KR101169871B1 - Apparatus and method for manufacturing an organic light emitting panel - Google Patents

Abstract

The present invention is an organic light emitting panel manufacturing apparatus and organic light emitting device in which bubbles are not mixed between the element substrate and the sealing substrate and no deviation occurs between the element substrate and the sealing substrate during the bonding of the element substrate and the sealing substrate. Provided is a method for producing a panel. The lower vacuum container 1 and the upper vacuum container 2 are sealed, the first space and the second space are vacuumed, the sealing substrate 3 is raised to be brought into contact with the element substrate 4, and the The element substrate 4 and the sealing substrate 3 are crimped by introducing an atmospheric pressure or a gas above the atmospheric pressure and acting the differential pressure generated between the first space and the second space on the element substrate 4 via the diaphragm 8. did.

Description

The manufacturing apparatus of an organic light emitting panel, and the manufacturing method of an organic light emitting panel {APPARATUS AND METHOD FOR MANUFACTURING AN ORGANIC LIGHT EMITTING PANEL}

The present invention relates to an apparatus for manufacturing an organic light emitting panel and a method for manufacturing an organic light emitting panel.

Organic EL (Electro Luminescence) has a very thin and surface-emitting shape, excellent color reproducibility or the quality of light UVless and environmental performance expected to be more energy-saving than fluorescent lamps in mercuryless years. It is greatly expected as next-generation lighting which is environmentally friendly. Such organic EL is generally manufactured through a cleaning process, an organic layer film forming process, a cathode (cathode) film forming process, and a sealing process using a transparent conductive film patterned glass substrate. In the organic EL, since the organic layer or the like is exposed to moisture or oxygen in the air, the light emission characteristics deteriorate. Therefore, it is necessary to provide a sealing structure that blocks the organic layer or the like from the outside air in the above-described sealing step.

For this reason, for example, in following patent document 1, the method of sealing the organic layer etc. of an element substrate is disclosed by bonding the element substrate in which the organic layer etc. were formed, and the sealing substrate in which the sealing agent was arrange | positioned. In addition, Patent Literature 2 below provides an element sheet and an encapsulation sheet on an upper portion of the element substrate and the encapsulation substrate, and exhausts a space provided with the element substrate and the encapsulation substrate to seal the element substrate and the element substrate by a differential pressure acting on the sheet of the elastic body. A method of joining a substrate is disclosed. Moreover, the following patent documents 3 and 4 disclose the method of joining an element substrate and a sealing substrate in a reduced pressure state.

Japanese Unexamined Patent Publication No. 2006-85957 Japanese Unexamined Patent Publication No. 2005-276754 Japanese Unexamined Patent Publication No. 2005-243413 Japanese Unexamined Patent Publication No. 2006-179352

However, in the conventional light emitting panel manufacturing apparatus and the manufacturing method of the light emitting panel which were disclosed by the said patent documents 1, 2, the problem that the bubble mixes between an element substrate and a sealing substrate at the time of joining of an element substrate and a sealing substrate has arisen. there was. Moreover, the conventional light emitting panel manufacturing apparatus and the manufacturing method of the light emitting panel which were disclosed by the said patent documents 1-4 have the problem that a shift | offset | difference arises in an element substrate and a sealing substrate at the time of joining an element substrate and a sealing substrate.

As mentioned above, this invention manufactures the organic light emitting panel in which the bubble does not mix between an element substrate and a sealing substrate at the time of the joining of an element substrate and a sealing substrate, and a shift | offset | difference does not arise in an element substrate and a sealing substrate. It is an object to provide a device and a method for producing an organic light emitting panel.

In the organic light emitting panel manufacturing apparatus according to the first aspect of the present invention, a device substrate in which an organic light emitting element is provided in a single area or a plurality of regions and a sealing substrate in which a sealing material is disposed in a region corresponding to the organic light emitting element are vacuum reduced. An apparatus for manufacturing an organic light emitting panel for sealing the organic light emitting element by bonding underneath, the apparatus comprising: a lower vacuum container, an upper vacuum container mounted on the lower vacuum container so as to be openable and close, and an elastic body provided in an opening of the upper vacuum container. A sheet, a pedestal for sealing substrate which is a pedestal for restricting the position of the sealing substrate with the sealing material upward in the lower vacuum container, and spaced apart from the sealing substrate with the organic light emitting element downward. A pedestal for element substrates, which is a pedestal for regulating relative positions of the substrate and the sealing substrate; A feeding table capable of supplying and exhausting gas in a lifting table, which is capable of lifting and lowering a rod substrate from the lower side, and a gas in a first space in the upper vacuum chamber and a second space in the lower vacuum chamber divided by the sheet. The exhaust means, the lower vacuum chamber and the upper vacuum container are sealed to vacuum the first space and the second space, and the lifting table is raised to bring the sealing substrate and the element substrate into contact with each other. Controlling the pressurization of the element substrate and the sealing substrate by introducing an atmospheric pressure or a gas above the atmospheric pressure into one space and acting the differential pressure generated between the first space and the second space on the element substrate via the sheet; It is characterized by including a control means.

The manufacturing apparatus of the organic light emitting panel which concerns on 2nd invention which solves the said subject is the manufacturing apparatus of the organic light emitting panel which concerns on 1st invention WHEREIN: The said elevation table is provided with the heating means which can heat the said sealing substrate. It is done.

The manufacturing method of the organic light emitting panel which concerns on the said subject is vacuum-pressure-reduced the element substrate in which the organic light emitting element was provided in the single or multiple area | region, and the sealing substrate which arrange | positioned the sealing material in the area | region corresponding to the organic light emitting element. A method of manufacturing an organic light emitting panel for sealing the organic light emitting element by bonding underneath, the method comprising: a lower vacuum container, an upper vacuum container mounted on the lower vacuum container so as to be openable and closed, and an elastic body provided in an opening of the upper vacuum container. An apparatus for producing an organic light emitting panel, comprising: a sheet and supply and discharge means capable of supplying and exhausting gas in a first space in an upper vacuum container divided by the sheet and a second space in a lower vacuum container, respectively, in the lower vacuum container. The sealing material is placed upward, the position of the sealing substrate is regulated, and the organic light emitting element is moved downward. The upper and lower vacuum containers are sealed while the upper and lower vacuum containers are spaced apart from each other, the relative positions of the element substrate and the sealing substrate are regulated, and the sealing substrate is lifted and lowered. The first space and the second space are vacuumed, the sealing substrate is raised to be brought into contact with the element substrate, and an atmospheric pressure or a gas higher than atmospheric pressure is introduced into the first space, thereby between the first space and the second space. The element substrate and the sealing substrate are pressed by acting the differential pressure generated in the element substrate through the sheet.

The manufacturing method of the organic light emitting panel which concerns on said 4th invention which solves the said subject is characterized by heating the said sealing substrate in the manufacturing method of the organic light emitting panel which concerns on 3rd invention.

According to the present invention, an apparatus for producing an organic light emitting panel in which bubbles are not mixed between the element substrate and the sealing substrate and no deviation occurs between the element substrate and the sealing substrate at the time of bonding the element substrate and the sealing substrate, and A method of manufacturing an organic light emitting panel can be provided.

1 is a schematic diagram showing, in cross section, the configuration of an apparatus for manufacturing an organic light emitting panel according to the present invention;
2 is a perspective view showing the structure of a pedestal of an element substrate and a sealing substrate in the apparatus for manufacturing an organic light emitting panel according to the present invention;
3 is a schematic diagram illustrating a method of manufacturing an organic light emitting panel according to the present invention;
4 is a schematic diagram illustrating a method of manufacturing an organic light emitting panel according to the present invention following FIG. 3;
5 is a flowchart illustrating a method of manufacturing an organic light emitting panel according to the present invention.

EMBODIMENT OF THE INVENTION Hereinafter, the form for implementing the organic light emitting panel manufacturing apparatus which concerns on this invention, and the manufacturing method of an organic light emitting panel is demonstrated, referring drawings.

First, the structure of the manufacturing apparatus of the organic light emitting panel which concerns on this invention is demonstrated.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram which shows the structure of the manufacturing apparatus of the organic light emitting panel which concerns on this invention with the cross section.

As shown in FIG. 1, the manufacturing apparatus of the organic light emitting panel which concerns on this invention is provided with the lower vacuum container 1 and the upper vacuum container 2. As shown in FIG. The upper vacuum container 2 is attached to the lower vacuum container 1 by a hinge 11 so that opening and closing is possible. The diaphragm 8 which is a sheet | seat of an elastic body is provided in the opening part of the upper vacuum container 2.

Inside the lower vacuum container 1, a pedestal 5 for sealing substrates for regulating the position of the sealing substrate 3 is provided. The pedestal 5 for sealing substrates supports the sealing substrate 3 with the sealing material prepositioned on the sealing substrate 3 upward.

On the pedestal 5 for sealing substrates, a pedestal 6 for element substrates for regulating the position of the element substrate 4 is provided. The pedestal 6 for the element substrate is spaced apart from the upper side of the sealing substrate 3 with the organic light emitting element pre-arranged on the element substrate 4 downward, and the relative position of the element substrate 4 and the sealing substrate 3. The element substrate 4 is supported so as to regulate the voltage.

Below the sealing substrate 3, a lifting table 7 capable of lifting and lowering the sealing substrate 3 from the lower side is provided. Thus, since the sealing substrate 3 is adsorbed and fixed to the lifting table 7, the sealing substrate 3 does not shift | deviate when raising the sealing substrate 3. In addition, the lifting table 7 is provided with a heater 7a which is a heating means capable of heating the sealing substrate 3.

Here, the structure of the pedestal 5 for sealing substrates, the pedestal 6 for element substrates, and the elevation table 7 in the manufacturing apparatus of the organic light emitting panel which concerns on this invention is demonstrated.

Fig. 2 is a perspective view showing the structure of the pedestal of the element substrate and the sealing substrate in the apparatus for manufacturing an organic light emitting panel according to the present invention.

As shown in FIG. 2, in the manufacturing apparatus of the organic light emitting panel according to the present embodiment, the base for sealing substrate 5 seals portions of four corners of the sealing substrate 3 shown by broken lines in FIG. 2. It is supported by the sealing board support surface 5a of the board | substrate pedestal 5. The part where the corner part of the sealing board 3 of the base board 5 for sealing boards is located becomes the rounded corner 5b. For this reason, mounting of the sealing substrate 3 to the base 5 for sealing substrates becomes easy. By this structure, the pedestal 5 for the sealing substrate regulates the position of the sealing substrate 3.

The element substrate pedestal 6 supports portions of two sides of the element substrate 4 shown by broken lines in FIG. 2 by the element substrate support surface 6a of the element substrate pedestal 6. The part where the corner part of the element substrate 4 of the element substrate base 6 is located is a rounded corner 6b. For this reason, the mounting of the element substrate 4 to the element substrate pedestal 6 becomes easy. By this structure, the element substrate pedestal 6 regulates the position of the element substrate 4.

The lifting table 7 has a shape corresponding to the sealing board pedestal 5 so as not to interfere with the sealing board pedestal 5 when the lifting table 7 is raised, and the upper surface of the lifting table 7 is sealed. The entire surface of the substrate 3 can be supported. For this reason, the sealing substrate 3 and the element substrate 4 can be bonded reliably.

In addition, as shown in FIG. 1, the gas in the first space formed by the upper vacuum container 2 and the diaphragm 8 is degassed in the upper vacuum chamber 2, and the first vacuum chamber 2 is degassed. A supply / exhaust device 9 which is a supply / exhaust means for introducing gas is provided. In addition, the lower vacuum chamber 1 is a supply / exhaust device which is a supply / exhaust means for degassing the gas in the second space formed by the lower vacuum container 1 and the diaphragm 8 and introducing the gas into the second space ( 10) is installed.

Moreover, the manufacturing apparatus of the organic light emitting panel which concerns on this invention is the control apparatus 12 which is control means which controls the lifting table 7, the air supply / exhaust apparatus 9, 10, etc. based on the manufacturing method of the organic light emitting panel mentioned later. ).

The above is the structure of the manufacturing apparatus of the organic light emitting panel which concerns on this invention.

Next, the manufacturing method of the organic light emitting panel which concerns on this invention is demonstrated.

3 and 4 are schematic diagrams showing a method of manufacturing an organic light emitting panel according to the present invention. In addition, in FIG. 3 and FIG. 4, in order to demonstrate the manufacturing method of an organic light emitting panel, the structure of the manufacturing apparatus of an organic light emitting panel is simplified and shown. 5 is a flowchart illustrating a method of manufacturing an organic light emitting panel according to the present invention.

As shown in FIG. 5, initially, in step P1, as shown to Fig.3 (a), the sealing substrate 3 is mounted in the base 5 for sealing substrates.

Next, in step P2, the element substrate 4 is mounted on the element substrate pedestal 6, as shown in Fig. 3B.

In this way, the sealing substrate 3 and the element substrate 4 are mounted on the pedestal 5 for the sealing substrate and the pedestal 6 for the element substrate that can be regulated. Accurate positioning is possible.

Next, in step P3, the lifting table 7 is raised until it comes in contact with the sealing substrate 3, as shown in Fig. 3C.

Next, in step P4, in the state shown in FIG.3 (c), the sealing board | substrate 3 is attracted and fixed by the lifting table 7, and is sealed by the heater 7a of the lifting table 7; The substrate 3 is heated. Thus, by heating the sealing substrate 3 by the heater 7a, the sealing material arrange | positioned at the sealing substrate 3 is softened, adhesion is made easy, and sealing is performed by degassing a sealing material. The performance can be improved.

Next, in step P5, as shown in FIG.3 (d), the upper vacuum container 2 is closed.

Next, in step P6, in the state shown in Fig. 3D, the gas inside the lower vacuum container 1, that is, the second space, is vacuum degassed by the supply / exhaust device 10, and at the same time, the upper vacuum. The gas inside the container 2, that is, the first space, is vacuum degassed by the supply / exhaust device 9. In this way, when the sealing substrate 3 and the element substrate 4 are bonded together, the sealing substrate 3 and the element substrate 4 are separated from each other and brought into a vacuum atmosphere to thereby seal the sealing substrate 3 and the element substrate. It becomes possible to manufacture the bonded substrate without mixing of bubbles between (4).

Next, in Step P7, as shown in FIG. 4E, the lifting substrate 7 is raised until the sealing substrate 3 comes into contact with the element substrate 4. According to the manufacturing apparatus of the organic light emitting panel which concerns on this embodiment, since the sealing substrate 3 is raised until it contacts with the element substrate 4 in the state fixed to the lifting table 7, the sealing substrate 3 is carried out. It can suppress that the shift | offset | difference arises in the relative position of and the element substrate 4.

In addition, when the sealing substrate 3 and the element substrate 4 are brought into contact with each other, the sealing substrate 3 is brought into contact with the sealing substrate 3 and the element substrate 4 by making the rising amount of the sealing substrate 3 as small as possible. With the rise of 3), the shift | offset | difference to a relative position of the sealing substrate 3 and the element substrate 4 can be further suppressed.

Next, in Step P8, as shown in FIG. 4F, the atmospheric pressure gas is introduced into the upper vacuum chamber 2, that is, the first space by the air supply / exhaust device 9, and the first air is discharged. The differential pressure generated between the space and the second space is applied to the element substrate 4 via the diaphragm 8 as shown by the broken line in Fig. 4F, so that the element substrate 4 and the sealing substrate ( Squeeze 3). In addition, although it is assumed here that air is introduced into the first space, a gas of atmospheric pressure or higher may be introduced. In this case, the pressure acting on the element substrate 4 can be made larger, and the pressure acting on the element substrate 4 can be appropriately adjusted by the pressure of the gas to be introduced.

In addition, in this embodiment, in step P7, the sealing substrate 3 is raised by the lifting table 7 until it comes in contact with the element substrate 4, and in step P8, the element substrate 4 and the element substrate 4 are raised. Although the sealing board | substrate 3 was crimped | bonded, you may carry out these simultaneously.

Next, in Step P9, as shown in Fig. 4G, the atmospheric pressure gas is introduced into the lower vacuum chamber 1, that is, the second space by the supply / exhaust device 10, that is, the lower vacuum. The container 1 is opened to the atmosphere.

Next, in step P10, as shown in FIG. 4 (h), the upper vacuum container 2 is opened.

Next, in step P11, in the state shown in FIG.4 (h), the adsorption fixation of the sealing board 3 by the lifting table 7 is released, and the lifting table 7 is lowered.

Finally, in Step P12, in the state shown in Fig. 4H, the bonded substrate on which the sealing substrate 3 and the element substrate 4 are bonded together is taken out.

The above is the manufacturing method of the organic light emitting panel which concerns on this invention.

As described above, according to the organic light emitting panel manufacturing apparatus and the organic light emitting panel manufacturing method according to the present invention, the sealing substrate 3 and the element substrate (at the time of bonding the sealing substrate 3 and the element substrate 4). Since 4) is isolate | separated and made into a vacuum atmosphere, it becomes possible to manufacture the bonded board | substrate without mixing of a bubble.

In addition, the sealing substrate 3 and the element substrate 4 are mounted on the sealing substrate pedestal 5 and the element substrate pedestal 6 which can be regulated, and the sealing substrate 3 is suction-fixed to the lifting table 7 Since it rises, the alignment of the sealing substrate 3 and the element substrate 4 is attained correctly.

In addition, by installing the heater 7a on the elevating table 7 and heating the sealing substrate 3 on which the sealing material is placed, the sealing material is softened to facilitate adhesion and degassing the sealing material. As a result, the sealing performance can be improved.

(Industrial availability)

The present invention seals the organic light emitting element by, for example, bonding a device substrate provided with an organic light emitting element in one or a plurality of regions and a sealing substrate in which a sealing material is disposed in a region corresponding to the organic light emitting element under vacuum reduced pressure. It is possible to use in the manufacturing apparatus of an organic light emitting panel, and the manufacturing method of an organic light emitting panel.

1: lower vacuum vessel 2: upper vacuum vessel
3: sealing substrate 4: element substrate
5: base for sealing substrate 5a: sealing substrate support surface
6: base for element substrate 6a: element substrate support surface
7: lifting table 7a: heater
8: diaphragm 9, 10: supply and exhaust device
11: hinge 12: control unit

Claims (4)

In the device for manufacturing an organic light emitting panel for sealing the organic light emitting element by bonding a device substrate provided with an organic light emitting element in one or a plurality of regions and a sealing substrate having a sealing material disposed in a region corresponding to the organic light emitting element under vacuum reduced pressure. In
The lower vacuum vessel,
An upper vacuum container mounted on the lower vacuum container so as to be opened and closed;
An elastic sheet provided in the opening of the upper vacuum vessel;
A pedestal for sealing substrate which supports a portion of four corners of the sealing substrate, and is a pedestal that regulates the position of the sealing substrate with the sealing material upward in the lower vacuum container;
It is supported on the pedestal for sealing substrate and supports two sides of the element substrate, and is spaced above the sealing substrate with the organic light emitting element as a lower side, and the relative position of the element substrate and the sealing substrate is Support for element board which is support to regulate,
A lift table capable of lifting and lowering the sealing substrate by suction from the lower side;
Supply-and-exhaust means capable of supplying and exhausting gases in the first space in the upper vacuum vessel and the second space in the lower vacuum vessel divided by the sheet, respectively;
The lower vacuum container and the upper vacuum container are sealed to vacuum the first space and the second space, and the lifting table is raised to contact the sealing substrate with the element substrate, and the atmospheric pressure is applied to the first space. Or control means for controlling the device substrate and the sealing substrate to be compressed by introducing a gas having an atmospheric pressure or higher and acting on the device substrate via the sheet a differential pressure generated between the first space and the second space. Characterized by
An apparatus for manufacturing an organic light emitting panel. The method of claim 1,
The lifting table includes heating means capable of heating the sealing substrate.
An apparatus for manufacturing an organic light emitting panel. A method of manufacturing an organic light emitting panel, wherein the organic light emitting element is sealed by bonding a device substrate provided with an organic light emitting element in one or a plurality of regions and a sealing substrate in which a sealing material is disposed in a region corresponding to the organic light emitting element under vacuum reduced pressure. In
The lower vacuum vessel,
An upper vacuum container mounted on the lower vacuum container so as to be opened and closed;
An elastic sheet provided in the opening of the upper vacuum vessel;
In the manufacturing apparatus of the organic light emitting panel provided with the air supply and exhaust means which can supply and exhaust the gas of the 1st space in the upper vacuum container divided by the said sheet, and the 2nd space in the lower vacuum container, respectively,
Supporting portions of four corners of the sealing substrate, regulating the position of the sealing substrate with the sealing material upward in the lower vacuum vessel,
Supporting two portions of the element substrate, spaced above the sealing substrate with the organic light emitting element as a lower side, and regulating the relative positions of the element substrate and the sealing substrate,
In a state where the sealing substrate can be lifted and lowered,
Sealing the lower vacuum container and the upper vacuum container, the first space and the second space is a vacuum,
Raising the sealing substrate to contact the device substrate,
Compressing the element substrate and the sealing substrate by introducing an atmospheric pressure or a gas of atmospheric pressure or higher into the first space and acting the differential pressure generated between the first space and the second space on the element substrate via the sheet; Characterized by
Method for producing an organic light emitting panel. The method of claim 3, wherein
Characterized in that for heating the sealing substrate.
Method for producing an organic light emitting panel.

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