KR101269487B1 - Gap control apparatus of floating sensor unit, and control method for the same - Google Patents

Abstract

PURPOSE: A gap control device of a floating sensor unit and a control method thereof are provided to accurately obtain interval between a sensor plate and a panel by checking the air pressure of a gap nozzle in a gap sensor in real time. CONSTITUTION: An air gap nozzle(20) sprays predetermined air pressure to a lower side of a sensor plate(10). A precision regulator(40) supplies the predetermined air pressure to the air gap nozzle. A gap sensor(50) transmits the data of the sprayed air pressure as a power value to the outside. A gap controller controls a vertical movement distance of a guide block(30) according to a difference between the air pressure and the predetermined air pressure. A driving unit(70) transfers driving power to the guide block by controlling the gap controller.

Description

Gap control apparatus of floating sensor unit, and control method for the same

The present invention relates to a gap control apparatus of a floating sensor unit capable of constantly maintaining a separation distance between a sensor plate and a panel.

More specifically, the present invention includes a gap sensor to check in real time the air pressure injected downward of the sensor plate, and compares the preset air pressure and the real-time checked air pressure to determine how the separation distance between the current sensor plate and the panel has changed After that, by moving the sensor plate in the up and down direction, even when there is a bending of the panel, the distance between the sensor plate and the panel is constantly maintained.

In general, a display panel mounted on an outer surface of a computer monitor, a TV, a mobile communication terminal, or the like performs a display function by using the electrical and optical properties of the liquid crystal injected therein.

The display panel has been widely applied in various fields due to the advantages of small size, light weight and low power consumption.

Such display panels may be classified into LCD panels for generating image data, liquid crystal display panels, and backlight units for applying light to the liquid crystal display panels.

These are each manufactured by a separate manufacturing process and then assembled through an assembly process to form a completed display panel.

In this case, the display panel undergoes a certain inspection process for each step of the manufacturing process, and in particular, before all the manufacturing processes are completed, before the assembly is performed, the display panel checks whether or not the product is abnormal by visual inspection of each finished product.

Final inspection of the display panel is generally performed by applying a test signal to the driving circuit of the panel and then checking whether there is an abnormality of the displayed image information.

Accordingly, for the final inspection of the display panel, a precise inspection apparatus is required to compress the driving circuit and the test signal applying unit so that a stable supply of the test signal can be achieved. At this time, the inspection is performed including whether the driving circuit patterned on the panel is open or shorted.

Such a conventional inspection apparatus is configured to compress between a driving circuit and a test signal applying unit (sensor) by a lever method, a clamp method or a cylinder method.

However, among the above methods, the lever method or the clamp method allows the user to directly control the lever or the clamp by manual operation, which causes problems such as slow working speed, inconvenience in use, and damage to the driving circuit. In the case of the method, there is a problem in that a large cost is required for the configuration of the inspection apparatus, and it is difficult to manufacture a small size.

In order to overcome this problem, the sensor (test head application) is disposed at a predetermined height (approximately 100 microns) from the upper surface of the panel while the panel is seated on the upper surface of the wide table, and then the air is sprayed downward of the sensor. Techniques for maintaining distance have been disclosed. However, since the flatness of the display panel itself is not constant or foreign matter is caught between the display panel and the table on which the display panel is seated, the display panel cannot be maintained horizontally. The disadvantage is that it is difficult to continuously maintain a constant distance between the sensor and the display panel only by the air pressure.

[Related Technical Literature]

1. Sensor floating unit (Patent application 10-2011-0044834)

2. Sensor floating unit equipped with air bearing block (Patent application 10-2012-0010114)

The present invention has been proposed in view of the above, and an object of the present invention is to check the air pressure injected downward of the sensor plate in real time while correspondingly moving the sensor plate in the up and down direction so that the flatness of the panel seated on the table is low. In the case of providing a clearance control device of the floating sensor unit that can maintain a constant distance between the sensor plate and the panel constantly.

In order to achieve the above object, a gap control apparatus of a floating sensor unit according to the present invention includes a sensor plate for inspecting patterning formed on a panel while moving along a longitudinal direction of the panel in a state of being injured for a predetermined distance from an upper surface of the panel; An air gap nozzle installed adjacent to the sensor plate and spraying air of a predetermined pressure under the sensor plate; A guide block integrally connected to an upper surface of the sensor plate and configured to guide flatness, horizontal movement, and vertical movement of the sensor plate; A precision regulator for supplying a predetermined constant pressure to the air gap nozzle; A gap sensor connected to the air gap nozzle to sense the air pressure of the air gap nozzle in real time, and converting the detected air pressure data into a voltage value and transmitting the converted voltage to the outside; PID operation is executed based on the voltage value received from the gap sensor to check whether the air pressure of the air gap nozzle is different from the preset constant pressure of the precision regulator, and if there is a difference, the vertical movement distance of the guide block in response to the difference. A gap controller to control the; It is connected to the upper portion of the guide block, the drive unit for controlling the gap between the sensor plate and the panel while moving the guide block in the vertical direction by transmitting a driving force to the guide block under the control of the gap controller.

Further, the touch sensor for detecting the height of each corner of the sensor plate and sequentially transmitting the touched height to each corner of the sensor plate located in the lower portion of the sensor plate moving in the vertical direction further It can be configured to include.

At this time, the guide block is connected to the upper surface of the sensor plate fixed frame 31 which moves integrally with the sensor plate; A multi-stage connected to an upper surface of the fixed frame to mechanically adjust the flatness of the sensor plate moving integrally with the fixed frame; A rotary stage integrally connected to an upper portion of the multi-stage and rotating the multi-stage while rotating at a predetermined angle; It is preferably configured to include a; horizontally coupled to the upper surface of the rotary stage, the horizontal stage for moving the rotary stage in the front, rear, left and right horizontal direction.

In the gap control method of the floating sensor unit according to the present invention, (a) in advance in the flatness of the sensor plate for inspecting the patterning formed on the panel while moving along the longitudinal direction of the panel in a state of floating a certain distance from the upper surface of the panel step; (b) measuring and preliminarily storing air pressure data of an air gap nozzle connected to the sensor plate when the sensor plate approaches the panel by a predetermined distance; (c) moving the sensor plate downward near the predetermined distance; (d) injecting air through the air gap nozzle while maintaining a value of air pressure data stored in advance by a precision regulator; (e) the gap sensor detecting the air pressure of the air gap nozzle in real time, and converting the data of the detected air pressure into a voltage value and transmitting the converted data to a gap controller; (f) the gap controller performing a PID operation based on the voltage value received from the gap sensor to check whether the air pressure from the air gap nozzle is different from the preset constant pressure of the precision regulator; and (g) controlling the vertical movement distance of the sensor plate in response to the difference when there is a difference between the air pressure of the air gap nozzle and a predetermined constant pressure of the precision regulator.

In this case, step (a) may include (a-1) lowering the sensor plate to a position in contact with an upper surface of the touch sensor disposed below the sensor plate; (a-2) contacting each edge of the sensor plate to the touch sensor while rotating the sensor plate; (a-3) storing an encoder value of a driving unit for driving the sensor plate at a corresponding position whenever each edge of the sensor plate contacts the touch sensor; (a-4) controlling the multi-stage to mechanically adjust the flatness of the sensor plate while being connected to the upper part of the sensor plate through correction of the stored encoder value difference; (a-5) maintaining the horizontal state of the sensor plate by the operation of the multi-stage; preferably further comprises.

In addition, step (b) is (b-1) lowering the sensor plate to a position abuts on the upper surface of the touch sensor disposed below the sensor plate; (b-2) setting air pressure data in a state where the sensor plate and the touch sensor are in contact with a reference value '0'; (b-3) stepwise raising the sensor plate upwards by a predetermined distance in contact with the touch sensor; (b-4) storing the voltage value output by the gap sensor step by step in response to the air pressure of the air gap nozzle when the sensor plate is gradually raised upward.

In addition, the numerical value of the air pressure data stored in advance in step (d) is a value of the voltage value stored in step (b-4), and may be configured as a signal value input by a control command through the gap controller.

The gap control device of the floating sensor unit according to the present invention,

(1) There is an advantage in that the distance between the sensor plate and the panel can be kept constant.

(2) Since the gap sensor is provided, the air pressure of the air gap nozzle disposed adjacent to the sensor plate is checked in real time, so that the separation distance between the sensor plate and the panel can be accurately identified in real time.

(3) Based on the air pressure of the air gap nozzle checked in real time from the gap sensor, the gap controller can precisely control the vertical movement of the sensor plate to precisely adjust the separation distance between the sensor plate and the panel.

1 is a schematic overall configuration diagram of a panel inspection system equipped with a gap control device of a floating sensor unit according to the present invention.
2 is a perspective view showing a gap control device of a floating sensor unit according to the present invention.
3 is a front view showing the gap control device of the floating sensor unit according to the present invention.
4 is a block diagram of a gap control device of a floating sensor unit according to the present invention;
5 is a block diagram of a gap controller of the present invention and a configuration interworking with the gap controller.
6 is an exemplary view briefly showing a gap control device of a floating sensor unit according to the present invention.
7 is a flowchart illustrating a gap control process of the floating sensor unit according to the present invention.

Hereinafter, the present invention will be described in detail with reference to the drawings.

1 is a schematic overall configuration diagram of a panel inspection system equipped with a gap control device of a floating sensor unit according to the present invention, briefly explaining the operation of the panel inspection system as follows.

The panel P is seated on the upper surface of the table 4, and LM guides (linear motion guides) 5 are disposed on both sides of the table. In addition, the panel may be lifted to the table 4 through an external robot arm (not shown), or a conveyor unit (not shown) may be provided on the upper surface of the table in contact with the panel.

The LM guide (5) guides the gantry bridge (3) disposed across both sides of the table to move forward and backward, and a linear motor (not shown) for transmitting a driving force to the LM guide (5), each LM guide It is preferred to be mounted on.

The gantry bridge 3 has a bar shape, and both ends of the gantry bridge 3 are bent downward, and then the bent lower portion is connected to the LM guide 5 to control the LM guide 5. It moves along the longitudinal direction of the table 4.

In addition, the gantry bridge (3) is arranged in a plurality of head transfer means (2) in the longitudinal direction, the transfer means (2) is arranged to be movable while sliding along the longitudinal direction of the gantry bridge (3) do.

In the case of patterning inspection on the panel, the conveying means 2 mounted on the gantry bridge 3 are arranged in a state in which they are spaced apart from each other along the longitudinal direction of the gantry bridge 3 and seated on the upper surface of the table 4. It can be located to a part corresponding to both ends of the width | variety of the panel P which were made.

Therefore, when the gantry bridge 3 moves along the longitudinal direction of the table 4, the conveying means 2 may evenly pass over the upper surface of the panel P along the longitudinal direction of the panel P.

Since the clearance control device 1 of the floating sensor unit according to the present invention is mounted below the conveying means 2, the clearance control device 1 of the floating sensor unit passes through the upper surface of the panel P evenly. The patterning formed in P) can be inspected efficiently.

If air is injected downward of the sensor floating unit in a state where the gap controller 1 of the floating sensor unit is in close contact with the upper surface of the panel P, the gap controller 1 of the floating sensor unit corresponds to the panel according to the air pressure. It will rise above a certain distance (approximately 100 microns) from (P).

At this time, the air pressure injected downward of the gap control device 1 of the floating sensor unit may change according to the gap between the gap control device 1 and the panel P of the floating sensor unit. It is possible to determine the change in the real time interval between the gap control device 1 of the sensor unit and the panel P, and based on this, the gap control of the floating sensor unit is precisely moved by moving the gap control device 1 of the floating sensor unit precisely in the vertical direction. Maintaining a constant and constant distance between the device 1 and the panel P is a key technique of the present invention.

When the gantry bridge 3 moves forward along the longitudinal direction of the panel P while the gap control device 1 of the floating sensor unit is floating with respect to the panel, the gap control device 1 of the floating sensor unit becomes a panel. The patterning formed on the panel is inspected while moving along the upper surface of the panel. This patterning test includes whether the driving circuit is open / shorted during patterning formed in the panel.

Hereinafter, the gap control device of the floating sensor unit of the present invention will be described in more detail.

2 is a perspective view illustrating a gap control device of a floating sensor unit according to the present invention, and FIG. 3 is a front view illustrating a gap control device of a floating sensor unit according to the present invention, and FIG. It is a block diagram of the clearance control apparatus of the floating sensor unit which concerns on this invention.

2 to 4, the gap control apparatus of the floating sensor unit according to the present invention includes a sensor plate 10, an air gap nozzle 20, a guide block 30, and a precision regulator 40. And a gap sensor 50, a gap controller 60, a driver 70, and a touch sensor 80.

The sensor plate 10 inspects the patterning formed on the panel while moving along the longitudinal direction of the panel in a state of being floated a predetermined distance from the upper surface of the panel. The sensor plate 10 is movable up and down integrally with the guide block 30 in a state suspended from the guide block 30, and in such a state that the sensor plate 10 is freely moved up and down in a state in which the panel is floated a predetermined distance from the top surface of the panel. The patterning formed on the panel is inspected while moving along the longitudinal direction of the panel.

The air gap nozzle 20 is installed adjacent to the sensor plate 10 and injects air of a predetermined pressure below the sensor plate 10. It may be installed through the side of the sensor plate 10 or the central portion of the sensor plate 10, preferably a plurality of adjacent to the sensor plate 10 may be installed. In addition, the air gap nozzle 20 may be connected to the precision regulator 40 for supplying air having a predetermined pressure from the outside by wiring. Here, the gap sensor 50 is disposed in the middle of the wiring connecting the precision regulator 40 and the air gap nozzle 20 to determine the air pressure that can be changed in real time according to the gap of the panel where the air gap nozzle 20 is located below. It can be detected.

That is, even when the precision regulator 40 outputs air of a predetermined constant pressure, the air gap nozzle 20 and the precision regulator 40 are connected to each other due to the air pressure reflected from the panel by the air injected from the air gap nozzle 20. The air pressure of the pipe may vary depending on the distance between the sensor plate 10 and the panel. By checking the air pressure of the pipe connecting the air gap nozzle 20 and the precision regulator 40, which can be changed in real time, it is possible to determine how the separation distance between the current sensor plate 10 and the panel is changing.

The guide block 30 may include a fixed frame 31, a multi-stage 32, a rotary stage 33, and a horizontal stage 34. The guide block 30 may be integrally connected to an upper surface of the sensor plate 10 so that the sensor Guide flatness, horizontal movement, and vertical movement of the plate 10. When it is necessary to adjust the separation distance between the sensor plate 10 and the panel in the vertical direction as a result of checking the air pressure of the pipe connecting the air gap nozzle 20, the guide block 30 is connected to the sensor plate 10 with the sensor The plate 10 may be moved in the vertical direction.

On the other hand, the fixed frame 31 is connected to the upper surface of the sensor plate 10 to move integrally with the sensor plate 10. That is, the fixing frame 31 forms a structure for fixing the sensor plate 10 in a state where the sensor plate 10 is suspended.

The multi-stage 32 is mechanically adjusted to the flatness of the sensor plate 10 which is connected to the upper surface of the fixed frame 31 and moves integrally with the fixed frame 31. The multi-stage 32 keeps the sensor plate 10 adjacent to the upper surface of the panel and the panel in parallel with each other, and guides both ends of the flat sensor plate 10 to move freely before and after.

The rotary stage 33 is integrally connected to the upper part of the multi stage 32 to rotate the multi stage 32 while rotating at a predetermined angle. The rotary stage 33 may rotate the sensor plate 10 by rotating the multi-stage 32 that moves integrally with the sensor plate 10. To align the height of the sensor plate 10 with the height of the panel To rotate. While rotating the sensor plate 10 in detail, each corner of the sensor plate 10 is sequentially contacted with the touch sensor 80 disposed at the lower side, and then the encoder 70 at that time is stored, and then stored The flatness of the sensor plate 10 is adjusted based on the encoder value.

The horizontal stage 34 is movably connected to the upper surface of the rotary stage 33 and moves the rotary stage 33 in the front, rear, left, and right horizontal directions. When the gap control device 1 of the floating sensor unit according to the present invention moves precisely in the front, rear, left and right directions, the gap control device 1 of the floating sensor unit is accurately moved in the front, rear, left and right directions even when the gantry bridge 3 is stopped. You can move it.

The precision regulator 40 supplies a predetermined constant pressure to the air gap nozzle 20. In order to determine the separation distance between the sensor plate 10 and the panel by checking the air pressure fluctuation in real time of the air gap nozzle 20 through the gap sensor 50 is supplied from the precision regulator 40 to the air gap nozzle 20 It is important to keep the air pressure constant as preset. That is, if the air pressure supplied from the precision regulator 40 is changed, if the air pressure sensed in real time from the air gap nozzle 20 is changed, the air pressure supplied from the precision regulator 40 is changed so that the gap between the sensor plate 10 and the panel is recognized. This is because the rebound air pressure of the panel caused by the change is fluctuated and the cause cannot be determined.

The gap sensor 40 is connected to the air gap nozzle 20 to detect the air pressure of the air gap nozzle 20 in real time, and converts the data of the detected air pressure into a voltage value and transmits it to the gap controller 60.

The gap controller 60 performs PID operation based on the voltage value received from the gap sensor 50 to check whether the air pressure of the air gap nozzle 20 is different from the preset constant pressure of the precision regulator 40, If there is a difference, the vertical movement distance of the guide block 30 is controlled in response to the difference. As a result, even when bending occurs on the panel while the sensor plate 10 moves the upper surface of the panel for patterning, the separation distance between the sensor plate 10 and the panel is moved by moving the sensor plate 10 up and down in real time. You can keep it constant.

As described above, there is a big difference in the accuracy of the technology of adjusting the separation distance between the sensor plate and the panel based on the repulsive force that the air pressure injected downward of the sensor plate hits the panel and bounces back. In addition, the repulsive force hitting the panel is insufficient to push up the sensor plate and the structure that suspends the sensor plate upward, and the repulsive force of air has only a degree of maintaining a fine equilibrium of the sensor plate.

The driving unit 70 is connected to the upper portion of the guide block 30, and preferably comprises a servo driver 71, a servo motor 72, and an LM actuator 73 and is controlled by the gap controller 60. The driving force is transmitted to the LM actuator to adjust the gap between the sensor plate 10 and the panel while moving the guide block 30 in the vertical direction with the guide of the LM actuator 73. That is, when the gap sensor 50 detects the air pressure of the air gap nozzle 20 in real time and transmits the sensed air pressure data to the gap controller 60, the gap controller 60 may move the sensor plate 10 upward. It determines whether to move downward, and transmits the corresponding movement control command to the drive unit 70 to adjust in real time to maintain a constant distance between the sensor plate 10 and the panel.

The touch sensor 80 detects the height of each corner of the sensor plate 10 while sequentially contacting each corner of the sensor plate 10 located in the lower portion of the sensor plate 10 and moving in the vertical direction. The height is transmitted to an external gap controller 60. It will be described in more detail through [FIG. 6].

4, the sensor plate 10 according to the present invention basically moves up and down by the control of the motion controller 90 according to the PC 100 operation of the manager. When the motion controller 90 transmits a control command to the servo driver 71 of the driving unit 70, the servo driver 71 actually controls the servo motor 72 to move the sensor plate 10 in the vertical direction. After the sensor plate 10 approaches the panel by a predetermined distance under the control of the motion controller 90, the gap controller 60 operates automatically and the air gap nozzle in the process of moving the upper surface of the panel. When the air pressure of 20 is changed, the control command is transmitted to the servo driver 71 as to how much the sensor plate 10 is moved in the vertical direction by the control of the gap controller 60.

Meanwhile, the gap controller 60 receives the current air pressure data from the real time air gap nozzle 20 through the gap sensor 50, and the gap sensor 50 uses the air pressure of the air gap nozzle 20 as a voltage value. In conversion, the buffer amplifier 51 is transmitted to the buffer amplifier 51. The buffer amplifier 51 removes noise of data and transmits the noise to the gap controller 60. Here, reference numeral 52 denotes a display unit that numerically displays the voltage value transmitted from the buffer amplifier 51 to the gap controller 60 so that an administrator can confirm.

5 is a block diagram of a gap controller of the present invention and a configuration interworking with the gap controller. Referring to FIG. 5, the gap controller 60 may include an operational amplifier 1 61, an AD converter 62, an MCU 63, a DA converter 64, and an operational amplifier 2 65. have.

Here, the operation of the gap controller 60 will be described. When the operational amplifier 1 61 amplifies the voltage value received from the buffer amplifier 51 to a level of approximately 0 to 5 V, the AD converter 62 converts the analog voltage value into a digital signal and transmits it to the MCU 63. . The MCU 63 performs PID operation based on the voltage value of the digital signal to check whether the air pressure of the air gap nozzle 20 is different from the preset constant pressure of the precision regulator 40. When there is a difference, the vertical movement distance of the sensor plate 10 is controlled in response to the difference, and in order to actually control the servo driver 71, a control command is again inputted through the DA converter 64 to an analog signal value of a predetermined value. To send. The servo driver 71 is then controlled by amplifying to a level of -7.5 to + 7.5V through the operational amplifier 2 (65).

6 is an exemplary view briefly showing a gap control device of a floating sensor unit according to the present invention. Referring to FIG. 6, the flatness of the sensor plate 10 is adjusted in advance before being placed on the upper surface of the panel, and then the sensor plate 10 is positioned on the upper surface of the panel. Looking at the process of adjusting the flatness of the sensor plate 10 in advance as follows. First, the sensor plate 80 is lowered to a position contacting the upper surface of the touch sensor 80, and then each corner of the sensor plate 10 is brought into contact with the touch sensor 80 by driving the rotary stage 33. At this time, whenever the corners of the sensor plate 10 is in contact with the touch sensor 80, the encoder value of the driving unit for driving the sensor plate 10 at the corresponding position is stored, and then corrected in the multi-stage 32 Through control, the flatness is mechanically adjusted to keep the sensor plate 10 horizontal.

7 is a flowchart illustrating a gap control process of the floating sensor unit according to the present invention. Referring to FIG. 7, the gap control process of the floating sensor unit according to the present invention will be described in detail.

S100: Prior to positioning the sensor plate on the upper surface of the panel, first adjust the flatness so that the sensor plate is horizontal. To this end, the sensor plate is lowered to a position in contact with the upper surface of the touch sensor disposed under the sensor plate. In this case, the servo driver operates under the control of the motion controller. Subsequently, each edge of the sensor plate is brought into contact with the touch sensor while the sensor plate is rotated, and the encoder value of the driving unit for driving the sensor plate at the corresponding position is stored whenever each edge is contacted.

The flatness of the sensor plate is determined by correcting the difference between the stored encoder values and then controlling the multi-stage that mechanically adjusts the level of the sensor plate. In this way, the sensor plate with the flatness set is moved to the upper surface of the panel seated on the table.

S110: Measure and store the air pressure according to the separation distance step by step how much air pressure is injected from the air gap nozzle according to the distance between the sensor plate and the panel. As such, when the sensor plate detects the air pressure of the air gap nozzle in real time while moving the upper surface of the panel, it is possible to determine what the actual separation distance between the sensor plate and the panel is.

In detail, the sensor plate is lowered to a position in contact with the upper surface of the touch sensor disposed below the sensor plate. Of course, at this time, the touch sensor and the panel are positioned at the same height. In addition, the air pressure injected from the air gap nozzle is measured while the sensor plate and the touch sensor are in contact with each other, that is, when the sensor plate and the panel are in contact with each other, and the current air pressure data is set to a reference value '0'.

Subsequently, while the sensor plate is raised in a stepwise manner (for example, by 10 μm) in a state where the sensor plate is in contact with the touch sensor, the voltage output by the gap sensor step by step in response to the air pressure of the current air gap nozzle in each step. Save the value.

Through this, data about the air pressure of the air gap nozzle according to the distance between the sensor plate and the panel can be obtained. Therefore, when the sensor plate moves closer to the upper surface of the panel, when the distance between the sensor plate and the panel changes according to the curvature of the panel, the air pressure of the air gap nozzle is changed, and the sensor plate and the panel are detected by detecting the changed air pressure. It is possible to know how much to move the separation distance in the vertical direction.

S120: In order to check the patterning of the actual panel, the distance between the sensor plate and the panel is approximately 100 μm by moving the sensor plate downward by a predetermined distance under the control of the motion controller. In this way, when the sensor plate and the panel are in close proximity, the gap controller operates automatically.

S130: Spray a predetermined constant pressure from the precision regulator through the air gap nozzle. At this time, it is important to maintain the air pressure supplied from the precision regulator without changing the preset pressure.

S140, S150: The gap sensor detects the air pressure injected from the air gap nozzle in real time, and transmits the detected air pressure data to the gap controller. The gap controller performs a PID operation based on the air pressure data received from the gap sensor, and accordingly checks whether the air pressure of the air gap nozzle is different from the preset constant pressure of the precision regulator. As a result of the check, if there is a difference, the vertical movement distance of the guide block, that is, the sensor plate moving integrally with the guide block, is controlled based on the preset control command in response to the difference.

Here, the process of checking whether there is a difference from a predetermined constant pressure of the precision regulator is a step by step (for example, by 10μm) while raising the sensor plate upwards by a preset distance in contact with the touch sensor. The output voltage value of the stored gap sensor is compared with the air pressure of the current air gap nozzle.

S160, S170, S180, S190: When the sensor plate moves the upper surface of the panel and checks the patterning, if the current air pressure detected from the air gap nozzle is greater than the previously stored air pressure, the distance between the sensor plate and the panel is approximately Since it is smaller than 100μm, the control of the gap controller raises the sensor plate, and if the current air pressure detected from the air gap nozzle is smaller than the previously set stored air pressure, the gap between the sensor plate and the panel is greater than approximately 100μm, so the control of the gap controller Lower the sensor plate.

Of course, when the operation of the sensor plate moving the upper surface of the panel is terminated while maintaining a distance of approximately 100 μm, the motion controller takes over the control operation of the vertical movement of the sensor plate from the gap controller.

As described above, the embodiments of the present invention have been disclosed in the present specification and drawings, and although specific terms have been used, they have been used only in a general sense to easily describe the technical contents of the present invention and to facilitate understanding of the invention. And is not intended to limit the scope of the invention. It will be apparent to those skilled in the art that other modifications based on the technical idea of the present invention are possible in addition to the embodiments disclosed herein.

1: gap control device of a floating sensor unit according to the present invention
2: transfer means 3: gantry bridge
4: Table 5: LM Guide
10 sensor plate 20 air gap nozzle
30: guide block 31: fixed frame
32: multi-stage 33: rotary stage
34: horizontal stage 40: precision regulator
50: gap sensor 51: buffer amplifier
52: display unit 60: gap controller
61: operational amplifier 1 62: AD converter
63: MCU 64: DA converter
65: operational amplifier 2 70: driver
71: servo driver 72: servo motor
73: LM actuator 80: touch sensor
100: PC P: panel

Claims (7)

A sensor plate (10) for inspecting patterning formed on the panel while moving along the longitudinal direction of the panel in a state of being floated a predetermined distance from the upper surface of the panel;
An air gap nozzle (20) installed adjacent to the sensor plate and injecting air of a predetermined pressure below the sensor plate;
A guide block 30 integrally connected to an upper surface of the sensor plate and guiding flatness, horizontal movement, and vertical movement with respect to the sensor plate;
A precision regulator 40 for supplying a predetermined constant pressure to the air gap nozzle;
A gap sensor 50 connected to the air gap nozzle to detect the air pressure injected from the air gap nozzle in real time, and convert the data of the detected air pressure into a voltage value to be transmitted to the outside;
PID operation is executed based on the voltage value received from the gap sensor to check whether the air pressure of the air gap nozzle is different from a predetermined constant pressure of the precision regulator, and if there is a difference, the guide corresponding to the difference. A gap controller 60 for controlling the vertical movement distance of the block;
A driving unit 70 connected to an upper portion of the guide block to adjust a gap between the sensor plate and the panel while transferring the guide block in a vertical direction by transmitting a driving force to the guide block under control of the gap controller;
A touch sensor positioned at a lower portion of the sensor plate and sequentially contacting each corner of the sensor plate moving upward and downward to sense a height of each corner of the sensor plate, and transmitting the detected height to an external controller. 80;
Gaps control device of the floating sensor unit configured to include.
delete The method according to claim 1,
The guide block 30,
A fixed frame 31 connected to an upper surface of the sensor plate and integrally moving with the sensor plate;
A multi-stage 32 connected to an upper surface of the fixed frame to mechanically adjust the flatness of the sensor plate moving integrally with the fixed frame;
A rotary stage 33 which is integrally connected to an upper portion of the multi-stage and rotates the multi-stage while rotating at a predetermined angle;
A horizontal stage 34 movably connected to an upper surface of the rotary stage and moving the rotary stage in a horizontal direction in front, rear, left and right directions;
Gap control device of the floating sensor unit, characterized in that comprises a.
(a) pre-adjusting the flatness of the sensor plate for inspecting the patterning formed on the panel while moving along the longitudinal direction of the panel with a certain distance floating from the top surface of the panel;
(b) measuring and storing air pressure data ejected from an air gap nozzle connected to the sensor plate when the sensor plate approaches the panel by a preset distance;
(c) moving the sensor plate downward near the preset distance;
(d) injecting air through the air gap nozzle while maintaining a numerical value of the pre-stored air pressure data by a precision regulator;
(e) detecting, by a gap sensor, the air pressure of the air gap nozzle in real time, and converting the detected air pressure data into a voltage value and transmitting it to a gap controller;
(f) the gap controller performing a PID operation based on the voltage value received from the gap sensor to check whether the air pressure of the air gap nozzle is different from a predetermined constant pressure of the precision regulator;
(g) controlling a vertical movement distance of the sensor plate in response to a difference between the air pressure of the air gap nozzle and a predetermined constant pressure of the precision regulator;
And,
The step (a)
(a-1) lowering the sensor plate to a position in contact with an upper surface of the touch sensor disposed under the sensor plate;
(a-2) contacting each edge of the sensor plate to the touch sensor while rotating the sensor plate;
(a-3) storing an encoder value of a driving unit which drives the sensor plate at a corresponding position whenever each edge of the sensor plate contacts the touch sensor;
(a-4) controlling a multi-stage to mechanically adjust the flatness of the sensor plate while being connected to the upper portion of the sensor plate by correcting the stored encoder value difference;
(a-5) maintaining the sensor plate in a horizontal state by the operation of the multi-stage;
The gap control method of the floating sensor unit comprising a.
delete The method of claim 4,
The step (b)
(b-1) lowering the sensor plate to a position in contact with an upper surface of the touch sensor disposed under the sensor plate;
(b-2) setting the air pressure data in a state where the sensor plate and the touch sensor are in contact with a reference value '0';
(b-3) stepwise raising the sensor plate upwards by a predetermined distance in contact with the touch sensor;
(b-4) storing the voltage value output by the gap sensor step by step in response to the air pressure of the air gap nozzle when the sensor plate is gradually raised upward;
The gap control method of the floating sensor unit, characterized in that it further comprises.
The method of claim 6,
In step (d),
The numerical value of the pre-stored air pressure data is a numerical value of the voltage value stored in the step (b-4), and is a signal value input by a control command through the gap controller.

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