KR101430663B1 - Film detaching apparatus for flat panel display - Google Patents

Abstract

A film peeling apparatus for a flat panel display device is disclosed. A film stripping apparatus for a flat display device according to an embodiment of the present invention includes a substrate loading unit for forming a loading position in which a substrate with a film assembled on both sides of a donor film and a back film is inserted; A substrate discharge portion disposed on the opposite side of the substrate loading portion and forming a discharge position where the substrate on which the donor film and the back film are separated is discharged; And a film peeling device for peeling the donor film and the back film from the film-attached substrate after tilting the substrate with the film loaded in the horizontal direction from the substrate loading portion and the substrate discharging portion in a vertical direction, .

Description

[0001] The present invention relates to a film detaching apparatus for flat panel display,

The present invention relates to a film peeling apparatus for a flat panel display, and more particularly, to a film peeling apparatus for a flat panel display device, which can peel off a film in a tilting state of a substrate, And more particularly, to a film peeling apparatus for a flat panel display device capable of improving the peeling efficiency of a film.

As a result of the rapid development of information and communication technology and the expansion of the market, a flat panel display is attracting attention as a display device.

Such flat panel display devices include liquid crystal display devices, plasma display panels, and organic light emitting diodes.

Among these organic electroluminescent devices, for example, OLEDs have very good advantages such as high response speed, lower power consumption than conventional LCD, light weight, no need for a separate backlight device, And has been attracting attention as a next generation display device.

Such an organic electroluminescent device is a principle in which an anode film, an organic thin film, and a cathode film are sequentially formed on a substrate, and a voltage is applied between the anode and the cathode to form a proper energy difference in the organic thin film and emit light by itself.

In other words, the injected electrons and holes are recombined, and the excitation energy generated is generated by light. At this time, since the wavelength of light generated according to the amount of the dopant of the organic material can be controlled, full color can be realized.

1 is a structural view of an organic electroluminescent device.

As shown in this figure, an organic electroluminescent device includes an anode, a hole injection layer, a hole transfer layer, an emitting layer, a hole blocking layer, an electron injection layer, a cathode, and the like are stacked in this order.

In this structure, ITO (Indium Tin Oxide), which has small surface resistance and good transparency, is mainly used as the anode. The organic thin film is composed of a multilayer of a hole injecting layer, a hole transporting layer, a light emitting layer, a hole blocking layer, an electron transporting layer, and an electron injecting layer in order to increase the luminous efficiency. Organic materials used as the light emitting layer include Alq3, TPD, PBD, m-MTDATA, and TCTA. As the cathode, a LiF-Al metal film is used. And since the organic thin film is very weak to moisture and oxygen in the air, a sealing film for sealing is formed at the top to increase the lifetime of the device.

1, the organic electroluminescent device includes an anode, a cathode, and a light emitting layer interposed between the anode and the cathode. When the organic electroluminescent device is driven, holes are injected from the anode into the light emitting layer , Electrons are injected into the light emitting layer from the cathode. The holes and electrons injected into the light emitting layer are combined in the light emitting layer to generate excitons, and the excitons emit light while transitioning from the excited state to the ground state.

Such an organic electroluminescent device can be classified into a monochromatic or full color organic electroluminescent device according to the color to be realized. The full-color organic electroluminescent device includes red (R), green (G) and And a light emitting layer patterned for each blue (B) color is provided to realize a full color.

In the full-color organic electroluminescent device, the patterning of the light-emitting layer may be performed differently depending on the material forming the light-emitting layer.

When the material forming the light emitting layer is a low molecular material, each light emitting layer is vacuum deposited using a shadow mask, and when the material forming the light emitting layer is a polymer material, inkjet printing is used to form each light emitting layer .

However, since the vacuum deposition process using a shadow mask is difficult to apply to a large substrate, inkjet printing is a wet process, so there is a limitation on the material forming the lower layer and a bank structure must be formed on the substrate.

In order to solve these problems, recently, a laser induced thermal imaging (LITI) method has been proposed in U.S. Patent Nos. 5,220,348, 5,256,506, 5,278,023, 5,308,737, 5,998,085, 6,214,520 and 6,114,088 And the like.

This laser thermal transfer method requires a donor film. The donor film includes a base film, a photo-thermal conversion layer disposed on the base film, and a transfer layer disposed on the photo-thermal conversion layer.

Hereinafter, the entire process that has been recently studied by the applicant will be briefly described, although it is not known in connection with the laser thermal transfer method.

First, a donor film is aligned and assembled on one side of a glass substrate, and a back film is assembled on the other side of the substrate. They are then laminating together.

When the laminating process is completed, the laser thermal transfer process proceeds in the next process. That is, when a laser beam is irradiated onto a predetermined region of the base film, the laser is converted into heat in the photo-thermal conversion layer, and the converted heat is transferred to the substrate by changing the adhesive force between the transfer layer and the photo-

After the transfer process to the substrate is completed, a heat treatment process for solidifying and fixing the transferred material proceeds.

Then, a process of peeling the donor film to use the substrate proceeds. At this time, the back film may also be peeled together, and usually the donor film, the substrate and the back film are horizontally arranged, and then the donor film (including the back film) is horizontally peeled off.

However, in a horizontal type film separator for a flat panel display device in which a film is horizontally peeled, there is a high risk that particles generated during the separation of the donor film fall off to the substrate, resulting in poor quality of the substrate. It is necessary to improve the structure of the new method.

U.S. Patent Nos. 5,220,348, 5,256,506, 5,278,023, 5,308,737, 5,998,085, 6,214,520, and 6,114,088

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a method for removing a film, which can peel off a film while tilting the substrate, thereby solving the problem of poor quality of a substrate due to particles, And a film peeling apparatus for a flat panel display element.

According to an aspect of the present invention, there is provided a substrate processing apparatus including: a substrate loading unit for forming a loading position in which a substrate with a film assembled on both sides of a donor film and a back film is inserted; A substrate discharge unit disposed on the opposite side of the substrate loading unit to form a discharge position where the substrate on which the donor film and the back film are separated is discharged; And a substrate holding unit for holding the film-attached substrate, which is disposed between the substrate loading unit and the substrate discharging unit, tilting the film- And a film peeling unit for peeling off the back film. The film peeling apparatus for a flat panel display element according to the present invention can be provided.

The substrate on which the donor film and the back film are peeled may be tilted in the horizontal direction by the film peeling unit and then discharged to the substrate discharge unit.

The donor film peeled off from the film-attached substrate may be returned to the substrate input portion through the film peeling portion and discharged, and the back film peeled off from the film-attached substrate may be discarded.

Wherein the film peeling unit comprises: a cabinet forming an outer appearance; An input side table unit movably installed at one side of the cabinet and adapted to attract a film-attached substrate transferred from the substrate input unit and tilting the film-attached substrate; An out-side table unit movably provided on the other side of the cabinet and adapted to attract the substrate on which the donor film and the back-film are peeled, and to tilt the substrate; A nip roll unit disposed between the input table unit and the discharge table unit for peeling the donor film and the back film from the film-attached substrate; And a donor film and a back film clamp for clamping the donor film and the back film, respectively.

The nip roll unit includes a porous roll for a donor film rotated in contact with the donor film; And an elastic roll for a back film (EPDM) arranged in parallel with the fore-film roll for donor film while being spaced apart from the poros roll for the donor film so that the film- roll.

Wherein the film peeling unit comprises a peeling roll for the donor film which prevents the oscillation of the donor film clamp from being transmitted to the nip roll unit when the donor film clamp pulls the donor film to clamp it; And a peeling roll for the back film which prevents the vibration of the back film clamp from being transmitted to the nip roll unit when the back film clamp pulls and pulls the back film.

The filling roll for the donor film may be crown-processed in both end regions so that the cross-sectional area of both end regions is larger than the cross-sectional area of the remaining region, and the filling roll for the back film may have the same cross-

Wherein when the donor film clamp and the back film clamp clamp the donor film and the back film respectively, air is prevented from entering both end regions of the substrate, And a suction nozzle unit for suctioning the suction nozzle unit.

The film peeling unit may further include a substrate clamp for clamping the substrate on which the donor film and the back film are peeled off.

Wherein the film peeling unit comprises: a film clamp transfer unit for transferring the donor film clamp and the back film clamp; And a substrate clamp transfer unit for transferring the substrate clamp.

According to another aspect of the present invention, there is provided a method of manufacturing a semiconductor device, comprising: a substrate loading step in which a film-attached substrate on which both a donor film and a back film are assembled is horizontally charged; A substrate primary tilting step of vertically tilting the film-adhering substrate inserted in a horizontal direction; And a film peeling step of peeling the donor film and the back film from the film-attached substrate in a state where the film-attached substrate is tilted, can be provided .

And a substrate secondary tilting step of tilting the substrate standing up after the film peeling step in the horizontal direction.

And a substrate discharging step of discharging the substrates arranged in the horizontal direction by the substrate secondary tilting step.

A donor film returning step in which the donor film peeled off from the film-attached substrate during the film peeling step is returned to the loading position of the film-attached substrate; And a donor film discharging step of discharging the donor film returned to the charging position.

The back film peeled off from the film-attached substrate during the film peeling step may be discarded.

In the substrate loading step, the film-attached substrate may be arranged in a horizontal direction so that the donor film faces upward.

According to the present invention, the film can be peeled off while the substrate is being tilted so that the problem of poor quality of the substrate due to the particles can be solved and the peeling efficiency of the film can be improved.

1 is a structural view of an organic electroluminescent device.
2 is a plan view of a film peeling apparatus for a flat panel display according to an embodiment of the present invention.
3 is a schematic structural view of FIG. 2 showing the process of peeling the film.
4 is a perspective view of the film peeling section.
Fig. 5 is a plan structural view of Fig. 4. Fig.
Fig. 6 is a side view of the structure of Fig. 4. Fig.
Fig. 7 is a front structural view of Fig. 4. Fig.
8 is a perspective view of the nip roll unit.
9 is a plan structural view of Fig.
10 is a side view of the structure of FIG.
11 is an enlarged view of Fig.
12 is a structural view of a filling roll for a donor film and a filling roll for a back film.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

FIG. 2 is a plan view of a film peeling apparatus for a flat panel display device according to an embodiment of the present invention, FIG. 3 is a schematic structural view of FIG. 2 showing a process of peeling a film, Fig. 5 is a plan view of Fig. 4, Fig. 6 is a side view of Fig. 4, Fig. 7 is a front view of Fig. 4, Fig. 8 is a perspective view of a nip roll unit, Fig. 10 is a side view of Fig. 8, Fig. 11 is an enlarged view of Fig. 10, and Fig. 12 is a structural view of a filling roll for a donor film and a filling roll for a back film.

Referring to these drawings, the film separator for a flat panel display device of this embodiment has a substrate with a film on which a donor film and a back film are attached on both sides, The apparatus includes a substrate loading unit 101, a substrate discharging unit 102, and a film peeling unit 110. The substrate loading unit 101 and the film discharging unit 110 are provided in the apparatus.

Prior to the description of the apparatus, it should be noted that the lengths of the donor film and the back film which are attached to both sides of the substrate are not necessarily different from each other in the enlarged portion of Fig. That is, the donor film is projected more from the end of the substrate than the back film, and then the end of the substrate is positioned.

That is, in the case where the film-attached substrate is set up, the order is such that the donor film, the back film, and the substrate are arranged from the uppermost side.

Therefore, when the film peeling process is started, the donor film which is arranged so as to protrude relatively is first clamped and peeled off, then the back film is clamped and peeled, and finally the substrate is peeled off from the film.

Of course, this is just one example. Therefore, unlike the drawing, protruding lengths between the donor film and the back film may be equal to each other. In this case, the donor film and the back film may be clamped at once and peeled at the same time.

The substrate loading portion 101 forms an insertion position in which a film-attached substrate on which both the donor film and the back film are assembled is inserted. The film-attached substrate is transferred to the loading position of the substrate loading section 101 by a separate robot. As will be described later, the donor film peeled off from the film-attached substrate is discharged through the substrate input portion 101 after being returned.

The substrate discharge portion 102 is disposed on the opposite side of the substrate loading portion 101 and forms a discharge position where the substrate on which the donor film and the back film are peeled off is discharged. The substrate discharging unit 102 may be the same as the substrate loading unit 101.

The film peeling unit 110 is disposed between the substrate loading unit 101 and the substrate discharging unit 102 and tilts the film loading substrate loaded in the horizontal direction from the substrate loading unit 101 in the vertical direction, ), The donor film and the back film are peeled from the film-attached substrate, and the substrate on which the donor film and the back film are peeled is again tilted in the horizontal direction and discharged to the substrate discharging unit 102. Actually, the processes in which the films are peeled off and the operations in which the substrate is tilted all proceed on the film peeling unit 110.

In summary, in the film peeling unit 110, the film-attached substrate is raised and tilted so that the donor film and the back film are peeled off from the film-attached substrate, and the substrate finally raised is laid horizontally again. At this time, the peeled back film is discarded, but the donor film is returned toward the substrate input portion 101 and discharged.

The film peeling unit 110 includes a cabinet 120, an in-table unit 131, an out-table unit 132, a nip roll unit 140, (161, 162, 163), and a suction nozzle unit (185).

The cabinet 120 may be formed by welding a gold frame having excellent durability. A plurality of foot members 121 for supporting the cabinet 120 on the ground are provided at the lower end of the cabinet 120. The foot member 121 may further have a height adjustment function.

The loading-side table unit 131 supports the film-attached substrate by vacuum suction. Since the loading table unit 131 is initially disposed in the horizontal direction in the beginning, the film-attached board is loaded in the horizontal direction on the loading-side table unit 131 after entering in the horizontal direction. However, when the film- The table unit 131 stands vertically and is tilted. Therefore, the film-attached substrate held by the input-side table unit 131 is also raised, and in this state, the separation process of the donor film and the back film starts.

When the donor film and the back film are peeled off from the substrate in the state where the film-attached substrate is standing, there is no fear that the particles generated during the peeling of the donor film fall down to the substrate, have.

That is, if the donor film is peeled off after the film-attached substrate is disposed in a horizontal state as in the conventional art, particles generated at the time of peeling the donor film must fall down to the substrate. However, if the donor film is peeled off after the film- Even if the phenomenon does not occur or even occurs, it can be minimized.

When the film-attached substrate is loaded on the loading-side table unit 131 and loaded, the donor film is horizontally arranged as shown in Fig. Thereafter, the film-attached substrate is vacuum-adsorbed after being aligned by the aligner 135. In the peeling process, the loading table unit 131 is erected and tilted.

The discharge side table unit 132 is provided movably on the other side of the cabinet 120 and serves to attract the substrate on which the donor film and the back film are separated and to tilt the substrate. The discharge-side table unit 132 has the same structure as that of the loading-side table unit 131 only in the positional difference from the object to be attracted.

The nip roll unit 140 is disposed between the input table unit 131 and the output table unit 132 and serves to separate the donor film and the back film from the film-attached substrate. That is, the donor film and the back film are peeled off as the film-attached substrate passes over the nip roll unit 140.

Of course, at this time, the film peeling process is performed by interaction between the donor film clamp 161 that clamps the donor film, the back film clamp 162 that clamps the back film, and the substrate clamp 163 that clamps the substrate as shown in Fig. 3 .

3, the donor film clamp 161, the back film clamp 162 for clamping the back film, and the substrate clamp 163 are connected to the donor film clamp transfer unit 171, the back film clamp transfer unit 172 and the substrate clamp transfer unit 173. The donor film clamp transport unit 171, the back film clamp transport unit 172 and the substrate clamp transport unit 173 may be linear motors.

8 to 11, the nip roll unit 140 includes a porous roll 141 for a donor film rotated in contact with a donor film, a poros roll for a donor film (EPDM roll) 151 arranged in parallel to the donor film roll 141 for the donor film while being spaced apart from the roll film 141 and rotated in contact with the back film.

When the film-attached substrate is placed upright by the direction-switching stage 110 for supporting the substrate, the film-attached substrate 141 is rotatably arranged on the upper region of the film-attached substrate So that the donor film is adsorbed and guided by suction.

Since the poros roll 141 for the donor film has to form a suction in a radially inward direction in a certain section and must be rotated in order to guide the donor film, the following structural features are satisfied in order to satisfy these two conditions.

That is, in the present embodiment, as shown in detail in FIG. 11, the poros roll 141 for a donor film includes at least one first suction hole 142a formed on a circumferential surface thereof, and a stationary inner ring And a plurality of second suction holes 143a formed on the circumferential surface of the fixed outer ring 142. The outer ring 143 is rotatable relative to the fixed inner ring 142, And a bearing 144 formed between the inner ring 142 and the rotating outer ring 143 and having a suction communication groove 144a communicating the first suction hole 142a and the second suction hole 143a.

The fixed inner ring 142 is a structure that is not rotated, and a first suction hole 142a is formed on one side of the circumferential surface of the fixed inner ring 142. [ The first suction hole 142a may be formed in the region of the suction communication groove 144a. In the present embodiment, the first suction hole 142a is formed in the suction communicating groove 144a region, but the first suction hole 142a may be arranged in a number as long as it does not deviate from the suction communication groove 144a have.

A plurality of second suction holes 143a are formed on the circumferential surface of the rotating outer ring 143, which is rotated differently from the fixed inner ring 142 having such a structure. The second suction holes 143a are arranged at equal angular intervals along the circumferential direction of the rotating outer ring 143. The second suction holes 143a can be selectively communicated with the suction communication groove 144a of the bearing 144 when the rotary outer ring 143 rotates.

The suction communication groove 144a is a portion where suction is provided. The first suction hole 142a and the suction communication groove 144a provide a suction at a fixed pressure in a fixed position. Therefore, the second suction holes 143a are connected to the rotation of the rotating outer ring 143 so that suction is formed only in the area disposed in the suction communication groove 144a.

In this way, when the donor film is guided by forming a suction on only a part of the poros roll 141 for donor film, a suction is formed only in an area where the donor film actually passes. Therefore, The particles generated in the donor film are transferred to the substrate to prevent a phenomenon that the quality of the substrate is poor.

A means for rotating the rotating outer ring 143 of the donor film roll 141 for donor film is provided on the donor film for porcelain roll 141 so that the donor film can be guided by the suction while the porcelain roll 141 for the donor film is rotated The donor film rotator 145 for donor film is connected.

As shown in Figs. 8 to 10, the donor film rotatable portion 145 for a donor film includes a first servomotor 145a for providing a rotational power, a drive pulley 145a for driving the first servo motor 145a, A driven pulley 145c connected to the rotary outer ring 143 of the forerun roll 141 for the donor film and a belt 145d for connecting the drive pulley 145b and the driven pulley 145c in a closed loop, . In other words, in this embodiment, the rotary outer ring 143 of the poros roll 141 for the donor film is rotationally driven by the indirect coupling method by the belt 145d. When the first servomotor 145a is operated, its rotational force is transmitted to the driving pulley 145b, the belt 145d and the driven pulley 145c, and as a result, the rotary outer ring 143 of the poros roll for donor film 141 Can be rotated. As described above, even if the rotary outer ring 143 of the poros roll 141 for the donor film is rotated, the fixed inner ring 142 of the poros roll 141 for the donor film does not rotate.

The backing film elastic rolls 151 are rotatably arranged in the vicinity of the donor film for donor film 141 in parallel with the donor film for donor film 141 to guide the back film.

The backing film elastic roll 151 guides the donor film to the suction while the porosus roll 141 for the donor film guides the donor film to the suction by the double roller structure of the fixed inner ring 142 and the rotating outer ring 143, So that it can be stably guided without being shaken.

The elastic roll 151 for the back film also rotates like the poros roll 141 for the donor film to guide the back film. However, the direct roll type rotary structure is applied to the elastic roll 151 for back film, while the poros roll 141 for the donor film is rotated by the indirect coupling type by the belt 145d. That is, the servo motor 148 is directly connected to one end of the back-film elastic roll 151 to rotate the back-film elastic roll 151.

Since the poros roll 141 for the donor film and the elastic roll 151 for the back film are long members as long as the size of the film, the poros roll 141 for the donor film approaches the back roll elastic roll 151, When the back film is guided, the transfer roll 151 for a donor film (hereinafter, referred to as " transfer roll 141 ") is rotated with respect to the elastic roll 151 for back film while maintaining the spacing of the donor film- ), So that the entire surface of the donor film and the back film, especially the donor film, can be clamped to a uniform pressure.

If the distance between the donor film rolls 141 for the backfilm elastic rolls 151 is kept the same, the donor film rolls 141 approach or separate from the backfilm elastic rolls 151 If the substrate is not driven, the transfer pattern transferred to the substrate may be crushed or distorted, resulting in poor quality of the substrate. For this purpose, a poros roll moving part 146 for a donor film is provided.

The transfer roll 146 for donor film moves the transfer roll 151 for backfilm while maintaining the separation distance of the donor film rolls 141 for the backfilm to the same, And serves to approach or drive the Poros roll 141.

As shown in Figs. 8 to 10, the donor film roll moving unit 146 for donor film is connected to both ends of the donor film roll 141 for donor film, A pair of rods 146b respectively connected to the pair of donor film support rollers 146a for a donor film and a pair of rods 146b for donor film for the donor film, And servo motors 146c and 146d for moving a pair of rods 146b at the corresponding positions.

At this time, a pair of rods 146b are provided with a pair of load cells 146a, 146b for sensing the pressure when the poros roll 141 for the donor film is moved toward the back-film elastic roll 151 by the servo motors 146c, (147). Sensing information by the pair of load cells 147 is transmitted to a control unit (not shown), and the control unit can control the operation of the servomotors 146c and 146d based on the transmitted sensing information. An indicator 149 may be disposed around the pair of load cells 147.

When the servo motors 146c and 146d are operated to move the foreros roll 141 for the donor film toward the backing film elastic roll 151, the pressure at this time is sensed by the pair of load cells 147, The control unit controls the operation of the servomotors 146c and 146d, that is, the torque and the rotation speed based on this information, whereby the long roll length 141 of the donor film for the donor film is fed to the elastic roll 151 for backfilm, The elastic rolls 151 can be separated from each other. Therefore, it is possible to eliminate the phenomenon that the transferred pattern transferred to the substrate during the peeling of the donor film is crushed or disordered, resulting in poor quality of the substrate.

Referring to FIG. 12, in this embodiment, the film peeling unit 110 further includes a peeling roll 181 for a donor film and a peeling roll 182 for a film.

The donor film peeling roll 181 serves to prevent the oscillation of the donor film clamp 161 from being transmitted to the nip roll unit 140 when the donor film clamp 161 pulls the donor film and pulls it.

And the film filling roll 182 serves to prevent the vibration of the back film clamp 162 from being transmitted to the nip roll unit 140 when the back film clamp 162 pulls the back film by pulling it.

The peeling roll 181 for a donor film and the peeling roll 182 for a film can eliminate the phenomenon that the transfer pattern transferred to the substrate during peeling off of the film, especially during peeling of the donor film, is crushed or disordered, .

At this time, the peeling roll 181 for the donor film is crown-processed in both end portions 181a so that the cross-sectional area of the region of the both end portions 181a is larger than the cross-sectional area of the remaining region as shown in Fig. Due to such a structure, only the both end portions 181a of the filling roll 181 for the donor film are locally contacted with the donor film.

On the contrary, the filling roll 182 for the back film has a bar shape having the same cross sectional area as the entire area as shown in Fig. 12 (b). Therefore, the entire area of the filling roll 182 for the back film can be pressed against the back film.

Lastly, a suction nozzle unit 185 is disposed adjacent to the nip roll unit 140 as shown in FIG. 5, and the donor film clamp 161 and the back film clamp 162 are disposed on the donor film and the back film, respectively And serves to suck both end regions of the substrate so that air does not enter both end regions of the substrate when clamping.

A film peeling method for a flat panel display device having such a structure will be described mainly with reference to Fig.

First, a substrate with film assembled on both sides of a donor film and a back film is injected in a horizontal direction. At this time, the film-attached substrate is horizontally arranged so that the donor film faces upward.

Next, in the film peeling unit 110, the film-attached substrate to be fed in the horizontal direction is vertically tilted. In this way, the donor film and the back film are peeled from the film-attached substrate in a state where the film-attached substrate is tilted.

The donor film clamp 161 and the back film are clamped on the opposite side so that the film-attached substrate is spaced apart from the gap between the poros roll for donor film 141 of the nip roll unit 140 and the elastic roll 151 for the back film, And the substrate clamp 163 for clamping the substrate to peel the donor film and the back film from the film-attached substrate.

Next, since the substrate on which the donor film and the back film are peeled off is in a standing state, the substrate is tilted in the horizontal direction, and then the substrate arranged in the horizontal direction is discharged in a post process.

On the other hand, in the film peeling step, the donor film peeled off from the film-attached substrate is returned to the input position of the film-attached substrate and then discharged along the path. At this time, the back film peeled from the film-attached substrate can be discarded as it is. Of course, the donor film may also be discarded as the case may be.

As described above, according to the present embodiment, the film can be peeled off while the substrate is being tilted so that the problem of poor quality of the substrate due to the particles can be solved, and the peeling efficiency of the film can be improved .

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

101: Substrate input portion 102: Substrate discharge portion
110: film peeler 120: cabinet
131: input-side table unit 132: exhaust-side table unit
140: Nip roll unit 141: Poros roll for donor film
151: elastic roll for back film 161: donor film clamp
162: back film clamp 163: substrate clamp
171: Donor film clamp transport unit 172: Back film clamp transport unit
173: Substrate clamp transport unit 181: Filling roll for donor film
182: Filling roll for back film 185: Suction nozzle unit

Claims (16)

A substrate loading portion for forming a loading position where a film-adhered substrate on which both a donor film and a back film are assembled is inserted;
A substrate discharge unit disposed on the opposite side of the substrate loading unit to form a discharge position where the substrate on which the donor film and the back film are separated is discharged; And
Wherein the film-attached substrate placed in the horizontal direction from the substrate loading portion is vertically tilted and disposed between the substrate loading portion and the substrate discharging portion, And a film peeling section for peeling the film,
The film-
A cabinet forming an appearance;
An input side table unit movably installed at one side of the cabinet and adapted to attract a film-attached substrate transferred from the substrate input unit and tilting the film-attached substrate;
An out-side table unit movably provided on the other side of the cabinet and adapted to attract the substrate on which the donor film and the back-film are peeled, and to tilt the substrate;
A nip roll unit disposed between the input table unit and the output table unit for peeling off the donor film and the back film from the film-attached substrate; And
And a donor film and a back film clamp for clamping the donor film and the back film, respectively. The method according to claim 1,
Wherein the substrate having the donor film and the back film peeled off is tilted in the horizontal direction by the film peeling unit and then discharged to the substrate discharge unit. The method according to claim 1,
The donor film peeled off from the film-attached substrate is returned to the substrate input portion through the film peeling portion and discharged,
Wherein the backing film peeled off from the film-attached substrate is discarded. delete The method according to claim 1,
The nip roll unit includes:
A porous roll for the donor film rotated in contact with the donor film; And
An EPDM roll (hereinafter referred to as " EPDM roll ") which is disposed in parallel with the poros roll for the donor film and rotates in contact with the back film so as to allow the film-attached substrate to pass therethrough, ) For separating the flat panel display device. The method according to claim 1,
The film-
A peeling roll for the donor film which prevents the oscillation of the donor film clamp from being transmitted to the nip roll unit when the donor film clamp clamps and pulls the donor film; And
Further comprising a peeling roll for the back film which prevents the vibration of the back film clamp from being transmitted to the nip roll unit when the back film clamp clamps and draws the back film. Film stripping device for device. The method according to claim 1,
The both end regions of the filling roll for the donor film are crown-processed such that the cross-sectional area of both end regions is larger than the cross-
Wherein the peeling roll for the back film has a rod shape having the same cross sectional area in all regions. The method according to claim 1,
Wherein when the donor film clamp and the back film clamp clamp the donor film and the back film respectively, air is prevented from entering both end regions of the substrate, Further comprising: a suction nozzle unit for sucking the liquid from the suction nozzle unit. The method according to claim 1,
The film-
Further comprising a substrate clamp for clamping the substrate on which the donor film and the back film are peeled off. 10. The method of claim 9,
The film-
A film clamp transfer unit for transferring the donor film clamp and the back film clamp; And
Further comprising a substrate clamp transporting unit for transporting the substrate clamp. delete delete delete delete delete delete

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