KR101444560B1 - 배면의 전기접속부를 갖는 잉크젯 프린트헤드 조립체 - Google Patents
배면의 전기접속부를 갖는 잉크젯 프린트헤드 조립체 Download PDFInfo
- Publication number
- KR101444560B1 KR101444560B1 KR1020127000846A KR20127000846A KR101444560B1 KR 101444560 B1 KR101444560 B1 KR 101444560B1 KR 1020127000846 A KR1020127000846 A KR 1020127000846A KR 20127000846 A KR20127000846 A KR 20127000846A KR 101444560 B1 KR101444560 B1 KR 101444560B1
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- printhead
- connector
- silicon
- film
- Prior art date
Links
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- 238000000429 assembly Methods 0.000 claims abstract description 23
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- 238000004891 communication Methods 0.000 claims abstract description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 83
- 239000010703 silicon Substances 0.000 claims description 83
- 238000000034 method Methods 0.000 claims description 36
- 239000004020 conductor Substances 0.000 claims description 26
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 25
- 239000000758 substrate Substances 0.000 claims description 20
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 16
- 239000010949 copper Substances 0.000 claims description 16
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- XBBRGUHRZBZMPP-UHFFFAOYSA-N 1,2,3-trichloro-4-(2,4,6-trichlorophenyl)benzene Chemical compound ClC1=CC(Cl)=CC(Cl)=C1C1=CC=C(Cl)C(Cl)=C1Cl XBBRGUHRZBZMPP-UHFFFAOYSA-N 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
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- 238000000576 coating method Methods 0.000 description 7
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- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 6
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 6
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 6
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 5
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
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- 238000005498 polishing Methods 0.000 description 2
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- 229920005591 polysilicon Polymers 0.000 description 2
- 239000000565 sealant Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
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- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/145—Arrangement thereof
- B41J2/155—Arrangement thereof for line printing
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
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- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
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- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1648—Production of print heads with thermal bend detached actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/18—Electrical connection established using vias
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/AU2009/000953 WO2011011807A1 (en) | 2009-07-27 | 2009-07-27 | Inkjet printhead assembly having backside electrical connection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20120031499A KR20120031499A (ko) | 2012-04-03 |
| KR101444560B1 true KR101444560B1 (ko) | 2014-10-07 |
Family
ID=43528619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020127000846A KR101444560B1 (ko) | 2009-07-27 | 2009-07-27 | 배면의 전기접속부를 갖는 잉크젯 프린트헤드 조립체 |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP2496419B1 (zh) |
| JP (1) | JP5475116B2 (zh) |
| KR (1) | KR101444560B1 (zh) |
| CN (1) | CN102470671B (zh) |
| SG (1) | SG176568A1 (zh) |
| WO (1) | WO2011011807A1 (zh) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9289974B2 (en) | 2013-04-29 | 2016-03-22 | Hewlett-Packard Development Company L.P. | Printhead control systems and methods for controlling a printhead |
| JP5864037B2 (ja) * | 2013-08-02 | 2016-02-17 | 富士フイルム株式会社 | 画像処理装置、撮像装置、画像処理方法及びプログラム |
| JP6492891B2 (ja) * | 2015-03-31 | 2019-04-03 | ブラザー工業株式会社 | 液体吐出装置及び液体吐出装置ユニット |
| JP6911170B2 (ja) * | 2016-02-24 | 2021-07-28 | ヒューレット−パッカード デベロップメント カンパニー エル．ピー．Ｈｅｗｌｅｔｔ‐Ｐａｃｋａｒｄ Ｄｅｖｅｌｏｐｍｅｎｔ Ｃｏｍｐａｎｙ， Ｌ．Ｐ． | 集積回路を含む流体吐出デバイス |
| TWI789529B (zh) | 2018-07-30 | 2023-01-11 | 瑞士商西克帕控股有限公司 | 多晶片模組(mcm)組件 |
| US11390081B2 (en) | 2019-02-06 | 2022-07-19 | Hewlett-Packard Development Company, L.P. | Fluid ejection device with a carrier having a slot |
| AU2019428237B2 (en) | 2019-02-06 | 2023-06-01 | Hewlett-Packard Development Company, L.P. | Fluid ejection devices including electrical interconnect elements for fluid ejection dies |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6394580B1 (en) | 2001-03-20 | 2002-05-28 | Hewlett-Packard Company | Electrical interconnection for wide-array inkjet printhead assembly |
| US20030082851A1 (en) | 2001-10-31 | 2003-05-01 | Van Hoff Jay F. | Back-side through-hole interconnection of a die to a substrate |
| US20050179729A1 (en) | 2004-01-30 | 2005-08-18 | Hewlett-Packard Development Company, L.P. | Method of making an inkjet printhead |
| US20080225076A1 (en) | 2007-03-12 | 2008-09-18 | Silverbrook Research Pty Ltd | Method of fabricating printhead having hydrophobic ink ejection face |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3309341B2 (ja) * | 1992-08-05 | 2002-07-29 | 株式会社吉野工業所 | チューブ容器供給装置 |
| US6536882B1 (en) * | 2000-07-26 | 2003-03-25 | Eastman Kodak Company | Inkjet printhead having substrate feedthroughs for accommodating conductors |
| US6902872B2 (en) * | 2002-07-29 | 2005-06-07 | Hewlett-Packard Development Company, L.P. | Method of forming a through-substrate interconnect |
| US6755509B2 (en) | 2002-11-23 | 2004-06-29 | Silverbrook Research Pty Ltd | Thermal ink jet printhead with suspended beam heater |
| JP2005044927A (ja) * | 2003-07-25 | 2005-02-17 | Kyocera Corp | 圧電アクチュエータ及びその製造方法並びに液体吐出装置 |
| JP4456609B2 (ja) * | 2004-01-21 | 2010-04-28 | シルバーブルック リサーチ ピーティワイ リミテッド | 印字ヘッドアセンブリおよび印字ヘッドモジュール |
| US7524016B2 (en) * | 2004-01-21 | 2009-04-28 | Silverbrook Research Pty Ltd | Cartridge unit having negatively pressurized ink storage |
| US7441865B2 (en) | 2004-01-21 | 2008-10-28 | Silverbrook Research Pty Ltd | Printhead chip having longitudinal ink supply channels |
| US7275805B2 (en) | 2004-05-27 | 2007-10-02 | Silverbrook Research Pty Ltd | Printhead comprising different printhead modules |
| US7690767B2 (en) * | 2004-07-22 | 2010-04-06 | Canon Kabushiki Kaisha | Ink jet recording head and ink jet recording apparatus |
| US7303930B2 (en) | 2005-10-11 | 2007-12-04 | Silverbrook Research Pty Ltd | Method of fabricating suspended beam in a MEMS process |
| US7438371B2 (en) | 2005-12-05 | 2008-10-21 | Silverbrook Research Pty Ltd | Method of modulating printhead peak power requirement using redundant nozzles |
| JP2007326340A (ja) * | 2006-06-09 | 2007-12-20 | Canon Inc | インクジェット記録ヘッドおよびその製造方法 |
| JP4819608B2 (ja) * | 2006-07-31 | 2011-11-24 | 富士フイルム株式会社 | 液体吐出ヘッド、液体吐出装置、及び画像形成装置 |
| US7984973B2 (en) | 2006-12-04 | 2011-07-26 | Silverbrook Research Pty Ltd | Thermal bend actuator comprising aluminium alloy |
| US7669967B2 (en) | 2007-03-12 | 2010-03-02 | Silverbrook Research Pty Ltd | Printhead having hydrophobic polymer coated on ink ejection face |
| US7938974B2 (en) | 2007-03-12 | 2011-05-10 | Silverbrook Research Pty Ltd | Method of fabricating printhead using metal film for protecting hydrophobic ink ejection face |
| US7819503B2 (en) | 2007-06-15 | 2010-10-26 | Silverbrook Research Pty Ltd | Printhead integrated circuit comprising inkjet nozzle assemblies having connector posts |
| US8029097B2 (en) | 2008-11-26 | 2011-10-04 | Silverbrook Research Pty Ltd | Inkjet nozzle assembly having moving roof structure and sealing bridge |
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2009
- 2009-07-27 EP EP09847677.3A patent/EP2496419B1/en active Active
- 2009-07-27 JP JP2012514289A patent/JP5475116B2/ja active Active
- 2009-07-27 CN CN200980160208.7A patent/CN102470671B/zh active Active
- 2009-07-27 SG SG2011085248A patent/SG176568A1/en unknown
- 2009-07-27 WO PCT/AU2009/000953 patent/WO2011011807A1/en active Application Filing
- 2009-07-27 KR KR1020127000846A patent/KR101444560B1/ko active IP Right Grant
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6394580B1 (en) | 2001-03-20 | 2002-05-28 | Hewlett-Packard Company | Electrical interconnection for wide-array inkjet printhead assembly |
| US20030082851A1 (en) | 2001-10-31 | 2003-05-01 | Van Hoff Jay F. | Back-side through-hole interconnection of a die to a substrate |
| US20050179729A1 (en) | 2004-01-30 | 2005-08-18 | Hewlett-Packard Development Company, L.P. | Method of making an inkjet printhead |
| US20080225076A1 (en) | 2007-03-12 | 2008-09-18 | Silverbrook Research Pty Ltd | Method of fabricating printhead having hydrophobic ink ejection face |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2496419A1 (en) | 2012-09-12 |
| EP2496419A4 (en) | 2014-02-19 |
| EP2496419B1 (en) | 2018-05-30 |
| CN102470671A (zh) | 2012-05-23 |
| JP5475116B2 (ja) | 2014-04-16 |
| CN102470671B (zh) | 2014-11-26 |
| JP2012529384A (ja) | 2012-11-22 |
| SG176568A1 (en) | 2012-01-30 |
| KR20120031499A (ko) | 2012-04-03 |
| WO2011011807A1 (en) | 2011-02-03 |
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