KR101329634B1 - Mobile Type Exhauster for Semiconductor Production Apparatus - Google Patents

Abstract

A casing provided with a wheel at a lower portion thereof so as to be able to be used while being conveniently moved to a position where the chamber is located and to be able to effectively remove contaminant gas from the outside, an exhaust pump installed inside the casing, An exhaust pipe forming an exhaust passage and having one end connected to the exhaust pump, an exhaust pipe connected to the other end of the intake pipe and having an opening in the chamber, And an intake hood provided so as to perform intake by the surroundings. The present invention also provides a mobile exhaust system for a semiconductor manufacturing equipment.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a mobile type exhaust device for semiconductor manufacturing equipment,

The present invention relates to a mobile exhaust apparatus for semiconductor manufacturing equipment, and more particularly, to a mobile exhaust apparatus capable of being removably mounted and capable of effectively exhausting and exhausting a polluted gas while preventing a polluted gas from flowing out to the outside when the chamber is opened. The present invention relates to a cost-removable exhaust system.

Generally, semiconductors can be broadly classified into memory semiconductors capable of storing information and system semiconductors (non-memory semiconductors) that perform computation or control functions without storing information.

The semiconductor has been widely used in various electronic products as well as aerospace. The wafer used for making a semiconductor chip or the like has been manufactured up to a size of 200 mm, and recently it has become possible to manufacture the wafer up to a size of 300 mm.

In manufacturing the semiconductor chip, various processes such as photographing, diffusion, etching, chemical vapor deposition, and metal deposition are performed on the wafer. As various chemical substances are used during the cleaning and maintenance of the manufacturing equipment including these processes, The semiconductor manufacturing equipment may be corroded or deformed, which may shorten the life of the equipment.

For example, when a cassette in which a wafer is loaded is taken out to the outside when a contaminated gas is generated during a wafer etching process and the contaminated gas can not be completely exhausted from the inside of the chamber, the cassette inlet of the chamber is opened, There is a problem that contamination or corrosion of peripheral manufacturing equipment and parts occurs and the health of a worker located in the vicinity of the chamber is deteriorated.

Korean Patent Registration No. 0567433 discloses a device for discharging a polluted gas in a semiconductor manufacturing equipment in which a polluted gas can be exhausted and removed without allowing the polluted gas to leak to the outside when the chamber is opened.

Korean Patent No. 0567433 discloses a suction duct which is provided around a cassette inlet of a chamber and has a suction port formed with a plurality of through holes and sucks the polluted gas by vacuum suction and a suction pipe for discharging the polluted gas sucked through the suction duct to an exhaust duct And a vacuum ejector for making the suction duct and the suction pipe into a vacuum state by using compressed air of an air compressor.

In the conventional apparatus for removing contaminants of the conventional semiconductor manufacturing equipment, the installation cost is increased as each chamber is individually installed. Therefore, there is a need for an improvement to solve such a problem.

Unlike the chamber for manufacturing semiconductor wafers having a size of 200 mm in the case of a chamber for manufacturing semiconductor wafers of 300 mm in size, the chambers are irregularly arranged without being arranged in a certain pattern, It is necessary to research and develop a device that can be used and effectively remove pollutant gas.

Disclosure of the Invention The present invention has been made in view of the above points, and it is an object of the present invention to provide an air conditioner which moves easily around a chamber used in a semiconductor manufacturing process to install an intake hood in a chamber, The present invention has been made in view of the above problems, and it is an object of the present invention to provide a mobile exhaust apparatus for a semiconductor manufacturing apparatus.

Another object of the present invention is to provide a vacuum pump which can operate the exhaust pump to exhaust the polluted gas and exhaust the exhaust gas. And to provide a mobile exhaust device for a semiconductor manufacturing equipment.

Still another object of the present invention is to provide a portable exhaust apparatus for a semiconductor manufacturing apparatus capable of minimizing the outflow of pollutant gases since it is possible to suck and exhaust the pollutant gas present in the chamber cover together with the pollutant gas present in the chamber .

A mobile exhaust system for semiconductor manufacturing equipment proposed by the present invention includes an enclosure in which a wheel is installed at a lower portion thereof, an exhaust pump installed inside the enclosure, and a suction port in which one end portion is connected to the exhaust pump An exhaust pipe formed at the other end of the intake pipe and configured to intake air around the opening of the intake pipe, and an exhaust pipe connected to the other end of the intake pipe, .

Wherein the intake hood is formed in a flat tubular shape and is disposed outside the opening of the chamber and has an intake space formed to pass through the intake space in opposed relation to the opening and is formed along the inner edge of the body, And an intake port formed at an outer edge of the body, the intake port being formed in the body so that the intake pipe communicates with the inside of the body.

Wherein the body comprises a pair of upper and lower plates formed with through holes at an inner side and spaced apart at regular intervals and inner edges formed with the through holes of the upper and lower plates, And a side plate connected to the outer edge of the upper plate and the lower plate to seal the intake panel and to form the intake port.

The intake hood may further include a cover for adjusting an opening area of the intake space on an upper side of the body.

The cover includes a cover plate closely attached to the upper surface of the body and formed to regulate the open / close area of the intake space as the cover is reciprocated along the upper surface of the body, and a pair of slidably supporting both sides of the cover plate As shown in FIG.

Further, the present invention may further include an air curtain installed to close the intake space as the compressed air is blown out from the upper portion of the body of the intake hood.

Further, the present invention may further comprise a bypass pipe connecting the intake pipe and the exhaust pipe, and a vacuum pump installed at the other end of the exhaust pipe.

Further, the present invention provides an air conditioner comprising: an auxiliary exhaust pump installed inside the housing; an auxiliary intake tract having an intake passage and one end connected to the auxiliary exhaust pump; and an exhaust passage, An auxiliary exhaust pipe connected to the exhaust pump, an auxiliary valve connected to the auxiliary intake pipe and configured to open and close the opening of the chamber and to form a space around the space of the chamber cover having a space facing the opening of the chamber, It is also possible to further include an intake hood.

Wherein the auxiliary intake hood has a flat tubular shape and has an auxiliary body on one side of which is closely attached to an inner surface side of the chamber lid; a plurality of auxiliary air intake hoods formed on one edge of the auxiliary body, And an auxiliary intake port formed at the other corner of the auxiliary body and formed so that the inside of the auxiliary body and the auxiliary intake pipe communicate with each other.

According to the present invention, there is provided a movable type exhaust apparatus for a semiconductor manufacturing apparatus, which can be easily moved around a chamber used in a semiconductor manufacturing process, and is capable of sucking and exhausting a contaminated gas flowing out of a chamber and a chamber lid, It is possible to use it easily, reduce the installation cost, and effectively prevent the pollution gas from flowing out.

According to the mobile exhaust apparatus for semiconductor manufacturing equipment according to the present invention, since exhaust operation can be performed using a bypass pipe and a vacuum pump when a failure of the exhaust pump occurs, it is possible to improve the efficiency and improve the exhaust performance.

Further, according to the mobile exhaust apparatus for semiconductor manufacturing equipment according to the present invention, it can be conveniently mounted and used in a mobile type and customized type, and can be used simultaneously with operations such as cleaning work, assembly, disassembly and maintenance of semiconductor manufacturing equipment .

1 is a perspective view showing a mobile type exhaust apparatus for a semiconductor manufacturing equipment according to a first embodiment of the present invention.
2 is a block diagram showing a mobile exhaust system for a semiconductor manufacturing equipment according to a first embodiment of the present invention.
3 is a perspective view showing an intake duct in a mobile exhaust system for a semiconductor manufacturing equipment according to a first embodiment of the present invention.
4 is a side sectional view showing an intake duct in a mobile exhaust system for a semiconductor manufacturing equipment according to a first embodiment of the present invention.
5 is a plan view showing an intake duct in a mobile exhaust system for a semiconductor manufacturing equipment according to a first embodiment of the present invention.
6 is a sectional view taken along the line AA in Fig.
7 is a sectional view taken along line BB of Fig.
8 is a plan view showing an air curtain in a mobile exhaust apparatus for a semiconductor manufacturing equipment according to a second embodiment of the present invention.
9 is a side sectional view showing an air curtain in a mobile exhaust apparatus for a semiconductor manufacturing equipment according to a second embodiment of the present invention.
10 is a perspective view showing a mobile type exhaust apparatus for a semiconductor manufacturing equipment according to a third embodiment of the present invention.
11 is a block diagram showing a mobile exhaust system for a semiconductor manufacturing equipment according to a third embodiment of the present invention.
12 is a perspective view showing an auxiliary intake duct in a mobile exhaust system for a semiconductor manufacturing plant according to a third embodiment of the present invention.
13 is a plan sectional view showing an auxiliary intake duct in a mobile exhaust system for a semiconductor manufacturing equipment according to a third embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, a preferred embodiment of a mobile exhaust apparatus for a semiconductor manufacturing equipment according to the present invention will be described in detail with reference to the drawings.

In the following description, the same reference numerals are used for the same technical elements, and detailed descriptions for avoiding redundant description are omitted.

The embodiments described below are intended to illustrate the preferred embodiments of the present invention in an effective manner and should not be construed to limit the scope of the present invention.

As shown in FIGS. 1 to 3, the mobile type exhaust apparatus for a semiconductor manufacturing apparatus according to the first embodiment of the present invention includes a housing 10 having a wheel 12 at a lower portion thereof, A suction pipe 22 and an exhaust pipe 24 connected to the exhaust pump 22 and an opening 22 of the chamber 2 connected to the intake pipe 22 and used in a semiconductor manufacturing process, And an intake hood 30 formed in such a manner that intake is performed on the intake side.

The housing 10 has a substantially rectangular box shape.

A handle 11 is provided on the upper portion of the housing 10 and the wheel 12 is installed on the bottom.

The exhaust pump 20 is generally made of an exhaust pump widely used for exhausting a gas such as gas or air.

The intake pipe 22 is formed in the shape of a pipe and forms an intake passage so that intake is performed to the inside of the exhaust pump 20. One end of the intake pipe 22 is connected to the exhaust pump 20, And is connected to the hood 30.

The exhaust pipe 24 is formed in a pipe shape and forms an exhaust passage through which the exhaust gas is exhausted from the exhaust pump 20, and one end of the exhaust pipe 24 is connected to the exhaust pump 20.

The other end of the exhaust pipe 24 is connected to a duct of an air conditioning system, an air purifier, etc., though it is not shown in the figure.

The intake pipe 22 may be provided with a mesh filter 23 in the form of a mesh.

The suction pipe 22 and the exhaust pipe 24 are connected to each other by using a bypass pipe 26 provided with an on-off valve 27. A vacuum pump 28 is connected to the other end of the exhaust pipe 24 It is also possible to install more.

When the bypass pipe 26 and the vacuum pump 28 are installed as described above, the vacuum pump 28 can be used even when the exhaust pump 20 fails.

The vacuum pump 26 may be a vacuum pump 26 installed for air conditioning or the like at a factory where the chamber 2 is installed.

The intake hood 30 is provided with a plurality of intake ports 34 around an opening of the chamber 2 in which an opening is formed in the upper end surface so that the polluted gas in the chamber 2 is sucked in through the intake port 34 Respectively.

4 to 7, the intake hood 30 is formed in a substantially flat tubular shape and horizontally laid on the opened upper side of the chamber 2, and is arranged to face the opening of the chamber 2, A plurality of intake ports 31 formed along the inner edge of the body 32 and formed so as to communicate with the internal space of the body 32 and the intake space 31, An intake port 36 formed at the outer side edge of the body 32 and formed so as to communicate with the internal space of the body 32 and the intake pipe 22, And a lid 40 installed on the upper surface of the intake port 32 to adjust the amount of opening and closing of the intake space 31.

It is also possible for the assembly protrusion 38 to protrude from the bottom of the body 32 so that the upper end of the chamber 2 is assembled inside.

The assembly projections 38 are formed in a ring shape along the circumference of the intake space 31 and surround the upper ends of the chambers 2 from outside.

The intake space 31 formed in the body 32 is formed in a substantially circular shape.

The intake space 31 may have a rectangular shape, an elliptical shape, or the like other than a circular shape.

The body 32 includes a pair of upper and lower plates 32a and 32b having through holes 33 formed therein and spaced apart at regular intervals and a pair of upper and lower plates 32a and 32b, A plurality of connecting rods 32c which are provided so as to be connected to each other at regular intervals between inner edges where the through holes 33 are formed and form the plurality of intake ports 34, And a side plate (32d) which is connected to the outer periphery to connect the periphery and is formed to be hermetically closed and in which the intake port (36) is formed.

The intake ports 36 are formed in pairs in the center of both sides of the body 32.

Both side surfaces of the body 32 are formed so as to gradually protrude outward toward the center. That is, the inner planar cross-sectional area of both end portions is gradually reduced toward the edge.

The lid plate 40 is attached to the upper surface of the body 32 and is reciprocated along the upper surface of the body 32 to adjust the opening and closing area of the intake space 31, And a pair of support rails 44 slidably supporting both side edges of the cover plate 41.

The cover plate 41 is formed symmetrically on both sides of the upper surface of the body 32 and increases the amount of opening and closing of the intake space 31 when moved outward so that the distance therebetween is increased. And a pair of first cover plates 42 and a second cover plate 43 which are formed so as to reduce the amount of opening and closing of the intake space 31 upon movement.

The support rail 44 has a substantially "a" shape.

That is, the support rail 44 is formed by a vertical portion 44a perpendicular to the upper surface of the cover plate 41 and a bent portion perpendicular to the end of the vertical portion 44a, And a horizontal portion 44b to which an end of the cover plate 41 is supported.

The support rail 44 may be provided with a bolt 48 for preventing the cover plate 41 from moving at a predetermined position.

The bolt 48 is installed through the support rail 44 and rotates in one direction so that the cover plate 41 is pushed and pressed. When the bolt 48 is rotated in the opposite direction, the bolt 48 is released.

The support rail 44 includes a pair of first rails 45 for slidably supporting both side edges of the first cover plate 42 and a pair of second rails 45 for sliding both side edges of the second cover plate 43, And a second rail (46) which supports the second rail (46).

The operation of the mobile exhaust system for semiconductor manufacturing equipment according to the present invention will now be described with reference to the drawings.

When the chamber 2 to be cleaned with the pollutant gas is determined, the operator grips the handle 11 of the housing 10 to roll the wheel 12 and moves the wheel 12 to the corresponding chamber 2. At this time, 30 are moved by the operator in a state of being carried or carried on the housing 10.

The exhaust pipe 24 is connected to an air conditioning apparatus such as an exhaust duct before or after the exhaust pipe 24 moves to the corresponding chamber 2.

When the exhaust hood 30 is moved to the chamber 2 and the exhaust pipe 24 is connected to the air conditioning system, the exhaust pump 20 is operated to open the upper surface of the chamber 2, Install it on the top of the chamber (2).

When the exhaust pump 20 is operated and the intake hood 30 is installed as described above, the contaminated gas inside or around the opening of the chamber 2 flows into the intake space 31 of the intake hood 30 and the intake opening And then flows through the intake pipe 22 and the mesh filter 23, the exhaust pump 20 and the exhaust pipe 24 in sequence through the intake port 36, The exhaust gas is discharged.

As shown in FIGS. 8 and 9, the movable type exhaust system for a semiconductor manufacturing plant according to the second embodiment of the present invention ejects compressed air from the upper side of the body 42 of the intake hood 40, And an air curtain 50 installed so as to close the opening 41.

The air curtain 50 includes an air chamber 51 in which compressed air is received, an air jet port 52 formed on one surface of the air chamber 51 and through which compressed air is ejected from the air chamber 51, And an air supply port 53 formed on the other surface of the air chamber 51 and supplied with compressed air into the air chamber 51.

The air chambers 51 of the air curtains 50 are installed above the first cover plate 42 and the second cover plate 43 and are installed so that the air outlets 52 face each other.

An air compressor (not shown) is connected to the air supply port 53 through an air supply pipe 54 or the like so as to supply compressed air.

The air curtain 50 prevents the polluted gas in the chamber 2 from flowing out to the outside through the intake space 31.

In the second embodiment described above, the same configuration as that of the above-described first embodiment can be employed except for the above-described configuration, and a detailed description thereof will be omitted.

As shown in FIGS. 10 and 11, the mobile type exhaust apparatus for a semiconductor manufacturing equipment according to the third embodiment of the present invention includes an auxiliary exhaust pump 120 installed in the housing 10, An auxiliary intake pipe 122 and an auxiliary exhaust pipe 124 connected to the auxiliary intake pipe 122 and connected to the auxiliary intake pipe 122 and connected to the auxiliary intake pipe 122 and opening and closing the opening of the chamber 2, And an auxiliary intake hood 130 formed to surround the space portion 7 of the chamber lid 6 with the space portion 7 formed therebetween so as to perform intake.

The auxiliary exhaust pump 120 may have the same configuration as that of the exhaust pump 20 described above.

The auxiliary intake pipe 122 is formed in the shape of a pipe and forms an intake passage so that intake is performed to the inside of the auxiliary exhaust pump 20. One end of the auxiliary intake pipe 122 is connected to the auxiliary exhaust pump 120, Is connected to the auxiliary intake hood (130).

The auxiliary intake pipe 122 may be provided with a mesh filter 123 in the form of a mesh.

The auxiliary exhaust pipe 124 is formed in a pipe shape and forms an exhaust passage through which the exhaust gas is exhausted from the auxiliary exhaust pump 120, and one end of the exhaust pipe 124 is connected to the auxiliary exhaust pump 120.

The auxiliary intake pipe 122 and the auxiliary exhaust pipe 134 are connected to each other by using an auxiliary bypass pipe 136 provided with an auxiliary opening / closing valve 137 to be used when the auxiliary exhaust pump 120 fails. .

A junction pipe 125 may be connected to the end of the exhaust pipe 24 and the auxiliary exhaust pipe 124 so as to join the exhaust pipe. In this case, 28 can be connected.

Since the space portion 7 of the chamber lid 6 is in communication with the internal space of the chamber 2 in the closed state, the contaminated gas can be present inside the chamber lid 6 when the chamber lid 6 is opened.

12 and 13, the auxiliary intake hood 130 is formed in a flat tubular shape and has an inner surface of the chamber lid 6 (an opening 3 of the chamber 2 in a state in which the chamber 2 is closed) And an auxiliary body 132 formed at one side of the auxiliary body 132 at a predetermined interval and communicating with the inside and the outside of the auxiliary body 132, And an auxiliary intake port 136 formed at the other corner of the auxiliary body 132 and formed so as to communicate with the inside of the auxiliary body 132 and the auxiliary intake pipe 122, .

One end of the auxiliary body 132 has a substantially arc shape.

One edge of the auxiliary body 132 and a part of the circumference of the space 7 may be formed to correspond to each other.

The auxiliary intake port 136 is formed at the center of the opposite corner where the auxiliary intake port 134 is located.

The other corner of the auxiliary body 132 is formed so as to gradually protrude outward toward the center.

The auxiliary body 132 includes a pair of auxiliary upper and lower plates 132a and 132b disposed at regular intervals and a pair of auxiliary upper and lower plates 132a and 132b, And a plurality of auxiliary connecting rods 132c which are provided to connect the auxiliary intake ports 134 and form the plurality of auxiliary intake ports 134 and the other edges of the auxiliary top plate 132a and the auxiliary bottom plate 132b, And an auxiliary side plate 132d on which the auxiliary intake port 136 is formed.

In the third embodiment described above, the same configuration as that of the first embodiment or the second embodiment can be employed except the above-mentioned configuration, and a detailed description thereof will be omitted.

2: chamber 4: chamber cover
10: Housing 11: Handle
12: wheel 20: exhaust pump
22: intake tube 23: mesh filter
24: Exhaust pipe 26: Bypass pipe
27: opening / closing valve 28: vacuum pump
30: intake hood 31: intake space
32: body 34: intake port
36: intake air outlet 40: cover
41: cover plate 42: support rail
50: air curtain 51: air chamber
52: air jet 53: air supply port
120: auxiliary exhaust pump 122: auxiliary intake pipe
124: auxiliary exhaust pipe 125: junction pipe
126: auxiliary bypass pipe 127: auxiliary opening / closing valve
130: auxiliary intake hood 132: auxiliary body
134: auxiliary intake inlet 136: auxiliary intake outlet

Claims (15)

A housing provided with a wheel at a lower portion thereof,
An exhaust pump installed inside the housing,
An intake pipe forming an intake passage and having one end connected to the exhaust pump,
An exhaust pipe forming an exhaust passage and having one end connected to the exhaust pump,
And an intake hood connected to the other end of the intake pipe and formed so as to perform intake around the opening of the chamber,
The intake hood has a flat cylindrical shape and is installed outside the opening of the chamber and is formed through the intake space to face the opening, and is formed around the inner edge of the body, and the inside of the body and the intake space communicate with each other. A plurality of intake inlets formed and installed so as to be formed, an intake outlet formed at an outer edge of the body and formed to communicate with the inside of the body, and an opening area of the intake space at an upper surface of the body; Mobile exhaust apparatus for semiconductor manufacturing equipment comprising a cover for adjusting the. The method according to claim 1,
The body of the air intake hood has a pair of upper and lower plates each having a through hole formed therein and spaced apart at regular intervals and an inner edge formed with the through hole of the lower plate so as to be spaced apart from each other And a side plate which is installed so as to close between the outer edges of the upper plate and the lower plate and in which the intake air outlet is formed. The method according to claim 1,
The body of the intake hood is formed so as to be protruded outward as its side faces toward the center,
Wherein the air inlet and the air outlet are formed in pairs in the center of both sides of the body. delete The method according to claim 1,
The cover is in close contact with the upper surface of the body and the cover plate is formed to adjust the opening and closing area of the intake space as the reciprocating along the upper surface of the body and a pair for supporting the two sides of the cover plate slidably Mobile exhaust device for semiconductor manufacturing equipment comprising a support rail of. The method according to claim 5,
The cover plate is installed on both sides of the intake space on the upper surface of the body is formed symmetrically with each other and is formed to increase the opening and closing amount of the intake space when moving outwards and to reduce the opening and closing amount of the intake space when moving inwards It consists of a pair of first cover plate and second cover plate,
The support rail includes a pair of first rails slidably supporting both edges of the first cover plate, and a second rail slidably supporting both edges of the second cover plate, respectively. Cost portable exhaust. The method according to any one of claims 1 to 6,
And the air intake hood further comprises an air curtain which is formed to close the intake space as the compressed air is ejected from the upper side of the body. The method of claim 7,
The air curtain is a mobile exhaust device for semiconductor manufacturing equipment installed on the upper portion of the cover. The method according to claim 8,
The air curtain is installed on the upper side of the first cover plate and the second cover plate of the cover and the mobile exhaust device for the semiconductor manufacturing equipment arranged so that the air outlets through which compressed air is ejected face each other. The method according to claim 1,
Wherein the intake space of the intake hood is formed in a circular shape. The method according to claim 1,
A bypass pipe connecting the intake pipe and the exhaust pipe,
And a vacuum pump connected to the other end of the exhaust pipe. The method according to claim 1,
An auxiliary exhaust pump installed inside the housing,
An auxiliary intake pipe forming an intake passage and having one end connected to the auxiliary exhaust pump;
An auxiliary exhaust pipe forming an exhaust passage and having one end connected to the auxiliary exhaust pump,
Further comprising an auxiliary intake hood connected to the auxiliary intake pipe and configured to open and close the opening of the chamber and to establish a space around the space of the chamber lid with a space facing the opening of the chamber,
Wherein the auxiliary intake hood has a flat tubular shape and has an auxiliary body on one side of which is closely attached to an inner surface side of the chamber lid; a plurality of auxiliary air intake hoods formed on one edge of the auxiliary body, And an auxiliary intake port formed at the other corner of the auxiliary body and formed so that the inside of the auxiliary body and the auxiliary intake tube communicate with each other. The method of claim 12,
Wherein the auxiliary body of the auxiliary intake hood comprises a pair of an auxiliary top plate and an auxiliary bottom plate arranged in parallel at regular intervals and a pair of auxiliary auxiliary plates arranged to be connected to one edge of the auxiliary bottom plate and one side edge of the auxiliary bottom plate at regular intervals, A plurality of auxiliary linkages forming an inlet and an auxiliary side plate connected between the auxiliary upper plate and the remaining lower edge of the auxiliary lower plate to seal the auxiliary side plate and to form the auxiliary intake port. The method of claim 12,
And the other one of the corners of the auxiliary body is formed to protrude outward toward the center,
And the intake port is disposed at the center of the other side surface. The method of claim 12,
An auxiliary bypass pipe connecting the auxiliary intake pipe and the auxiliary exhaust pipe,
Further comprising: a merging pipe connected to an end of the exhaust pipe and an auxiliary exhaust pipe.

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