KR101281965B1 - 중합체 및 이를 함유하는 감광성 수지 조성물 - Google Patents

중합체 및 이를 함유하는 감광성 수지 조성물 Download PDF

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Publication number
KR101281965B1
KR101281965B1 KR1020087026896A KR20087026896A KR101281965B1 KR 101281965 B1 KR101281965 B1 KR 101281965B1 KR 1020087026896 A KR1020087026896 A KR 1020087026896A KR 20087026896 A KR20087026896 A KR 20087026896A KR 101281965 B1 KR101281965 B1 KR 101281965B1
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KR
South Korea
Prior art keywords
group
formula
resin composition
photosensitive resin
polymer
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KR1020087026896A
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English (en)
Korean (ko)
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KR20090007578A (ko
Inventor
다까시 지바
아끼오 사이또
시게히또 아사노
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제이에스알 가부시끼가이샤
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Publication of KR20090007578A publication Critical patent/KR20090007578A/ko
Application granted granted Critical
Publication of KR101281965B1 publication Critical patent/KR101281965B1/ko

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0387—Polyamides or polyimides

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Materials For Photolithography (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
KR1020087026896A 2006-04-24 2007-04-19 중합체 및 이를 함유하는 감광성 수지 조성물 KR101281965B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006119594 2006-04-24
JPJP-P-2006-119594 2006-04-24
PCT/JP2007/058551 WO2007125818A1 (ja) 2006-04-24 2007-04-19 重合体及びそれを含有する感光性樹脂組成物

Publications (2)

Publication Number Publication Date
KR20090007578A KR20090007578A (ko) 2009-01-19
KR101281965B1 true KR101281965B1 (ko) 2013-07-03

Family

ID=38655344

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020087026896A KR101281965B1 (ko) 2006-04-24 2007-04-19 중합체 및 이를 함유하는 감광성 수지 조성물

Country Status (4)

Country Link
JP (1) JP5141552B2 (zh)
KR (1) KR101281965B1 (zh)
TW (1) TWI432483B (zh)
WO (1) WO2007125818A1 (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1159266B1 (en) 1999-03-05 2004-11-03 Duke University C-16 unsaturated fp-selective prostaglandins analogs
US20020172693A1 (en) 2000-03-31 2002-11-21 Delong Michell Anthony Compositions and methods for treating hair loss using non-naturally occurring prostaglandins
US20020037914A1 (en) 2000-03-31 2002-03-28 Delong Mitchell Anthony Compositions and methods for treating hair loss using C16-C20 aromatic tetrahydro prostaglandins
JP5076390B2 (ja) * 2006-07-31 2012-11-21 日立化成デュポンマイクロシステムズ株式会社 ネガ型感光性樹脂組成物、パターン硬化膜の製造方法および電子部品
JP2008083359A (ja) * 2006-09-27 2008-04-10 Jsr Corp 感光性樹脂組成物及び硬化膜
US8722739B2 (en) 2008-10-29 2014-05-13 Novaer Holdings, Inc. Amino acid salts of prostaglandins

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03177430A (ja) * 1989-12-06 1991-08-01 Tomoegawa Paper Co Ltd ポリアミドイミド樹脂
JP2001261825A (ja) 2000-03-17 2001-09-26 Hitachi Cable Ltd ポリイミドの製造方法および感光性ポリイミド樹脂組成物
JP2003035950A (ja) 2001-05-15 2003-02-07 Hitachi Cable Ltd 感光性ポリイミド樹脂組成物

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000256462A (ja) * 1998-11-09 2000-09-19 Kanegafuchi Chem Ind Co Ltd ポリイミド組成物およびその製造方法
JP4154086B2 (ja) * 1999-07-29 2008-09-24 日立化成工業株式会社 感光性重合体組成物、パターンの製造法及び電子部品
JP2001194796A (ja) * 1999-10-29 2001-07-19 Hitachi Chemical Dupont Microsystems Ltd ポジ型感光性樹脂組成物、パターンの製造法及び電子部品

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03177430A (ja) * 1989-12-06 1991-08-01 Tomoegawa Paper Co Ltd ポリアミドイミド樹脂
JP2001261825A (ja) 2000-03-17 2001-09-26 Hitachi Cable Ltd ポリイミドの製造方法および感光性ポリイミド樹脂組成物
JP2003035950A (ja) 2001-05-15 2003-02-07 Hitachi Cable Ltd 感光性ポリイミド樹脂組成物

Also Published As

Publication number Publication date
WO2007125818A1 (ja) 2007-11-08
JP5141552B2 (ja) 2013-02-13
TW200806712A (en) 2008-02-01
KR20090007578A (ko) 2009-01-19
JPWO2007125818A1 (ja) 2009-09-10
TWI432483B (zh) 2014-04-01

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