KR101308884B1 - 집속된 플라스마 빔을 생성하기 위한 방법 및 빔 발생기 - Google Patents

집속된 플라스마 빔을 생성하기 위한 방법 및 빔 발생기 Download PDF

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Publication number
KR101308884B1
KR101308884B1 KR1020117021906A KR20117021906A KR101308884B1 KR 101308884 B1 KR101308884 B1 KR 101308884B1 KR 1020117021906 A KR1020117021906 A KR 1020117021906A KR 20117021906 A KR20117021906 A KR 20117021906A KR 101308884 B1 KR101308884 B1 KR 101308884B1
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KR
South Korea
Prior art keywords
voltage
beam generator
working gas
supply unit
electrode
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KR1020117021906A
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English (en)
Korean (ko)
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KR20120004972A (ko
Inventor
미카엘 비스게스
우웨 하트만
홀거 슈네이더레이트
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레인하우센 플라즈마 게엠베하
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Publication of KR20120004972A publication Critical patent/KR20120004972A/ko
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/36—Circuit arrangements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/42—Plasma torches using an arc with provisions for introducing materials into the plasma, e.g. powder, liquid

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)
KR1020117021906A 2009-04-02 2010-03-24 집속된 플라스마 빔을 생성하기 위한 방법 및 빔 발생기 KR101308884B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102009015510A DE102009015510B4 (de) 2009-04-02 2009-04-02 Verfahren und Strahlgenerator zur Erzeugung eines gebündelten Plasmastrahls
DE102009015510.4 2009-04-02
PCT/EP2010/053816 WO2010112378A1 (de) 2009-04-02 2010-03-24 Verfahren und strahlgenerator zur erzeugung eines gebuendelten plasmastrahls

Publications (2)

Publication Number Publication Date
KR20120004972A KR20120004972A (ko) 2012-01-13
KR101308884B1 true KR101308884B1 (ko) 2013-09-23

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020117021906A KR101308884B1 (ko) 2009-04-02 2010-03-24 집속된 플라스마 빔을 생성하기 위한 방법 및 빔 발생기

Country Status (6)

Country Link
EP (1) EP2415331B1 (de)
JP (1) JP5871789B2 (de)
KR (1) KR101308884B1 (de)
CN (1) CN102379163B (de)
DE (1) DE102009015510B4 (de)
WO (1) WO2010112378A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2686460A1 (de) * 2011-03-16 2014-01-22 Reinhausen Plasma GmbH Beschichtung sowie verfahren und vorrichtung zum beschichten
CN102523674B (zh) * 2011-11-30 2016-04-20 华中科技大学 手持式等离子体电筒
DE102012103498A1 (de) * 2012-04-20 2013-10-24 Reinhausen Plasma Gmbh Vorrichtung und Verfahren zum Kennzeichnen eines Substrats sowie Kennzeichnung hierfür
AT514555B1 (de) 2013-08-27 2015-02-15 Fronius Int Gmbh Verfahren und Vorrichtung zur Erzeugung eines Plasmastrahls
KR102297068B1 (ko) * 2014-02-25 2021-09-03 한국전자통신연구원 플라즈마 발생장치
DE102014103025A1 (de) * 2014-03-07 2015-09-10 Ernst-Moritz-Arndt-Universität Greifswald Verfahren zur Beschichtung eines Substrates, Verwendung des Substrats und Vorrichtung zur Beschichtung
CN103917035B (zh) * 2014-04-03 2017-04-19 华中科技大学 用非平衡等离子体处理颗粒和气体物质的装置

Citations (3)

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Publication number Priority date Publication date Assignee Title
US5837958A (en) * 1995-09-01 1998-11-17 Agrodyn Hochspannungstechnik Gmbh Methods and apparatus for treating the surface of a workpiece by plasma discharge
US6225743B1 (en) * 1998-05-04 2001-05-01 Inocon Technologie Gesellschaft M.B.H. Method for the production of plasma
US6355312B1 (en) * 1998-10-16 2002-03-12 Cottin Development, Inc. Methods and apparatus for subjecting a rod-like or thread-like material to a plasma treatment

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CH649518A5 (de) * 1979-08-02 1985-05-31 Bbc Brown Boveri & Cie Verfahren und schaltungsanordnung zur durchfuehrung von gasentladungsreaktionen.
DE4105407A1 (de) * 1991-02-21 1992-08-27 Plasma Technik Ag Plasmaspritzgeraet zum verspruehen von festem, pulverfoermigem oder gasfoermigem material
DE4127317C2 (de) * 1991-08-17 1999-09-02 Leybold Ag Einrichtung zum Behandeln von Substraten
EP0727504A3 (de) * 1995-02-14 1996-10-23 Gen Electric Plasmabeschichtungsverfahren für verbesserte Hafteigenschaften von Beschichtungen auf Gegenständen
DE19717127A1 (de) * 1996-04-23 1998-10-29 Fraunhofer Ges Forschung Anregen elektrischer Entladungen mit Kurzzeit-Spannungspulsen
DE19616187B4 (de) * 1996-04-23 2004-03-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Anregen elektrischer Gas-Entladungen mit Spannungspulsen
EP0961527A1 (de) * 1998-05-26 1999-12-01 The Lincoln Electric Company Schweissbrenner
JP3357627B2 (ja) * 1999-04-09 2002-12-16 株式会社三社電機製作所 アーク加工装置用電源装置
JP4221847B2 (ja) * 1999-10-25 2009-02-12 パナソニック電工株式会社 プラズマ処理装置及びプラズマ点灯方法
WO2003071839A1 (en) * 2002-02-20 2003-08-28 Matsushita Electric Works, Ltd. Plasma processing device and plasma processing method
JP2006114450A (ja) * 2004-10-18 2006-04-27 Yutaka Electronics Industry Co Ltd プラズマ生成装置
JP2006278191A (ja) * 2005-03-30 2006-10-12 Iwasaki Electric Co Ltd プラズマジェット生成用電極
DE102007011235A1 (de) * 2007-03-06 2008-09-11 Plasma Treat Gmbh Verfahren und Vorrichtung zur Behandlung einer Oberfläche eines Werkstückes
DE102009004968B4 (de) * 2009-01-14 2012-09-06 Reinhausen Plasma Gmbh Strahlgenerator zur Erzeugung eines gebündelten Plasmastrahls

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5837958A (en) * 1995-09-01 1998-11-17 Agrodyn Hochspannungstechnik Gmbh Methods and apparatus for treating the surface of a workpiece by plasma discharge
US6225743B1 (en) * 1998-05-04 2001-05-01 Inocon Technologie Gesellschaft M.B.H. Method for the production of plasma
US6355312B1 (en) * 1998-10-16 2002-03-12 Cottin Development, Inc. Methods and apparatus for subjecting a rod-like or thread-like material to a plasma treatment

Also Published As

Publication number Publication date
DE102009015510B4 (de) 2012-09-27
EP2415331A1 (de) 2012-02-08
JP5871789B2 (ja) 2016-03-01
KR20120004972A (ko) 2012-01-13
DE102009015510A1 (de) 2010-10-07
EP2415331B1 (de) 2013-05-08
CN102379163B (zh) 2014-06-11
WO2010112378A1 (de) 2010-10-07
JP2012522888A (ja) 2012-09-27
CN102379163A (zh) 2012-03-14

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