KR101266079B1 - 적층형 ic들을 위한 정전기적 방전(esd)실딩 - Google Patents
적층형 ic들을 위한 정전기적 방전(esd)실딩 Download PDFInfo
- Publication number
- KR101266079B1 KR101266079B1 KR1020117010996A KR20117010996A KR101266079B1 KR 101266079 B1 KR101266079 B1 KR 101266079B1 KR 1020117010996 A KR1020117010996 A KR 1020117010996A KR 20117010996 A KR20117010996 A KR 20117010996A KR 101266079 B1 KR101266079 B1 KR 101266079B1
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- stacked
- unpatterned
- esd
- temporary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/60—Protection against electrostatic charges or discharges, e.g. Faraday shields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of semiconductor or other solid state devices
- H01L25/03—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10D89/00
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/27—Manufacturing methods
- H01L2224/274—Manufacturing methods by blanket deposition of the material of the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of semiconductor or other solid state devices
- H01L25/03—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10D89/00
- H01L25/0657—Stacked arrangements of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01055—Cesium [Cs]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12044—OLED
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/251,802 | 2008-10-15 | ||
| US12/251,802 US20100091475A1 (en) | 2008-10-15 | 2008-10-15 | Electrostatic Discharge (ESD) Shielding For Stacked ICs |
| PCT/US2009/060764 WO2010045413A1 (en) | 2008-10-15 | 2009-10-15 | Electrostatic discharge (esd) shielding for stacked ics |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20110069883A KR20110069883A (ko) | 2011-06-23 |
| KR101266079B1 true KR101266079B1 (ko) | 2013-05-27 |
Family
ID=41484024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020117010996A Expired - Fee Related KR101266079B1 (ko) | 2008-10-15 | 2009-10-15 | 적층형 ic들을 위한 정전기적 방전(esd)실딩 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20100091475A1 (enExample) |
| EP (1) | EP2347441A1 (enExample) |
| JP (2) | JP2012506154A (enExample) |
| KR (1) | KR101266079B1 (enExample) |
| CN (1) | CN102171824A (enExample) |
| TW (1) | TW201030934A (enExample) |
| WO (1) | WO2010045413A1 (enExample) |
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| WO2008103374A2 (en) | 2007-02-19 | 2008-08-28 | Mobile Access Networks Ltd. | Method and system for improving uplink performance |
| US20100054746A1 (en) | 2007-07-24 | 2010-03-04 | Eric Raymond Logan | Multi-port accumulator for radio-over-fiber (RoF) wireless picocellular systems |
| US8175459B2 (en) | 2007-10-12 | 2012-05-08 | Corning Cable Systems Llc | Hybrid wireless/wired RoF transponder and hybrid RoF communication system using same |
| WO2009053910A2 (en) | 2007-10-22 | 2009-04-30 | Mobileaccess Networks Ltd. | Communication system using low bandwidth wires |
| US8175649B2 (en) | 2008-06-20 | 2012-05-08 | Corning Mobileaccess Ltd | Method and system for real time control of an active antenna over a distributed antenna system |
| US8644844B2 (en) * | 2007-12-20 | 2014-02-04 | Corning Mobileaccess Ltd. | Extending outdoor location based services and applications into enclosed areas |
| JP5480916B2 (ja) | 2009-02-03 | 2014-04-23 | コーニング ケーブル システムズ リミテッド ライアビリティ カンパニー | 光ファイバベースの分散型アンテナシステム、構成要素、及びその較正のための関連の方法 |
| US9673904B2 (en) | 2009-02-03 | 2017-06-06 | Corning Optical Communications LLC | Optical fiber-based distributed antenna systems, components, and related methods for calibration thereof |
| AU2010210766A1 (en) | 2009-02-03 | 2011-09-15 | Corning Cable Systems Llc | Optical fiber-based distributed antenna systems, components, and related methods for monitoring and configuring thereof |
| WO2010089719A1 (en) | 2009-02-08 | 2010-08-12 | Mobileaccess Networks Ltd. | Communication system using cables carrying ethernet signals |
| US9590733B2 (en) | 2009-07-24 | 2017-03-07 | Corning Optical Communications LLC | Location tracking using fiber optic array cables and related systems and methods |
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| TWI416706B (zh) * | 2010-12-20 | 2013-11-21 | 國立交通大學 | 三維積體電路的靜電放電防護結構 |
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| US8633562B2 (en) * | 2011-04-01 | 2014-01-21 | Qualcomm Incorporated | Voltage switchable dielectric for die-level electrostatic discharge (ESD) protection |
| EP2702710A4 (en) | 2011-04-29 | 2014-10-29 | Corning Cable Sys Llc | DETERMINING THE TRANSMISSION DELAY OF COMMUNICATIONS IN DISTRIBUTED ANTENNA SYSTEMS AND CORRESPONDING COMPONENTS, SYSTEMS AND METHODS |
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| EP2829152A2 (en) | 2012-03-23 | 2015-01-28 | Corning Optical Communications Wireless Ltd. | Radio-frequency integrated circuit (rfic) chip(s) for providing distributed antenna system functionalities, and related components, systems, and methods |
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| WO2016098109A1 (en) | 2014-12-18 | 2016-06-23 | Corning Optical Communications Wireless Ltd. | Digital interface modules (dims) for flexibly distributing digital and/or analog communications signals in wide-area analog distributed antenna systems (dass) |
| US20160249365A1 (en) | 2015-02-19 | 2016-08-25 | Corning Optical Communications Wireless Ltd. | Offsetting unwanted downlink interference signals in an uplink path in a distributed antenna system (das) |
| US9785175B2 (en) | 2015-03-27 | 2017-10-10 | Corning Optical Communications Wireless, Ltd. | Combining power from electrically isolated power paths for powering remote units in a distributed antenna system(s) (DASs) |
| US9681313B2 (en) | 2015-04-15 | 2017-06-13 | Corning Optical Communications Wireless Ltd | Optimizing remote antenna unit performance using an alternative data channel |
| US9948349B2 (en) | 2015-07-17 | 2018-04-17 | Corning Optical Communications Wireless Ltd | IOT automation and data collection system |
| KR102405657B1 (ko) * | 2015-09-22 | 2022-07-01 | 지멕주식회사 | Esd 방지 코팅 구조 및 esd 방지 코팅 구조의 제조 방법 |
| US10560214B2 (en) | 2015-09-28 | 2020-02-11 | Corning Optical Communications LLC | Downlink and uplink communication path switching in a time-division duplex (TDD) distributed antenna system (DAS) |
| US9648580B1 (en) | 2016-03-23 | 2017-05-09 | Corning Optical Communications Wireless Ltd | Identifying remote units in a wireless distribution system (WDS) based on assigned unique temporal delay patterns |
| US10236924B2 (en) | 2016-03-31 | 2019-03-19 | Corning Optical Communications Wireless Ltd | Reducing out-of-channel noise in a wireless distribution system (WDS) |
| EP4075608A1 (en) | 2021-04-12 | 2022-10-19 | Sofamel, SLU | Earthing assembly of an electrical conductor of an overhead electrical line |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4883543A (en) * | 1980-06-05 | 1989-11-28 | Texas Instruments Incroporated | Shielding for implant in manufacture of dynamic memory |
| JPS6276564A (ja) * | 1986-08-25 | 1987-04-08 | Hitachi Ltd | 半導体装置 |
| US5138438A (en) * | 1987-06-24 | 1992-08-11 | Akita Electronics Co. Ltd. | Lead connections means for stacked tab packaged IC chips |
| US5448095A (en) * | 1993-12-20 | 1995-09-05 | Eastman Kodak Company | Semiconductors with protective layers |
| US5869869A (en) * | 1996-01-31 | 1999-02-09 | Lsi Logic Corporation | Microelectronic device with thin film electrostatic discharge protection structure |
| JPH09326465A (ja) * | 1996-06-06 | 1997-12-16 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
| US6130459A (en) * | 1998-03-10 | 2000-10-10 | Oryx Technology Corporation | Over-voltage protection device for integrated circuits |
| US6064094A (en) * | 1998-03-10 | 2000-05-16 | Oryx Technology Corporation | Over-voltage protection system for integrated circuits using the bonding pads and passivation layer |
| US6534422B1 (en) * | 1999-06-10 | 2003-03-18 | National Semiconductor Corporation | Integrated ESD protection method and system |
| JP4251421B2 (ja) * | 2000-01-13 | 2009-04-08 | 新光電気工業株式会社 | 半導体装置の製造方法 |
| US6762076B2 (en) * | 2002-02-20 | 2004-07-13 | Intel Corporation | Process of vertically stacking multiple wafers supporting different active integrated circuit (IC) devices |
| JP4489345B2 (ja) * | 2002-12-13 | 2010-06-23 | 株式会社ルネサステクノロジ | 半導体装置の製造方法 |
| CN100495701C (zh) * | 2005-11-11 | 2009-06-03 | 财团法人工业技术研究院 | 具有梁柱结构的三维晶片堆叠结构及三维晶片堆叠的方法 |
| US20070161150A1 (en) * | 2005-12-28 | 2007-07-12 | Intel Corporation | Forming ultra dense 3-D interconnect structures |
| US20080122078A1 (en) * | 2006-11-08 | 2008-05-29 | Jun He | Systems and methods to passivate on-die redistribution interconnects |
| JP2008205375A (ja) * | 2007-02-22 | 2008-09-04 | Oki Electric Ind Co Ltd | 半導体装置及びその製造方法 |
-
2008
- 2008-10-15 US US12/251,802 patent/US20100091475A1/en not_active Abandoned
-
2009
- 2009-10-15 JP JP2011532236A patent/JP2012506154A/ja active Pending
- 2009-10-15 WO PCT/US2009/060764 patent/WO2010045413A1/en not_active Ceased
- 2009-10-15 CN CN200980138788XA patent/CN102171824A/zh active Pending
- 2009-10-15 KR KR1020117010996A patent/KR101266079B1/ko not_active Expired - Fee Related
- 2009-10-15 EP EP09740237A patent/EP2347441A1/en not_active Withdrawn
- 2009-10-15 TW TW098134984A patent/TW201030934A/zh unknown
-
2014
- 2014-09-22 JP JP2014192539A patent/JP5917639B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US20100091475A1 (en) | 2010-04-15 |
| CN102171824A (zh) | 2011-08-31 |
| TW201030934A (en) | 2010-08-16 |
| KR20110069883A (ko) | 2011-06-23 |
| EP2347441A1 (en) | 2011-07-27 |
| JP2015065437A (ja) | 2015-04-09 |
| JP5917639B2 (ja) | 2016-05-18 |
| JP2012506154A (ja) | 2012-03-08 |
| WO2010045413A1 (en) | 2010-04-22 |
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