the image pickup head is moved up and down so that the image pickup unit is positioned corresponding to each of the plurality of objects to be processed stacked in the vertical direction,
Wherein the application unit is located on either the upper side or the lower side of the image pickup unit,
Wherein the application head moves up and down in such a manner that the application unit is positioned corresponding to each of the plurality of objects to be processed stacked in the vertical direction and while the application unit horizontally moves along the extending direction of the coated surface of each object to be processed, And adjusts the height so as to move horizontally along the center of the object to be processed in the vertical direction.
The coating motion control unit controls the bonding agent to be applied to the center position in the vertical direction of the coating surface in accordance with the extending direction of the coating target surface by changing the height of the coating unit according to the horizontal movement of the coating unit,
Wherein the image analyzing unit calculates a positional change in the thickness direction of the object to be processed along the extending direction of the coated surface by calculating a change in position of the object to be processed in the vertical direction along the extending direction of the coated surface,
The movement control unit controls the vertical movement of the coating unit according to the horizontal movement according to the calculated value,
Wherein the change in height along the extending direction of the surface to be treated is calculated in calculating the change in position in the thickness direction along the extending direction of the surface to be treated.
Wherein when the imaging section picks up an object to be processed out of a plurality of objects to be processed, the application section picks up an image of the object to be processed on the object to be processed on one layer or one layer below the object, And a coating unit spaced apart in the vertical direction.
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KR1020140047591A KR101445744B1 (en) | 2014-04-21 | 2014-04-21 | Dispensing apparatus and method for dispensing using the same |
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KR100521607B1 (en) | 2003-10-21 | 2005-10-12 | 시바우라 메카트로닉스 가부시키가이샤 | Paste application apparatus |
KR20060130134A (en) * | 2003-12-23 | 2006-12-18 | 크비스, 게엠베하 | Method for automatically applying and controlling a structure applicable on a substrate and device for carrying out said method |
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