KR101326016B1 - Module for detaching substrate and Apparatus using the same - Google Patents

Abstract

A substrate separation module according to the present invention includes a substrate separation module provided in a substrate separation apparatus for separating the substrate from a tray to which a substrate is adhered, comprising: a stage; A buffer unit installed on one surface of the stage and having a plurality of chambers; A substrate separation unit extending from the buffer unit and having a diaphragm at an extended end thereof to expand the diaphragm to separate the substrate as the pressure in the chamber increases; A fluid supply part supplying a fluid into the buffer part; And a controller for individually controlling a supply condition of the fluid supplied from the fluid supply unit to the respective chambers, wherein the substrate separation device using the substrate separation module independently controls the expansion pressure of the diaphragm for each zone, thereby adhering to the adhesive member. Irrespective of the characteristic of the adhesive force, the substrate can be separated from the tray uniformly.

Description

Module for detaching substrate and Apparatus using the same}

The present invention relates to a substrate separation module and a substrate separation apparatus using the same, and more particularly, to a substrate separation module for separating the substrate from the tray to which the substrate is attached, and a substrate separation apparatus using the same.

 A display device using an organic EL (Electro Luminescence) applies a voltage to the organic EL layer to lift the molecular state of the organic EL material from the ground state to the excited state, and the excited state and the ground state when the molecular state returns to the ground state. The energy difference of the state is used to emit light.

A panel using an organic EL is generally fabricated by forming an anode using ITO (Indium Tin Oxide) as a transparent electrode material on a glass substrate, forming an organic thin film layer thereon, and then forming a cathode thereon.

Accordingly, in the process of manufacturing the organic EL panel, the substrate goes through various processes for forming an anode, an organic thin film layer, and a cathode.

During each treatment process, the substrate is fixed to a substrate mounting table or the like, and the substrate fixing method includes a method using an electrostatic chuck, a method using a vacuum suction force, a method using a pressure-sensitive adhesive, and the like.

In particular, in the case of using a pressure-sensitive adhesive member, when the substrate is separated after the processing process for the substrate, the substrate is separated by pushing up the substrate using a lift pin or expanding the diaphragm installed at the end of the lift pin toward the substrate. This is common.

However, if the lift pin is constantly raised or the diaphragm is inflated at a constant pressure, the separation timing of the central and peripheral portions of the substrate varies depending on the characteristics of the adhesive force of the adhesive member that adheres the substrate to the tray, thereby causing the substrate to break. Often problems arise. This is expected to occur more frequently when considering the trend of larger substrate.

The present invention is to solve the above-mentioned problems and an object of the present invention is to independently control the expansion pressure of the diaphragm for each zone, the substrate separation module for uniformly separating the substrate from the tray regardless of the characteristics of the adhesive force of the adhesive member and It is to provide a substrate separation apparatus.

Substrate separation module according to the invention,

A substrate separation module provided in a substrate separation device for separating a substrate from a tray to which a substrate is attached, comprising: a stage; A buffer unit installed on one surface of the stage and having a plurality of chambers; A substrate separation unit extending from the buffer unit and having a diaphragm at an extended end thereof to expand the diaphragm to separate the substrate as the pressure in the chamber increases; A fluid supply part supplying a fluid into the buffer part; And a controller for individually controlling supply conditions of the fluid supplied from the fluid supply unit to the respective chambers.

The substrate separation unit may include a pneumatic chamber receiving the fluid from the buffer unit and expanding the diaphragm at the pressure of the fluid, and a supply passage transferring the fluid from the buffer unit to the pneumatic chamber.

The plurality of chambers may include a central chamber positioned at a central portion of the buffer unit and a peripheral chamber surrounding the central chamber.

The fluid supply part may include a first fluid supply part supplying a fluid to the central chamber, and a second fluid supply part supplying a fluid to the peripheral chamber.

The plurality of chambers may include a central chamber positioned at a central portion of the buffer portion, a corner chamber positioned at a corner portion of the buffer portion, and a side chamber positioned at a side portion of the buffer portion.

The fluid supply part may include a first fluid supply part supplying a fluid to the central chamber, a second fluid supply part supplying a fluid to the corner chamber, and a third fluid supply part supplying a fluid to the side chamber.

A plurality of corner chambers may be provided at each corner, and the side chambers may be provided at a plurality of side chambers.

The controller may control the supply conditions of the fluid supplied from the first fluid supply part, the second fluid supply part, and the third fluid supply part to adjust pressures in the corner chamber, the side chamber, and the central chamber, respectively. .

Substrate separation apparatus according to the present invention,

Claims [1] A substrate separation apparatus for separating a tray having a through hole formed thereon with a pressure-sensitive adhesive member on one surface and a substrate adhered to the pressure-sensitive adhesive member, comprising: a seating portion on which the tray is seated; A stage provided at a lower portion of the seating portion, a buffer portion disposed on one surface of the stage, the buffer portion including a plurality of chambers, a diaphragm extending from one surface of the buffer portion, and having a diaphragm at one end thereof. A substrate separation module including a substrate separation unit for expanding the diaphragm to separate the substrate as the pressure increases, a fluid storage unit for supplying a fluid into the buffer unit, and a controller for controlling internal pressure of each of the chambers; It includes a lifting unit for adjusting the interval between the tray and the substrate separation module.

The lifting unit may include a lifting unit installed below the stage to support the stage, and a driving unit to lift the lifting unit.

The plurality of chambers may include a central chamber positioned at a central portion of the buffer unit and a peripheral chamber surrounding the central chamber.

The plurality of chambers may include a central chamber positioned at a central portion of the buffer portion, a corner chamber positioned at a corner portion of the buffer portion, and a side chamber positioned at a side portion of the buffer portion.

A plurality of corner chambers may be provided at each corner, and the side chambers may be provided at a plurality of side chambers.

The controller may control the supply conditions of the fluid supplied from the first fluid supply part, the second fluid supply part, and the third fluid supply part to adjust pressures in the corner chamber, the side chamber, and the central chamber, respectively. .

The substrate separation module and the substrate separation apparatus according to the present invention have the effect of uniformly separating the entire surface of the substrate from the tray irrespective of the characteristics of the adhesive force of the adhesive member for adhering the substrate and the tray.

The technical effects of the present invention are not limited to the effects mentioned above, and other technical effects not mentioned can be clearly understood by those skilled in the art from the following description.

1 is a perspective view of a tray according to the present invention.
2 is a perspective view of a substrate separation module according to a first embodiment of the present invention.
3 is a cross-sectional view taken along line AA ′ of FIG. 2.
4 is a schematic view showing a substrate separation apparatus according to a first embodiment of the present invention.
5 is an operation of the substrate separation apparatus according to the first embodiment of the present invention.
6 is a perspective view of a substrate separation module according to a second embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, it should be understood that the present invention is not limited to the disclosed embodiments, but may be implemented in various forms, and the present embodiments are not intended to be exhaustive or to limit the scope of the invention to those skilled in the art. It is provided to let you know completely. The shape and the like of the elements in the drawings may be exaggerated for clarity, and the same reference numerals denote the same elements in the drawings.

Conventionally, in order to process film formation, etching, and the like on a substrate, the substrate is brought into the processing apparatus and fixed to a mounting table provided in the processing apparatus, and then a predetermined treatment is performed. It was removed from the processing unit and taken out to the processing unit and transferred to the processing unit of the next step.

However, as the number of times of fixing and detaching the substrate increases, the number of defects or breakage of the substrate increases, which is more frequent as the substrate becomes larger.

As a solution to this, various treatment processes may be performed while adhering the substrate, and a tray may be used to carry in and out of each processing apparatus. The process using this tray can be used not only in the production process of the organic EL display device but also in the production process of flat panel display devices, such as LCD and PDP.

1 is a perspective view of a tray according to the present invention.

As shown in FIG. 1, the tray 180 may have a plate shape having a slightly larger area than a substrate (not shown). The tray 180 is provided with a plurality of through holes 181. The through hole 181 is a space for the substrate separation unit 130 installed in the substrate separation module 110, which will be described later, to enter the tray 180 when the substrate is separated from the tray 180. The adhesive member 182 is provided around the through hole 181 on the upper surface of the tray 180, and the substrate is adhered to the adhesive member 182 to be positioned above the tray 180.

Since the substrate undergoes various treatment processes while being adhered to the tray 180, the number of fixing and detaching of the substrate is drastically reduced compared to the related art, thereby reducing the burden on the substrate.

 The substrate and the tray 180 are separated after various processing processes are completed. Hereinafter, the substrate separation module separating the substrate from the tray 180 will be described.

2 is a perspective view of a substrate separation module according to a first embodiment of the present invention, and FIG. 3 is a cross-sectional view taken along line AA ′ of FIG. 2.

2 and 3, the substrate separation module 110 according to the present embodiment is installed on the stage 111, one surface of the stage 111 and the central chamber 121 and the peripheral chamber 122 The first fluid for supplying a fluid to the central chamber 121, the buffer unit 120, a substrate separation unit 130 having a diaphragm 131 at the end portion extending from the buffer unit 120, Supply conditions of the supply unit 141, the second fluid supply unit 142 for supplying the fluid to the peripheral chamber 122, and the respective fluids supplied from the first fluid supply unit 141 and the second fluid supply unit 142 Control unit 151 to adjust individually.

As shown in FIG. 2, the stage 111 may be a flat plate. The stage 111 forms a bottom of the substrate separation module 110, and may support the buffer unit 120 and the substrate separation unit 130 extending from the buffer unit 120 installed on the top surface of the stage 111. have.

The buffer unit 120 may include a central chamber 121 positioned at the center of the buffer unit 120 and a peripheral chamber 122 surrounding the side of the central chamber 121.

The central chamber 121 and the peripheral chamber 122 may have buffer spaces separated from each other. Each of the chambers 121 and 122 has fluid supply holes 121a and 122a through which fluid can be supplied. The fluid supply holes 121a and 122a communicate with the buffer space inside the central chamber 121 and the peripheral chamber 122, respectively.

2 and 3 illustrate embodiments in which the fluid supply holes 121a and 122a are formed on the upper surfaces of the chambers 121 and 122, but are not limited thereto and may be configured in various embodiments. For example, the fluid supply holes 121a and 122a may be provided below the chambers 121 and 122 so that the fluid may be supplied through the stages 111 and the lower portions of the chambers 121 and 122. In addition, the peripheral chamber 122, the fluid supply hole 122a may be provided on the side. A plurality of fluid supply holes 121a and 122a may be formed in each chamber.

Subsequently, as shown in FIGS. 2 and 3, the substrate separation unit 130 may be provided in plural, and each substrate separation unit 130 extends from the central chamber 121 and the peripheral chamber 122. Can be located.

Each substrate separation unit 130 includes a diaphragm 131 installed at an extended end, and a pneumatic chamber 132 which is a space consisting of a bottom surface of the diaphragm 131 and an inner surface of the substrate separation unit 130. Can be. Each pneumatic chamber 132 may be in communication with the corresponding central chamber 121 or the peripheral chamber 122 by the supply passage 133 is installed in communication with the pneumatic chamber 132, respectively.

As shown in FIG. 3, the substrate separation module 110 according to the present embodiment includes a first fluid supply part 141 and a second fluid supply part 142. Each of the fluid supply units 141 and 142 may be a storage space for storing the fluid supplied to the central chamber 121 and the peripheral chamber 122 provided in the buffer unit 120.

The first fluid supply unit 141 supplies the fluid into the central chamber 121 through the fluid supply hole 121a provided on the upper surface of the central chamber 121. The first controller 152 may be installed between the first fluid supply part 141 and the central chamber 121. The first controller 152 may be a mass flow controller (MFC) capable of adjusting the flow rate of the fluid flowing out of the first fluid supply unit 141. Or it may be a pressure control valve (PCV) to adjust the pressure of the fluid supplied. In addition, various embodiments capable of adjusting the flow rate or the hydraulic pressure of the fluid are possible.

The second fluid supply unit 142 also supplies a fluid into the peripheral chamber 122 through the fluid supply hole 122a provided on the upper surface of the peripheral chamber 122, and the second fluid supply unit 142 and the peripheral chamber 122 The second controller 153 may be installed between and. The second controller 153 may also be a mass flow controller (MFC) or a pressure control valve (PCV).

The first controller 152 and the second controller 153 are connected to the controller 151.

The controller 151 may control the first controller 152 to adjust the supply amount or supply pressure of the fluid supplied from the first fluid supply unit 141 to the central chamber 121. In addition, the second controller 153 may be controlled to adjust the supply amount or supply pressure of the fluid supplied from the second fluid supply unit 142 to the peripheral chamber 122.

The controller 151 separately adjusts the supply amount or the supply pressure of the fluid supplied to the central chamber 121 and the peripheral chamber 122, and the pneumatic chamber 132a and the peripheral chamber 122 communicating with the central chamber 121. The pressure inside the connected pneumatic chamber 132b may be controlled differently. Therefore, the substrate separation module 110 according to the present exemplary embodiment includes the expansion pressure of the diaphragm 131a connected to the central chamber 121 positioned at the center portion and the diaphragm 131b connected to the peripheral chamber 122 positioned at the periphery thereof. It is possible to adjust the expansion pressure differently.

In FIG. 3, the fluid supply units 141 and 142 are provided separately for each chamber 121 and 122, but in contrast, the fluid supply units supply fluid to each chamber from one fluid supply unit, and constitute a separate supply line for each chamber 121 and 122. Controllers 152 and 153 may be installed in supply lines, respectively, to provide the same effects.

In addition, since the substrate separation module 110 according to the present invention may be configured to elevate in the substrate separation apparatus to be described later, the supply line 143 connecting the chambers 121 and 122 and the fluid supply units 141 and 142 is flexible. It is preferable to adopt as having one property.

Hereinafter, the substrate separation apparatus 100 using the substrate separation module 110 according to the first embodiment of the present invention will be described.

4 is a schematic diagram showing a substrate separation apparatus according to a first embodiment of the present invention.

The substrate separating apparatus 100 according to the present exemplary embodiment includes a housing 160, a substrate separating module 110 installed inside the housing 160, and a lifting unit 170 for elevating the substrate separating module 110.

The upper part of the housing 160 may be provided with a seating portion 161 on which the tray 180 to which the above-described substrate S is attached is mounted. The tray support jaw 162 may be formed on the seating portion 161 on which the tray 180 is seated to support the bottom surface of the tray 180. The tray support jaw 162 may protrude into the seating portion 161. Alternatively, although not shown, the entire bottom surface of the tray 180 may be formed in a lattice shape while forming a space corresponding to the through hole 181 formed in the tray 180.

As shown in FIG. 4, the lifting unit 170 may be installed at an inner lower portion of the housing 160 to support the substrate separation module 110.

The lifting unit 170 may include a lifting unit 171 for supporting the substrate separation module 110 and a driving unit 172 for lifting the lifting unit 171.

The driving unit 172 may be installed at the lower end of the platform 171 to freely lift the platform 171 up and down. The driving unit 172 may be variously changed in a range capable of elevating the platform 171. For example, the lifting platform 171 may be lifted or lifted by hydraulic, or the lifting platform 171 may be lifted by a motor (not shown) capable of forward and reverse rotation.

The lifting table 171 may be installed to stand between the driving unit 172 and the substrate separation module 110 in a bar shape. The lifting platform 171 receives power from the driving unit 172, and when the substrate S is separated, the diaphragm 131 of the substrate separation unit 130 enters the through hole 181 and is below the substrate S. The substrate separation module 110 is raised to be positioned, and after the separation of the substrate S is completed, the substrate separation module 110 is lowered again to return to the position before the rise.

Hereinafter, operations of the substrate separation module 110 and the substrate separation apparatus 100 according to the first embodiment of the present invention will be described. 5 is an operation of the substrate separation apparatus according to the first embodiment of the present invention.

As shown in FIG. 5A, the tray 180 to which the substrate S is adhered is seated on the seating portion 161 of the substrate separation apparatus 100. At this time, the substrate separation module 110 is located below the seating portion 161.

When the mounting of the tray 180 is completed, the driving unit 172 raises the platform 171 and the substrate separation module 110.

As shown in FIG. 5B, when the diaphragm 131 of the substrate separation unit 130 enters the through hole 181 and is positioned on the upper surface of the tray 180, the driving unit 172 is a lifting platform 171. Stops rising.

After the lifting of the lifting platform 171 is completed, the control unit 151 controls the first controller 152 and the second controller 153, respectively, the fluid supplied from the first fluid supply unit 141 to the central chamber 121 ( The supply state of a) and the supply state of the fluid b supplied from the second fluid supply unit 142 to the peripheral chamber 122 are respectively controlled.

The fluid a supplied into the central chamber 121 is supplied to the pneumatic chamber 132a along the supply passage 133a. As the fluid flows into the pneumatic chamber 132a and the pressure in the pneumatic chamber 132a increases, as shown in FIG. 5C, the diaphragm 131a in contact with the pneumatic chamber 132a expands toward the substrate S side. The center portion of the substrate S is pushed out of the tray 180.

At the same time, the fluid b supplied into the peripheral chamber 122 also flows into the pneumatic chamber 132b communicating with the peripheral chamber 122 along the supply passage 133b. And the diaphragm 131b which contact | connects the pneumatic chamber 132b is expanded to the board | substrate S side, and the periphery part of the board | substrate S is pushed out from the tray 180. FIG.

In the substrate separation module 110 and the substrate separation apparatus 100 according to the present embodiment, the diaphragm in which the controller 151 controls the first controller 152 and the second controller 153 communicates with the central chamber 121. The expansion pressure of 131a and the expansion pressure of the diaphragm 131b communicating with the peripheral chamber 122 can be controlled separately. Therefore, even if the adhesive properties of the adhesive member 182a sticking to the center portion of the substrate and the adhesive member 182b sticking to the peripheral portion are different, the inflation pressure of the diaphragm 131 of the central portion and the peripheral portion is changed according to the characteristics of the adhesive member 182. By adjusting, the substrate may be uniformly separated from the tray 180.

Hereinafter, the substrate separation module 210 according to the second embodiment of the present invention will be described. 6 is a perspective view of a substrate separation module according to a second embodiment of the present invention. For convenience of description, parts similar to those of the first embodiment use the same reference numerals, and parts common to the first embodiment will be omitted.

In the substrate separation module 110 according to the first embodiment, the buffer unit 120 includes a central chamber 121 and a peripheral chamber 122. In contrast, in the substrate separation module 210 according to the second embodiment of the present invention, the buffer unit 220 includes three or more chambers 221, 222, and 223.

As shown in FIG. 6, the buffer unit 220 includes a central chamber 221 positioned at the center of the buffer unit 220, a corner chamber 222 positioned at each corner of the buffer unit 220, and a buffer. The side chambers 223 may be provided at each side portion of the part 220. Each chamber is provided with fluid supply holes 221a, 222a, and 223a for receiving fluid.

6 illustrates an embodiment in which the fluid supply holes 221a, 222a, and 223a are formed on the upper surface of each chamber, but the present invention is not limited thereto and may be configured in various embodiments unless the operation of separating the substrate from the substrate separation unit is limited. Can be. For example, fluid supply holes 221a, 222a, and 223a may be provided below the chambers 221, 222, and 223 to penetrate the stage 211 to supply fluid through the lower portions of the chambers 221, 222, and 223, respectively. In addition, a plurality of fluid supply holes 221a, 222a, and 223a may be formed in each chamber 221, 222, and 223.

Each of the chambers 221, 222, and 223 forms an empty space therein, and partition walls (not shown) may be installed between the chambers and the chambers to isolate each other. In addition, although not shown, a plurality of substrate separation units 130 extending from each chamber may be positioned above the respective chambers as in the first embodiment.

The fluid supply parts 241, 242, and 243 may include a first fluid supply part 241 for supplying the fluid a to the central chamber 221, a second fluid supply part 242 for supplying the fluid b to the corner chamber 222, and a side thereof. A third fluid supply part 243 may be provided to supply the fluid c to the chamber 223.

As shown in FIG. 6, a first controller 252 may be provided between the central chamber 221 and the first fluid supply unit 241. In the case of the corner chamber 222, a second controller 253 is provided between the corner chamber 222 and the second fluid supply part 242, and the fluid b passing through the second controller 253 branches to each other. It may be supplied to the corner chamber 222. In the case of the side chamber 223, a third controller 254 is provided between the side chamber 223 and the third fluid supply unit 243, and the fluid c passing through the third controller 254 branches. It may be supplied to each side chamber 223.

Alternatively, although not shown, each corner chamber 222 may be in communication with each other and one or more chambers of the corner chambers 222 may be configured to receive the fluid b from the second fluid supply unit 242. The same applies to the side chamber 223.

The controller 251 may control the first controller 252, the second controller 253, and the third controller 254.

By the above configuration, the controller 251 may individually control the supply conditions of the fluid flowing into the central chamber 221, the corner chamber 222, and the side chamber 223, and thus, the central chamber 221. And the pneumatic chamber 132 in communication with the central chamber 221, the pneumatic chamber 132 in communication with the corner chamber 222 and the corner chamber 222, and the side chamber 223 and the side chamber 223. By individually adjusting the pressure in the communicating pneumatic chamber 132, the expansion pressure of the diaphragm 131 separating the central portion, the corner portion, and the side portion of the substrate S can be adjusted for each zone.

Therefore, even if the characteristics of the adhesive member 182 for adhering the center portion, the corner portion, and the side portion of the substrate S are different, the expansion pressure of the diaphragm 131 for each zone is adjusted to suit the characteristics of the adhesive member 182. S may be uniformly separated from the tray 180.

In order to secure the adhesion and separation of the substrate, each manufacturer may change the characteristics of the adhesive member that adheres to the center and periphery of the substrate, or to the center, corner, and side surfaces.The diaphragm separating the substrate is used to provide a uniform expansion pressure. If it is separated, the timing of separation of the central and peripheral portions of the substrate may be different and the substrate may be broken.

However, the substrate separating apparatus according to the present invention adjusts the expansion pressure of the diaphragm according to the characteristics of the adhesive member for each zone having different characteristics of the adhesive member, so that the substrate can be uniformly separated from the tray regardless of the characteristics of the adhesive member. In addition, it is possible to prevent breakage of the substrate, which may occur due to various adhesive properties of the adhesive member during substrate separation.

One embodiment of the invention described above and shown in the drawings should not be construed as limiting the technical idea of the present invention. The scope of protection of the present invention is limited only by the matters described in the claims, and those skilled in the art will be able to modify the technical idea of the present invention in various forms. Accordingly, such improvements and modifications will fall within the scope of the present invention as long as they are obvious to those skilled in the art.

100: substrate separating device
110. 210: Board separation module
120, 220: buffer part
130: substrate separation unit
141, 142, 143: fluid supply
151: control unit

Claims (15)

In the substrate separation module provided in the substrate separation apparatus for separating the substrate from the tray to which the substrate is adhered,
stage;
A buffer unit installed on one surface of the stage and having a plurality of chambers formed independently from each other;
A substrate separation unit extending from the buffer unit and having a diaphragm at an extended end thereof to independently inflate the diaphragm from each chamber as the pressure in each chamber increases;
A plurality of fluid supply parts for independently supplying fluid into each of the chambers of the buffer part;
And a controller for individually controlling a supply condition of a fluid supplied from each of the plurality of fluid supply parts to each of the chambers so as to independently inflate the diaphragm extending from each of the chambers.
The method of claim 1,
The substrate separation module comprises a pneumatic chamber for receiving the fluid from the buffer unit to expand the diaphragm at the pressure of the fluid and a supply passage for delivering the fluid from the buffer unit to the pneumatic chamber.
The method of claim 1,
The plurality of chambers comprises a central chamber positioned in the central portion of the buffer unit and a peripheral chamber surrounding the central chamber.
The method of claim 3,
The fluid supply unit substrate separation module comprising a first fluid supply for supplying a fluid to the central chamber and a second fluid supply for supplying a fluid to the peripheral chamber.
The method of claim 1,
The plurality of chambers comprises a central chamber located in the central portion of the buffer portion, a corner chamber positioned in the corner portion of the buffer portion, and a side chamber positioned in the side portion of the buffer portion.
The method of claim 5,
The fluid supply part includes a first fluid supply part for supplying a fluid to the central chamber, a second fluid supply part for supplying a fluid to the corner chamber and a third fluid supply part for supplying fluid to the side chamber. Board Separation Module.
The method of claim 5,
The plurality of corner chambers are provided in each corner, the side chamber is provided with a plurality of substrate separation module, characterized in that located on each side.
The method according to claim 6,
The control unit controls the supply conditions of the fluid supplied from the first fluid supply unit, the second fluid supply unit and the third fluid supply unit, to adjust the pressure in the corner chamber, the side chamber, the central chamber respectively. Substrate separation module characterized in that.
In the substrate separating apparatus for forming a through-hole and separating the tray having the adhesive member on one surface around the through hole and the substrate adhered to the adhesive member,
A seating part on which the tray is seated;
A buffer unit comprising a stage provided below the seating portion, a plurality of chambers installed on one surface of the stage and formed independently of each other, a diaphragm extending from one surface of the buffer portion, and entering into the through hole. As the pressure in the chamber increases, the substrate separation unit for inflating the diaphragm extending from each chamber to separate the substrate, and a plurality of fluids for independently supplying fluid into each chamber of the buffer unit A substrate separation module including a supply unit and a control unit controlling a pressure in each of the chambers by adjusting a fluid amount supplied into the plurality of chambers;
And a lifter configured to adjust a distance between the tray and the substrate separation module.
10. The method of claim 9,
And the elevating unit is provided below the stage and includes a lift table for supporting the stage, and a driving unit for elevating the lift table.
10. The method of claim 9,
The plurality of chambers comprises a central chamber positioned in the center of the buffer portion and a peripheral chamber surrounding the central chamber.
10. The method of claim 9,
The plurality of chambers may include a central chamber positioned at the center of the buffer unit, a corner chamber positioned at a corner of the buffer unit, and a side chamber positioned at a side of the buffer unit;
The method of claim 12,
The plurality of corner chambers are provided in each corner, the side chamber is provided with a plurality of substrate separation apparatus, characterized in that located on each side.
The method of claim 12,
The fluid supply part includes a first fluid supply part for supplying a fluid to the central chamber, a second fluid supply part for supplying a fluid to the corner chamber and a third fluid supply part for supplying fluid to the side chamber. Substrate Separator.
15. The method of claim 14,
The control unit controls the supply conditions of the fluid supplied from the first fluid supply unit, the second fluid supply unit and the third fluid supply unit, to adjust the pressure in the corner chamber, the side chamber, the central chamber respectively. Substrate separation apparatus characterized in that.

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