CN101997089A - Apparatus and method for manufacturing an organic light emitting panel - Google Patents
Apparatus and method for manufacturing an organic light emitting panel Download PDFInfo
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- CN101997089A CN101997089A CN2010102456114A CN201010245611A CN101997089A CN 101997089 A CN101997089 A CN 101997089A CN 2010102456114 A CN2010102456114 A CN 2010102456114A CN 201010245611 A CN201010245611 A CN 201010245611A CN 101997089 A CN101997089 A CN 101997089A
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- hermetic sealing
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
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Abstract
The present invention provides an apparatus and method for manufacturing an organic light emitting panel, where air bubbles will not be mixed between an element substrate and a sealing substrate in attaching of the element substrate and the sealing substrate, and there will not be dislocation between the element substrate and the sealing substrate. A lower side vacuum container (1) and an upper side vacuum container (2) are enclosed so as to vacuumize a first space and a second space to make the sealing substrate (3) to rise to contact with the element substrate (4), a gas of an atmosphere pressure or more is guided into the first space, such that a pressure difference between the first space and the second space is applied to the element substrate (4) by a baffle (8), thereby, the element substrate (4) is of crimp connection with the sealing substrate (3).
Description
Technical field
The present invention relates to the manufacture method of the manufacturing installation and the organic luminous panel of organic luminous panel.
Background technology
Because organic EL (Electro Luminescence) as thin as a wafer and the luminous shape of so-called face, good color reprodubility, so-calledly do not have the light quality of ultraviolet ray (UV レ ス) and do not have mercury, therefore save the environmental performance etc. of energy from expectation than fluorescent lamp, be endowed big expectation as the next generation's illumination that is of value to environment.This organic EL uses the glass substrate after the transparent conductivity film figure forms usually, main makes through cleaning operation, organic layer film formation process, cathode filming operation, sealing process.And if the organic layer of organic EL etc. are exposed in the moisture or oxygen in the atmosphere, then the characteristics of luminescence worsens, and therefore in above-mentioned sealing process, the hermetically-sealed construction that organic layer etc. is isolated from extraneous gas need be set.
Therefore, for example in following patent documentation 1, disclose the method for organic layer by the device substrate behind the film forming organic layer and the hermetic sealing substrate that disposes sealant being fitted the potted component substrate etc.In addition, in following patent documentation 2, disclose following method: on the top of device substrate and hermetic sealing substrate elastomeric plate is set, device substrate and hermetic sealing substrate is fitted by the space that is provided with device substrate and hermetic sealing substrate being carried out the pressure differential that exhaust utilization acts on elastomeric plate.And, disclose the method that device substrate and hermetic sealing substrate are fitted in the following patent documentation 3,4.
Patent documentation 1: TOHKEMY 2006-85957 communique
Patent documentation 2: TOHKEMY 2005-276754 communique
Patent documentation 3: TOHKEMY 2005-243413 communique
Patent documentation 4: TOHKEMY 2006-179352 communique
Yet in the manufacture method of the manufacturing installation of disclosed existing luminescent panel and luminescent panel, existence bubble when device substrate and hermetic sealing substrate applying is blended into the problem between device substrate and the hermetic sealing substrate in above-mentioned patent documentation 1,2.And, in above-mentioned patent documentation 1～4 in the manufacture method of the manufacturing installation of disclosed existing luminescent panel and luminescent panel, there is the problem that generation misplaces between the device substrate and hermetic sealing substrate when device substrate is fitted with hermetic sealing substrate.
Summary of the invention
Owing to above reason, the objective of the invention is to, provide a kind of when device substrate and hermetic sealing substrate are fitted bubble can not be blended between device substrate and the hermetic sealing substrate and can not produce the manufacturing installation of organic luminous panel of dislocation and the manufacture method of organic luminous panel between device substrate and the hermetic sealing substrate.
The manufacturing installation of the organic luminous panel of the first aspect that addresses the above problem by make single or multiple zone be provided with organic illuminating element device substrate and with the corresponding zone of organic illuminating element on dispose encapsulant hermetic sealing substrate under vacuum decompression, fit, seal described organic illuminating element, the manufacturing installation of described organic luminous panel is characterised in that to possess:
The downside vacuum tank;
The upside vacuum tank, it can be installed on described downside vacuum tank with opening and closing;
Elastomeric plate, it is arranged on the peristome of described upside vacuum tank;
The hermetic sealing substrate bracket, it is to be the bracket that upside limits the position of described hermetic sealing substrate with described encapsulant in described downside vacuum tank.
The device substrate bracket, it is downside and the bracket that separates described device substrate and described hermetic sealing substrate and limit the relative position of described device substrate and described hermetic sealing substrate above described hermetic sealing substrate with described organic illuminating element;
Self-powered platform, it is from the fixing described hermetic sealing substrate of downside absorption and can lifting;
Suction and discharge mechanism, it can carry out air-breathing exhaust to first space in the described upside vacuum tank of being separated by described plate and the gas in second space in the described downside vacuum tank respectively;
Controlling organization, it is controlled as follows: airtight described downside vacuum tank and described upside vacuum tank, make described first space and described second space become vacuum, make described self-powered platform rising and described hermetic sealing substrate is contacted with described device substrate, import atmospheric pressure or the gas more than the atmospheric pressure to described first space, make the pressure differential that produces between described first space and described second space act on described device substrate, thereby make described device substrate and described hermetic sealing substrate crimping via described plate.
On the basis of the manufacturing installation of the organic luminous panel of first aspect, the manufacturing installation of the organic luminous panel of the second aspect that addresses the above problem is characterised in that described self-powered platform possesses the heating arrangements that can heat described hermetic sealing substrate.
The manufacture method of the organic luminous panel of the third aspect that addresses the above problem by make single or multiple zone be provided with organic illuminating element device substrate and with the corresponding zone of organic illuminating element on dispose encapsulant hermetic sealing substrate under vacuum decompression, fit, seal described organic illuminating element, the manufacture method of described organic luminous panel is characterised in that
The manufacturing installation of organic luminous panel possesses:
The downside vacuum tank;
The upside vacuum tank, it can be installed on described downside vacuum tank with opening and closing;
Elastomeric plate, it is arranged on the peristome of described upside vacuum tank;
Suction and discharge mechanism, it can carry out air-breathing exhaust to first space in the described upside vacuum tank of being separated by described plate and the gas in second space in the described downside vacuum tank respectively,
In the manufacturing installation of described organic luminous panel,
In described downside vacuum tank, be the position that upside limits described hermetic sealing substrate with described encapsulant,
With described organic illuminating element is downside and separate described device substrate and described hermetic sealing substrate and limit the relative position of described device substrate and described hermetic sealing substrate above described hermetic sealing substrate,
Make the described hermetic sealing substrate can lifting,
On this basis, airtight described downside vacuum tank and described upside vacuum tank make described first space and described second space become vacuum,
Described hermetic sealing substrate risen and contact with described device substrate,
Import atmospheric pressure or the gas more than the atmospheric pressure to described first space, make the pressure differential that produces between described first space and described second space act on described device substrate, thereby make described device substrate and described hermetic sealing substrate crimping via described plate.
On the basis of the manufacture method of the organic luminous panel of the third aspect, the manufacture method of the organic luminous panel of the fourth aspect that addresses the above problem is characterised in that,
Heat described hermetic sealing substrate.
The invention effect
According to the present invention, can provide a kind of when device substrate and hermetic sealing substrate are fitted bubble can not be blended between device substrate and the hermetic sealing substrate and can not produce the manufacturing installation of organic luminous panel of dislocation and the manufacture method of organic luminous panel between device substrate and the hermetic sealing substrate.
Description of drawings
Fig. 1 is the schematic diagram of structure of representing the manufacturing installation of organic luminous panel of the present invention by section.
Fig. 2 is the stereogram of structure of the bracket of the device substrate of manufacturing installation of expression organic luminous panel of the present invention and hermetic sealing substrate.
Fig. 3 is the schematic diagram of the manufacture method of expression organic luminous panel of the present invention.
Fig. 4 is the schematic diagram of manufacture method of the organic luminous panel of the present invention of expression hookup 3.
Fig. 5 is the flow chart of the manufacture method of expression organic luminous panel of the present invention.
Symbol description:
1 downside vacuum tank
2 upside vacuum tanks
3 hermetic sealing substrates
4 device substrates
5 hermetic sealing substrate brackets
5a hermetic sealing substrate bearing plane
6 device substrate brackets
6a device substrate bearing plane
7 self-powered platforms
The 7a heater
8 dividing plates
9,10 for exhaust apparatus
11 hinges
12 control device
Embodiment
Below, with reference to accompanying drawing, the mode of the manufacture method of the manufacturing installation that is used to implement organic luminous panel of the present invention and organic luminous panel is described.
The structure of the manufacturing installation of organic luminous panel of the present invention at first, is described.
Fig. 1 is the schematic diagram of structure of representing the manufacturing installation of organic luminous panel of the present invention by section.
As shown in Figure 1, the manufacturing installation of organic luminous panel of the present invention possesses downside vacuum tank 1 and upside vacuum tank 2.Upside vacuum tank 2 can be installed on downside vacuum tank 1 by hinge 11 with opening and closing.Be provided with dividing plate 8 at the peristome of upside vacuum tank 2 as elastomeric plate.
Be provided with the hermetic sealing substrate bracket 5 of the position of restriction hermetic sealing substrate 3 in the inside of downside vacuum tank 1.Hermetic sealing substrate with bracket 5 being that upside supports hermetic sealing substrate 5 with pre-configured encapsulant in hermetic sealing substrate 5.
Hermetic sealing substrate is provided with the device substrate bracket 6 of the position of limiting element substrate 4 with bracket 5.Device substrate is downside and separate hermetic sealing substrate 3 and device substrate 4 above hermetic sealing substrate 3 with bracket 6 with pre-configured organic illuminating element in device substrate 4, and supporting member substrate 4 is with the relative position of limiting element substrate 4 with hermetic sealing substrate 3.
Be provided with self-powered platform 7 below hermetic sealing substrate 3, this self-powered platform 7 is from downside absorption fixing seal substrate 3 and can lifting.So, because self-powered platform 7 is fixed in hermetic sealing substrate 3 absorption, therefore when containment member 3 was risen, containment member 3 can the changing of the relative positions.And, self-powered platform 7 be provided with can heated sealant substrate 5 heating arrangements be heater 7a.
At this, the hermetic sealing substrate bracket 5 of the manufacturing installation of organic luminous panel of the present invention, the structure that device substrate is used bracket 6 and self-powered platform 7 are described.
Fig. 2 is the stereogram of structure of the bracket of the device substrate of manufacturing installation of expression organic luminous panel of the present invention and hermetic sealing substrate.
As shown in Figure 2, in the manufacturing installation of the organic luminous panel of present embodiment, hermetic sealing substrate is supported the part at four angles of hermetic sealing substrate 3 shown in dotted lines in Figure 2 with in the bracket 5 with the hermetic sealing substrate bearing plane 5a of bracket 5 by hermetic sealing substrate.Hermetic sealing substrate forms fillet with the residing part in bight of the hermetic sealing substrate 3 of bracket 5.Therefore, hermetic sealing substrate 3 is easily to hermetic sealing substrate bracket 5 mountings.By such structure, the position that hermetic sealing substrate limits hermetic sealing substrates 3 with bracket 5.
Device substrate is with in the bracket 6, supports the part on the both sides of device substrate 4 shown in dotted lines in Figure 2 by device substrate with the device substrate bearing plane 6a of bracket 6.Device substrate forms fillet with the residing part in bight of the device substrate 4 of bracket 6.Therefore, device substrate 4 is easily to device substrate bracket 6 mountings.By such structure, device substrate is used the position of bracket 6 limiting element substrates 4.
Self-powered platform 7 form with hermetic sealing substrate with bracket 5 corresponding shape, in order to avoid when self-powered platform 7 is risen with hermetic sealing substrate with bracket 5 collisions, what the upper surface of self-powered platform 7 can be by device substrate 4 roughly puts in order surface bearing.Therefore hermetic sealing substrate 3 and device substrate 4 are fitted reliably.
In addition, as shown in Figure 1, be provided with for exhaust apparatus 9 at upside vacuum tank 2, these confession exhaust apparatus 9 conducts make the gas degassing in first space that is formed by upside vacuum tank 2 and dividing plate 8 and import the exhaust gear that supplies of gas to first space.In addition, be provided with for exhaust apparatus 10 at downside vacuum tank 1, these confession exhaust apparatus 10 conducts make the gas degassing in second space that is formed by downside vacuum tank 1 and dividing plate 8 and import the exhaust gear that supplies of gas to second space.
And the manufacturing installation of organic luminous panel of the present invention possesses control device 12, and this control device 12 is as the controlling organization of controlling self-powered platform 7 and confession exhaust apparatus 9,10 etc. based on the manufacture method of organic luminous panel described later.
It more than is the structure of the manufacturing installation of organic luminous panel of the present invention.
Next, the manufacture method of organic luminous panel of the present invention is described.
Fig. 3, the 4th, the schematic diagram of the manufacture method of expression organic luminous panel of the present invention.In addition, in Fig. 3,4, the structure of the manufacturing installation of reduced representation organic luminous panel for the manufacture method that organic luminous panel is described.And Fig. 5 is the flow chart of the manufacture method of expression organic luminous panel of the present invention.
As shown in Figure 5, at first, in step P1, shown in (a) among Fig. 3, to hermetic sealing substrate bracket 5 mounting hermetic sealing substrates 3.
Next, in step P2, shown in (b) among Fig. 3, to device substrate bracket 6 mounting device substrates 4.
So, use on the bracket 6 with bracket 5 and device substrate by being positioned in the hermetic sealing substrate that can limit hermetic sealing substrate 3 and device substrate 4, and can make hermetic sealing substrate 3 and device substrate 4 contraposition correctly.
Next, in step P3, shown in (c) among Fig. 3, self-powered platform 7 is risen to hermetic sealing substrate 3 contact.
Next, in step P4, shown in (c) among Fig. 3, by self-powered platform 7 absorption fixing seal substrates 3, by the heater 7a heated sealant substrate 3 of self-powered platform 7.So, softening and bonding easily by utilizing heater 7a heated sealant substrate 3, make the encapsulant that is configured on the hermetic sealing substrate 3, and, can improve sealing property by carrying out the degassing of encapsulant.
Next, in step P5, shown in (d) among Fig. 3, close upside vacuum tank 2.
Next, in step P6, in Fig. 3 under the state shown in (d), by in 9 pairs of downside vacuum tanks of exhaust apparatus 1, promptly the gas in first space carries out vacuum degassing, 2 interior by 10 pairs of upside vacuum tanks of air intake and exhaust system simultaneously, promptly the gas in second space carries out vacuum degassing.So, when hermetic sealing substrate 3 is fitted with device substrate 4, make hermetic sealing substrate 3 and device substrate 4 leave and form vacuum, can not be blended into adhesive substrates between hermetic sealing substrate 3 and the device substrate 4 thereby can produce bubble.
Next, in step P7, shown in (e) among Fig. 4, by self-powered platform 7 hermetic sealing substrate 3 is risen to device substrate 4 and contact.Manufacturing installation according to the organic luminous panel of present embodiment, because hermetic sealing substrate 3 rises to device substrate 4 under the state fixing by self-powered platform 7 absorption and contacts, the situation of dislocation takes place in the relative position that therefore can suppress hermetic sealing substrate 3 and device substrate 4.
In addition, when hermetic sealing substrate 3 is contacted with device substrate 4, by the ascending amount that dwindles hermetic sealing substrate 3 as far as possible hermetic sealing substrate 3 is contacted with device substrate 4, thereby can further suppress to follow the rising of hermetic sealing substrate 3 and the situation of dislocation takes place for hermetic sealing substrate 3 and the relative position of device substrate 4.
Next, in step P8, shown in (f) among Fig. 4, by air intake and exhaust system 9 with atmospheric gas import in the upside vacuum tank 2, i.e. first space, shown in the arrow that dotted line among Fig. 4 (f) is represented, the pressure differential that produces between first space and second space acts on device substrate 4 via dividing plate 8, thereby makes device substrate 4 and hermetic sealing substrate 3 crimping.In addition, import atmosphere to first space, but also can import the above gas of atmospheric pressure at this.In this case, can make the pressure that acts on device substrate 4 bigger, thereby can come suitable regulating action in the pressure of device substrate 4 by the pressure of the gas that imports.
In addition, in the present embodiment, in step P7, by self-powered platform 7 hermetic sealing substrate 3 is risen to device substrate 4 and contact, in step P8, make device substrate 4 and hermetic sealing substrate 3 crimping, but also can carry out above-mentioned steps simultaneously.
Next, in step P9, shown in (g) among Fig. 4, by air intake and exhaust system 10 with atmospheric gas import in the downside vacuum tank 1, i.e. second space, that is to say to make downside vacuum tank 1 to atmosphere opening.
Next, in step P10, shown in (h) among Fig. 4, open upside vacuum tank 2.
Next, in step P11, under the state shown in (h), the absorption of the hermetic sealing substrate 3 that releasing self-powered platform 7 is carried out is fixed in Fig. 4, and self-powered platform 7 is descended.
At last, in step P12, in Fig. 4, under the state shown in (h), take out the adhesive substrates that is pasted with hermetic sealing substrate 3 and device substrate 4.
It more than is the manufacture method of organic luminous panel of the present invention.
As described above, manufacture method according to the manufacturing installation and the organic luminous panel of organic luminous panel of the present invention, when hermetic sealing substrate 3 is fitted with device substrate 4, make hermetic sealing substrate 3 and device substrate 4 leave and form vacuum, therefore can produce the adhesive substrates of not sneaking into bubble.
And, because at the hermetic sealing substrate that can limit hermetic sealing substrate 3 and device substrate 4 bracket 5 and device substrate mounting hermetic sealing substrate 3 and device substrate 4 on the bracket 6, and hermetic sealing substrate 3 absorption are fixed in self-powered platform 7 and are risen, and therefore can correctly carry out the contraposition of hermetic sealing substrate 3 and device substrate 4.
And, by being set at self-powered platform 7, heater 7a comes the hermetic sealing substrate 3 that disposes encapsulant is heated, and make encapsulant softening and bonding easily, and, by carrying out the degassing of encapsulant, can improve sealing property.
Industrial applicibility
The present invention can be used in the manufacture method by the manufacturing installation of the organic luminous panel that the hermetic sealing substrate that disposes encapsulant on device substrate that single or multiple zone for example is provided with organic illuminating element and the zone corresponding with organic illuminating element is fitted seal described organic illuminating element under vacuum decompression and organic luminous panel.
Claims (4)
1. the manufacturing installation of an organic luminous panel, by make single or multiple zone be provided with organic illuminating element device substrate and with the corresponding zone of organic illuminating element on dispose encapsulant hermetic sealing substrate under vacuum decompression, fit, seal described organic illuminating element, the manufacturing installation of described organic luminous panel is characterised in that to possess:
The downside vacuum tank;
The upside vacuum tank, it can be installed on described downside vacuum tank with opening and closing;
Elastomeric plate, it is arranged on the peristome of described upside vacuum tank;
The hermetic sealing substrate bracket, it is to be the bracket that upside limits the position of described hermetic sealing substrate with described encapsulant in described downside vacuum tank.
The device substrate bracket, it is downside and the bracket that separates described device substrate and described hermetic sealing substrate and limit the relative position of described device substrate and described hermetic sealing substrate above described hermetic sealing substrate with described organic illuminating element;
Self-powered platform, it is from the fixing described hermetic sealing substrate of downside absorption and can lifting;
Suction and discharge mechanism, it can carry out air-breathing exhaust to first space in the described upside vacuum tank of being separated by described plate and the gas in second space in the described downside vacuum tank respectively;
Controlling organization, it is controlled as follows: airtight described downside vacuum tank and described upside vacuum tank, make described first space and described second space become vacuum, make described self-powered platform rising and described hermetic sealing substrate is contacted with described device substrate, import atmospheric pressure or the gas more than the atmospheric pressure to described first space, make the pressure differential that produces between described first space and described second space act on described device substrate, thereby make described device substrate and described hermetic sealing substrate crimping via described plate.
2. the manufacturing installation of organic luminous panel according to claim 1 is characterized in that,
Described self-powered platform possesses the heating arrangements that can heat described hermetic sealing substrate.
3. the manufacture method of an organic luminous panel, by make single or multiple zone be provided with organic illuminating element device substrate and with the corresponding zone of organic illuminating element on dispose encapsulant hermetic sealing substrate under vacuum decompression, fit, seal described organic illuminating element, the manufacture method of described organic luminous panel is characterised in that
The manufacturing installation of organic luminous panel possesses:
The downside vacuum tank;
The upside vacuum tank, it can be installed on described downside vacuum tank with opening and closing;
Elastomeric plate, it is arranged on the peristome of described upside vacuum tank;
Suction and discharge mechanism, it can carry out air-breathing exhaust to first space in the described upside vacuum tank of being separated by described plate and the gas in second space in the described downside vacuum tank respectively,
In the manufacturing installation of described organic luminous panel,
In described downside vacuum tank, be the position that upside limits described hermetic sealing substrate with described encapsulant,
With described organic illuminating element is downside and separate described device substrate and described hermetic sealing substrate and limit the relative position of described device substrate and described hermetic sealing substrate above described hermetic sealing substrate,
Make the described hermetic sealing substrate can lifting,
On this basis, airtight described downside vacuum tank and described upside vacuum tank make described first space and described second space become vacuum,
Described hermetic sealing substrate risen and contact with described device substrate,
Import atmospheric pressure or the gas more than the atmospheric pressure to described first space, make the pressure differential that produces between described first space and described second space act on described device substrate, thereby make described device substrate and described hermetic sealing substrate crimping via described plate.
4. the manufacture method of organic luminous panel according to claim 3 is characterized in that,
Heat described hermetic sealing substrate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009184129A JP2011040182A (en) | 2009-08-07 | 2009-08-07 | Manufacturing device of organic light-emitting panel and method for manufacturing organic light-emitting panel |
| JP2009-184129 | 2009-08-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101997089A true CN101997089A (en) | 2011-03-30 |
| CN101997089B CN101997089B (en) | 2013-03-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010102456114A Active CN101997089B (en) | 2009-08-07 | 2010-08-03 | Apparatus and method for manufacturing an organic light emitting panel |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2011040182A (en) |
| KR (1) | KR101169871B1 (en) |
| CN (1) | CN101997089B (en) |
| TW (1) | TWI436512B (en) |
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| CN103947292A (en) * | 2011-11-17 | 2014-07-23 | 三菱重工业株式会社 | Method for producing organic EL panel and device for sealing organic EL panel |
| CN104022234A (en) * | 2014-06-24 | 2014-09-03 | 深圳市华星光电技术有限公司 | OLED encapsulating equipment and encapsulating method of OLED panel |
| CN108321097A (en) * | 2017-01-17 | 2018-07-24 | 行家光电股份有限公司 | Vacuum film sticking apparatus and method |
| US10730276B2 (en) | 2017-01-17 | 2020-08-04 | Maven Optronics Co., Ltd. | System and method for vacuum film lamination |
| CN112093123A (en) * | 2020-10-10 | 2020-12-18 | 深圳市泰科盛自动化系统有限公司 | Curved surface screen protection film pad pasting device |
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| KR101402504B1 (en) * | 2012-09-06 | 2014-06-11 | (주)아이씨디 | Power Supply Electrode, Substrate Holder Having the Electrode, and Thermal Transferring Apparatus Having the Substrate Holder |
| JP6267920B2 (en) * | 2013-10-15 | 2018-01-24 | 常陽工学株式会社 | SEALING DEVICE AND SEALING METHOD |
| KR102638297B1 (en) | 2016-09-23 | 2024-02-20 | 삼성디스플레이 주식회사 | Manufacturing method and apparatus for a display device |
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| US9661718B2 (en) | 2011-11-17 | 2017-05-23 | Mitsubishi Heavy Industries, Ltd. | Method for producing organic EL panel and device for sealing organic EL panel |
| CN104022234A (en) * | 2014-06-24 | 2014-09-03 | 深圳市华星光电技术有限公司 | OLED encapsulating equipment and encapsulating method of OLED panel |
| US9590206B2 (en) | 2014-06-24 | 2017-03-07 | Shenzhen China Star Optoelectronics Technology Co., Ltd | OLED package device and package method of OLED panel |
| CN108321097A (en) * | 2017-01-17 | 2018-07-24 | 行家光电股份有限公司 | Vacuum film sticking apparatus and method |
| US10730276B2 (en) | 2017-01-17 | 2020-08-04 | Maven Optronics Co., Ltd. | System and method for vacuum film lamination |
| CN112093123A (en) * | 2020-10-10 | 2020-12-18 | 深圳市泰科盛自动化系统有限公司 | Curved surface screen protection film pad pasting device |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI436512B (en) | 2014-05-01 |
| JP2011040182A (en) | 2011-02-24 |
| TW201208173A (en) | 2012-02-16 |
| KR101169871B1 (en) | 2012-07-31 |
| CN101997089B (en) | 2013-03-27 |
| KR20110015391A (en) | 2011-02-15 |
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