KR101445746B1 - Dispensing equipment and method for dispensing using the same - Google Patents

Dispensing equipment and method for dispensing using the same Download PDF

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Publication number
KR101445746B1
KR101445746B1 KR1020140047595A KR20140047595A KR101445746B1 KR 101445746 B1 KR101445746 B1 KR 101445746B1 KR 1020140047595 A KR1020140047595 A KR 1020140047595A KR 20140047595 A KR20140047595 A KR 20140047595A KR 101445746 B1 KR101445746 B1 KR 101445746B1
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South Korea
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unit
processed
buffer
loading
coating
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KR1020140047595A
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Korean (ko)
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최항병
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주식회사 디앤씨
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/6715Apparatus for applying a liquid, a resin, an ink or the like
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67253Process monitoring, e.g. flow or thickness monitoring
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)

Abstract

An object of the present invention is to provide a coating apparatus for applying a bonding agent to a side surface of each of a plurality of objects to be processed which are arranged horizontally and which are vertically spaced apart from each other, And a plurality of objects to be processed arranged in the horizontal direction are placed in the vertical direction so as to be spaced apart from each other in the vertical direction And a coating unit which is disposed on one side of the loading unit and which applies a bonding agent to the side surfaces of the plurality of target objects which are moved in the horizontal direction and in the vertical direction and spaced apart in the vertical direction A plurality of objects to be processed, which are located on one side of the application device and are supported by the loading unit and have been subjected to the application process, And a carry-out device for carrying out the transfer to the outside.

Figure R1020140047595

Description

Dispensing equipment and method for dispensing using same

More particularly, the present invention relates to an application equipment for applying a bonding agent to the side surfaces of a plurality of objects to be processed, each of which is disposed in a horizontal direction and which is stacked in a vertical direction, and a coating method using the same .

As shown in FIG. 1, an organic light emitting diode generally includes a first substrate on one side of which an organic light emitting layer composed of upper and lower electrodes and an organic material layer, a transistor (TFT) and the like are stacked, a second substrate And a substrate S2. A bonding agent is applied between the upper surface of the first substrate S1 and the lower surface of the second substrate S2 so that the first substrate S1 and the second substrate S2 are bonded to each other.

On the other hand, the organic material layer constituting the organic light emitting diode is very vulnerable to moisture and oxygen, and when moisture and oxygen enter the organic light emitting diode, there arises a problem that the light emitting characteristic and the lifetime are reduced. In addition to the primary coating step of applying the bonding agent along the upper edge of the first substrate S1 and the lower edge of the second substrate S2, the first substrate S1 and the second substrate S2 ) Is further applied to the side surface of the base material to reinforce the bonding.

As described above, the application equipment for applying the bonding agent along the side surfaces of the first substrate S1 and the second substrate S2, which are primarily bonded together, And the application equipment for applying the bonding agent to the panel is used. However, when the panel is vertically conveyed, it is difficult to transfer the panel stably due to the weight of the panel as the size of the panel increases, which causes an accident in the process.

In addition, in the case of other application facilities, there is a single-leaf type in which the application is performed while transferring the panels one by one. Such a coating facility has a disadvantage of increasing the tact time for the application process and lowering the process yield.

Korea registered patent 0987944

The present invention provides a coating apparatus and a coating method using the coating apparatus, which can easily apply a bonding agent to a plurality of objects to be processed arranged in a horizontal direction.

Further, the present invention provides a coating apparatus capable of shortening the time for applying a bonding agent to a plurality of objects to be processed and improving the process yield, and a coating method using the same.

An object of the present invention is to provide a coating apparatus for applying a bonding agent to a side surface of each of a plurality of objects to be processed which are arranged horizontally and which are vertically spaced apart from each other, Into a coating apparatus in a coating direction; A loading unit which is located at one side of the loading device and receives a plurality of articles to be processed from the loading device to load and hold a plurality of articles to be arranged in a horizontal direction so as to be spaced apart from each other in the vertical direction, And a coating unit that applies a bonding agent to the side surfaces of the plurality of target objects spaced apart in the vertical direction while moving in the horizontal direction and the vertical direction; And a delivering device which is located at one side of the application device and is supported by the loading unit to support a plurality of objects to be processed in a coating process in a horizontal direction and to take them out to the outside.

Wherein the coating device is disposed between the charging device and the coating unit and supports a plurality of materials to be processed provided from the charging device in a vertical direction to support the coating device in a direction in which the charging device is located, A pull-in buffer module having a pull-in buffer capable of horizontal movement and up-and-down movement; A plurality of objects to be processed, which are supported by the loading unit and which have been subjected to the coating process, are stacked in a vertical direction and supported between the applying unit and the take-out unit, And an carry-out buffer module having a carry-out buffer capable of moving up and down and moving up and down.

And an input support member which is positioned between the input device and the input buffer and supports the object to be processed provided from the input device in a horizontal state so as to move forward in a direction in which the input buffer is located, And an inlet module.

Wherein the pull-in buffer module comprises: a pull-in buffer ascending / descending part installed to be connected to the pull-in buffer to move the pull-up buffer up and down; A loading buffer horizontal moving unit connected to the loading buffer ascending and descending unit and horizontally moving the loading buffer to move forward in a direction in which the coating unit is located and to move backward in a direction in which the loading module is located; And a pull-in buffer horizontal driver coupled to the pull-in buffer horizontal shifting unit to provide a horizontal shifting driving force to the pull-in buffer horizontal shifting unit.

Wherein the inlet buffer is disposed so as to extend in the up and down direction and is spaced apart from each other so as to face each other and is vertically spaced apart from each other on mutually opposing sides so that the edge of the object to be processed is supported, A pair of buffer members provided with a plurality of support blocks for supporting the support blocks in a direction; A buffer member connection portion connected to connect the upper portions of the pair of buffer members; A buffer member horizontally moving unit connected to at least one of the pair of buffer members to horizontally move at least one of the pair of buffer members to horizontally move the pair of buffer members toward or away from each other; .

Wherein the coating device is provided with an image pickup section for picking up and acquiring images of a plurality of objects to be processed stacked in the vertical direction and the image pickup section is supported on one side and the image pickup section corresponds to each of the plurality of objects to be processed stacked in the vertical direction And an image pick-up unit for picking up and lowering the image pick-up unit.

Wherein the coating unit is disposed on one of the upper side and the lower side of the imaging unit and applies a bonding agent to a coating surface of each of the plurality of to-be-processed objects; And the coating part is horizontally moved along the extending direction of the coated surface of each object to be processed, and moves along the inclined path of the object to be processed, and the center of the coated object in the vertical direction And an application head for adjusting the height to horizontally move along the guide surface.

And an applied horizontal moving part for guiding the coating head and the imaging head so as to horizontally move the coating unit and the imaging unit in the extending direction of the coated object surface, respectively.

And a controller for analyzing an arrangement state of the object to be processed in cooperation with the imaging unit and the coating unit and using the image and the reference data captured and obtained by the imaging unit to determine an operation of the application head according to the arrangement state of the object to be processed To control the application agent to be applied to the center position in the vertical direction of the coated surface along the extending direction of the to-be-treated coated surface by changing the height of the coated unit according to the horizontal movement of the coated unit, .

Wherein the coating movement control unit compares and analyzes image coordinate values of the object to be processed obtained and captured by the image pickup unit by using the reference data which is a coordinate value of a reference line in cooperation with the image pickup unit, An image analyzer for expressing a degree of separation of an image of the object to be processed and calculating a change in position of the object in the vertical direction along the extension direction of the coated surface through the separation data; And a movement controller which receives the position change calculation value in the vertical direction along the extension direction of the application surface from the image analysis unit and controls the vertical movement of the application unit according to the horizontal movement according to the calculated value.

Wherein the reference data is a position value of a reference line, and the reference line is a straight line on a path that is horizontally moved in parallel at a position of each of the plurality of objects to be processed.

Wherein the image analyzing unit comprises: a display unit for displaying an image of the object to be captured obtained by the imaging unit and the reference line on a single screen; And a calculation unit for calculating a distance between a coordinate value of the reference line displayed on the display unit and a coordinate value of the image of the object to be processed, wherein the calculation unit calculates, on the object image displayed on the display unit, Wherein the calculating unit calculates a distance between one extension of the image of the object to be processed and a position in the extending direction of the reference line, Can be calculated.

Wherein when the imaging section picks up an object to be processed out of a plurality of objects to be processed, the application section picks up an image of the object to be processed on the object to be processed on one layer or one layer below the object, And the application portion is spaced apart in the vertical direction.

Wherein each of the application head and the imaging head is extended in a direction in which a plurality of objects to be processed are arranged and is fastened to the application horizontal moving part so as to be spaced apart in the extending direction of the application horizontal moving part, A first upward and downward member that extends in a direction corresponding to a direction in which the plurality of objects to be processed are stacked and that guides the application unit so as to be slidable is provided on one surface of the imaging head on which the imaging unit is mounted And a second ascending / descending member extending in a direction corresponding to the direction in which the plurality of the objects to be processed are stacked and guiding the scraper so as to be slidable.

A main head which is extended in a direction in which a plurality of to-be-processed objects are arranged, and which is fastened to the applied horizontal moving portion, the imaging head being fastened to the main head, A main lifting member for guiding the imaging head so as to be slidable is provided and the application portion of the application unit is connected to the imaging head and moves together when the imaging head slides along the main lifting member.

Wherein the loading unit comprises: a loading unit that is vertically spaced apart and has a plurality of seating members on which the object to be processed is seated, the loading unit being insertable into the inlet buffer; A loading unit feeding means extending from at least the loading buffer to the loading buffer position and horizontally moving the loading unit; And a rotary table installed to connect between the loading unit and the loading unit transporting unit and rotating the loading unit and horizontally moving along the loading unit transporting unit.

Wherein the applying device is provided in a number corresponding to a plurality of the objects to be processed and is vertically spaced apart and movable so that each of the applying devices is positioned between the object to be processed and the object to be processed in the application step, And a gas injection unit having a plurality of gas injection units for forming curtains of gas on the upper side and the lower side of each of the objects to be processed by injecting gas from one side to the other side of the target.

Wherein the gas injection unit includes a plurality of gas injection units extending in the vertical direction and connected to the plurality of gas injection units, wherein the gas injection unit includes a plurality of gas injection units, And a slit is provided on one side of the direction in which the loading part is located, for discharging the gas and injecting the gas.

Wherein each of the plurality of gas injecting portions comprises: a first gas injecting member for injecting a gas onto an upper surface of an object to be processed; And a second gas injection member located on the upper side of the first gas injection member and injecting gas to a lower side of the lower surface of the other object to be processed located on one layer compared to the object to be processed.

Wherein the first and second gas injection members are plate-shaped, and a first slit is provided for discharging the gas to one side of the first gas injection member in the direction in which the loading part is located, 1 gas injection member, the lower region of the first slit is inclined downward toward the upper surface of the workpiece, and gas is supplied to one side of the second gas injection member in the direction in which the loading portion is located A second slit for ejecting and spraying the gas is provided on the upper surface of the second slit, and an upper region of the second slit is provided on another side of the region on one side of the second gas injection member provided with the second slit, And is inclined upward toward the lower surface of the object to be processed.

Wherein a region of the one side surface of the first gas injection member provided with the first slit is a curved surface having a curvature inclined downward toward an upper surface of an object to be processed, The upper region of the second slit is inclined upward toward the lower surface of the other workpiece positioned above the one workpiece in a region on one side of the provided second gas injection member, to be.

The length of the first gas injection member facing the object to be processed in the length of the first gas injection member and the second gas injection member is longer than the length of the second gas injection member.

A plurality of objects to be processed provided in the take-out buffer are horizontally supported between the take-out buffer and the take-out device so that backward movement in the direction in which the take-out buffer is located and advancement in the direction in which the take- And a carry-out unit having a carry-out support portion.

The take-out buffer module includes: an take-up buffer ascending and descending section installed to be connected to the take-out buffer and to raise and lower the take-out buffer; A take-out buffer horizontal shifting unit connected to the take-up buffer ascending and descending unit to allow the take-out buffer to move forward and backward in a direction in which the coating unit is located and in a direction in which the unit is located; And a take-out buffer horizontal driver connected to the take-out buffer horizontal shifting unit to provide a horizontal shift driving force to the take-out buffer horizontal shifting unit.

Wherein each of the carry-out buffers is provided so as to extend in the vertical direction and to be spaced apart from each other and to face each other and to be vertically spaced apart from each other on mutually facing surfaces, A pair of buffer members provided with a plurality of support blocks for supporting the buffer blocks; A buffer member connection portion connected to connect the upper portions of the pair of buffer members; A buffer member horizontally moving unit connected to at least one of the pair of buffer members to horizontally move at least one of the pair of buffer members to horizontally move the pair of buffer members toward or away from each other; .

Wherein each of the plurality of loading buffer modules, the plurality of loading units, the plurality of unloading buffer modules, the plurality of unloading units, and the plurality of the hardeners are each provided with a plurality of loading buffer modules, a loading unit, an unloading buffer module, And arranged in a direction intersecting the conveyance direction of the object to be processed in the application device.

Wherein the pull-in module is connected to a lower portion of each of the plurality of forward / backward moving members so as to extend in the direction in which the plurality of pull-in buffers are arranged As shown in Fig.

There is provided a coating method for applying a bonding agent to a side surface of each of a plurality of objects to be processed which are arranged in a horizontal direction and which are vertically spaced apart from each other and which receives a plurality of materials to be subjected to a coating step, A process of vertically supporting a plurality of objects arranged in a horizontal direction on a loading unit so as to be spaced apart from each other; Moving the loading unit in a direction in which the application unit for applying the bonding agent is located so that the side surfaces of the plurality of objects are opposed to the application unit; A coating agent is applied while horizontally moving the coating unit along the extending direction of at least one side of the object to be processed, and the height of the coating unit is adjusted so that the coating unit is positioned at each of the plurality of objects to be processed, Sequentially applying the bonding agent to the side surfaces of the plurality of objects to be processed stacked in the vertical direction.

The plurality of objects to be processed are vertically stacked in the loading buffer, and the plurality of objects to be processed are vertically stacked in the loading buffer, Process; Moving the loading unit in a direction in which the loading buffer is located; Inserting the loading unit into the loading buffer and placing a plurality of objects in the loading buffer in the loading unit; And moving the loading part in a direction in which the coating unit is located to pull the loading part out of the pulling buffer, wherein the loading part pulled out from the pulling buffer moves toward the coating unit.

Wherein the object to be processed is polygonal and a bonding agent is applied to a side surface of the object to be treated, the bonding agent is applied to a plurality of side surfaces of the object to be processed, and in order to apply a bonding agent to one side of the object, The one side of the object to be processed is supported by the loading unit so as to face the coating unit, and when the coating process is completed on one side of the object to be processed, the loading unit is rotated, And the bonding agent is applied to the other side surface of the object to be treated.

Loading a plurality of objects to be processed in a vertically stacked state in an unloading buffer located in front of the loading unit after a coating process for each of the plurality of objects is completed; A plurality of objects to be processed are sequentially taken out from the take-out buffer and moved so as to pass through a curing unit located in front of the take-out buffer, thereby curing the bonding agent.

A plurality of objects to be processed arranged in the horizontal direction in the drawing buffer are stacked in the vertical direction and at least any one of a pair of buffer members of the drawing buffer facing the side of the material to be processed is horizontally moved And aligning the plurality of objects to be processed.

A plurality of loading buffers, a loading unit, a coating unit, a hardening unit, and a plurality of take-out buffers, wherein the plurality of loading buffers, the plurality of loading units, and the plurality of loading units are provided in a direction intersecting the moving direction of the article to be coated The plurality of loading buffers, the plurality of loading units, the plurality of application units, the plurality of curing units, and the plurality of the carry out buffers alternately operate.

Positioning an image pickup unit at an application start position of at least one object to be coated with the bonding agent to image the object to be processed to obtain an image of the object to be processed; Analyzing an arrangement state of the object to be processed using the acquired image of the object to be processed; Adjusting a height of the coated portion to a target position at which the object to be processed is analyzed in the disposition state; And applying a bonding agent while horizontally moving a coated portion that is adjustable in height separately from the imaging portion along an extending direction of the coated object surface, Applying a bonding agent to a coating surface of the object to be treated while changing a height of the coating unit according to a horizontal movement of the coating unit according to an analysis result; .

A step of raising or lowering the imaging unit to position the object to be imaged at a height of the object to be imaged in a process of imaging the object to be processed and acquiring an image of the object to be processed; Capturing an image of the object to be processed on the surface of the object to be imaged while horizontally moving the imaging unit at a height of the object to be imaged; .

And comparing the coordinate value of the image of the object to be processed and obtained and the reference data which is the coordinate value of the reference line with each other to analyze the arrangement state of the object to be processed, Wherein the reference line is a straight line on a path that is horizontally moved in parallel at a position of each of the plurality of the objects to be processed.

Displaying an image of the object to be processed imaged by the imaging unit and the reference line on a screen of the display unit; Calculating a distance between a coordinate value of the reference line displayed on the display unit and a coordinate value of the image of the object to be processed; Calculating a separation distance between an extension line extending in a direction opposite to the reference line on the object to be processed and the reference line in a process of calculating a separation distance between coordinate values of the object to be processed, The height of the applying unit in accordance with the horizontal movement is controlled in accordance with the calculated value.

Wherein when the imaging section picks up an object to be processed of any one of a plurality of objects to be processed, a coating section located on the upper side or the lower side of the imaging section is formed on the upper side or lower side of the object to be processed, The bonding agent is applied to the treated material.

According to the embodiments of the present invention, a plurality of to-be-processed objects are moved in a process advancing direction in a state in which they are arranged in a horizontal direction, and a bonding agent is applied to each of a plurality of objects to be processed in a horizontal state. Thus, compared with the case where the object to be processed is vertically moved as in the prior art, the object P can be moved more stably when moving the plurality of objects in a horizontal state as in the present invention. Therefore, it is easy to apply to the manufacture of a display device which is becoming increasingly large. Further, since the bonding agent is applied to a plurality of workpieces, and a plurality of pull-in buffer modules, a loading unit, and a take-out buffer module each having a plurality of units are alternately operated, time for the coating process can be saved, Is improved.

Each of the first and second draw-in buffers and the first and second carry-out buffers according to the present invention can adjust the interval between the pair of buffer members according to the size of the object P, It is possible to easily cope with a change in size.

BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a view for explaining a process for applying and bonding a bonding agent to a material to be processed according to an embodiment of the present invention;
FIGS. 2 and 3 are perspective views of a coating apparatus according to an embodiment of the present invention,
4 is a perspective view of a coating apparatus according to an embodiment of the present invention.
FIG. 5 is a perspective view of a coating apparatus according to an embodiment of the present invention, showing an inlet module, a loading unit, a draw buffer module, a curtain gas module, a coating module, a carry buffer module,
6 is a view illustrating a loading unit according to an embodiment of the present invention.
7 is a view for explaining a coating unit according to an embodiment of the present invention;
8 is a graph showing the image of an object to be processed and a reference line displayed on the display unit of the image analysis unit according to the embodiment of the present invention
9 is a view for explaining the operation of the application control unit and the application unit according to the embodiment of the present invention
11 is a view showing the state of the loading section, the gas injection unit, the coating unit, and the image pickup unit at the time of applying the bonding agent in the coating apparatus according to the embodiment of the present invention
12 is a perspective view of a gas injection unit according to an embodiment of the present invention.
13 is a view showing the carry-out buffer module and carry-out unit according to the embodiment of the present invention

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. It should be understood, however, that the invention is not limited to the disclosed embodiments, but is capable of other various forms of implementation, and that these embodiments are provided so that this disclosure will be thorough and complete, It is provided to let you know completely.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view for explaining a process of applying a joining agent to a material to be treated and bonding the material to be processed according to an embodiment of the present invention. Fig. FIG. 2 and FIG. 3 are three-dimensional views showing a coating apparatus according to an embodiment of the present invention. 4 is a perspective view of a coating apparatus according to an embodiment of the present invention. 5 is a stereoscopic view showing an infeed module, a loading unit, a draw-in buffer module, a curtain gas module, a dispensing module, a carry-out buffer module, and a carry-out unit according to the embodiment of the present invention, . 6 is a view illustrating a loading unit according to an embodiment of the present invention. 7 is a view for explaining a coating unit according to an embodiment of the present invention. 8 is a photograph showing an image of an object to be processed and a reference line displayed on the display unit of the image analysis unit according to the embodiment of the present invention. 9 is a view for explaining the operation of the application control unit and the application unit according to the embodiment of the present invention. 11 is a view showing the states of the loading section, the gas injection unit, the coating unit, and the image pickup unit at the time of applying the bonding agent in the coating apparatus according to the embodiment of the present invention. 12 is a perspective view showing a gas injection unit according to an embodiment of the present invention. 13 is a diagram showing an export buffer module and an export unit according to the embodiment of the present invention.

In the embodiment of the present invention, the object P to which the coating process is performed may be, for example, a display panel in which a pair of glass substrates are mutually bonded and emit light. 1, a target substrate P according to the present invention includes a first substrate S1 on which a thin film transistor (TFT) and an organic light emitting layer are formed on one surface of the active matrix organic light emitting diode, , And a second substrate (S1) covering the first substrate (S1). The bonding agent D1 is applied and bonded to the edge of one surface of the first substrate S1 and the edge of the second substrate S1 on the surface facing the first substrate S1, The material D1 may be, for example, a frit.

The coating facility according to the present invention is a facility for applying the bonding agent (D2) to the side surface of the article to be treated. Hereinafter, the bonding agent (D2) will be described as an example of the coating agent applied to the article to be treated from the coating facility. Of course, the coating agent applied to the object to be treated is not limited to the bonding agent, and various materials to be coated can be applied.

The coating apparatus according to the present invention applies a bonding agent to a side surface of a panel made of a first substrate S1 and a second substrate S2 which are primarily bonded. At this time, the application equipment is caused to apply the bonding agent (D2) to the center position in the vertical direction on the side surface of the article to be treated. 1A, at the side of the first substrate S1 and the second substrate S2, the position of a junction or a gap between the first substrate S1 and the second substrate S2 The bonding agent D2 is applied. The first and second substrates S1 and S2 are first bonded by a bonding agent D1 applied along the edge of one surface of the first substrate S1 and the edge of one surface of the second substrate S2 facing each other, S2) side is further coated with the bonding agent (D2), the bonding is reinforced. At this time, the bonding agent D2 applied to the side surfaces of the first and second substrates S1 and S2 penetrates into the gap between the first substrate S1 and the second substrate S2 by osmotic pressure (FIG. 1B) When the bonding agent S2 is cured, the bonding between the first substrate S1 and the second substrate S2 is strengthened. Therefore, penetration of water and oxygen into the organic light emitting diode can be more effectively blocked.

Hereinafter, a coating apparatus according to an embodiment of the present invention will be described with reference to FIGS. 2 to 13. FIG. At this time, a panel to which the first substrate S1 and the second substrate S2, which are the objects to be coated, are bonded to each other is referred to as an "object to be processed S". The direction in which the objects P are successively transferred for the application process is referred to as the Y axis direction, the direction intersecting or orthogonal to the Y axis direction as the X axis direction, and the up and down direction as the Z axis direction. The direction in which the article P is conveyed at a position in a Y-axis direction is defined as forward and the opposite direction is defined as the rear.

The coating apparatus according to the embodiment of the present invention includes a charging device 10, a coating device 20, a curing device 30a, 30b, and a discharging device 30, which are arranged in a direction in which the application step of the bonding agent is continuously performed, (40). Further, a table portion 50 provided to support the charging device 10, the coating device 20, the coils 30a and 30b, and the carrying device 40 is provided on the upper portion, Axis direction from the upper portion of the table portion 50 so as to be separated from the insertion module 1200 of the insertion device 10 and the application module 5000 of the application device 20 and the curtain gas module 6000, G1, G2, G3, and G4 that support the carry-out module 9000 of the carry-out device 40. The first through fourth gantries G1, G2, G3,

The table portion 50 according to the embodiment of the present invention is arranged in the order of the first table 51, the second table 52, and the third table 53 in the coating process progress direction. The coating apparatus 20 and the curing apparatuses 30a and 30b are installed on the first table 51 and the second table 52 on the third table 53 A delivery device 40 is provided.

However, the configuration of the table portion 50 is not limited to the above-described first to third tables 51, 52 and 53, but may include a loading device 10, a coating device 20, a curing device 30a, 30b and the carry-out device 40 in that order. For example, a table in which a table portion is composed of two or less or three or more pieces, or a table in which a single portion is not divided can be provided.

The dispensing apparatus 10 draws the object P to be subjected to the dispensing process into the dispensing apparatus 20. The input device 10 includes an input module 1200 installed above the first table 51 and configured to input and wait for the object P to be subjected to the application process, The alignment stage 1100 for aligning the object P to be processed is allowed to horizontally move in the X and Y axes and move up and down (i.e., move in the Z axis) And a transfer unit 1300 that picks up and aligns the object P to be aligned and placed on the alignment stage and transfers the object P to the application device 20.

The closing module 1200 according to the embodiment of the present invention is a means for placing the article P placed on the tray T on the alignment stage 1100 and transporting and loading the empty tray T . That is, as shown in FIGS. 2 and 3, the input module 1200 according to the embodiment is disposed at the rear of the alignment stage 1100 on the first table 51, The first and second tray input units 1210 and 1210 and the second tray input unit 1210 and the second tray input unit 1220 in which a plurality of trays T on which the processed products P are placed are stacked, (Hereinafter referred to as a first tray take-out unit 1230) in which an empty tray T placed in any one of the first and second tray input units 1210 and 1220 is transferred and stacked, And the object to be processed P placed in the first tray input unit 1210 or the second tray input unit 1220 is picked up and supported on the alignment stage 1100 The first pick-up unit 1240 can horizontally move in the X-axis and the Y-axis and move up and down to move the first and second tray input units 1210 and 1220 And a tray transfer unit (hereinafter referred to as a first tray transfer unit 1250) that transfers the empty tray to the first tray take-out unit 1230 and stacks the same. Although not shown, a plurality of trays T are provided on the first and second tray input portions 1210 and 1220, respectively, and the tray trays T, which raise or lower the stacked trays T, (Not shown) is provided.

Here, the first and second tray input units 1210 and 1220 and the first tray output unit 1230 are spaced apart from each other in the X-axis direction. That is, the first tray input unit 1210 and the second tray input unit 1220 are spaced apart from each other in the X axis direction on the first table 51, and the first tray input unit 1210 and the second tray input The first tray take-out portion 1230 is positioned between the first tray take-out portion 1220 and the second tray take-out portion 1230. As described above, each of the first tray input unit 1210 and the second tray input unit 1220 is provided with a plurality of trays T on which a plurality of to-be- . The object to be processed P is continuously fed from the tray input part 1210 or 1220 of the first tray input part 1210 and the second tray input part 1220 to the alignment stage 1100, And a plurality of trays T on which a to-be-processed object P to be used in the next process is placed are stacked on the other tray input portion 1210 or 1220. [ The object to be processed P is successively transferred from the tray T placed on the first tray input unit 1210 and placed on the alignment stage 1100. At this time, When the to-be-processed articles P of the one tray input unit 1210 are exhausted, a plurality of trays T on which the to-be-processed objects P to participate in the next coating process are stacked are waiting.

The first pick-up unit 1240 seats the object P placed on the tray T placed on the first tray input unit 1210 or the second tray input unit 1210 on the alignment stage 1100 . The first pick-up unit 1240 includes a first pick-up unit 1241 for picking up the object P placed on the tray T and placing the object P on the alignment stage 1100, a first pick-up unit 1241 (Hereinafter, referred to as a first pick-up conveyance unit 1242) that horizontally moves in the X-axis and Y-axis directions and moves in the vertical direction, i.e., in the Z-axis direction.

The first pick-up unit 1241 is formed, for example, in the vertical direction, and at least a lower portion thereof is provided with support means for supporting and fixing the object P to be processed. The first pick-up section 1241 or the object to be processed P support means according to the embodiment is a means for supporting the article P with a vacuum attraction force, Various means can be used.

The first pick-up conveyance section 1240 is extended in the X-axis direction so as to intersect or orthogonally intersect with the first guide member 1242a and the first guide member 1242a formed on the first table 51 in the Y-axis direction, A second guide member 1242b disposed on the upper portion of the first guide member 1242a and a second guide member 1242b disposed between the second guide member 1242b and the first guide member 1242a for connecting the first guide member 1242a, A first horizontal moving block 1242c capable of sliding along the second guide member 1242b and a second horizontal moving block 1242b provided so as to connect the first pickup portion 1241 and the second guide member 1242b, And a lifting block 1242e which is installed to connect the first pickup 1241 and the second horizontal moving block 1242d and can move up and down along the extending direction of the first pickup 1241 .

Here, the first guide member 1242a and the second guide member 1242b are, for example, LM rails, the first horizontal movement block 1242c is an LM block that slides along the first guide member 1242c, The horizontal movement block 1242d may be an LM block that slides along the second guide member 1242b.

A third guide member extending in the Z-axis direction is provided on one surface of the first pick-up portion 1241, that is, on one surface of the first pick-up portion 1241 which is engaged with the ascending / descending block 1242e so that the ascending and descending block 1242e can slide in the up- The third guide member may be an LM guide, and the ascending / descending block may be an LM block.

Of course, the first and second guide members 1242a and 1242b and the third guide member, the first and second horizontal movement blocks 1242c and 1242d, and the ascending / descending block 1242e are not limited to the LM rail and the LM block Various means capable of horizontally moving the first pick-up portion 1240 in the X-axis and Y-axis directions can be used.

The first tray transfer unit 1250 includes a tray support unit 1251 for supporting the empty tray T located in the first tray input unit 1210 or the second tray input unit 1220, And a first tray transferring part 1252 for transferring the first tray supporting part 1251 in the X axis direction (see FIG. 2).

The first tray transfer part 1252 is extended in the direction corresponding to the direction in which the first tray input part 1210, the first tray output part 1230 and the second tray input part 1220 are arranged, A guide member (hereinafter referred to as a tray guide member 1252a) provided at the rear of the first tray input unit 1210, the first tray output unit 1230 and the second tray input unit 1220, (Hereinafter referred to as a tray horizontal movement block 1252b) horizontally moving along the horizontal movement block 1252a.

The tray guide member 1252a of the first tray transfer unit 1252 according to the embodiment is installed in the first gantry G1 and is an LM rail and the tray horizontal movement block 1252b is an LM block, Various means for horizontally moving the first tray supporting portion 1251 can be used for the first tray conveying portion 1252.

The first tray supporting portion 1251 includes a tray supporting member 1251b for supporting the tray T, one end connected to the tray supporting member 1251b and the other end connected to the tray horizontal moving block 1252b of the first tray conveying portion 1252, And a connecting means 1251a connected to the connecting means. Here, the connecting means 1251a may be a bar-shaped member extending in one direction, for example, the Y-axis direction. The connecting means 1251a is provided with a tray supporting member 1251b, for example, a means for supporting the tray T with a vacuum suction force. However, in addition to the supporting means using the vacuum attraction force, the tray supporting member 1251b can be applied with various means capable of supporting the tray T by another supporting method. The tray supporting members 1251b may be provided in a plurality of ways. For example, when two tray supporting members 1251b are provided, the tray supporting members 1251b may be disposed on both sides of the connecting means 1251a.

In the above description, the input module 1200 according to the embodiment of the present invention loads a tray T on which an article P is placed, and places the article P on the tray T, Are sequentially transferred to the alignment stage. However, the present invention is not limited to this, and the input module 1200 can be changed to a means having a cassette for vertically stacking the object P without using the tray T, , And a separate robot capable of placing the object P loaded on the cassette on the alignment stage 1100 can be provided.

The aligning stage 1100 is disposed in front of the first and second tray inputting portions 1210 and 1220 and the first tray let-out portion and before the object P is drawn into the applying device 20, And aligns the treatments (P). The aligning stage 1100 includes a supporting table on which an object to be processed P is placed at an upper portion thereof, a plurality of alignment pins (not shown) horizontally movably inserted so that at least a part thereof protrudes above the supporting table, (Not shown). The support may be, for example, a plate having a square cross section, and is provided with a vacuum suction line for supporting the object P with a vacuum suction force.

On the other hand, the workpiece supported by the first pick-up unit 1240 and resting on the alignment stage 1100 may be in an abnormal state, that is, misaligned or crooked. Accordingly, in the present invention, a plurality of alignment pins are disposed at alignment positions of the object P, and the alignment pins are spaced apart from each other so as to be aligned in one direction. When the object to be processed is placed on the alignment stage 1100, a plurality of alignment pins are transported toward one side of the object P to be processed. When the object P to be processed is in a crooked state, some alignment pins among a plurality of alignment pins arranged in a line and horizontally moving in the direction of the object to be processed are first brought into contact with the object P to be processed. At this time, P is tilted by applying a pressing force to a part of the target object P. Therefore, one side of the object to be processed P facing the plurality of alignment pins is all in contact with the plurality of alignment pins, one side of the to-be-processed object P becomes parallel to the plurality of alignment pins, The object to be processed is aligned.

The transfer unit 1300 is placed on the alignment stage 1100 to transfer the aligned workpiece P to be drawn into the applicator 20. The transfer unit 1300 includes a support portion (hereinafter referred to as a transfer support portion 1310) for supporting and fixing the object P placed on the alignment stage and a transfer portion 1310 for horizontally moving the transfer support portion 1310 in the Y- And a transfer unit (hereinafter, referred to as transfer transfer unit 1320) for moving up and down.

The transfer support part 1310 is formed, for example, in the vertical direction and provided with supporting means for supporting the object P in the lower part thereof. The supporting means of the transfer supporting portion 1310 according to the embodiment may be a means for supporting the object to be processed by vacuum attraction force, but various means for supporting and fixing the object to be processed can be used.

The transferring and conveying unit 1320 includes a first guide member 1321 and a first guide member 1321 which are formed on the first table 51 and the second table 52 in the direction in which the applicator 20 is located, Axis direction and is disposed on the upper side of the first guide member 1321 and has a transmission support portion 1310 mounted on one side thereof and extends horizontally along the Y-axis direction along the first guide member 1321 A first connecting member 1323 whose one end is connected to the first guide member 1321 and the other end is connected to the second guide member 1322 and the other end is connected to the transfer supporting portion 1310 And a second connecting member 1324 whose other end is connected to the second guide member 1322.

Although not shown in detail, the ascending and descending block of the transfer conveying unit 1320 is installed to connect the transfer supporting unit 1310 and the second guide member 1322, and the transfer supporting unit 1310 is supported in a state As shown in Fig. To this end, a guide member extending in the vertical direction is provided on one surface of the transfer supporting portion, that is, one surface of the transfer guide portion 1310 facing the second guide member 1322 and the ascending / descending block, 1310 in the vertical direction. Here, the ascending / descending block of the transfer conveying part 1320 is an LM block, and the guide member provided on the transfer supporting part 1310 may be an LM guide.

The application device 20 applies a bonding agent to the object P to be transferred, which is transferred from the inlet module 2000. The applicator 20 according to the present invention is a horizontal type applicator for transferring the object P in a horizontal state and applying a coating process to the object P arranged in a horizontal state . Further, a plurality of objects P arranged in a horizontal state are provided and are vertically spaced from each other, and a coating process is sequentially performed on a plurality of objects P to be processed which are stacked in multiple layers.

Hereinafter, a coating apparatus 20 according to an embodiment of the present invention will be described in more detail.

The application device 20 is installed in front of the alignment stage 1100 in the upper part of the second table 52 and a plurality of objects P to be processed are stacked in the vertical direction, The first and second drawing buffer modules 3000a and 3000b arranged in the X axis direction and spaced apart from each other and the alignment table 1100 and the first and second drawing tables 1100 and 1100b, The first and second input buffer modules 3000a and 3000b are provided between the two input buffer modules 3000a and 3000b to support the object P picked up and delivered from the transfer unit 1300, (P) from the first inlet buffer module 3000a and feeds and receives the article P to be horizontally moved and rotated in the direction in which a coating unit 5100 to be described later is placed, A first loading unit 4000a having a first loading unit 4100a, a second loading buffer module 3000b A second loading unit 4000 having a second loading unit 4100b that receives and receives a plurality of the objects P to be horizontally moved and rotated in a direction in which the application unit 5100 is located, And an application module 5000 which is installed in front of the first and second loading buffer modules 3000a and 3000b and applies a coating process to the object P transferred by the first and second loading units 4000a and 4000b. , The first and second drawing buffer modules 3000a and 3000b and the coating module 5000 to spray gas onto the upper and lower sides of a plurality of the objects P to be coated, A curtain gas module 6000 for preventing a bonding agent or impurities from adhering to the upper and lower portions of the object P by forming curtains of the object P to be processed, And receives a plurality of the objects P to which the coating process has been completed from the first loading unit 4000a The first take-out buffer module 7000a and the second take-out buffer module 7000b which are stacked in the vertical direction and the second take-out buffer module 7000b which receives the plurality of to-be- (7000b).

The lead-in module 2000 draws a plurality of to-be-processed objects P to be applied to the first lead-in buffer module 3000a and the second lead-in buffer module 3000b, respectively. The lead-in module 2000 includes first and second lead supporting parts 2100 and 2200 arranged in parallel in the X-axis direction, first and second lead- The first and second receiving buffer modules 3000a and 3000b extend in the direction in which the first and second receiving buffer modules 3000a and 3000b are arranged in the rear of the first and second receiving support modules 3000a and 3000b, Axis direction, a part of which is connected to the first draw-in support part 2100, and the other part of which is connected to the draw-in guide member 2300, , A first forward / backward moving member (2400) connected to the first forward / backward moving member (2400) and extending in the Y axis direction so as to allow the first receiving support portion (2100) to move forward or backward in the Y axis direction, A part of which is connected to the second receiving support part 2200, And a second forward / rearward shifting member 2500 connected to the supplementary draw-in guide member 2300 for allowing the second draw-in support 2100 to move back and forth in the Y-axis direction.

Here, each of the first and second forward / backward moving members 2400 and 2500 is connected to the first and second receiving supports 2100 and 2200, and the other is connected to the receiving guide member 2300, And can be conveyed in the X-axis direction along the draw-in guide member 2300. [ Each of the pulling guide member 2300 and the first and second forward and backward moving members 2400 and 2500 may be an LM guide and the pulling guide member 2300 and the first forward / A separate horizontal movement block may be provided between the pulling guide member 2300 and the second forward / backward moving member 2500, and the horizontal movement block may be provided between the first and second forward / 2400, and 2500, and horizontally moves along the lead-in guide member 2300. A horizontal movement block may be provided between the first forward / backward movement member 2400 and the first reception support portion 2100 and between the second forward / backward movement member 2500 and the second reception support portion 2200, The horizontal moving block may be an LM block.

The first and second receiving supports 2100 and 2200 can be inserted into the receiving buffers 3100a and 3100b constituting the first and second receiving buffer modules 3000a and 3000b, As shown in Fig. The first and second receiving supports 2100 and 2200 according to the embodiment are formed in a bar shape extending in one direction and inserted into the receiving buffers 3100a and 3100b of the receiving buffer modules 3000a and 3000b It has a possible width. In addition, means capable of supporting and fixing the object P is provided at least at a part of the first and second draw-in supporting portions 2100 and 2200. For example, the object to be processed P is supported It may be a vacuum adsorption hole.

In the coating facility according to the present invention, a plurality of draw buffer modules 3000a and 3000b, which are stacked and queued before the object P is transported to the application module 5000, are provided. For example, two draw buffer modules 3000a, 3000b may be provided. At this time, the first and second inlet buffer modules 3000a and 3000b are located in front of the inlet module 2000, and are spaced apart from each other in the X axis direction. In order to support the first input buffer modules 3000a and 3000b and the second input buffer modules 3000a and 3000b, the first input buffer modules 3000a and 3000b are extended in the Y axis direction, And the first to third buffer supports 3510, 3520, and 3530 are spaced apart from each other.

4 and 5, each of the first and second drawing buffer modules 3000a and 3000b includes draw-in buffers 3100a and 3100b in which a plurality of workpieces P are stacked in the vertical direction, The transfer buffer horizontal moving parts 3300a and 3300b for transferring the transfer buffers 3100a and 3100b in the Y axis direction and the transfer buffer vertical transfer parts 3300a and 3300b for transferring the transfer buffers 3100a and 3100b in the Y axis direction, 3200b and the input buffer horizontal drive units 3300a and 3300b so as to be horizontally movable in the Y axis direction by the input buffer horizontal drive units 3300a and 3300b do.

The input buffers 3100a and 3100b are arranged to face each other in the X-axis direction, and a pair of support blocks 3111, which are capable of supporting a plurality of the processed products P, At least one of the buffer member 3110 and the buffer member connection portion 3120 is connected to an upper portion of the pair of buffer members 3110 to face each other and the pair of buffer members 3110 moves in the X- And a buffer member horizontally moving part 3130 that enables alignment of the stacked object P to be processed. The image forming apparatus further includes a driving unit for operating the pull-in buffer horizontal driving units 3300a and 3300b such that the pull-in buffer horizontal moving units 3400a and 3400b can horizontally move forward and backward by the pull-in buffer horizontal driving units 3300a and 3300b, The drive unit of the first input buffer module 3000a may be installed on the first buffer support 3510 and the drive unit of the second input buffer module 3000b may be installed on the third buffer support 3530. [

Each of the pair of buffer members 3110 is extended in the vertical direction, and each of the inner side surfaces of the buffer member 3110 facing each other is provided with the support block 3111 as described above. In other words, a plurality of grooves for inserting one end and the other end edge of the object P are provided on the inner side surface of the pair of buffer members 3110. The pair of buffer members 3110 are connected to each other by a buffer member connection portion 3120. The buffer member connection portion 3120 extends in the left-right direction or the X-axis direction, As shown in FIG.

The buffer member horizontal moving part 3130 includes a buffer member guide part 3131 extending along the buffer member connecting part 3120 and installed on the buffer member connecting part 3120, And a buffer member moving block 3132 installed to connect between the upper portion of the buffer member guide portion 3131 and the buffer member guide portion 3131 and horizontally moving along the buffer member guide portion 3131. Here, the buffer member guide portion 3131 may be, for example, a ball screw.

Some of the incoming buffer ascending and descending parts 3200a and 3200b are connected to the input buffers 3100a and 3100b and the other part is connected to the buffer horizontal shifting parts 3400a and 3400b. The loading buffer lifting / lowering parts 3200a and 3200b according to the embodiment are provided as a pair, and are connected to the pair of buffering parts 3110, respectively. The LM rail may be an LM rail extended in the vertical direction, for example, and the LM rail may be provided between the inlet buffer up / down sections 3200a and 3200b and the inlet buffers 3100a and 3100b. A rising / falling block that slides in the vertical direction may be provided.

The input buffer horizontal drive units 3300a and 3300b are provided on the buffer support base 3520 and are connected to the buffer horizontal movement units 3400a and 3400b with a buffer guide member 3310 extending in the Y axis direction, And a buffer member moving block 3320 connected to the guide member 3310 and capable of horizontally moving back and forth along the buffer guide member 3310 while supporting the buffer horizontal movements 3400a and 3400b.

The input buffer horizontal shifters 3400 and 3400b are coupled with the pair of input buffer uprising portions 3200a and 3200b and are moved in the Y axis direction along the buffer guide member 3310 by the buffer movement block 3320. [ The pull-in buffer horizontal shifters 3400a and 3400b according to the embodiment may have a lower open shape, for example, 'П' shape.

According to the draw-in buffer modules 3000a and 3000b, the draw-in buffers 3100a and 3100b are moved up and down by the draw-in buffer ascending and descending parts 3200a and 3200b. When the workpiece P is aligned, At the time of changing the size of the water P, at least one of the pair of buffer members 3110 is moved in the X-axis direction by the buffer member horizontal shifting portion 3130. At this time, when at least one of the pair of buffer members 3110 is moved, the pair of buffer members 3110 can be moved so as to approach each other or away from each other. The inlet buffer horizontal movement units 3400a and 3400b are movable in the Y axis direction by the inlet buffer horizontal drive units 3300a and 3300b so that the inlet buffer vertical movement units 3300a and 3300b are connected to the inlet buffer horizontal movement units 3300a and 3300b, 3200a and 3200b and the inlet buffers 3100a and 3100b connected to the inlet and outlet ascending and descending parts 3200a and 3200b horizontally move together along the buffer guide member 3310 in the Y axis direction.

The first loading units 4000a and 4000b receive the object P supported in the first loading buffer 3100a and transfer the objects P to the coating module 5000. To this end, the first loading units 4000a and 4000b Is provided in front of the first input buffer 3100a. The second loading unit 4000b receives the object P supported by the second loading buffer 3100b and transfers the object P to the coating module 5000. The second loading unit 4000b transfers the object P, And is opposed to the front of the buffer 3100b.

Each of the first and second loading units 4000 4000a and 4000b includes loading units 4100a and 4100b, rotating tables 4200 and 4200a and 4200b and loading unit transfer means 4300 4300a and 4300b .

More specifically, the first loading unit 4000a includes a first loading unit 4100a provided with a plurality of seating members 4110, which are spaced apart from each other in the vertical direction and on which the articles P are placed, A first rotating table 4200a installed at a lower portion of the first loading portion 4100a and rotating the first loading portion 4100a; a first rotating table 4200b rotating from the first receiving buffer 3100a to the coating module 5000 in the Y- A first rotating table 4200a is coupled to an upper portion of the first rotary table 4200a and conveying means for conveying the first loading portion 4100a coupled with the first rotary table 4200a in the Y axis direction Transfer means 4300a).

The second loading unit 4000b includes a second loading unit 4100b provided with a plurality of seating members 4110 that are spaced apart from each other in the vertical direction and on which the articles P are placed, A second rotating table 4200b installed below the second loading part 4100b for rotating the second loading part 4100b and extending from the second loading buffer 3100b to the coating module 5000 in the Y axis direction, The second rotating table 4200b is coupled to the second rotating table 4200b to transfer the second loading unit 4100b coupled to the second rotating table 4200b in the Y axis direction )).

Each of the first and second loading portions 4100a and 4100b may include a body 4120 extending in the up and down direction and a plurality of seats 415a and 415b connected to the body 4120, Member 4110 as shown in FIG. Each of the plurality of seating members 4110 may be in the form of a bar extending in one direction and may be disposed between a pair of buffer members 3110 constituting the first and second inlet buffers 3100a and 3100b It can be provided so as to have an insertable area. Each of the seating members 4110 is provided with a means for supporting and fixing the article P, for example, a vacuum suction hole for sucking and fixing the article by vacuum suction force.

The first and second rotary tables 4200a and 4200b may be connected to the lower portion of the body 4120 of the first and second loading portions 4100a and 4100b and may be rotating means having a motor. The lower portions of the rotary tables 4200a and 4200b are fastened to the loading portion transfer means 4300a and 4300b extending in the Y axis direction and are transferred along the Y axis direction along the loading portion transfer means 4300a and 4300b. for teeth. The loading unit transporting means 4300a and 4300b according to the embodiment may be an LM rail and may include a horizontal moving block connecting the rotary tables 4200a and 4200b and the LM rail and slidable in the Y axis direction along the LM rail And the horizontal moving block may be an LM block.

In order to place a plurality of objects P on the first and second loading portions 4100a and 4100b, first and second loading portions 4100a and 4100b are respectively inserted into the first and second loading buffers 3100a, and 3100b so that a plurality of seating members 4110 are fed into the space between the pair of buffer members 3110. At this time, each of the plurality of seating members 4110 is inserted so as to be positioned below the article P to be processed. Then, when the inlet buffers 3100a and 3100b are lowered, the article P descends, And is seated on the seating member 4110 of the loading sections 4100a and 4100b. Next, the first and second loading unit feeding means 4300a and 4300b are operated to move the first and second loading units 4100a and 4100b in the direction in which the application module 5000 is positioned, Is rotated so as to face the application module (5000).

The operations of the first and second loading sections 4100a and 4100b are preferably carried out alternately. For example, the first loading section 4100a moves backward toward the first loading buffer 3100a by the first loading section transporting means 4300a, and the plurality of piles And receives the processed product P. At this time, the second loading section 4100b is transported by the second loading section transporting means 4300b in the direction in which the coating module 5000 is positioned, and the plurality of articles P ) Is applied to each of the first and second substrates. When the application of the bonding agent to the article P is completed in the second loading section 4100b, the article P is transferred to the first take-out buffer 7100a and then transferred to the empty second loading section 4100b move backward toward the second drawing buffer 3100b to receive a plurality of workpieces P loaded in the first drawing buffer 3100a. At this time, the first loading section 4100a is transported by the first loading section transporting means 4300a in the direction in which the coating module 5000 is located, and the plurality of objects P ) Is applied to each of the first and second substrates.

The dispensing module 5000 is disposed between the curtain gas module 6000 and the first and second take-out buffer modules 7000a and 7000b and is provided with a plurality of blood vessels 7000a and 7000b delivered by the first and second loading units 4000a and 4000b. A bonding agent is sequentially applied to each of the treatments (P). The application module 5000 according to the present invention includes a coating unit 5100 having a coating unit 5110 for discharging and applying a bonding agent to each of a plurality of objects P to be processed, An image pickup unit 5210 for obtaining an image of a side of the coating unit 5100 to detect whether or not each of the plurality of the target objects P is parallel or inclined, The application control unit 5200, the application unit 5100, and the image pickup unit 5210, which allow the bonding agent to be applied to the center of the application surface in the vertical direction on the surface to be treated P by controlling the movement operation, (Hereinafter referred to as an applied horizontal moving part 5300) which horizontally moves in the axial direction.

7, the coating unit 5100 includes a coating unit 5110 for discharging and applying a bonding agent toward a coating surface of the object P, a coating unit 5110 mounted on one side of the coating unit 5110, (Hereinafter, referred to as a first ascending / descending member 5121) capable of raising or lowering the horizontal movement unit 5100 and the horizontal movement unit 5300. The horizontal movement unit 5300 includes an application head 5120 that is horizontally movable along the horizontal movement unit 5300.

The application portion 5110 includes nozzles 5111a and 5111b for discharging the bonding agent toward the coated surface of the object P and a plurality of nozzles 5111a and 5111b connected to the nozzles 5111a and 5111b at one end, And nozzle support blocks 5112a and 5112b fastened to the ascending / descending member 5121 and movable up and down along the first ascending / descending member 5121 while supporting the nozzles 5111a and 5111b.

The nozzles 5111a and 5111b are disposed such that one end of the bonding agent is discharged toward the rear surface of the gas injection unit 6100 and the application surface of the object P supported by the loading portions 4100a and 4100b. The nozzles 5111a and 5111b according to the embodiment are provided in a plurality and are spaced apart from each other in the vertical direction. At this time, nozzle support blocks 5112a and 5112b corresponding to the nozzles 5111a and 5111b are provided, do. For example, two nozzles 5111a and 5111b (hereinafter referred to as first and second nozzles 5111a and 5111b) are provided, and nozzle support blocks 5112a and 5112b are also provided with two nozzles 5111a and 5111b (Hereinafter referred to as first and second nozzle support blocks 5112a and 5112b). Of course, the nozzle and nozzle support block can be provided in a plurality of two or more, and by providing a plurality of nozzles, the coating process can be performed on a plurality of the objects P to be processed at one time, have. Further, each of the nozzles and the nozzle support blocks may be provided with a single nozzle.

The coating head 5120 according to the embodiment of the present invention extends vertically and is provided with a first ascending / descending member 5121 extending in the vertical direction on one surface thereof to which the applying unit 5110 is fastened, (5300). Here, the first ascending / descending member 5121 may be an LM rail.

The application unit 5110 according to the embodiment of the present invention is configured to dispense the bonding agent intermittently while moving along the coated surface of the object P when applying the bonding agent to the coated surface of the object P, It is possible to apply the bonding agent in the form of a dot (DOT), or to apply the bonding agent continuously in the form of a line by applying the bonding agent continuously along the coated surface of the to-be-

The application control unit 5200 controls the application unit 5100 in accordance with the parallel or inclined state of the object P when the application unit P applies the bonding agent to the object P while horizontally moving the application unit 5100. [ As shown in FIG. The application control unit 5200 includes an imaging unit 5210 having an imaging unit 5211 that acquires an image while moving along the coated surface, that is, the extending direction of the side surface of the object P, an imaging unit 5210, An image pickup motion control unit 5230 that controls the image pickup unit 5210 to move along the center of the water (the center in the vertical direction or the height direction) And an application movement control unit 5220 for controlling the movement of the application unit 5100 using the analysis result.

The image pickup unit 5210 includes an image pickup section 5211 for obtaining an image of a coated surface and an image pickup head 5213 for supporting the image pickup section 5211. [ Here, the image pickup section 5211 includes image pickup devices 5211a and 5211b for picking up an image of the object P to be processed and one end connected to the image pickup devices 5211a and 5211b and the other end connected to the image pickup head 5213 And image pickup device support blocks 5212a and 5212b that are coupled to the second ascending / descending member 5213a and movable along the second ascending and descending member 5213a while supporting the image pickup head 5213. [ The image pickup devices 5211a and 5211b may be, for example, a configuration including a CCD camera, illumination, and a lens.

The image pickup devices 5211a and 5211b are provided in plural numbers and are spaced apart from each other in the vertical direction and are provided with the image pickup device support blocks 5212a and 5212b corresponding to the image pickup devices 5211a and 5211b. For example, two image pickup devices 5211a and 5211b (hereinafter, first and second image pickup devices 5212a and 5212b) are provided, and the image pickup device support blocks 5212a and 5212b are also provided with the image pickup devices 5211a and 5211b (Hereinafter referred to as first and second image pickup device support blocks 5212a and 5212b) are provided. Of course, the image pickup devices 5211a and 5211b and the image pickup device support blocks 5212a and 5212b may be provided in a plurality of two or more, and a plurality of image pickup devices 5211a and 5211b may be provided, ) Can be obtained, and the yield of the coating process can be improved. In addition, each of the image pickup devices 5211a and 5211b and the image pickup device support blocks 5212a and 5212b may be provided with one but not a plurality.

The imaging head 5213 according to the embodiment is vertically extended. A second ascending / descending member 5213a extending in the vertical direction is provided on one surface of the imaging unit 5211 to which the imaging unit 5211 is fastened. (5300). Here, the second ascending / descending member 5213a may be an LM rail.

The imaging movement control unit 5230 is interlocked with the second horizontal movement member 5213a of the application horizontal movement unit 5300 and the imaging unit 5210 to move the imaging unit 5211 horizontally in the X- Control the height. Here, the imaging section 5211 horizontally moves along the side surface of the object P to pick up an image of the side surface which is the coated surface of the object P, and the imaging section 5211 according to the present invention has the angle And moves horizontally along the center in the vertical direction of the side surface of the object P to be processed. In other words, the center of the imaging section 5211 horizontally moves in the coating advancing direction along the vertical direction center of the side of the object P, and the height of the imaging section 5211 Height) does not change. Here, the height of the imaging unit 5211 is controlled so that the imaging unit 5211 moves along the center of the side surface of the object P to be processed by the mechanical design values of the coating equipment or the loading units 4000a and 4000b Adjustable.

This is because a plurality of objects P are stacked on a plurality of seating members 4110 constituting the loading sections 4100a and 4100b and the height of the object P to be processed, When the workpiece P is seated in parallel (not tilted) on the one seating member 4110, the height of the imaging unit 4110 and the spacing distance between the seating members 4110 are determined, 5211 is positioned at the center in the vertical direction of the workpiece P is the height of the imaging section 5211 for imaging the workpiece P to be processed. As the image pickup is progressed with respect to the side surfaces of each of the plurality of the objects P to be processed, the center position of the object P to be seated on each of the seating members 4110 and the center of the imaging unit 5211, And the height value of the image pickup section 5211 is stored or set in the image pickup motion control unit 5230 so that the height of the image pickup section 5211 is controlled .

In the embodiment, a plurality of objects P are stacked in the loading sections 4100a and 4100b in the vertical direction. For example, when the first to tenth objects P to be processed are placed on each of the first to 10th placing members 4110 of the loading sections 4100a and 4100b, And is stored in the movement control unit 5230. For example, a plurality of seating members 4110 of the loading units 4100a and 4100b may be referred to as first to tenth seating members in the upward direction from below, and a plurality of to-be-processed And the water is named as the first to tenth objects P to be processed from the lower side to the upper side. At this time, the first object P to be processed is placed so as to be parallel to the first placing member 4110, and the center of the imaging section 5211 is aligned with the center of the first object P to be processed. The position of the imaging section 5211 where the center of the imaging section 5211 coincides with the center of the second object to be processed which is located above the first object to be processed is the second imaging height, The position of the imaging section 5211 whose center of the imaging section 5211 coincides with the center of the third target object located above the second object to be processed is the third imaging height. Although not described, the fourth to tenth imaging heights can also be obtained by the methods described above, and the first to tenth imaging heights are set in the imaging motion control unit 5230. [ Then, in order for the imaging unit 5210 to move along the side surfaces of the first to tenth objects to be processed for the actual application process, the imaging unit 5211 is controlled to the positions of the first to tenth imaging heights, do.

The application horizontal moving part 5300 horizontally moves the application unit 5110 and the image pickup unit 5210 in the application advancing direction, that is, the X axis direction. The application horizontal moving part 5300 includes a horizontal movement guide member 5310 extended on the third gantry G3 and horizontal movement blocks 5320a and 5320b horizontally movable along the horizontal movement guide member 5310. [ . The horizontal movement blocks 5320a and 5320b are provided to connect between the application head 5120 and the horizontal movement guide member 5310 and between the imaging head 5213 and the horizontal movement guide member 5310. [

The coating motion control unit 5220 receives an image picked up by the image pick-up unit 5210, and based on the analysis results in the image analyzing unit 5221 and the image analyzing unit 5221 for analyzing the position value on the basis of the reference data, And an application movement control section 5222 for instructing to control the movement of the application section 5110. [

The image analysis unit 5221 includes a display unit 5211a for displaying a reference line having an image obtained by the imaging unit 5211 and reference data on one coordinate, a reference line on one coordinate point displayed on the display unit 5221a, And a calculating unit 5221b that calculates the distance between the images and calculates the degree of parallelism and inclination of the object P to be processed. The image picked up by the image pickup unit is displayed on the display portion 5221a together with the reference line as shown in Fig.

The reference line indicates that the image pickup unit 5210 does not tilt on the mounting member 4110 of the loading units 4100a and 4100b and that the image pickup unit 5210 does not tilt on the application surface 4110 of the loading units 4100a and 4100b, A straight line extending parallel to the center of the image of the picked up object P moving along the in-plane side or another straight line parallel to the straight line is a reference line, and the position data of the reference line is reference data. For example, when the to-be-processed object P is not tilted on the mounting member 4110 and is placed parallel to the X-axis direction, the center of the coated object P in the up-down direction is connected in the extending direction of the coated surface A straight line on the coordinate of the display portion 5221a is a reference line, and a position in the Z-axis direction along the X-axis position of the reference line is reference data. At this time, since the object P is not tilted to one side but lies in parallel, the position in the Z-axis direction according to the X-axis position of the reference line is the same.

When the imaging unit 5210 horizontally moves along the extension direction of the object P to set the reference data and the reference line as described above, In the vertical direction. The reason why the imaging unit 5210 can be horizontally moved along the vertical center of the coated surface is that the imaging movement control unit 5230 can adjust the height of the imaging unit 5211 to the mechanical design value of the coating equipment or the loading units 4000a and 4000b .

The calculating unit 5221b calculates parallelism and inclination of the article P using the preset reference line and reference data as described above.

To this end, a distance between a straight line (hereinafter referred to as an extension line) extending in the direction in which the application continues in the imaging image on the coordinate and a reference line is calculated at a plurality of points. At this time, an extension line on the captured image to be used to calculate the separation distance from the reference line may be either the outermost line on both sides of the captured image, or the center line of the acquired image. For example, when a plurality of objects P are horizontally arranged so as to be spaced from each other in the Z-axis direction and each of the objects P to be placed in the X-axis direction, as shown in Fig. 9, The separation distance between the extending line in the X-axis direction, which is the coating advancing direction, and the reference line extending in the X-axis direction, on the image. At this time, a change in the separation distance in the Z-axis direction according to the extension line of the object to be processed and the X-axis position of the reference line is calculated. As a result of the calculation, when the distance in the Z-axis direction between the extension line of the object P and the reference line in the Z-axis direction increases or decreases in either direction, it is determined that the object is inclined do.

The coating movement control section 5222 controls the movement of the coating unit 5100 according to the analysis result in the image analysis section 5221. [ That is, in the application operation, the position of the application unit 5110 in the Z axis direction is controlled according to the result of the analysis performed by the image analysis unit 5221 while moving the application unit 5100 in the X axis direction. The coating unit 5110 gradually moves up or down while the coating unit 5110 moves in the coating direction, that is, in the X-axis direction, when it is determined that the object P is tilted to one side.

The operation of the application module 5000 according to the embodiment of the present invention will be described. To this end, a plurality of seating members 4110 of the loading units 4100a and 4100b are referred to as first to tenth seating members in the upward direction from below, And the treated product P is referred to as the first to tenth processed product P from the lower side to the upper side.

First, the imaging section 5211 is moved along the imaging head 5213 to move the imaging section 5211 to the height of the first target object P positioned at the lowermost position, that is, the first imaging height. Then, the image of the side of the first target object P is picked up while horizontally moving the imaging unit 5211 in the x-axis direction at the first imaging height, for example, from left to right. At this time, the imaging unit 5211 horizontally moves in the X-axis direction without changing the height, as shown in Fig. 9A. The image thus picked up may be, for example, as shown in FIG. 9B, and the picked-up image is transmitted to the image analyzing unit 5221. The calculation unit 5221b of the image analysis unit 5221 calculates the separation distance between the extension line on the captured image and the reference line at a plurality of positions. At this time, when the separation distance gradually increases in the imaging progressing direction as shown in FIG. 9B, the calculating unit 5221b judges that the coating advancing direction, that is, the object P to be processed is arranged in an upward inclined state from left to right Which is transferred to the application movement control section 5222. Thereafter, the application portion 5110 is raised along the application head 5120 to apply the bonding agent to the first object P to be processed, and the application portion 5110 applies the bonding agent to the first object P Facing the side. At this time, the coating motion control unit 5222 moves the coating unit 5100 horizontally from the left to the right while moving the coating unit 5100 horizontally in the X direction so as to increase the height of the coating . That is, the coating motion control section 5222 controls the coating unit 5100 to move the first workpiece P in a tilted state or along a path as shown in Fig. 9C. Therefore, the bonding agent can be applied to the center of the side surface of the first object P to be processed.

Thus, while the application unit 5100 applies the bonding agent to the first object P to be processed, the image pickup unit 5211 picks up the second object P (P) positioned on the upper side of the first object P ) Side image. To this end, the imaging section 5211 is moved so as to come to the height of the second target object P, that is, the second imaging height. Then, the image of the side of the second target object P is picked up while horizontally moving the imaging unit 5211 from the left to the right at the second imaging height. At this time, the imaging unit 5211 horizontally moves in the X-axis direction without changing the height as shown in Fig. 9C. The image thus picked up may be, for example, as shown in FIG. 9D, and the picked-up image is transmitted to the image analyzer 5221. The calculation unit 5221b of the image analysis unit 5221 calculates the distance between the extension line on the captured image and the reference line at a plurality of positions. At this time, in the case where there is no change in the separation distance in the imaging progressing direction as shown in Fig. 9D, the calculating unit 5221b determines the coating advancing direction, that is, the object P is not tilted to any one side, This is transferred to the application movement control section 5222. Thereafter, the application portion 5110 is raised along the application head 5120 so as to apply the bonding agent to the second target object P, and the application portion 5110 applies the bonding agent to the second target P Facing the side. The coating unit 5200 discharges and applies the bonding agent while horizontally moving the coating unit 5200 in the middle direction of the X direction so that the coating unit 5100 is horizontally moved from the left side to the right side so that the height does not change gradually . That is, the coating motion control section 5222 controls the coating unit 5100 to move along the path in which the second to-be-processed object P is arranged as shown in Fig. 9E. Therefore, the bonding agent can be applied to the center of the side surface of the second target P to be processed.

Subsequently, similarly, while the application unit 5100 applies the bonding agent to the second target object P, the imaging unit 5211 applies the bonding agent to the third target object P positioned on the upper side of the second target object P P) side, as shown in Fig. 9E, and horizontally moves in the X-axis direction without changing the height. The image thus picked up may be as shown in Fig. 9F, for example. As a result of the calculation in the calculating section 5211, when the distance to be separated in the imaging progressing direction gradually decreases as shown in FIG. 9F, it is determined that the image of the third object P to be processed is inclined downward Which is transferred to the application movement control section 5222. Thereafter, the applying unit 5110 is moved to apply the bonding agent to the side surface of the third object P to be processed. At this time, the coating motion control unit 5222 controls the coating unit 5100 to move along the downward inclination of the third target object P as shown in FIG. 9G.

While the application unit 5100 applies the bonding agent to the third object P to be processed, the image pickup unit 5211 causes the fourth object P to be positioned above the third object P to be processed, As shown in Fig. 9G, the image is horizontally moved in the X-axis direction without changing the height. The image thus picked up may be as shown in Fig. 9H, for example.

Thereafter, although not separately shown, the image picked up by the image pickup section 5211 is transmitted to the image analysis section and analyzed, and then the movement of the application unit 5100 is controlled.

The data measured or calculated by the image pickup unit 5210 and the application movement control unit 5220 of the application control unit 5200 in the above-described manner is stored in a separate storage unit according to year, month, day, and time, Can be stored. This is because the movement path for picking up the object P while the image pickup unit 5210 moves is a value fixed by the design value and the movement of the coating unit at the time of application of the coating unit 5100 It does not affect movement.

The imaging head 5213 for moving the imaging section 5211 and the application head 51200 for moving the application section 5110 are separately provided so that the imaging section 5211 and the application section 5110 Z-axis direction. The imaging unit 5211 always obtains an image of each of the objects P while moving horizontally so as to face the center position of each object P and the application unit 5110 controls the application movement control unit 5220 according to the analysis result of the object P to be processed. That is, the application unit 5110 moves separately from the imaging unit 5211, and the application unit 5110 moves along the path in which the articles to be processed are inclined. Therefore, it is possible to apply the bonding agent to the center position of the side surface of each article P to be processed.

That is, conventionally, the imaging unit and the coating unit are connected to one head, so that the imaging unit and the coating unit always move simultaneously in the vertical direction. Therefore, the position of the application portion can not be controlled according to the degree of inclination of each object to be processed. Further, when the side of the object to be processed is imaged, the imaging section is moved along the inclined path of the previous object. Therefore, even if the object to be imaged currently is not tilted, it is recognized as inclined, Even if the degree of difference is different, it is tilted equally. Therefore, the bonding agent can not be applied to the center position of the article to be treated, and the more the application of the agent to the article to be treated is performed continuously, the more the error is accumulated.

However, in the present invention, as described above, the imaging head 5213 for moving the imaging section 5211 and the application head 5120 for moving the application section 55110 are separately provided, so that the application section 5120 It is possible to cause the bonding agent to be applied to the center position of the side surface of each article P to be processed by moving the respective articles P along the inclined path.

The application head 5120 for adjusting the height of the application portion 5510 in the vertical direction or the thickness direction of the object P and the imaging head 5213 for moving the imaging portion 5211 are separately provided, The present invention is not limited to the first embodiment and may be modified so that the application heads 5510a and 5510b and the imaging heads 5613a and 5613b are separately formed in one head (i.e., the main head 5700) You may.

That is, as shown in FIG. 9A, the application module according to the second embodiment includes a coating unit 5500a, 5500b having an application unit 5510 for discharging and applying a bonding agent to each of a plurality of objects P And imaging units 5610a and 5610b for acquiring images of the side surfaces of the plurality of objects P to be processed so as to obtain an image of each of the plurality of objects P so as to determine whether each of the plurality of objects P is parallel or inclined And controls the movement of the coating units 5500a and 5500b in accordance with the result to control the coating movement control unit to apply the bonding agent to the center of the coating surface in the vertical direction of the coating surface of the object P (Hereinafter referred to as a coating horizontal moving part 5300) for horizontally moving the coating units 5500a and 5500b and the imaging units 5610a and 5610b in the X axis direction and the coating horizontal moving part 5300 And the coating units 5500a and 5500b and the image pickup units 5610a and 5610b are supported on one surface, A coating unit (5500a, 5500b) and an image pickup unit (5610a, 5610b) comprises a main head (5700) for moving up and down.

The coating units 5500a and 5500b and the image pickup units 5610a and 5610b are supported by the main head and are composed of one pair of the application units 5500a and 5500b and one image pickup unit 5610a and 5610b The applicator may be provided in a plurality of two or more as shown in FIG. 9A, as shown in FIG. 9A or FIG. 9B, and spaced apart in a direction in which a plurality of objects to be processed are arranged.

That is, the coating module 5000 according to the second embodiment and the coating module 5000 according to the modification include a plurality of coating units 5500a and 5500b and imaging units 5610a and 5610b.

Each of the plurality of imaging units according to the second embodiment includes imaging units 5611a and 5611b for obtaining an image of a coated surface and imaging heads 5613a and 5613b for supporting imaging units 5611a and 5611b. The image pickup units 5611a and 5611b include an image pickup unit 5611 for picking up the image of the object P to be processed and one end connected to the image pickup unit 5611 and the other end to the image pickup heads 5613a and 5613b And an image pickup device support block 5612 connected to the image pickup device and capable of ascending and descending by the image pickup heads 5613a and 5613b.

The image pickup heads 5613a and 5613b are mounted on the one surface with imaging sections 5611a and 5611b and the other surface is fastened to the main head 5700 to be slidable along the main lifting member 5700a provided on the main head 5700 Do. The imaging heads 5613a and 5613b may have a smaller area than that of the main head 5700 and may have a cross section in the shape of a rectangular sphere and the other surfaces of the imaging heads 5613a and 5613b and the main head 5700, (Not shown) that slides along the main lifting member 5700a.

Each of the plurality of application units 5500a and 5500b according to the second embodiment includes application units 5510a and 5510b, application units 5510a and 5510b, and application units 5510a and 5510b for ejecting and applying a bonding agent toward the application surface of the object P And coating heads 5520a and 5520b connected to the coating units 5510a and 5510b so that the coating units 5510a and 5510b can be vertically or horizontally adjustable in height.

The application portions 5510a and 5510b are provided with a nozzle 5511 for discharging the bonding agent toward the coated surface of the object P, one end connected to the nozzle 5511 and the other end connected to the application heads 5520a and 5520b, And a nozzle support block 5512 capable of moving upward and downward by the application heads 5520a and 5520b.

The application heads 5520a and 5520b according to the second embodiment are mounted on the imaging heads 5613a and 5613b and are connected to the nozzle support block 5512 so as to move up and down the coating support 5512 A member 5521, and a coating drive unit 5522 for driving the application up / down member 5521. [ Here, the application up / down member 5521 may be a rotatable ball screw, and the nozzle support block 5512 may be configured to be coupled to the application up / down member 5521, which is a ball screw, The motor 5522 may be a motor.

In the application module according to the second embodiment, the application position control of the application unit using the application movement control unit is the same as that in the first embodiment, and a detailed description of the operation will be omitted.

The curtain gas module 6000 is supported by any one of the first and second loading portions 4100b to spray gas to a plurality of objects P to be coated, A curtain made of gas is formed on the upper side and the lower side of the substrate P so as to prevent the bonding agent from adhering to the upper surface and the lower surface of the object P to be processed.

The curtain gas module 6000 includes a gas injecting unit 6100 for injecting gas in the upper and lower directions of each of a plurality of the objects P to be processed, a direction in which the first and second loading units 4100a and 4100b are arranged , And a transfer unit (hereinafter referred to as a jetting unit horizontal transfer unit 6200) which extends in the X-axis direction and horizontally feeds the gas jetting unit 6100 in the X-axis direction.

As shown in FIGS. 11 and 12, the gas injection unit 6100 is extended in one direction and spaced apart in the vertical direction, and a gas, such as air (air) And a jetting body 6120 extending in the vertical direction and supporting the plurality of gas jetting portions 6110. The gas jetting portion 6110 includes a plurality of gas jetting portions 6110, Here, the injection body 6120 is installed to support the opposite surface, that is, the rear surface, of the gas injection portion 6110 through which the gas is injected, and the upper portion is connected to the injection unit horizontal transfer portion 6200.

The gas injector 6110 injects gas in the upper and lower directions of the object P to be processed. That is, the gas injector 6110 according to the present invention injects gas to the upper side and the lower side of the upper surface of the object to be processed P, And the gas is injected to the upper side and the lower side of each of the plurality of the objects P to be processed.

11 and 12, each of the plurality of gas jetting portions 6110 according to the embodiment includes a first gas jetting member 6111 for jetting gas onto the upper surface of a workpiece P, A second gas injection member 6111 and a second gas injection member 6111. The second gas injection member 6111 injects a gas to the lower side of the lower surface of the other workpiece P positioned above the workpiece P, And an injection member 6112.

The first gas injection member 6111 may be in the shape of a plate having a predetermined width (area) and a height and may be formed at one end or one side of the first gas injection member 6111 along the extension direction of the P (Hereinafter, referred to as a first slit 6111a) for spraying a gas or a target P to be processed. In the first gas injection member 6111, a channel (hereinafter referred to as a first channel 6111b) for temporarily supplying gas supplied from the outside and supplying gas to the first slit 6111a is provided, A first gas supply means connected to the first channel 6111b and supplying gas to the first channel 6111b is provided outside the gas injection member 6111. [

Here, the first channel 6111b is located in the rear of the first slit 6111a inside the first gas injection member 6111, and is arranged to communicate with the first slit 6111a. The first channel 6111b according to the embodiment may have a shape of an empty space extending along the extending direction of the first slit 6111a in the first gas injection member 6111. However, 6111a of the first embodiment of the present invention.

The first gas injection member 6111 is located on the upper side of the workpiece P and injects the gas toward the upper side of the workpiece P to be processed. In order for the gas injected from the first gas injection member 6111 located above the workpiece P to be sprayed toward the upper side of the workpiece P, the first gas injection member It is necessary to guide the gas injected from the first slit 6111a of the first slit 6111 to the lower side where the workpiece is located. Accordingly, in the present invention, the first slit 6111a and the first channel 6111b are connected and communicated, and the lower region of the first channel 6111b is connected to the first slit 6111a.

One side surface of the first gas injection member 6111 provided with the first slit 6111a is inclined downward at a predetermined angle not perpendicular to the upper surface thereof, It may be a curved surface having curvature while being inclined downward. More specifically, the lower region of the first slit 6111a to which the first channel 6111b is connected is inclined downward in the vertical direction of the one side region of the first gas injection member 6111, and more preferably, . Therefore, the gas injected from the first slit 6111a is injected downward toward the upper side of the object P, diffused along the upper surface of the object P, A curtain is formed on the upper side. At least a portion of the gas may be directed toward the first gas injection member 6111. At this time, the flow is induced along the inclined surface formed on one side of the first gas injection member 6111, Out of the curtain gas module 6000 through the lower space of the curtain gas module 6111.

When one side of the first gas injection member 6111 is perpendicular to the upper surface of the first gas injection member 6111, the gas moves back to the first slit 6111a by the vortex, So that the formation of the air curtain is not easy. Thus, as described above, one side of the first gas injection member 6111 through which the gas is injected is inclined downward, thereby preventing the gas from entering the first slit 6111a again by the vortex, So that it can be discharged in the direction in which the body 6120 is located.

The second gas injection member 6112 is in the form of a plate having a predetermined width and height and is formed at one end or one side of the gas injection member 6112 along the extension direction of the target P to generate gas (Hereinafter referred to as a second slit 6112a) is provided. The length of the second gas injection member 6112 is smaller than that of the first gas injection member 6111. More specifically, the length of the second gas injection member 6112 in the direction in which the second slit 6112b is provided is shorter than that of the first gas injection member 6111, And the length of the side intersecting or orthogonal to the direction in which the second slit 6112a is provided is shorter than that of the first gas injection member 6111. [

In the second gas injection member 6112, a channel (hereinafter referred to as a second channel 6112b) for temporarily supplying gas supplied from the outside and supplying gas to the second slit 6112a is provided, A second gas supply means connected to the second channel 6112b and supplying gas to the second channel 6112 is provided outside the gas injection member 6112. [

Here, the second channel 6112b is located in the rear of the second slit 6112 inside the second gas injection member 6112, and is arranged to communicate with the second slit 6112a. The second channel 6112b according to the embodiment is not limited to the shape of the empty space formed inside the second gas injection member 6112 along the extending direction of the second slit 6112b, 6112a, 6112a.

The second gas injection member 6112 is located below the workpiece P and injects gas toward the lower side of the workpiece P to be processed. In order for the gas injected from the second gas injection member 6112 located above the workpiece P to be injected toward the lower side of the workpiece P, the second gas injection member It is necessary to guide the gas injected from the second slit 6112a of the workpiece 6112 to the upper side where the workpiece P is located. Accordingly, in the present invention, the second slit 6112a and the second channel 6112b are connected and communicated, and the upper region of the second channel 6112b is connected to the second slit 6112a.

One side of the second gas injection member 6112 provided with the second slit 6112a may be a sloped surface inclined upwards at a predetermined angle and an upper region of the sloped surface may be a curved surface having an upward inclination and a curvature. More specifically, in the vertical direction of the one side region of the second gas injection member 6112, the upper region of the second slit 6112a connected to the second channel 6112b is inclined upward, and more preferably, . The gas injected from the second slit 6112a is injected downward toward the lower side of the lower surface of the workpiece P and diffused along the lower surface of the material P to be processed, P) to form a curtain on the right side. At the same time, at least some of the gas is directed again toward the second gas injection member 6112, at which time the flow is induced along the inclined surface formed on one side of the second gas injection member 6112, 6112 to the outside of the curtain gas module 6000 through the upper space.

On the other hand, when one side of the second gas injection member 6112 is at right angles, there is a problem that the gas moves back to the second slit 6112a by the vortex, So that the formation of the air curtain is not easy. Thus, as described above, one side of the second gas injection member 6112 through which the gas is injected is inclined downward, thereby preventing the gas from entering the second slit 6112a again by the vortex, So that it can be discharged in the direction in which the body 6120 is located.

The first gas injection member 6111 and the second gas injection member 6112 may be integrally connected to each other in the vertical direction. For example, the other end facing the one end of the first gas injection member 6111 provided with the first slit 6111a and the other end facing the end of the second gas injection member 6112 provided with the second slit 6112a And the other end of the first slit 6111a and the other end of the second slit 6112a are connected to the injection body 6120.

A plurality of gas injection portions 6110 composed of the first gas injection member 6111 and the second gas injection member 6112 are provided so as to be vertically spaced apart from the injection body 6120. After a workpiece P is positioned between the gas spraying section 6110 and the gas spraying section 6110 which are vertically spaced apart from each other when the bonding agent is applied to each of the plurality of the objects P to be processed, Spray gas.

In the above description, the gas injector 6110 has been described as an integral type in which the first gas injection member 6111 and the second gas injection member 6112 are coupled to each other. However, the present invention is not limited to this, and may be a separate gas injection unit 6110 in which the first gas injection member 6111 and the second gas injection member 6112 are not coupled to each other.

The injection unit horizontal feed portion 6200 is disposed in the direction intersecting the moving direction of the first and second loading portions 4100a and 4100b or in the direction in which the first loading portion 4100a and the second loading portion 4100b are arranged, And horizontally moves the gas injection unit 6100 in the X-axis direction. The injection unit horizontal transfer part 6200 may be an LM rail mounted and supported on the second gantry G2 extending in the X axis direction and the injection unit horizontal transfer part 6200 may be provided on the injection body 6120 of the gas injection unit 6100, A horizontal movement block slidable along the horizontal movement block 6200 may be provided, and the horizontal movement block may be, for example, an LM block.

In the coating apparatus according to the present invention, a plurality of take-out buffer modules 7000a and 7000b waiting for the object P to which the bonding agent is applied to be delivered to the take-out unit 40 are provided. Modules 7000a and 7000b may be provided. The first take-out buffer module 7000a and the second take-out buffer module 7000b are located in front of the application module 5000 and are spaced apart from each other in the X axis direction. In order to support the first take-out buffer module 7000a and the second take-out buffer module 7000b, the first take-out buffer module 7000a and the second take-out buffer module 7000b are extended in the Y axis direction, (Hereinafter, fourth to sixth buffer supports 4510, 4520 and 4530) are provided.

Each of the first and second carry buffer modules 7000a and 7000b has the same shape and configuration as the first and second fetch buffer modules 3000a and 3000b described above. 13, the first and second take-out buffer modules 7000a and 7000b will be described in detail. Each of the first and second take-out buffer modules 7000a and 7000b includes a plurality of Out buffers 7100a and 7100b for picking up and lowering the pick-up buffers 7100a and 7100b and pick-up buffer pick-up and pick-up parts 7200a and 7200b for picking up and lowering the pick-out buffers 7100a and 7100b in the Y- Out buffers horizontal drive units 7300a and 7300b and carry-out buffer vertical move units 7200a and 7200b and carry-out buffer horizontal drive units 7300a and 7300b for transferring the carry-out buffer horizontal drive units 7300a and 7300b And an output buffer horizontal shifting unit 7400a and 7400b horizontally movable in the Y-axis direction.

The carry-out buffers 7100a and 7100b are arranged so as to be opposed to each other in the X-axis direction, and a pair of support blocks 7111 capable of supporting a plurality of to-be- At least one of the buffer member 7110 and the buffer member connection portion 7120 and the pair of buffer members 7110 connected to the upper portion of the pair of buffer members 7110 facing each other are moved in the X- And a buffer member horizontal shifting portion 7130 for enabling alignment of the stacked object P to be processed. It also includes a drive unit for operating the take-out buffer horizontal drive units 7300a and 7300b such that the take-out buffer horizontal movement units 7400a and 7400b can horizontally move forward and backward by the take-out buffer horizontal drive units 7300a and 7300b, The drive unit of the first take-out buffer module 7000a may be installed on the fourth buffer support platform 7510 and the drive unit of the second take-out buffer module 7000b may be installed on the sixth buffer support platform 7530. [

Each of the pair of buffer members 7110 extends in the vertical direction, and each of the inner side surfaces of the buffer member 7110 facing each other is provided with the support block 7111 as described above. That is, a plurality of grooves for inserting one end and the other end edge of the object P are provided on the inner side surface of the pair of buffer members 7110. The pair of buffer members 7110 are connected to each other by a buffer member connection portion 7120. The buffer member connection portion 7120 extends in the left-right direction or the X-axis direction, As shown in FIG.

The buffer member horizontal moving part 7130 includes a buffer member guide part 7131 extending along the buffer member connecting part 7120 and installed on the buffer member connecting part 7120 and a pair of buffer members 7110 And a buffer member moving block 7132 which moves horizontally along the buffer member guide portion 7131 to connect the buffer member guide portion 7131 with the upper portion of the buffer member guide portion 7131. Here, the buffer member guide portion 7131 may be, for example, a ball screw.

Some of the carry-out buffer ascending / descending parts 7200a and 7200b are connected to the carry-out buffers 7100a and 7100b, and a part of them are connected to the buffer horizontal moving parts 7400a and 7400b. The carry-out buffer ascending / descending sections 7200a and 7200b according to the embodiment are provided as a pair, and are connected to a pair of buffer members 7110, respectively. The take-out buffer ascending and descending sections 7200a and 7200b according to the embodiment can be, for example, LM rails extended in the vertical direction. An LM rail is provided between the carry-out buffer ascending / descending sections 7200a and 7200b and the carry out buffers 7100a and 7100b A rising / falling block that slides in the vertical direction may be provided.

The unloading buffer horizontal driving units 7300a and 7300b are provided on the fifth buffer supporting base 7520 and are connected to the buffer horizontal moving units 7400a and 7400b with one end thereof being connected to the buffer guide member 7310 extending in the Y axis direction, And a buffer member moving block 7320 connected to the buffer guide member 7310 and capable of horizontally moving back and forth along the buffer guide member 7310 while supporting the buffer horizontal movements 7400a and 7400b.

The unloading buffer horizontal moving parts 7400 and 7400b are coupled with the pair of unloading buffer ascending and descending parts 7200a and 7200b and are moved in the Y axis direction along the buffer guide member 7310 by the buffer moving block 7320. [ The unloading buffer horizontal shifters 7400a and 7400b according to the embodiment may have a lower open shape, for example, 'П' shape.

According to the export buffer modules 7000a and 7000b, the carry-out buffers 7100a and 7100b move in the vertical direction by the carry-out buffer ascending / descending sections 7200a and 7200b, and when aligning the object P, At the time of changing the size of the water P, at least one of the pair of buffer members 7110 is moved in the X-axis direction by the buffer member horizontal shifting portion 7130. At this time, when at least one of the pair of buffer members 7110 is moved, the pair of buffer members 7110 can be moved so as to approach each other or to move away from each other. The unloading buffer horizontal moving units 7400a and 7400b are movable in the Y axis direction by the unloading buffer horizontal driving units 7300a and 7300b so that the unloading buffer moving units 7300a and 7300b are connected to the unloading buffer horizontal moving units 7300a and 7300b, Out buffers 7100a and 7100b connected to the carry-off buffer ascending and descending parts 7200a and 7200b horizontally move together along the buffer guide member 7310 in the Y axis direction.

The carry-out units 8000a and 8000b transfer the object P loaded in the carry-out buffers 7100a and 7100b to the carry-out apparatus 40. [ A plurality of, for example, two carry-out units (hereinafter referred to as first and second carry-out units 8000a and 8000b) are provided in front of the first carry-out buffer 7100a and the second take-out buffer 7100b Respectively. That is, it includes a first take-out unit 8000a provided in front of the first take-out buffer 7100a and a second take-out unit 8000b provided in front of the second take-out buffer 7100b.

The first unloading unit 8000a is provided with a first unloading robot 8100a and a first unloading robot 8100a which receive and deliver the object P to which the bonding agent has been applied from the first unloading buffer 7100a (Hereinafter, referred to as a first carry-out section 8200a) for transferring from the first carry-out buffer 7100a to the carry-out apparatus 40. [ The first take-out unit 8000a according to the embodiment is provided with a plurality of (for example, two) first take-out robots 7100a so as to be able to carry out the object P alternately or alternately from the first take- And the pair of first carry-out robots 8100a move forward or backward alternately or alternately on the first carry-out section 8200a.

The first carry-out conveying portion 8200a is located below the first curing unit 30a and includes a first carry-out conveying support 8210a extending from the first take-out buffer 7100a to the conveying unit 40 in the Y axis direction, A pair of first carry-out guide members (8100a) extending along the extending direction of the first carry-out conveying support 8210a on the first carry-out conveying support 8210a and horizontally moving the pair of first take-out robots 8100a, 8220a.

Each of the pair of first take-out robots 8100a includes a support portion (hereinafter referred to as a first take-out supporting portion 8110a) that receives and receives the object P to which the bonding agent has been applied from the first take-out buffer 7100a, A first take-out horizontal moving block 8110c which is fastened to the first carry-out guide member 8220a and slides along the Y-axis direction along the first carry-out guide member 8220a, and a first take- And the other end is connected to the first take-out horizontal moving block 8110c. Here, the first carry-out supporting portion 8110a may be, for example, in the form of a bar extending in one direction, and may include means for supporting and fixing the object P at least at a part where the object P is supported A vacuum suction hole may be provided.

The second unloading unit 8000b transfers the object P to which the bonding agent has been applied from the second unloading buffer 7100b to the unloading unit 40. The first unloading unit 8000b And have the same configuration and shape. That is, the second take-out unit 8000b includes a second take-out robot 8100b and a second take-out robot 8100b which receive and deliver the object P to which the bonding agent has been applied from the second take-out buffer 7100b (Hereinafter, referred to as a second carry-out conveyance section 8200b) for conveying the sheet S from the second take-out buffer 7100b to the carry-out apparatus 40. [ The second take-out unit 8000b according to the embodiment is provided with a plurality of (for example, two) second take-out robots 830b so that the object P can be taken out from the second take-out buffer 7100b alternately or alternately. And the pair of second carry-out robots 8100b move forward or backward alternately or alternately on the second carry-out transfer portion 8200b.

The second carry-out conveying portion 8200b is located below the second curing unit 30b and includes a second carry-out conveying support 8210b extending in the Y-axis direction from the second carry-out buffer 7100b to the carry- A pair of second carry-out guide members (8100b) extending along the extending direction of the second carry-out conveying support 8210b on the second carry-out conveying support base 8210b and horizontally moving the pair of second take-out robots 8100b 8220b.

Each of the pair of second take-out robots 8100b includes a support portion (hereinafter referred to as a second take-out supporting portion 8110b) that receives and receives the object P to which the bonding agent has been applied from the second take-out buffer 7100b, A second carrying-out horizontal moving block 8210c which is installed to be engaged with the second carrying-out guide member 8220b and slides along the Y-axis direction along the second carrying-out guide member 8220b, And a second connecting member 8210b connected to the second take-out guide member 8220b and the other end connected to the second take-out horizontal moving block 8210c. Here, the second carry-out supporting portion 8110b may be, for example, in the form of a bar extending in one direction, and at least a part for supporting the object P may include means for supporting and fixing the object P A vacuum suction hole may be provided.

The first and second carry-out guide members 8220a and 8220b of the first and second carry-outs 8200a and 8200b according to the embodiment are connected to the LM rail, the first carry-out robot 8100a and 8100b, Horizontal movement blocks 8110c and 8210c0 may be LM blocks. However, the present invention is not limited to this, and various means for horizontally moving the first and second take-out robots 8100a and 8100b in the Y-axis direction can be used for the first and second carry-out guide members 8220a and 8220b, Various means capable of sliding along the first carry-out guide members 8220a and 8220b can be used for the first and second unloading horizontal movement blocks 8110c and 8210c.

Each of the first and second curing units 30a and 30b cures the bonding agent applied to the side surface of the article P, that is, the bonding agent. Here, the first curing unit 30a is located in front of the first carry-out buffer 7100a and is provided on the movement path of the first carry-out support unit 8100a, which will be described later, And is provided on the movement path of the second carry-out supporting portion 8100b, which will be described later. That is, the first curing unit 30a and the second curing unit 30b are spaced apart from each other in the X axis direction in the front area of the first and second carry-out buffers 7100a and 7100b, (8000a, 8000b). In order to support the first and second curing units 30a and 30b, the first and second curing units 30a and 30b are disposed on the third table 53 in the direction in which the first and second curing units 30a and 30b are arranged, A tree G3 may be provided and the first and second curing units 30a and 30b may be fixedly installed in the third gantry G3.

The first and second curing units 30a and 30b according to the embodiment are means for radiating light, for example UV (ultraviolet ray), which can harden the bonding agent in the direction in which the article to be processed is transported, for example, downward. Various means for curing the bonding agent to be applied to the object P may be used. For example, when the bonding agent applied to the object P is a thermosetting material, the first and second curing units 30a and 30b may be means for radiating heat.

The take-out device 40 takes out the object P delivered from each of the first and second take-out units 8000a and 8000b of the application device 20 to the outside of the application equipment. The transfer device 40 is provided on the third table 53 and includes a transfer module 9000 for transferring the object P from the first and second transfer units 8000a and 8000b to the outside, A defect inspection unit 90 located between the first and second carry-out units 8000a and 8000b and the carry-out module 9000 for inspecting the object P, And a bad carry-out mounting portion 96 for separately transporting the defective object P and taking it out when the object P is defective.

The unloading module 9000 according to the embodiment of the present invention places the articles to be processed transferred from the first and second unloading units 8000a and 8000b on the tray T and discharges the tray T to the outside . That is, the take-out module 9000 according to the embodiment is installed in front of the first and second take-out units 8200a and 8200b above the third table 53, and a plurality of empty trays T are stacked The first and second tray stacking portions 9210 and 9220 are located between the first tray stacking portion 9210 and the second tray stacking portion 9220. The first and second tray stacking portions 9210 and 9220 (Hereinafter referred to as a second tray take-out unit (hereinafter, referred to as " second tray take-out unit ") for placing a tray T, 9230), horizontal movement in the X-axis and Y-axis directions, and upward / downward movement are possible so that the object P supported on the first or second carry-out supporting portions 8100a, A second pick-up unit 9240 for putting the first pick-up unit 9210 on the empty tray T mounted on the second tray stacking unit 9220, (Hereinafter, referred to as a second tray transfer unit 9250) for transferring the trays (trays on which the objects are placed) of the stacking units 9210 and 9220 to the second tray stacking unit 9230 do.

Here, the first and second tray loading portions 9210 and 9220 and the second tray loading and unloading portion 9230 are spaced from each other in the X axis direction. That is, the first tray stacking portion 9210 and the second tray stacking portion 9220 are spaced apart from each other in the X axis direction above the third table 53, and the first tray stacking portion 9210 and the second tray stacking portion 9220 And a second tray carry-out portion 9230 is positioned between the first and second tray carrying portions 9220 and 9220. In addition, a plurality of empty trays T are stacked on the first tray stacking portion 9210 and the second tray stacking portion 9220, respectively. In the operation of taking out the object to be treated after the coating process, any one of the first tray mounting portion 9210 and the second tray mounting portion 9220 is provided with the to-be-processed object P, Is picked up by the second pick-up unit 9240, and a plurality of trays T to be used in the next carry-out process are loaded on the other tray loading unit 9210 or 9220. [ For example, the second pick-up unit 9240 receives the article P from the first and second carry-out supporting portions 8100a and 8100b and holds the empty tray T located in the first tray loading portion 9210, And the second tray transfer unit 9250 transfers the tray T on which the article P is placed to the second tray take-out unit 9230. Meanwhile, if empty trays T loaded on the first tray stacking portion 9210 are exhausted from the second tray stacking portion 9220, a plurality of empty trays T are stacked for the next stacking process It is in a waiting state.

The second pick-up unit 9240 seats the object P supported on the first and second carry-out supporting portions 8100a and 8100b on the empty trays of the first and second tray stacking portions 9210 and 9220, . The second pick-up unit 9240 supports and fixes the object P placed on the first and second carry-out supporting portions 8100a and 8100b to form an empty space of the first or second tray loading portion 9210 and 9220 (Hereinafter, referred to as a first pick-up conveyance section 9242) that horizontally moves the second pick-up section 9241 and the second pick-up section 9241 in the X and Y axis directions and moves them in the vertical direction .

The second pickup unit 9241 may have the same shape and structure as the first pickup unit 1241 of the first pickup unit 1240 described above. That is, the second pick-up part 9241 is formed to extend in the vertical direction, and at least the lower part thereof is provided with a to-be-processed holding part capable of supporting and fixing the object P to be processed. The second pick-up section 9241 according to the embodiment or the object to be processed supporting means may be means for supporting the object to be processed with vacuum attraction force, but various means capable of holding and fixing the object to be processed can be used.

The second pick-up conveyance section 9242 is the same as the first pick-up conveyance section 1242 described above. That is, the second pick-up conveyance section 9242 includes a first guide member 9242a extending from the upper side of the third table 53 in the Y-axis direction, a second guide member 9242b extending and extending in the X-axis direction so as to intersect or orthogonally intersect with the first guide member 9242a A second guide member 9242b disposed on the upper portion of the first guide member 9242a and a second guide member 9242b provided on the upper portion of the first guide member 9242a for connecting between the second guide member 9242b and the first guide member 9242a, A first horizontal moving block 9242c slidable along the first guide member 9242a and a second horizontal moving block 9242b slidable along the second guide member 9242b so as to connect the second pickup unit 9241 and the second guide member 9242b, A moving block 9242d which is installed to connect the second pick-up section 9241 and the second horizontal moving block 9242d and a rising and falling block 9242e which can be moved up and down along the extending direction of the ninth pick- .

Here, each of the first guide member 9242a and the second guide member 9242b is, for example, an LM rail, the first horizontal moving block 9242c includes an LM block that slides along the first guide member 9242c, The horizontal movement block 9242d may be an LM block that slides along the second guide member 9242b.

A third guide member extending in the Z-axis direction is provided on one surface of the second pickup section 9241, that is, on one surface of the second pickup section 9241, which is engaged with the ascending / descending block 9242e, such that the ascending / descending block 9242e can slide in the vertical direction The third guide member may be an LM guide, and the ascending / descending block may be an LM block.

Of course, the first and second guide members 9242a and 9242b and the third guide member, the first and second horizontal movement blocks 9242c and 9242d, and the ascending / descending block 9242e are not limited to the LM rail and the LM block Various means capable of horizontally moving the second pickup portion 9240 in the X-axis and Y-axis directions can be used.

The second tray transfer unit 9250 has the same configuration and formation as the above-described first tray transfer unit 1250 described above. That is, the second tray transfer unit 9250 is disposed in the first or second tray loading unit 9210 or 9220, and is provided with a tray (not shown) for supporting a tray on which a plurality of to-be- (Hereinafter, referred to as a second tray supporting portion 9251), and a tray conveying portion (hereinafter referred to as a second tray conveying portion 9252) for conveying the second tray supporting portion 9251 in the X axis direction.

The second tray feeder 9252 is extended in the direction corresponding to the direction in which the second tray stacking portion 9210, the second tray stacking portion 9230 and the second tray stacking portion 9220 are arranged, A guide member (hereinafter referred to as a tray guide member 9252a) provided at the rear of the first tray stacking portion 9210, the first tray stacking portion 9230 and the second tray stacking portion 9220, (Hereinafter referred to as a tray horizontal movement block 9252b) horizontally moving along the horizontal movement block 9252a.

The tray guide member 9252a of the second tray transfer unit 9252 according to the embodiment is installed in the fourth gantry G4 and is an LM rail and the tray horizontal movement block 9252b is an LM block, Various means for horizontally moving the second tray supporting portion 9251 can be used for the second tray conveying portion 9252. [

The second tray supporting portion 9251 has a tray supporting member 9251b for supporting the tray T, one end connected to the tray supporting member 9251b and the other end connected to the tray horizontal moving block 9252b of the second tray feeding portion 9252, And a connecting means 9251a connected to the connecting means 9251a. Here, the connecting means 9251a may be a bar-shaped member extending in one direction, e.g., the Y-axis direction. The connecting means 9251a is provided with a tray supporting member 9251b, for example, means for supporting the tray T with a vacuum suction force. However, in addition to the supporting means using the vacuum attraction force, the tray supporting member 9251b can be applied with various means capable of supporting the tray T by another supporting method. The tray supporting member 9251b may be provided in a plurality of ways. For example, when two tray supporting members 9251b are provided, the tray supporting member 9251b may be disposed on both sides of the connecting means 9251a.

In the above description, the unloading module 9000 according to the embodiment of the present invention includes means for laying the object P to which the coating process has been completed in the empty trays T stacked in the vertical direction, . However, the present invention is not limited to this, and the take-out module 9000 may be modified to include a cassette capable of vertically stacking the object P having been subjected to the coating process without using the tray T At this time, a separate robot that can take out the object to be processed placed on the cassette to the outside can be installed.

The defect inspection unit 90 includes an inspection unit 91 for inspecting an image or an image of the object P to inspect it for defects, a guide member (hereinafter referred to as a first inspection guide member 92) A guide member (hereinafter referred to as a second inspection guide member) which is formed to extend in the X-axis direction and is fastened to the first inspection guide member 92 and can slide in the Y-axis direction along the first inspection guide member 92 And a horizontal movement block (hereinafter referred to as a horizontal movement block) 93 which is provided so as to connect between the first inspection guide member 92 and the second inspection guide member 93 and can slide in the Y axis direction along the first inspection guide member 92 (Hereinafter, referred to as a second inspection guide horizontally moving block 94), a second inspection guide member 92 and an inspection unit 91 so as to be able to slide along the second inspection guide member 93 And an inspection section horizontal movement block 95).

Hereinafter, the operation of the coating equipment according to the embodiment of the present invention will be described with reference to FIGS. 1 to 13. FIG. At this time, the contents overlapping with the above contents will be omitted or briefly explained.

First, a to-be-processed object P to be processed is loaded on a tray T and a plurality of trays T on which the to-be-processed object P is loaded are loaded into a first tray input portion (Not shown). The first pick-up unit 1241 is horizontally moved in the X and Y axes through the first pick-up unit 1242 so that the first pick-up unit 1241 is positioned above the first tray- . The tray T positioned at the uppermost position of the first tray input portion 1210 is raised to be adjacent to the first pickup portion 1241 using the ascending and descending portion located below the first tray input portion 1210 , The object P is vacuum-sucked and supported on the lower portion of the first pickup 1241. When the object P is supported on the first pick-up part 1241, the first pick-up part 1242 is operated again to move the first pick-up part 1241 to the alignment stage 1100, The object to be processed P supported on the pickup unit 1241 is placed on the alignment stage 1100. In the alignment stage 1100, a plurality of alignment pins are horizontally moved in one direction to align the object P to be processed. When the alignment of the object P is completed, the transfer unit 1300 unloads and supports the object P from the alignment stage 1100 and transfers the object P to the drawing module 2000, More specifically, on the first draw-in support portion 2100 and the second draw-in support portion 2200 alternately.

As described above, the object P to be processed of the first tray input unit 1210 is placed on the alignment stage 1100, and the object P placed on the alignment stage 1100 is placed on the entry stage The operation of resting on the receiving supports 2100 and 2200 of the main body 2000 is carried out continuously. At this time, the first tray transfer unit 1252 is operated to move the first tray support unit 1251 to the upper side of the first tray input unit 1210, and the empty tray is supported on the first tray support unit 1210. Thereafter, the first tray transfer unit 1252 is operated again so that the first tray support unit 1251 is positioned above the first tray support unit 1230 and the empty tray supported by the first tray support unit 1251 1 tray take-out unit 1230. [ The second tray input unit 1220 is provided with a plurality of trays T on which an object to be processed is placed while the object P to be processed in the first tray input unit 1210 is moved to perform a coating process, And it may be in a state of waiting.

When the article P is supported on the transfer support part 1310 of the charging device 10, the object P is transferred to the first or second retraction buffer 3100a or 3100b For example, first into the first input buffer 3100a. For this purpose, the transfer conveying part 1320 is operated so that the transfer supporting part 1310 horizontally moves to be positioned above the inlet module 2000, that is, above the first inlet support part 2100 or the second inlet support part 2200, The first pull-in buffer 3100a is moved to the rear where the first and second pull-in supports 2100 and 2200 are located through the pull-in buffer horizontal shifting portion 3400a. Thereafter, the lead-in guide member 2300 and the first and second forward / backward movement members 2400 and 2500 are operated to move the first draw-in support portion 2100 and the second draw-in support portion 2200 in the X-axis direction, The first pulling-in support part 2100 and the second pulling-up support part 2200 are horizontally moved so as to be positioned behind the first pulling-in buffer 3100a. The first retractable support 2100 is operated through the first retractable member 2400 to retract the first retractable support 2100 in the direction in which the transmission unit 1300 is located. The transfer support part 2100 seats the article P on the first support part 2100 and the first support part 2100 moves forward toward the first retraction buffer 3100a, Into the one-in-one buffer 3100a. At this time, the to-be-processed object P placed on the first draw-in support part 2100 is positioned on the upper side of the support block 3111, for example, the uppermost support block 3111. Next, when the first drawing buffer 3100a is lowered, the article P placed on the first drawing supporting portion 2100 is placed on the uppermost supporting block 3111 of the first drawing buffer 3100a, And the first receiving support portion 2100 moves backward in the direction of the transfer supporting portion 1310.

As described above, the to-be-processed object P is placed on the first draw-in support portion 2100, and the object P is fed into the first draw-in buffer 3100a through the first draw-in support portion 2100 The second receiving support portion 2200 is moved backward to the position of the transfer supporting portion 1310 and the transfer supporting portion 1310 seats the object P on the second receiving supporting portion 2200. Thereafter, the second forward / backward movement member 2500 is operated to advance the second pulling support portion 2200 toward the first pulling-in buffer 3100a so that the second pulling support portion 2200 is moved to the first pulling-in buffer 3100a, The second receiving support portion 2200 is inserted to be positioned above the empty supporting block 3111 located below the uppermost supporting block 3111 on which the object P is placed . Thereafter, when the first drawing buffer 3100a is lowered, the article P placed on the second drawing supporting portion 2200 is placed on the supporting block 3111 of the first drawing buffer 3100a, The second receiving support portion 2200 moves backward in the direction of the transfer supporting portion 1310. [

As described above, in the present invention, the operations of the first and second draw-in support portions 2100 and the first draw-in buffer 3100a are repeatedly performed to form a plurality of objects to be processed 3100a in the first draw- P in the vertical direction.

When a plurality of objects P are loaded on the first loading buffer 3100a, the plurality of objects P are transferred to the first loading unit 4100a and the plurality of objects P are loaded on the first loading unit 4100a. Toward the curtain gas module (6000) and the application module (5000). The first loading portion 4300a is rotated using the first rotating table 4200a so that the mounting member 4110 is not the body 4120 of the first loading portion 4100a but the first loading portion 4300b And is rotated to face the buffer 3100a. The first loading unit 4100a moves the first loading unit 4100a toward the first loading buffer 3100a by operating the first loading unit transporting unit 4300a to move the first loading unit 4100a to the first loading buffer 3100a, Respectively. At this time, each of the plurality of seating members 4110 constituting the first loading unit 4100a is positioned below each of the plurality of the objects P supported by the first receiving buffer 3100a. When the first receiving buffer 3100a is lowered, a plurality of objects P that are seated in the supporting block 3111 of the first receiving buffer 3100a are transferred to a plurality of seats of the first loading portion 4100a Member 4110, respectively.

On the other hand, in the present invention, in the quadrangular-shaped article P having four sides (i.e., the first to fourth sides), the bonding agent is applied to the first to third sides, Do not apply the agent. Therefore, when a plurality of the objects P to be processed are loaded in the first drawing buffer 4100a, the fourth side of each article P is directed to the direction in which the first loading portion 4100a is located. When the first loading portion 4100a is inserted into the first loading buffer 3100a and a plurality of the objects P are placed on the first loading portion 4100a in this state, The fourth side faces the body 4120 of the first loading portion 4100a, and the other first to third side surfaces are exposed.

Next, the first loading portion transporting means 4300a is operated to advance the first loading portion 4100a so that the first loading portion 4100a is positioned between the gas injection unit 6100 and the application unit 5100 . At this time, the injection unit transfer section 6200 is operated so that the gas injection unit 6100 horizontally moves to be positioned in front of the first loading buffer 3100a or the first loading section 4100a, To horizontally move the coating unit 5100 so as to be positioned behind the first loading buffer 3100a, the first loading unit 4100a and the gas injection unit 6100. [ Thereafter, the first loading portion 4100a is rotated through the first rotating table 4200a so that the mounting member 4110, which is not the body 4120 of the first loading portion 4100a, See you. At this time, the gas injection unit 6110 of the gas injection unit 6100 is positioned above and below each of the plurality of target objects P supported by the first loading unit 4100a, and the first loading unit 4100a The one side surface, that is, one side surface of the plurality of target objects P supported on the gas injection unit 6100 is exposed to the outside of the injection body 6120 of the gas injection unit 6100, See you.

The bonding agent is applied to one side (hereinafter, referred to as a first side) of each of the plurality of the processed products P stacked on the first loading portion 4100a through the coating unit 5100, (P) located on the lowermost side of the workpiece (4100a). To this end, the placement state of the object P positioned at the lowermost position is first analyzed through the imaging unit 5210 and the coating motion control unit 5220. [

That is, the imaging section 5211 is moved along the imaging head 5213 to move the imaging section 5211 to the height of the first target object P positioned at the lowermost position, that is, the first imaging height. Then, the image of the first side face of the first object P is picked up while horizontally moving the imaging unit 5211 from the left to the right at the first imaging height. At this time, the imaging unit 5211 horizontally moves in the X-axis direction without changing the height, as shown in Fig. 9A. The image thus picked up may be, for example, as shown in FIG. 9B, and the picked-up image is transmitted to the image analyzing unit 5221. The calculation unit 5221b of the image analysis unit 5221 calculates the separation distance between the extension line on the captured image and the reference line at a plurality of positions. At this time, when the separation distance gradually increases in the imaging progressing direction as shown in FIG. 9B, the calculating unit 5221b judges that the coating advancing direction, that is, the object P to be processed is arranged in an upward inclined state from left to right Which is transferred to the application movement control section 5222. Thereafter, the application portion 5110 is raised along the application head 5120 to apply the bonding agent to the first object P to be processed, and the application portion 5110 applies the bonding agent to the first object P Let's face the first aspect. At this time, the coating motion control unit 5222 moves the coating unit 5100 horizontally from the left to the right while moving the coating unit 5100 horizontally in the X direction so as to increase the height of the coating . That is, the coating motion control section 5222 controls the coating unit 5100 to move the first workpiece P in a tilted state or along a path as shown in Fig. 9C. Therefore, the bonding agent can be applied to the center of the first side face of the first object to be processed (P).

Thus, while the application unit 5100 applies the bonding agent to the first object P to be processed, the image pickup unit 5211 picks up the second object P (P) positioned on the upper side of the first object P ) Image of the first side face, and analyzes the arrangement state of the second target object P. The image picked up by the image pickup section 5211 may be, for example, as shown in FIG. 9D, and the picked-up image is transmitted to the image analyzing section 5221. The calculation unit 5221b of the image analysis unit 5221 calculates the distance between the extension line on the captured image and the reference line at a plurality of positions. At this time, in the case where there is no change in the separation distance in the imaging progressing direction as shown in Fig. 9D, the calculating unit 5221b determines the coating advancing direction, that is, the object P is not tilted to any one side, This is transferred to the application movement control section 5222. Thereafter, the application portion 5110 is raised along the application head 5120 so as to apply the bonding agent to the second target object P, and the application portion 5110 applies the bonding agent to the second target P Let's face the first aspect. The coating unit 5200 discharges and applies the bonding agent while horizontally moving the coating unit 5200 in the middle direction of the X direction so that the coating unit 5100 is horizontally moved from the left side to the right side so that the height does not change gradually . That is, the coating motion control section 5222 controls the coating unit 5100 to move along the path in which the second to-be-processed object P is arranged as shown in Fig. 9E. Therefore, the bonding agent can be applied to the center of the first side face of the second object P to be processed.

Thereafter, the arrangement states of the third to eleventh objects to be treated are analyzed in the same manner as the above-described method to control the movement of the application unit to apply the bonding agent to the first sides of the third to tenth objects to be processed. That is, when the imaging unit 5211 picks up an object P to be processed among a plurality of the objects P to be processed, the application unit 5110 located on the upper side or the lower side of the imaging unit 5211, Applies the bonding agent to the object P to be processed one layer above or one layer below the object P to be processed which is picked up by the image pickup unit.

The imaging head 5213 for moving the imaging unit 5211 and the application head 5120 for moving the application unit 55110 are separately provided so that the application unit 5120 can move the object to be processed P are moved along the inclined path, the bonding agent can be applied to the central position of the side surface of each article P to be processed.

While the bonding agent is applied to each of the first to tenth objects P to be processed in the above-described manner, each of the plurality of gas injecting sections 6110 of the gas injecting unit 6100 applies a plurality of to-be- And a curtain made of gas is formed on the upper and lower sides of each of the plurality of the objects P to be processed.

More specifically, when air is supplied to the first channel 6111b provided in the first gas injection member 6111 positioned above each of the plurality of the objects P, the air is supplied to the first slit 6111a. Here, the first slit 6111a communicates with the lower region of the first channel 6111b, and one side of the first gas injection member 6111 provided with the first slit 6111a is inclined downward at a predetermined angle Slope. Thus, the air discharged through the first slit 6111a is sprayed downward, diffused from above the workpiece P to form an air curtain. Part of the air injected from the first slit 6111a of the first gas injection member 6111 flows on one side or curved surface of the first gas injection member 6111 and flows along the curved surface of the first gas injection member 6111 The ejection body 6120 located at the outer side, that is, the direction opposite to the ejection direction, is located. When the air is supplied to the second channel 6112b provided inside the twelfth gas injection member 6112 located below each of the plurality of the objects P to be processed, the air is supplied to the second slit 61112 through the second slit 61112 . Here, the second slit 6112a is in communication with the upper region of the second channel 6112b, and one side of the second gas injection member 6112 provided with the second slit 6112a is inclined upward Slope. Thus, the air discharged through the second slit 6112a is sprayed upward, diffused from below the workpiece P to form an air curtain. Part of the air injected from the first slit 6111a of the second gas injection member 6112 flows along one side or curved surface of the first gas injection member 6111 and flows along the curved surface of the second gas injection member 6112 The ejection body 6120 located at the outer side, that is, the direction opposite to the ejection direction, is located.

As described above, in the present invention, a plurality of gas injection portions 6110 composed of the first and second gas injection members 6111 and 6112 are provided, Thereby forming a curtain made of gas. Therefore, it is possible to prevent the bonding agent, which is separated from the other object P located on the upper side of the object P, from being attached to the upper surface of the object P located on the lower side, It is possible to prevent the bonding agent separated from the other object P located below the object P from being adhered to the lower surface of the object P located on the upper side.

When all of the bonding agents are applied to the first side of each of the plurality of articles P placed on the first loading section 4100a, the first loading section 4100a is rotated through the first rotating table 4200a, So that the second side faces of the plurality of objects P face the application unit 5200. After the gas injection unit 6100, the coating unit 5100 and the image pickup unit 5230 are horizontally moved to be separated from the first loading unit 4100a before rotating the first loading unit 4100a, The first loading section 4100a may be rotated and then returned. Thereafter, the bonding agent is applied to the second side surfaces of the plurality of target objects P by the same method as described above, and then the bonding agent is applied to the third side surface by the same method.

When the application of the bonding agent is finished to the first to third sides of the respective objects P to be placed on the first loading section 4100a, the plurality of objects P are transferred into the first carry-out buffer 7100a . That is, the first take-out buffer horizontal moving section 7400a is operated through the first take-out horizontal drive section 7300a to move back the first take-out buffer 7100a toward the first loading section 4100a, The first loading section 4100a is moved forward toward the first take-out buffer 7100a in a state in which the seating member 4110 of the loading section 4100a faces the first take-out buffer 7100a, And inserts the portion 4100a into the first carry-out buffer 7100a. At this time, while the positions of the plurality of objects P placed on the first loading section 4100a are adjusted so as to be positioned above the support blocks 7111 of the first take-out buffer 7100a, 7100a. Thereafter, when the first carry-out buffer 7100a is lifted by using the take-up / dropping portion 7200a, the to-be-processed P which has been seated on the seat 4110 of the first loading portion 4100a, And is placed in the support block 7111 of the main body 7100a.

When a plurality of the objects P to be processed are loaded and supported in the first unloading buffer 7100a, the plurality of objects P are transferred to the unloading device 40 by using the first unloading unit 8000a . That is, the first carry-out conveying portion 8200a is operated to move the first carry-out supporting portion 8100a backward so as to be inserted into the first carry-out buffer 7100a. At this time, after the first carry-out supporting portion 8100a is inserted below any one of the plurality of the objects P, for example, the object P located at the uppermost side of the first carry-out buffer 7100a , The first carry-out buffer 7100a is lowered. The object P positioned at the uppermost position of the first take-out buffer 7100a is seated on the first take-out supporting portion 8100a and the first take-out supporting portion 8100a advances toward the take-out device 40. [ At this time, the first carry-out supporting portion 8100a moves in the direction of the carry-out device 40 along the extending direction of the first carry-out guide member 8210a of the first carry-out portion 8200a, 30a. ≪ / RTI > Thus, the bonding agent applied to the object P placed on the first carry-out supporting portion 8100a is moved toward the transporting device 40 while being cured by the light emitted from the first curing unit 30a, that is, UV .

When the first carry-out supporting portion 8100a moves horizontally and is positioned on the carry-out device 40, the second pick-up portion 9241 is operated by using the second pick-up conveying portion 9242 to be seated on the first carry-out supporting portion 8100a And supports the object P to be processed on the second pickup section 9241. Thereafter, the second pick-up support portion 9241 is placed on the uppermost empty tray T positioned in any one of the first and second tray stacking portions 9210 and 9220, for example, the first tray stacking portion 9210 Rest. The operations of the first take-out unit 8000a and the second pick-up unit 9240 are repeated a plurality of times to place a plurality of the objects P on one empty tray T, Is supported by the second tray supporting portion 9251 and is sequentially stacked on the second tray take-out portion 9230. [

A plurality of empty trays T are stacked on the second tray stacking portion 9220 while waiting for the object P to be bonded on the tray of the first tray stacking portion 9210.

The second loading buffer module 3000b, the second loading unit 4000b, the second unloading buffer module 7000b and the second unloading unit 8000b are connected to the first loading buffer module 3000b, the first loading unit 4000a, the first take-out buffer module 7000a, and the first take-out unit 8000a. Each of the second fetching buffer module 3000b, the second fetching buffer unit 3000b, the second fetching buffer module 7000b and the second fetching unit 8000b includes a first fetching buffer module 3000b, The first carry-out buffer module 7000a, the first carry-out buffer module 7000a, and the first carry-out unit 8000a.

That is, while the first loading unit 4000a is operated to perform the coating process on the plurality of the objects P to be loaded on the first loading section 4100a, the second inlet of the second inlet buffer module 3000b A plurality of the objects P to be processed are loaded in the buffer 3100b. The bonding agent application process is completed for a plurality of the objects P to be placed on the first loading section 4100a to load the object P in the first delivery buffer 7100a, A plurality of the objects P to be loaded in the second drawing buffer 3100b are transferred to the transporting device 40 while the transporting object P of the first transporting buffer 7100a is transported to the transporting device 40 by the transporting unit 8000a Is loaded on the second loading portion 4100b of the second loading unit 4000b, and then the bonding agent applying process is performed.

As described above through the operation of the series of coating facilities, in the present invention, a plurality of objects to be processed P are moved in the process advancing direction in a state in which they are horizontally arranged, and a plurality of objects P Lt; / RTI > Therefore, when moving the plurality of objects P in a horizontal state, as in the present invention, compared with the case of moving the object P in a vertical state as in the prior art, . Therefore, it is easy to apply to the manufacture of a display device which is becoming increasingly large. In addition, the bonding agent is applied to a plurality of the objects P to be processed, and the plurality of drawing buffer modules 3000a and 3000b, the loading units 4000a and 4000b, and the carrying buffer modules 4000a and 4000b It is possible to save time for the coating process and improve the process efficiency.

Each of the first and second pulling buffers 3100a and 3100b and the first and second pulling out buffers 7100a and 7100b according to the present invention includes a pair of buffer members 3110, and 7110 can be adjusted, and the size of the object to be processed can be easily changed.

10: input device 1100: alignment stage
1200: input module 1300: transmission unit
20: Coating device 2000: Inlet module
3000a, 3000b: Retrieval buffer module 3100a, 3100b: Retrieval buffer
4000a and 4000b: loading units 4100a and 4100b:
5000: dispensing module 5100: dispensing unit
5110: Application part 5120: Application head
5200: application control unit 5210: image pickup unit
5211: imaging section 5213: imaging head
5220: Coating movement control unit 5300: Coating horizontal movement unit
6000: Curtain gas module 6100: Gas injection unit
6110: Gas injecting part 7000a, 7000b: Export buffer module
7100a, 7100b: Export buffer 8000a, 8000b: Export unit
9000: Export module 90: Bad check unit

Claims (38)

Each of which is disposed in a horizontal direction and which applies a bonding agent to a side surface of each of a plurality of objects to be processed which are vertically spaced apart from each other,
A charging device for charging a plurality of objects to be processed, each of which is arranged in a horizontal direction, in a vertical direction to charge the object to be processed in a coating direction;
A loading unit which is located at one side of the loading device and receives a plurality of articles to be processed from the loading device to load and hold a plurality of articles to be arranged in a horizontal direction so as to be spaced apart from each other in the vertical direction, And a coating unit that applies a bonding agent to the side surfaces of the plurality of target objects spaced apart in the vertical direction while moving in the horizontal direction and the vertical direction;
A delivery device which is located at one side of the application device and is supported by the loading unit to support a plurality of objects to be processed in a coating process in a horizontal direction and take them out to the outside;
≪ / RTI >
The method according to claim 1,
The coating device includes:
Wherein a plurality of objects to be processed provided from the dispensing apparatus and the dispensing unit are stacked and supported in a vertical direction to form a horizontal movement in a direction in which the dispensing apparatus is located and a direction in which the dispensing unit is located, A pull-in buffer module having a pull-in buffer capable of falling;
A plurality of objects to be processed, which are supported by the loading unit and which have been subjected to the coating process, are stacked in a vertical direction and supported between the applying unit and the take-out unit, A carry-out buffer module having a carry-out buffer capable of horizontal movement and up-and-down movement;
≪ / RTI >
The method of claim 2,
And an input support member which is positioned between the input device and the input buffer and supports the object to be processed provided from the input device in a horizontal state so as to move forward in a direction in which the input buffer is located, And an infeed module including the infeed module.
The method of claim 3,
Wherein the pull-
A receiving buffer ascending and descending unit installed to be connected to the receiving buffer to move the receiving buffer up and down;
A loading buffer horizontal moving unit connected to the loading buffer ascending and descending unit and horizontally moving the loading buffer to move forward in a direction in which the coating unit is located and to move backward in a direction in which the loading module is located;
A pull-in buffer horizontal driver coupled to the pull-in buffer horizontal shifting unit to provide a horizontal shifting driving force to the pull-in buffer horizontal shifting unit;
≪ / RTI >
The method of claim 4,
Wherein the pull-
Each of which extends in the vertical direction and is arranged to face each other and face each other and is spaced apart in the vertical direction on each of the mutually facing inner sides so as to support the edge of the object to be processed, A pair of buffer members provided with a support block;
A buffer member connection portion connected to connect the upper portions of the pair of buffer members;
A buffer member horizontally moving unit connected to at least one of the pair of buffer members to horizontally move at least one of the pair of buffer members to horizontally move the pair of buffer members toward or away from each other;
≪ / RTI >
The method of claim 2,
The coating device includes:
An image pickup apparatus comprising: an image pickup section for picking up and acquiring images of a plurality of objects to be processed stacked in a vertical direction; and an image pick-up section supported on one side of the image pick-up section, An imaging apparatus comprising an imaging unit having an imaging head.
The method of claim 6,
The coating unit includes:
A coating unit that is disposed on one of the upper side and the lower side of the imaging unit and applies a bonding agent to the coating surface of each of the plurality of target objects; And
Wherein the coating part moves horizontally along the extending direction of the coated surface of each object to be processed and moves along the inclined path of the object to be processed so that the center of the coated object in the vertical direction An application head which adjusts a height to be horizontally moved;
≪ / RTI >
The method of claim 7,
And an applied horizontal moving part provided with the coating head and the imaging head on one side and guiding the coating unit and the imaging unit so as to horizontally move each of the coating unit and the imaging unit in the extending direction of the coated object.
The method of claim 8,
And a controller for analyzing an arrangement state of the object to be processed in cooperation with the imaging unit and the coating unit and using the image and the reference data captured and obtained by the imaging unit to determine an operation of the application head according to the arrangement state of the object to be processed To control the application agent to be applied to the center position in the vertical direction of the coated surface along the extending direction of the to-be-treated coated surface by changing the height of the coated unit according to the horizontal movement of the coated unit, ≪ / RTI >
The method of claim 9,
Wherein the coating movement control unit comprises:
And an image processing unit which is interlocked with the image pickup unit and compares and analyzes image coordinate values of the object to be picked up and obtained by the image pickup unit using reference data which is a coordinate value of a reference line, An image analyzing unit for calculating a positional change of the object to be processed in a vertical direction according to an extending direction of the coated surface through spacing data;
A movement control unit that receives a position change calculation value in a vertical direction along the extending direction of the coated surface from the image analysis unit and controls vertical movement of the coating unit according to the horizontal movement according to the calculated value;
≪ / RTI >
The method of claim 10,
The reference data is a position value of a reference line,
Wherein said reference line is a straight line on a path that is horizontally moved in parallel at a position of each of said plurality of objects to be processed.
The method of claim 11,
The image analysis unit
A display unit for displaying an image of the object to be captured obtained by the imaging unit and the reference line on a single screen;
A calculating unit for calculating a distance between a coordinate value of the reference line displayed on the display unit and a coordinate value of the image of the object to be processed;
Lt; / RTI >
Wherein the calculation unit calculates a separation distance between an extension line extending in a direction opposite to the reference line and the reference line on the object image displayed on the display unit,
Wherein the calculating unit can calculate the height change along the extending direction of the coated object surface by calculating a distance between one extension line of the image of the object to be processed and a position in the extending direction of the reference line.
The method of claim 12,
Wherein when the imaging section picks up an object to be processed out of a plurality of objects to be processed, the application section picks up an image of the object to be processed on the object to be processed on one layer or one layer below the object, And the coating unit is vertically spaced apart.
14. The method of claim 13,
Wherein each of the application head and the imaging head is extended in a direction in which a plurality of objects to be processed are arranged and fastened to the application horizontal moving part so as to be spaced apart in the extending direction of the application horizontal moving part,
A first lifting member is provided on one surface of the application head on which the application portion is mounted and extends in a direction corresponding to a direction in which the plurality of objects are stacked so as to guide the application portion to be slidable,
And a second lifting member that extends in a direction corresponding to a direction in which the plurality of objects are stacked and which guides the imaging unit to be slidable, on one surface of the imaging head on which the imaging unit is mounted, .
14. The method of claim 13,
A main head extending in a direction in which a plurality of objects to be processed are arranged and fastened to the coated horizontal moving portion,
Wherein the imaging head is fastened to the main head,
A main lifting member for guiding the imaging head so as to be slidable is provided on one surface of the main head to which the imaging head is fastened,
Wherein an application portion of the application unit is connected to the imaging head and moves together when the imaging head slides along the main lifting member.
14. The method of claim 13,
The loading unit includes:
A loading unit spaced apart in the vertical direction and having a plurality of seating members on which the object to be processed is seated, the loading unit being insertable into the inlet buffer;
A loading unit feeding means extending from at least the loading buffer to the loading buffer position and horizontally moving the loading unit;
A rotary table installed to connect between the loading unit and the loading unit transporting unit and rotating the loading unit and horizontally moving along the loading unit transporting unit;
≪ / RTI >
18. The method of claim 16,
Wherein the applying device is provided in a number corresponding to a plurality of the objects to be processed and is vertically spaced apart and movable so that each of the applying devices is positioned between the object to be processed and the object to be processed in the application step, And a gas injection unit having a plurality of gas injection units for forming curtains of gas on the upper side and the lower side of each of the objects to be processed by injecting gas from one side to the other side of the object to be processed, .
18. The method of claim 17,
Wherein the gas injection unit includes a plurality of gas injection portions extending in the vertical direction and connected to the plurality of gas injection portions,
Wherein the gas injection unit is formed to extend from the injection body in a direction in which the loading unit is located and a slit is provided for discharging the gas by discharging gas on one side of the loading unit.
18. The method of claim 17,
Wherein each of the plurality of gas jetting portions comprises:
A first gas injection member for injecting a gas onto the upper surface of the workpiece;
A second gas injection member located above the first gas injection member and injecting a gas to a lower side of a lower surface of the other object to be processed located on one layer in comparison with the object to be processed;
≪ / RTI >
The method of claim 19,
Wherein the first and second gas injection members are plate-
Wherein a first slit is provided on one side of the first gas injection member in the direction in which the loading section is located to eject gas and inject the gas, The lower region of the slit is shaped to be inclined downward toward the upper surface of the workpiece,
Wherein a second slit is provided for discharging the gas to one side of the second gas injection member in the direction in which the loading section is located, Wherein the upper region of the slit has an upward sloping shape toward a lower surface of another workpiece positioned above the workpiece.
The method of claim 20,
The lower region of the first slit is inclined downward toward the upper surface of the workpiece to be processed and is a curved surface having curvature, of the region on one side of the first gas injection member provided with the first slit,
An upper region of the second slit is inclined upward toward a lower surface of another workpiece located above the one object to be processed, the region being on one side of the second gas injection member provided with the second slit, A curved surface having a curvature.
23. The method of claim 21,
In the lengths of the first gas injection member and the second gas injection member,
The length of the first gas injection member facing the object to be processed is longer than the length of the second gas injection member.
The method according to any one of claims 2 to 22,
A plurality of objects to be processed provided in the take-out buffer are horizontally supported between the take-out buffer and the take-out device so that backward movement in the direction in which the take-out buffer is located and advancement in the direction in which the take- And a carry-out unit having a carry-out supporting portion.
The method of claim 2,
The export buffer module includes:
An unloading buffer ascending and descending portion installed to be connected to the unloading buffer for moving up and down the unloading buffer;
A take-out buffer horizontal shifting unit connected to the take-up buffer ascending and descending unit to allow the take-out buffer to move forward and backward in a direction in which the coating unit is located and in a direction in which the unit is located;
A take-out buffer horizontal driving unit connected to the take-out buffer horizontal moving unit to provide a horizontal moving driving force to the take-out buffer horizontal moving unit;
≪ / RTI >
27. The method of claim 24,
Wherein each of the carry-out buffers is provided so as to extend in the vertical direction and to be spaced apart from each other and to face each other and to be vertically spaced apart from each other on mutually facing surfaces, A pair of buffer members provided with a plurality of support blocks for supporting the buffer blocks;
A buffer member connection portion connected to connect the upper portions of the pair of buffer members;
A buffer member horizontally moving unit connected to at least one of the pair of buffer members to horizontally move at least one of the pair of buffer members to horizontally move the pair of buffer members toward or away from each other;
≪ / RTI >
24. The method of claim 23,
And a curing unit located at one side of the carry-out buffer for curing the bonding agent applied to the object to be processed,
The drawing buffer module, the loading unit, the take-out buffer module, the take-out unit, and the curing unit are provided in plural,
Wherein the plurality of draw-in buffer modules, the plurality of loading units, the plurality of take-out buffer modules, the plurality of take-out units, and the plurality of curing units are arranged in a direction intersecting the conveying direction of the to-be-
The method of claim 3,
A plurality of inlet modules are provided,
A plurality of forward / backward moving members each extending in a direction in which the plurality of inlet buffers are arranged and arranged to move the inlet support unit forward or backward;
And a drawing guide member connected to a lower portion of each of the plurality of forward / backward moving members and horizontally moving each of the plurality of forward / backward moving members in a direction in which the plurality of drawing buffers are arranged.
A method of applying a bonding agent to a side surface of each of a plurality of objects to be processed which are arranged in a horizontal direction and are vertically spaced apart from each other,
A process of receiving a plurality of objects to be processed to be subjected to a coating process and vertically stacking a plurality of objects to be processed arranged in a horizontal direction on the loading section;
Moving the loading unit in a direction in which the application unit having the application unit for applying the bonding agent is located so that the side surfaces of the plurality of the products are opposed to the application unit;
The bonding agent is applied while horizontally moving the coating unit along the extending direction of at least one side of the article to be treated,
The height of the coating unit is sequentially controlled so that the coating unit is positioned at a position of each of the plurality of objects to be processed in the vertical direction, and the bonding agent is sequentially applied to the side surfaces of the plurality of objects to be processed, A process of applying;
≪ / RTI >
29. The method of claim 28,
In the loading and unloading of the plurality of target objects in the vertical direction,
Stacking a plurality of objects to be processed arranged in a horizontal direction in a vertical direction in a pull-in buffer located behind the loading unit;
Moving the loading unit in a direction in which the loading buffer is located;
Inserting the loading unit into the loading buffer and placing a plurality of objects in the loading buffer in the loading unit;
Moving the loading unit in a direction in which the coating unit is located, and drawing the loading unit from the loading buffer;
/ RTI >
Wherein the loading section drawn out from the drawing buffer moves toward the coating unit.
29. The method of claim 29,
The object to be processed is polygonal,
In applying the bonding agent to the side surface of the object to be treated, a bonding agent is applied to a plurality of side surfaces of the object to be treated,
The one side of the article to be treated is supported by the loading section so as to face the application unit so as to apply the bonding agent to one side of the article to be treated,
And a bonding agent is applied to another side surface of the article to be treated by rotating the loading section so that the other side surface of the article is directed to the application section when the application step is completed on one side surface of the article to be treated.
32. The method of claim 30,
After the application process for each of the plurality of the objects to be processed is completed,
Loading a plurality of objects to be processed in the vertically loaded state in the take-out buffer located in front of the loading unit;
Wherein the plurality of objects to be processed are sequentially taken out from the take-out buffer and moved so as to pass through a curing unit located in front of the take-out buffer, thereby curing the bonding agent.
29. The method of claim 29,
A plurality of objects to be processed arranged in the horizontal direction in the drawing buffer are stacked in the vertical direction and at least any one of a pair of buffer members of the drawing buffer facing the side of the material to be processed is horizontally moved And aligning the plurality of objects to be processed.
32. The method of claim 31,
A plurality of loading buffers, a loading unit, a coating unit, a hardening unit, and a plurality of take-out buffers, wherein the plurality of loading buffers, the plurality of loading units, and the plurality of loading units are provided in a direction intersecting the moving direction of the article to be coated A plurality of coating units, a plurality of curing units, Respectively,
Wherein the plurality of loading buffers, the plurality of loading units, the plurality of coating units, the plurality of curing units, and the plurality of the take-out buffers are alternately operated.
29. The method according to any one of claims 28-32,
Positioning an image pickup unit at an application start position of at least one object to be coated with the bonding agent to image the object to be processed to obtain an image of the object to be processed;
Analyzing an arrangement state of the object to be processed using the acquired image of the object to be processed;
Adjusting a height of the coated portion to a target position at which the object to be processed is analyzed in the disposition state;
And applying a bonding agent while horizontally moving an application portion adjustable in height separately from the imaging portion along an extending direction of the object to be processed,
In the process of applying the bonding agent,
Applying a bonding agent to a coating surface of the object to be treated while changing a height of the coating unit according to a horizontal movement of the coating unit according to an analysis result of the arrangement state of the object to be processed;
≪ / RTI >
35. The method of claim 34,
In the process of capturing the object to be processed and acquiring an image of the object to be processed,
A step of raising or lowering the imaging unit to position the object to be imaged at a height of the object to be imaged;
Capturing an image of the object to be processed on the surface of the object to be imaged while horizontally moving the imaging unit at a height of the object to be imaged;
≪ / RTI >
36. The method of claim 35,
In the process of analyzing the arrangement state of the object to be processed,
And comparing the coordinate value of the image of the object to be captured and the reference data which is the coordinate value of the reference line with the coordinate value of the image of the object to be captured and calculating a positional change in the vertical direction according to the extending direction of the coated surface,
Wherein the reference line is a straight line on a path that is horizontally moved in parallel at a position of each of the plurality of target objects.
37. The method of claim 36,
Displaying an image of the object to be processed imaged by the imaging unit and the reference line on a screen of the display unit;
Calculating a distance between a coordinate value of the reference line displayed on the display unit and a coordinate value of the image of the object to be processed;
Calculating a distance between coordinate values of the image of the object to be processed,
Calculating a separation distance between an extension line extending in a direction opposite to the reference line on the object image and the reference line,
Wherein a height of the coating unit in accordance with a horizontal movement is controlled in accordance with a calculated change in position in a vertical direction along the extending direction of the coated surface.
36. The method of claim 35,
Wherein when the imaging section picks up an object to be processed of any one of a plurality of objects to be processed, a coating section located on the upper side or the lower side of the imaging section is formed on the upper side or lower side of the object to be processed, A method of applying a bonding agent to a treated material.
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