KR101286187B1 - 다단형 건식 진공펌프 - Google Patents

다단형 건식 진공펌프 Download PDF

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Publication number
KR101286187B1
KR101286187B1 KR1020110115573A KR20110115573A KR101286187B1 KR 101286187 B1 KR101286187 B1 KR 101286187B1 KR 1020110115573 A KR1020110115573 A KR 1020110115573A KR 20110115573 A KR20110115573 A KR 20110115573A KR 101286187 B1 KR101286187 B1 KR 101286187B1
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KR
South Korea
Prior art keywords
cooling
pump
cylinders
cylinder
passage
Prior art date
Application number
KR1020110115573A
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English (en)
Korean (ko)
Other versions
KR20130050488A (ko
Inventor
데이비드 김
Original Assignee
데이비드 김
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 데이비드 김 filed Critical 데이비드 김
Priority to KR1020110115573A priority Critical patent/KR101286187B1/ko
Priority to CN201210069287.4A priority patent/CN103089647B/zh
Publication of KR20130050488A publication Critical patent/KR20130050488A/ko
Application granted granted Critical
Publication of KR101286187B1 publication Critical patent/KR101286187B1/ko

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/22—Fluid gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S415/00—Rotary kinetic fluid motors or pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
KR1020110115573A 2011-11-08 2011-11-08 다단형 건식 진공펌프 KR101286187B1 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020110115573A KR101286187B1 (ko) 2011-11-08 2011-11-08 다단형 건식 진공펌프
CN201210069287.4A CN103089647B (zh) 2011-11-08 2012-03-07 多级干式真空泵

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020110115573A KR101286187B1 (ko) 2011-11-08 2011-11-08 다단형 건식 진공펌프

Publications (2)

Publication Number Publication Date
KR20130050488A KR20130050488A (ko) 2013-05-16
KR101286187B1 true KR101286187B1 (ko) 2013-07-15

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110115573A KR101286187B1 (ko) 2011-11-08 2011-11-08 다단형 건식 진공펌프

Country Status (2)

Country Link
KR (1) KR101286187B1 (zh)
CN (1) CN103089647B (zh)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101509387B1 (ko) 2014-01-20 2015-04-07 성균관대학교산학협력단 스크류 압축기 냉각 시스템
WO2017122894A1 (ko) * 2016-01-15 2017-07-20 이영수 스크류 로터와 그루브를 구비한 건식진공펌프
WO2020063375A1 (zh) * 2018-09-28 2020-04-02 党祎贤 集射真空泵
KR20210124385A (ko) * 2019-02-06 2021-10-14 아뜰리에 부쉬 에스.아. 다단 펌프 본체 및 다단 가스 펌프

Families Citing this family (19)

* Cited by examiner, † Cited by third party
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CN105275820B (zh) * 2014-07-07 2017-06-16 上海汉钟精机股份有限公司 干式真空泵轴封离心冷却机构
WO2017031807A1 (zh) * 2015-08-27 2017-03-02 上海伊莱茨真空技术有限公司 一种多驱动腔非共轴真空泵
JP6657387B2 (ja) * 2015-09-25 2020-03-04 アトラス コプコ エアーパワー, ナームローゼ フェンノートシャップATLAS COPCO AIRPOWER, naamloze vennootschap 圧縮機または真空ポンプを冷却するための方法及びこのような方法に適用される圧縮機または真空ポンプ
BE1023523B1 (nl) 2015-09-25 2017-04-19 Atlas Copco Airpower, N.V. Werkwijze voor het koelen van een compressor of vacuümpomp en een compressor of vacuümpomp die een dergelijke werkwijze toepast
CN105715513B (zh) * 2016-04-07 2017-10-24 台州环球真空设备制造有限公司 风冷式真空泵
GB201700995D0 (en) * 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump rotor
CN106837800A (zh) * 2017-02-21 2017-06-13 东北大学 一种带有内循环冷却系统的螺杆真空泵
CN108561308B (zh) * 2018-03-13 2024-03-12 杭州新宇机械制造有限公司 一种带有冷却装置的无油涡旋空气压缩机
FR3092879B1 (fr) * 2019-02-14 2021-02-19 Pfeiffer Vacuum Pompe à vide primaire de type sèche
CN109854501A (zh) * 2019-03-21 2019-06-07 南通龙鹰真空科技有限公司 一种多级罗茨真空泵
CN210629269U (zh) 2019-09-23 2020-05-26 兑通真空技术(上海)有限公司 一种罗茨泵的电机连接传动结构
CN110594156B (zh) 2019-09-23 2021-05-25 兑通真空技术(上海)有限公司 一种三轴多级罗茨泵的驱动结构
CN110500275B (zh) 2019-09-23 2021-03-16 兑通真空技术(上海)有限公司 一种三轴多级罗茨泵的泵壳体结构
CN110685912A (zh) 2019-10-10 2020-01-14 兑通真空技术(上海)有限公司 一种多轴多级罗茨泵转子连接的结构
CN113803255B (zh) * 2021-10-29 2023-07-07 上海樊容工业技术中心 一种双级罗茨泵的泵腔结构及泵体结构
CN115143108B (zh) * 2022-07-04 2024-05-28 淄博真空设备厂有限公司 一种用于油气收集回收的螺杆式真空压缩机
GB2625582A (en) * 2022-12-21 2024-06-26 Leybold Gmbh Vacuum pump
CN116241461B (zh) * 2023-04-03 2024-03-19 北京通嘉宏瑞科技有限公司 一种多级罗茨真空泵及其工作方法
CN116517833B (zh) * 2023-04-13 2024-01-23 北京通嘉宏瑞科技有限公司 真空泵

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06346883A (ja) * 1993-06-07 1994-12-20 Orion Mach Co Ltd ベーンポンプの冷却装置
KR100526056B1 (ko) 2003-08-13 2005-11-08 김덕겸 로터리 베인형 진공펌프
JP2007177632A (ja) 2005-12-27 2007-07-12 Sekisui Chem Co Ltd 単段ルーツ式真空ポンプ及びこの単段ルーツ式真空ポンプを用いた真空式流体搬送システム
JP2010270657A (ja) 2009-05-20 2010-12-02 Mitsubishi Heavy Ind Ltd ドライ真空ポンプ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2691168B2 (ja) * 1988-09-05 1997-12-17 株式会社宇野澤組鐵工所 冷却水路を内蔵する逆流冷却式多段ロータリー形真空ポンプ
JP2588595B2 (ja) * 1988-09-30 1997-03-05 株式会社宇野澤組鐵工所 多段ロータリー形真空ポンプ
CN200999730Y (zh) * 2007-01-29 2008-01-02 南通天成机械有限公司 风冷式罗茨真空泵

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06346883A (ja) * 1993-06-07 1994-12-20 Orion Mach Co Ltd ベーンポンプの冷却装置
KR100526056B1 (ko) 2003-08-13 2005-11-08 김덕겸 로터리 베인형 진공펌프
JP2007177632A (ja) 2005-12-27 2007-07-12 Sekisui Chem Co Ltd 単段ルーツ式真空ポンプ及びこの単段ルーツ式真空ポンプを用いた真空式流体搬送システム
JP2010270657A (ja) 2009-05-20 2010-12-02 Mitsubishi Heavy Ind Ltd ドライ真空ポンプ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101509387B1 (ko) 2014-01-20 2015-04-07 성균관대학교산학협력단 스크류 압축기 냉각 시스템
WO2017122894A1 (ko) * 2016-01-15 2017-07-20 이영수 스크류 로터와 그루브를 구비한 건식진공펌프
WO2020063375A1 (zh) * 2018-09-28 2020-04-02 党祎贤 集射真空泵
KR20210124385A (ko) * 2019-02-06 2021-10-14 아뜰리에 부쉬 에스.아. 다단 펌프 본체 및 다단 가스 펌프
KR102612571B1 (ko) 2019-02-06 2023-12-11 아뜰리에 부쉬 에스.아. 다단 펌프 본체 및 다단 가스 펌프

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Publication number Publication date
KR20130050488A (ko) 2013-05-16
CN103089647B (zh) 2015-09-02
CN103089647A (zh) 2013-05-08

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