KR101232910B1 - apparatus for supplying organic matter, Apparatus and method for depositing organic matter using the same - Google Patents

Abstract

An organic material supply apparatus, an organic material deposition apparatus and a deposition method using the same, which can supply a large amount of organic material and allow the organic material to be uniformly supplied to the entire area of the workpiece, are disclosed.
The organic material supply apparatus according to the present invention includes a plurality of crucibles having one side opened and organic materials contained therein, a plurality of heaters for respectively heating the plurality of crucibles to vaporize the organic material, and the plurality of crucibles; A diffusion tube having a partition wall installed therein so that each organic substance vaporized from the plurality of crucibles is diffused in an independent diffusion space, and communicated with the diffusion tube and opened toward an object to be diffused in the diffusion tube. It includes a nozzle for increasing the flow rate of the organic material injected to the outside.

Description

Apparatus for supplying organic matter, Apparatus and method for depositing organic matter using the same}

The present invention relates to an organic material supply apparatus, an organic material deposition apparatus using the same, and a deposition method. More particularly, the present invention relates to an organic material supply apparatus, an organic material deposition apparatus using the same, and a deposition method using the same. .

OLED (Organic Light Emitting Diodes) has the advantages of being thinner, lighter, simpler structure and manufacturing process, and lower power consumption than other flat panel display devices.

The OID has a structure in which an anode, an organic film, and a cathode are sequentially stacked on a substrate. Among them, the organic layer has a multilayer structure of a hole transport layer, an emission layer, and an electron transfer layer. Therefore, ODL forms an exciton in which holes supplied from the hole transport layer and electrons supplied from the electron transport layer are transferred to the light emitting layer and are combined with hole-electrons, and again, energy generated when the excitons return to the ground state. Light emission.

On the other hand, if the organic film is not uniform at an optimal thickness (100-200 nm), the device characteristics change together, so that the number of devices that can be used decreases and the yield decreases. Therefore, it is important to form a film thickness uniformly in forming an organic film.

Such an organic film may be formed using a low molecular weight or a high molecular weight organic material, but there is still much point to improve in terms of color purity, efficiency, and lifetime than the low molecular weight organic material.

Therefore, the organic film is mainly formed using a low molecular weight organic material. As a representative method of forming the organic film using the low molecular weight organic material, a vacuum deposition method may be mentioned. Vacuum deposition methods include resistance heating deposition and electron beam deposition.

In the electron beam deposition method, when the energy of the electron beam is too large, the organic material itself may be decomposed. Therefore, when forming an organic film using a low molecular weight organic material, a resistance heating deposition method is mainly used. In the resistive heating deposition method, a crucible containing an organic material is disposed under the substrate, and a vaporized organic material is deposited on the substrate by heating the crucible.

However, since organic materials have lower thermal conductivity than metals or inorganic materials, when a large amount of organic material is put into a crucible with a large capacity, when the crucible is heated, heat is transferred only to the wall of the crucible and cannot be transferred to the inside. There is a problem that does not vaporize smoothly.

In addition, the general resistive heating evaporation method has a problem that the organic material vaporized from the crucible is formed thick in the center of the substrate, is formed thin in the edge of the substrate, the thickness of the organic film is non-uniform in the entire area of the substrate.

An object of the present invention is to provide an organic material supply apparatus, an organic material deposition apparatus using the same, and a deposition method for supplying a large amount of organic material, the organic film is formed to a uniform thickness for the entire area of the object to be processed.

The organic material supply apparatus according to the present invention includes a plurality of crucibles having one side opened and organic materials contained therein, a plurality of heaters for respectively heating the plurality of crucibles to vaporize the organic material, and the plurality of crucibles; A diffusion tube having a partition wall installed therein so that each organic substance vaporized from the plurality of crucibles is diffused in an independent diffusion space, and communicated with the diffusion tube and opened toward an object to be diffused in the diffusion tube. It includes a nozzle for increasing the flow rate of the organic material injected to the outside.

The organic material supply device is a plurality of connecting pipes branched from the diffusion pipe and connected to the plurality of crucibles, and are respectively installed in the plurality of connecting pipes to control the flow rate of the organic material from the plurality of crucibles to the diffusion pipe, respectively. A plurality of valves may be further included.

The apparatus may further include a plurality of coolers configured to cool the heat emitted from the plurality of crucibles, which are respectively disposed outside the plurality of crucibles and are heated.

The diffusion tube is coupled to the nozzle is sealed at both ends and the tube axis is arranged in the direction in which the plurality of crucibles are arranged, the discharge port is formed to protrude toward the nozzle in communication with the nozzle in a form that the cross-sectional area is reduced toward the nozzle It may include protrusions.

The nozzle may be formed with a nozzle having a cross-sectional area smaller than the discharge port.

On the other hand, the organic material deposition apparatus according to the present invention is provided with a deposition chamber in which a substrate is supported therein, an organic material feeder for spraying organic material toward the substrate provided with a length across the substrate, and supports the organic material feeder, the organic material feeder A linear feeder for linearly transporting the organic feeder in a direction crossing the longitudinal direction of the organic feeder is a plurality of crucibles and the plurality of crucibles each of which is arranged in parallel with the organic material is opened in one side, A plurality of heaters for vaporizing the organic materials by heating, respectively, a diffusion tube communicating with the plurality of crucibles and having a partition therein so that each organic material vaporized from the plurality of crucibles is diffused in an independent diffusion space; Communicate with the diffusion tube and open toward the object to diffuse from the diffusion tube That in the outside air jet comprises a nozzle for increasing the flow rate of the organic material.

The organic material feeder is a plurality of connecting pipes branched from the diffusion pipe and connected to the plurality of crucibles, and respectively installed in the plurality of connecting pipes to control the flow rate of the organic material from the plurality of crucibles to the diffusion pipe, respectively. It may further include a plurality of valves.

The organic material supplier may further include a plurality of coolers arranged to be disposed outside the plurality of crucibles to cool the heat emitted from the plurality of heated crucibles.

The organic material feeder may be provided in plurality, and the plurality of organic material feeders may be disposed in a direction in which the organic material feeder is transferred.

The plurality of organic material feeders may cross-jet the host material and the dopant material.

On the other hand, the organic material deposition method according to the present invention is a vaporization step of vaporizing each of the plurality of organic substances contained in the plurality of crucibles by heating a plurality of crucibles, and the plurality of organic substances vaporized in the plurality of crucibles in one diffusion tube And a diffusion step of independently diffusing each of the plurality of diffusion spaces partitioned by the partition walls in the interior of the cell and spraying the plurality of organic substances diffused from the diffusion tube toward the substrate.

In the vaporization step, the flow rate of the plurality of organic substances vaporized from the plurality of crucibles may be adjusted by adjusting heating temperatures of the plurality of crucibles, respectively.

In the diffusion step, the flow rate of the plurality of organic materials may be adjusted by adjusting the opening and closing amounts of the plurality of valves installed in the plurality of crucibles and the plurality of connection pipes connecting the diffusion pipes, respectively.

The organic material supply apparatus, the organic material deposition apparatus and the organic material deposition method using the same according to the present invention can supply a large amount of organic material from a plurality of crucibles, there is an effect that the production efficiency is increased.

In addition, the organic material supplying device, the organic material deposition apparatus and the organic material deposition method using the same according to the present invention can adjust the flow rate of the plurality of organic materials, respectively, to uniformly form the thickness of the organic film deposited on the entire surface of the workpiece, high-quality organic There is an effect that can form a film.

1 is a perspective view showing an organic material supply apparatus according to the present embodiment.
2 is an exploded perspective view showing an organic material supply apparatus according to the present embodiment.
3 is a plan view schematically showing an organic material deposition apparatus according to the present embodiment.
4 is a cross-sectional view of the organic material deposition apparatus according to the present exemplary embodiment, taken along the line II ′ of FIG. 3.
FIG. 5 is a cross-sectional view of the organic material deposition apparatus according to the present exemplary embodiment, taken along the line II-II ′ of FIG. 3.
6 is a flowchart illustrating an organic material deposition method according to the present embodiment.
7 is a plan view schematically showing an organic material deposition apparatus according to another embodiment.
FIG. 8 is a cross-sectional view of an organic material deposition apparatus according to another embodiment based on a line III-III ′ of FIG. 7.

Hereinafter, an organic material supply apparatus and an organic material deposition apparatus using the same according to the present embodiment will be described in detail with reference to the accompanying drawings.

1 is a perspective view showing an organic material supply apparatus according to the present embodiment, Figure 2 is an exploded perspective view showing an organic material supply apparatus according to the present embodiment.

Referring to FIGS. 1 and 2, the organic material supply device 100 vaporizes organic materials and supplies them to a target object. The crucible 110, the heater 130, the cooler 150, the diffusion tube 170, and the nozzle are provided. 190.

The crucible 110 is provided as a heat resistant container. The crucible 110 is open at one side so that the organic substance heated by the heater 130 and vaporized may be discharged to the outside. Such a crucible 110 is provided in plurality and arranged in parallel. That is, the plurality of crucibles 110 are arranged side by side in the open state toward the upper side of FIG. In FIG. 1 and FIG. 2, two crucibles 110 are shown, but the number of crucibles 110 and the spacing of the plurality of crucibles 110 may be adjusted according to the total area of the workpiece.

The heater 130 heats the crucible 110 to vaporize the organic material contained in the crucible 110, and includes a heating block 131 and a heating wire 133. The heating block 131 is disposed outside the crucible 110 and is installed to surround the crucible 110. The heating wire 133 is installed inside the heating block 131 to generate heat by power supplied from the outside to heat the crucible 110. The heater 130 is provided in plurality, the plurality of heaters 130 to heat the plurality of crucibles 110, respectively.

The cooler 150 prevents the heat emitted from the heater 130 or the crucible 110 heated by the heater 130 to be discharged to the outside, and includes a cooling block 151 and a cooling furnace 153. can do. The cooling block 151 is disposed outside the heater 130 and is installed to surround the heater 130. The cooling path 153 forms a path through which the refrigerant circulates inside the cooling block 151. The cooler 150 is provided in plurality, and the plurality of coolers 150 cools the heat emitted from the plurality of heaters 130 or the crucibles 110, respectively.

Diffusion tube 170 is to allow each organic material vaporized in the plurality of crucibles 110 to be temporarily suspended therein so that the organic material can be sprayed in a uniform distribution with respect to the workpiece, both ends are sealed and the tube shaft The plurality of crucibles 110 are arranged in the direction in which they are arranged.

The diffusion tube 170 communicates with the plurality of crucibles 110 by the plurality of connection tubes 171. The plurality of connection pipes 171 branch from the diffusion pipe 170 and are coupled to the open ends of the plurality of crucibles 110.

In addition, valves 173 are installed in the pipe lines of the plurality of connecting pipes 171, respectively. The plurality of valves 173 may respectively control the flow rate of each organic material vaporized from the plurality of crucibles 110 and directed to the diffusion tube 170. The plurality of valves 173 may use a solenoid valve, a mass flow controller (MFC), or the like.

On the other hand, the partition wall 175 is installed inside the diffusion tube 170. The partition wall 175 is interposed between the plurality of crucibles 110 so that the organic substances vaporized from the plurality of crucibles 110 and diffused in the inside of the diffusion tube 170 are not mixed with each other, but are diffused in independent diffusion spaces. Is installed on.

In addition, a nozzle coupling protrusion 177 having a cross-sectional area reduced from the diffusion tube 170 is formed in the diffusion tube 170. The nozzle coupling protrusion 177 protrudes toward the object to be processed, and an outlet 179 through which each organic substance diffused in the diffusion tube 170 is discharged is formed at an end portion thereof.

The nozzle 190 allows the organic energy to be injected to the outside by changing the pressure energy generated as the organic material diffuses from the diffusion tube 170 to the velocity energy, and is coupled to the nozzle coupling protrusion 177. The nozzle 190 is provided with a spray hole 191 in communication with the discharge port 179. The injection hole 191 may be formed to have a smaller cross-sectional area than the discharge hole 179 to increase the velocity energy of the organic material.

On the other hand, the organic material supply device 100 further includes a flange (111). The flange 111 supports the crucible 110, the heater 130, and the cooler 150 from the bottom, but is engaged with the crucible 110 by a binding screw 113. As such, the flange 111 that is coupled to the crucible 110 is separated from the heater 130 and the cooler 150 so that the crucible 110 may be separated from the heater 130 and the cooler 150 together. Easily replace all of the crucible (110) exhausted, or provide convenience to the operation of replenishing the organic material in the crucible (110).

3 is a plan view schematically illustrating an organic material deposition apparatus according to the present embodiment, FIG. 4 is a cross-sectional view of the organic material deposition apparatus according to the present exemplary embodiment taken along the line II ′ of FIG. 3. FIG. 3 is a cross-sectional view of the organic material deposition apparatus according to the present exemplary embodiment, taken along the line II-II ′ of FIG. 3.

3 and 5, the organic material deposition apparatus 200 is for evaporating organic materials to form an organic film on one surface of the substrate S, and the deposition chamber 210, the organic material feeder 100, and the linear transfer machine ( 230).

A space in which the deposition process of the organic material is performed is formed in the deposition chamber 210. The deposition chamber 210 may be provided as a vacuum chamber in which a vacuum atmosphere therein may be formed, and a gate valve (not shown) may be installed at one side wall of the deposition chamber 210 to allow the substrate S to enter and exit.

The substrate support 211 supporting the substrate S is installed in the deposition chamber 210. The substrate support 211 supports the substrate S such that one surface of the substrate S on which the organic material is to be deposited faces the organic material supplier 100. The substrate support 211 uses a vacuum force to support the substrate S, and a vacuum chuck and a substrate. A clamping chuck or the like for supporting the substrate S by clamping the edge of S can be used.

The organic material supplier 100 is to supply organic materials to one surface of the substrate S supported by the substrate support 211 by vaporizing the organic material, and the nozzle 190 is disposed to face one surface of the substrate S.

Here, the organic material supplier 100 uses the organic material supply device 100 described above, and the same reference numerals are used for components similar to those of the organic material supply device 100 described above, and a detailed description thereof will be omitted. Therefore, the organic material supplier 100 in which the detailed description is omitted in the following description will be understood with reference to the description of the organic material supply device 100 described above.

On the other hand, the organic material supplier 100 is provided with a length in which the nozzle 190 crosses the substrate (S). For example, in the organic material supplier 100, when the substrate S is formed of a rectangular flat plate, the length of the nozzle 190 is provided longer than the length of any one side of the substrate S, and the substrate S is circular. When made of a flat plate, the organic material supplier 100 is provided with a length of the nozzle 190 is longer than the diameter of the substrate (S).

Accordingly, the organic material supply apparatus 100 allows the organic material to be deposited on the substrate in a scan method using the linear transporter 230. The linear feeder 230 supports the organic feeder 100, and linearly feeds the organic feeder 100 in a direction crossing the longitudinal direction of the nozzle 190. The linear transfer unit 230 may use any one of a linear actuator including a combination of an L guide, a ball screw and a rotating motor, a linear actuator including a rack and pinion and a rotating motor.

Hereinafter, an organic material deposition method according to the present embodiment will be described in detail with reference to the accompanying drawings.

6 is a flowchart illustrating an organic material deposition method according to the present embodiment.

Referring to FIG. 6, a plurality of crucibles 110 containing organic materials are respectively coupled to the inside of the plurality of heaters 130. The substrate S is loaded into the deposition chamber 210 and supported by the substrate support 211. Then, one surface of the substrate S faces the organic material supplier 100, and the nozzle 190 of the organic material supplier 100 faces one surface of the substrate S.

In this state, power is applied to the plurality of heaters 130, respectively, and the plurality of crucibles 110 are respectively heated by the plurality of heaters 130. As the plurality of crucibles 110 are heated by the plurality of heaters 130, the organic materials contained in the plurality of crucibles 110 are vaporized. In this case, the plurality of coolers 150 may prevent the heat emitted from the plurality of heaters 130 or the plurality of crucibles 110 heated by the heaters 130 to be discharged to the outside, thereby preventing the deposition chamber 210 of the deposition chamber 210. The internal temperature is increased to prevent the preset process temperature from rising (step S11).

Subsequently, the plurality of valves 173 open the plurality of connecting pipes 171, respectively. As the plurality of valves 173 are opened, the organic substances vaporized from the plurality of crucibles 110 are discharged to the diffusion tube 170 through the plurality of connection tubes 171. The organic matter discharged to the diffusion tube 170 is impinged on the inner wall of the diffusion tube 170 and diffuses inside the diffusion tube 170. As such, the diffusion tube 170 allows the organic material to be diffused therein so that the organic material may be sprayed in a uniform distribution with respect to the substrate S (step S13).

Subsequently, the organic material diffused in the diffusion tube 170 passes through the nozzle 190 and the flow velocity thereof is increased to be sprayed onto one surface of the substrate S.

In addition, the linear conveyor 230 transfers the organic material supplier 100 for spraying the organic material in a direction crossing the longitudinal direction of the nozzle 190. Therefore, the organic material may be deposited on the entire surface of one surface of the substrate S (step S15).

As such, the organic film deposition apparatus 200 according to the present exemplary embodiment allows the organic material to be sprayed together from the plurality of crucibles 110 so that an organic film is formed on one surface of the substrate S. Therefore, since the organic film deposition apparatus 200 according to the present exemplary embodiment may deposit a large amount of organic material on the substrate S by one scan operation, the organic film deposition apparatus 200 may vaporize and spray the organic material from the single crucible 110. Can increase production efficiency.

On the other hand, the flow rate of the organic material vaporized and injected from the crucible 110 serves as a factor for determining the thickness of the organic film. That is, as the flow rate of the organic material increases, the thickness of the organic film may be thickened, and as the flow rate decreases, the thickness of the organic film may be thinned. The flow rate of the organic material may be determined by the heating temperature of the crucible 110 heated by the heater 130 and the opening / closing amount of the valve 173.

In other words, if the heating temperature of the crucible 110 is increased, the amount of vaporization of the organic material may be increased, and the flow rate of the organic material may be increased. If the heating temperature of the crucible 110 is lowered, the amount of organic matter may be reduced and the flow rate of the organic material may be decreased. . In addition, increasing the opening amount of the valve 173 may increase the flow rate of the organic material, and decreasing the opening amount of the valve 173 may reduce the flow rate of the organic material.

For this reason, the organic material deposition apparatus 200 according to the present embodiment includes a plurality of heaters 130 for heating the plurality of crucibles 110, respectively, in order to efficiently control the flow rate of the organic material, A plurality of valves 173 are provided at 171, respectively.

Therefore, the organic material deposition apparatus 200 according to the present embodiment may adjust the flow rate of the organic material by adjusting the heating temperatures of the plurality of crucibles 110 by the plurality of heaters 130, and the plurality of valves 173 The flow rate of the organic substance can be adjusted by adjusting the opening and closing amount.

In addition, in the organic material deposition apparatus 200 according to the present embodiment, a plurality of crucibles 110 are respectively communicated with respective diffusion spaces partitioned by the partition wall 175. That is, each organic substance vaporized from the plurality of crucibles 110 is not mixed with each other and diffused separately in an independent diffusion space.

Accordingly, the organic material deposition apparatus 200 according to the present embodiment individually adjusts the heating temperature of the plurality of crucibles 110 and the opening / closing amounts of the plurality of valves 173, respectively, to thereby determine the crucibles of the entire area of the substrate S ( The flow rate of the organic material sprayed onto the area allocated to 110 may be finely adjusted to uniformly form the thickness of the entire organic film.

For example, referring to FIG. 3, organic substances vaporized and sprayed from the first crucible 110a and the second crucible 110b may be sprayed into the first and second regions A1 and A2, respectively. . In this case, for convenience of description, it is assumed that the flow rate of the organic material injected into the second area A2 is an appropriate amount of organic material consumed to form the set organic film.

When the flow rate of the organic material injected into the first region A1 is lower than the flow rate of the organic material injected into the second region A2, the heating temperature of the first crucible 110a is increased or the first valve 173a is opened. By increasing the amount, the flow rate of the organic material injected into the first region A1 and the second region A2 can be balanced. On the contrary, when the flow rate of the organic material injected into the first region A1 is higher than the flow rate of the organic material injected into the second region A2, the heating temperature of the first crucible 110a is lowered or the first valve 173a is used. ), The amount of organic particles injected into the first region A1 and the second region A2 can be balanced.

As described above, the organic material deposition apparatus 200 according to the present embodiment can finely adjust the flow rate of the organic material to uniformly form the thickness of the entire organic film, it is possible to improve the quality of the organic film.

On the other hand, the organic material deposition apparatus 200 according to the present embodiment described above has been described with respect to the embodiment in which the organic film is formed on the substrate (S) using one type of organic material.

However, as illustrated in FIGS. 7 and 8, the organic material deposition apparatus 200 according to another exemplary embodiment may cross-inject different types of organic materials. That is, the organic material deposition apparatus 200a according to another embodiment may include a plurality of organic material supplies 100a and 100b. The plurality of organic material supplies 100a and 100b may be disposed in a direction in which the organic material supplier 100 is transferred, and the plurality of organic material supplies 100a and 100b may be supplied to the substrate S by vaporizing different types of organic materials.

For example, two organic feeders 100 may be disposed in a conveying direction, and one of the two organic feeders 100a and 100b may be filled with a host material, and the other crucible may contain a dopant ( dopant) can be charged. The host material and the dopant material constitute the light emitting layer among the ODL, the host material functions to recombine with the charge transport, and the dopant material emits light.

Accordingly, the organic material deposition apparatus 200a according to another embodiment may include a host material and a dopant material vaporized from the plurality of organic material feeders 100 by linearly transferring the plurality of organic material feeders 100a and 100b by the linear feeder 230. By allowing cross injection, the host material and the dopant material may be deposited together on one surface of the substrate S. FIG.

As such, the organic material deposition apparatus 200a according to another exemplary embodiment may deposit a plurality of different types of organic materials on the substrate S by one scruning operation, thereby increasing production efficiency.

100: organic matter supply device 110: crucible
130: heater 150: cooler
170: diffuser tube 190: nozzle
200: organic material deposition apparatus

Claims (13)

A plurality of crucibles in which one side is opened and organic materials are accommodated and arranged in parallel,
A plurality of heaters for respectively heating the plurality of crucibles to vaporize the organic substances,
Both ends are sealed so that the tube axis is disposed in a direction in which the plurality of crucibles are arranged so as to communicate with the plurality of crucibles, and a partition wall is installed therein so that each organic substance vaporized from the plurality of crucibles is diffused in an independent diffusion space. Diffusion tube,
A nozzle which communicates with the diffusion tube and opens toward the object to be treated to increase the flow rate of the organic material diffused from the diffusion tube and sprayed outward;
Protruding from the diffusion tube in the form that the cross-sectional area toward the nozzle is reduced, and comprises a nozzle coupling projection is formed with a discharge port communicating with the nozzle,
And a supply amount of the organic material supplied to an independent diffusion space of the diffusion pipe partitioned by the partition wall is individually controlled. The method of claim 1,
A plurality of connecting pipes branched from the diffusion pipe and connected to the plurality of crucibles,
And a plurality of valves respectively installed in the plurality of connecting pipes to control the flow rate of the organic material from the plurality of crucibles to the diffusion pipe, respectively. The organic material supply apparatus according to claim 1, further comprising a plurality of coolers configured to cool heat emitted from the plurality of crucibles heated and disposed outside the plurality of crucibles, respectively. delete The organic material supply apparatus according to claim 1, wherein the nozzle is formed with a spray hole having a cross-sectional area smaller than that of the discharge hole. A deposition chamber in which a substrate is supported therein;
An organic material feeder provided to have a length across the substrate and spraying the organic material toward the substrate;
A linear feeder supporting the organic material feeder and linearly transporting the organic material feeder in a direction crossing the longitudinal direction of the organic material feeder,
The organic matter feeder
A plurality of crucibles in which one side is opened and organic materials are accommodated and arranged in parallel,
A plurality of heaters for respectively heating the plurality of crucibles to vaporize the organic substances,
Both ends are sealed so that the tube axis is disposed in a direction in which the plurality of crucibles are arranged so as to communicate with the plurality of crucibles, and a partition wall is installed therein so that each organic substance vaporized from the plurality of crucibles is diffused in an independent diffusion space. Diffusion tube,
A nozzle which communicates with the diffusion tube and opens toward the object to be treated to increase the flow rate of the organic material diffused from the diffusion tube and sprayed outward;
Protruding from the diffusion tube in the form that the cross-sectional area toward the nozzle is reduced, and comprises a nozzle coupling projection is formed with a discharge port communicating with the nozzle,
And a supply amount of the organic material supplied to the diffusion space of each of the diffusion pipes partitioned by the partition wall is individually controlled. The method of claim 6, wherein the organic material supply unit
A plurality of connecting pipes branched from the diffusion pipe and connected to the plurality of crucibles;
And a plurality of valves respectively installed in the plurality of connection pipes to control the flow rate of the organic material from the plurality of crucibles to the diffusion pipe, respectively. The organic material deposition apparatus according to claim 6, wherein the organic material supplier further comprises a plurality of coolers configured to cool heat emitted from the plurality of heated crucibles respectively disposed outside the plurality of crucibles. The organic material deposition apparatus of claim 6, wherein the organic material supplier is provided in plural, and the plurality of organic material supplies are arranged in a direction in which the organic material supplier is transported. The organic material deposition apparatus of claim 9, wherein the plurality of organic material supplies cross-spray the host material and the dopant material. A vaporization step of respectively heating a plurality of crucibles to vaporize a plurality of organic substances contained in the plurality of crucibles,
A diffusion step of supplying the plurality of organic materials to a plurality of diffusion spaces independently partitioned by partition walls in one diffusion tube to individually diffuse the plurality of organic materials in the plurality of diffusion spaces;
The plurality of organic matter diffused from the diffusion tube is sprayed through a nozzle coupled to the diffusion tube, the nozzle coupling is formed to project the outlet from the diffusion tube in communication with the nozzle in a cross-sectional area is reduced toward the nozzle is formed Organic material deposition method comprising the step of spraying toward the substrate via a projection. The method of claim 11, wherein the vaporizing step
And controlling a flow rate of the plurality of organic substances vaporized from the plurality of crucibles by adjusting heating temperatures of the plurality of crucibles, respectively. The method of claim 11, wherein the diffusion step
The method of depositing organic material, characterized in that for controlling the flow rate of the plurality of organic materials by adjusting the amount of opening and closing of the plurality of valves provided in the plurality of connecting pipes connecting the plurality of crucibles and the diffusion pipe.

Images