CN108048797A - Three T-shaped OLED vapor depositions line source of one kind - Google Patents
Three T-shaped OLED vapor depositions line source of one kind Download PDFInfo
- Publication number
- CN108048797A CN108048797A CN201711482603.XA CN201711482603A CN108048797A CN 108048797 A CN108048797 A CN 108048797A CN 201711482603 A CN201711482603 A CN 201711482603A CN 108048797 A CN108048797 A CN 108048797A
- Authority
- CN
- China
- Prior art keywords
- line source
- crucible
- air balance
- balance pipe
- shaped oled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 title claims abstract description 20
- 239000011368 organic material Substances 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 abstract description 11
- 238000007789 sealing Methods 0.000 abstract description 2
- 238000010438 heat treatment Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- -1 that is Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Abstract
The present invention relates to three T-shaped OLED of one kind to be deposited line source, including：Three crucibles, spaced set is in a row, and inside is respectively provided with vapor deposition organic material；Three air balance pipes, each air balance pipe are connected respectively with a crucible；Multiple nozzles are respectively equipped at the top of each air balance pipe, all nozzle arrangements are a row.The three T-shaped OLED vapor depositions line sources of the present invention devise 3 crucibles, they load material respectively, and sealing area is small, and dress, embankment are just.They correspond to the left, center, right part of line source nozzle respectively, and each control the rate of left, center, right, easily controllable.
Description
Technical field
The present invention relates to evaporation coating technique fields, more particularly to three T-shaped OLED vapor depositions line source of one kind.
Background technology
The line source of existing volume production evaporated device is mostly " yi word pattern ", and as its name suggests, a kind of yi word pattern line source, that is, shape is near
Like the linear evaporation source of Chinese character " one ".As shown in Figure 1, organic material of traditional yi word pattern line source is by 2 top of line source main body
The nozzle 1 that one row of horizontal is intervally arranged sprays.Yi word pattern line source can also approximation be interpreted as a cuboid, add inside cuboid
Adding organic material, there is the nozzle that a row of horizontal is intervally arranged on top, when rectangular body sidewall is heated, internal organic material, that is, gas
Change and sprayed at tip nozzles, and film forming is finally deposited on substrate.
Although the current application of yi word pattern line source is very extensive, yi word pattern line source is since self structure limits, and there are some
Shortcoming.Wherein, fill, move back that material is difficult and the big rate of system inertia is difficult to control two shortcomings particularly fatal.The former is because a word
There is crucible in a strip inside molded line source, during inside crucible filling material, it is difficult to accomplish the uniform of horizontal direction.It adds in
It needs to do end face seal after material and interior crucible is enclosed in line source, this process is very cumbersome, and acquires a certain degree of difficulty.And " it is
System the big rate of inertia be difficult to control " be since yi word pattern line source all material is laid in a word length bar shaped in crucible, and
The side of interior crucible is nearly all in the radiation scope of heater strip.So heating cooling is all difficult control, therefore say that its system is used to
Property it is big, speed control is difficult.
Japanese ULVAC and SFA companies of South Korea have all applied for the patent of a word line source, but the line source that they provide is in reality
There are the above problems in use.
The content of the invention
The invention solves in the prior art the technical issues of, provide one kind three T-shaped OLED vapor deposition line sources.
In order to solve the above-mentioned technical problem, technical scheme is specific as follows：
Three T-shaped OLED vapor depositions line source of one kind, including：
Three crucibles, spaced set is in a row, and inside is respectively provided with vapor deposition organic material；
Three air balance pipes, each air balance pipe are connected respectively with a crucible；The top of each air balance pipe
Multiple nozzles are respectively equipped with, all nozzle arrangements are a row.
In the above-mentioned technical solutions, the spacing of multiple nozzles on intermediate air balance pipe is more than the air balance of both sides
The spacing of multiple nozzles on pipe.
In the above-mentioned technical solutions, the periphery of each air balance pipe is equipped with balance pipe heater strip.
In the above-mentioned technical solutions, the periphery of each nozzle is equipped with nozzle heater strip.
In the above-mentioned technical solutions, the periphery of each crucible is equipped with crucible heater strip.
In the above-mentioned technical solutions, the middle part of each air balance pipe is perpendicular equipped with what is be connected with the top of the crucible
Straight tube-like structure.
In the above-mentioned technical solutions, the diameter of the vertical tubular structure is more than the diameter of the crucible.
The present invention has following advantageous effect：
The three T-shaped OLED vapor depositions line sources of the present invention devise 3 crucibles, they load material respectively, and sealing area is small, dress,
Embankment is just.They correspond to the left, center, right part of line source nozzle respectively, and each control the rate of left, center, right, easily controllable.
The three T-shaped OLED vapor depositions line sources of the present invention, organic material convenient filling；Organic material material leakage is avoided, is maintained easily；
Easily controllable, film thickness uniformity is good, repeated height.
Description of the drawings
The present invention is described in further detail with reference to the accompanying drawings and detailed description.
Fig. 1 is the structure diagram of " yi word pattern " line source of the prior art.
Fig. 2 is that the main structure diagram of line source is deposited in the three T-shaped OLED of the present invention.
Fig. 3 is that the side structure schematic view of line source is deposited in the three T-shaped OLED of the present invention.
Reference numeral in figure is expressed as：
1- nozzles；2- line source main bodys；3- crucibles；4- air balance pipes；5- crucible heater strips；6- balance pipe heater strips；7-
Nozzle heater strip.
Specific embodiment
The present invention is described in detail below in conjunction with the accompanying drawings.
Fig. 2 illustrates the inner body portion of the three T-shaped OLED vapor depositions line sources of the present invention, including：Nozzle 1, air balance
Pipe 4, crucible 3.Do not include heating part, water cooling, shell, restriction plate etc..Each several part surface external shown in Fig. 2 is actual equal
There is design heater strip.As shown in figure 3, the periphery of crucible 3 is equipped with crucible heater strip 5, the periphery of balance pipe 4 is heated equipped with balance pipe
Silk 6, the periphery of nozzle 1 are equipped with nozzle heater strip 7.These heater strips ensure that organic material is interior by heating and gasifying in crucible 3, and
It will not be cured into air balance pipe 4 and during finally being sprayed from nozzle 1.
Each air balance pipe 4 includes a horizontal tubular structure and a vertical tubular structure, vertical tubular structure
Upper end is connected with the middle part lower end of horizontal tubular structure, and the lower end of vertical tubular structure is connected with the top of crucible 3, and nozzle 1 is set
It puts on the top of horizontal tubular structure.The diameter of the vertical tubular structure is more than the diameter of crucible 3.By a crucible 3 and one
Air balance pipe 4 forms a T-shaped unit.It is whole by T-shaped unit horizontal splicing one line source of composition in left, center, right 3 in the present invention
Body, splicing ensure that the nozzle level of 3 units is arranged as a line.The advantage so designed：3 T-shaped units can be distinguished first
Filling material, because crucible 3 is tubular, filling material is more convenient.And connection between crucible 3 and air balance pipe 4 and close
Seal it is easy to implement, using threaded connection；Furthermore it is interval between the T-shaped unit in left, center, right 3, so their speed control
It controls, do things in his own way respectively, therefore left, center, right speed control realizes independent progress, so makes the overall rate control of line source
System is very flexible, stablizes, and can ensure that very high repeatability while extraordinary film thickness uniformity is ensured.
In addition, the T-shaped unit in left, center, right 3 is each the unified entirety for only staying row's nozzle bore in the present invention, that is, remove
Other faces are all closed outside nozzle bore.And heater strip has all been respectively arranged on crucible 3, air balance pipe 4,1 side of nozzle,
By heating and gasifying in crucible, vapour molecule can be reflected material when encountering the balance tube wall heated or nozzle tube wall, and
Finally sprayed from nozzle 1.Such design can be effectively prevented material leakage of the organic material during vapor deposition, so as to the side of reaching
Just the effect safeguarded.
Obviously, the above embodiments are merely examples for clarifying the description, and is not intended to limit the embodiments.It is right
For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or
It changes.There is no necessity and possibility to exhaust all the enbodiments.And the obvious variation thus extended out or
Among changing still in the protection domain of the invention.
Claims (7)
1. three T-shaped OLED vapor depositions line source of one kind, which is characterized in that including：
Three crucibles (3), spaced set is in a row, and inside is respectively provided with vapor deposition organic material；
Three air balance pipes (4), each air balance pipe (4) are connected respectively with a crucible (3)；Each air balance pipe
(4) multiple nozzles (1) are respectively equipped at the top of, all nozzles (1) are arranged as a row.
2. three T-shaped OLED vapor depositions line source according to claim 1, which is characterized in that on intermediate air balance pipe (4)
The spacing of multiple nozzles (1) is more than the spacing of multiple nozzles (1) on the air balance pipe (4) of both sides.
3. three T-shaped OLED vapor deposition line sources source according to claim 1, which is characterized in that each air balance pipe (4)
Periphery be equipped with balance pipe heater strip (6).
4. three T-shaped OLED vapor depositions line source according to claim 1, which is characterized in that the periphery of each nozzle (1) is set
There is nozzle heater strip (7).
5. three T-shaped OLED vapor depositions line source according to claim 1, which is characterized in that the periphery of each crucible (3) is set
There is crucible heater strip (5).
6. the T-shaped OLED vapor depositions line source of three described in any one in claim 1-5, which is characterized in that each described
The middle part of air balance pipe (4) is equipped with the vertical tubular structure being connected with the top of the crucible (3).
7. three T-shaped OLED vapor depositions line source according to claim 6, which is characterized in that the diameter of the vertical tubular structure
More than the diameter of the crucible (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711482603.XA CN108048797A (en) | 2017-12-29 | 2017-12-29 | Three T-shaped OLED vapor depositions line source of one kind |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711482603.XA CN108048797A (en) | 2017-12-29 | 2017-12-29 | Three T-shaped OLED vapor depositions line source of one kind |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108048797A true CN108048797A (en) | 2018-05-18 |
Family
ID=62128678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711482603.XA Pending CN108048797A (en) | 2017-12-29 | 2017-12-29 | Three T-shaped OLED vapor depositions line source of one kind |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108048797A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101057552B1 (en) * | 2011-02-23 | 2011-08-17 | 주식회사 선익시스템 | Apparatus for supplying source gas in deposition device |
| KR20120035787A (en) * | 2010-10-06 | 2012-04-16 | 엘아이지에이디피 주식회사 | Apparatus for supplying organic matter, apparatus and method for depositing organic matter using the same |
| CN102732843A (en) * | 2011-04-13 | 2012-10-17 | 韩商Snu精密股份有限公司 | High-capacity deposition device for forming a thin film |
| CN104762601A (en) * | 2015-04-30 | 2015-07-08 | 京东方科技集团股份有限公司 | Evaporator source, evaporation device and evaporation method |
| CN106560008A (en) * | 2014-07-07 | 2017-04-05 | 铣益系统有限责任公司 | Possess the film deposition apparatus of multiple evaporation sources |
| CN207699656U (en) * | 2017-12-29 | 2018-08-07 | 上海升翕光电科技有限公司 | Line source is deposited in three T-type OLED of one kind |
-
2017
- 2017-12-29 CN CN201711482603.XA patent/CN108048797A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20120035787A (en) * | 2010-10-06 | 2012-04-16 | 엘아이지에이디피 주식회사 | Apparatus for supplying organic matter, apparatus and method for depositing organic matter using the same |
| KR101057552B1 (en) * | 2011-02-23 | 2011-08-17 | 주식회사 선익시스템 | Apparatus for supplying source gas in deposition device |
| CN102732843A (en) * | 2011-04-13 | 2012-10-17 | 韩商Snu精密股份有限公司 | High-capacity deposition device for forming a thin film |
| CN106560008A (en) * | 2014-07-07 | 2017-04-05 | 铣益系统有限责任公司 | Possess the film deposition apparatus of multiple evaporation sources |
| CN104762601A (en) * | 2015-04-30 | 2015-07-08 | 京东方科技集团股份有限公司 | Evaporator source, evaporation device and evaporation method |
| CN207699656U (en) * | 2017-12-29 | 2018-08-07 | 上海升翕光电科技有限公司 | Line source is deposited in three T-type OLED of one kind |
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