KR101145530B1

KR101145530B1 - Squeegee and squeegee assembly

Info

Publication number: KR101145530B1
Application number: KR1020100086228A
Authority: KR
Inventors: 세이찐 기누따
Original assignee: 가부시끼가이샤 옵토니쿠스 세이미쯔
Priority date: 2009-09-04
Filing date: 2010-09-03
Publication date: 2012-05-14
Also published as: KR20110025620A; JP2011056666A

Abstract

In the squeegee, an object of the present invention is to suppress generation of static electricity and generation of cutting chips by friction with a mask and to cope with conductive fine particles.
Produced by electroforming, the plurality of needle-like protrusions 12 are arranged with a predetermined gap along the end edge of the base. When the squeegee 10 is made of metal, the mask 50 is disposed on the substrate 44, the conductive fine particles 40 such as solder balls are placed on the mask 50, and the needle protrusions of the squeegee 10 are placed. When the conductive fine particles 40 are moved to (12) to arrange the conductive fine particles 40 in the opening pattern 52 formed in the mask 50, between the needle protrusion 12 and the mask 50. Even if friction occurs, generation of static electricity and cutting chips can be suppressed.

Description

Squeegee and Squeegee Assembly {SQUEEGEE AND SQUEEGEE ASSEMBLY}

The present invention relates to a squeegee and a squeegee assembly.

A microparticle aligning device is disclosed in which conductive fine particles on a mask are moved by a squeegee and suction-inserted into the openings of a ceramic porous plate (see Patent Document 1). In this squeegee, soft conductive fibers are planted.

[Patent Document 1] Japanese Patent Application Laid-Open No. 9-148332

Conventionally, a mask in which an opening pattern corresponding to a position of an electrode pad such as a semiconductor substrate or a printed wiring board is formed is superimposed on the semiconductor substrate or the like to load conductive fine particles (solder balls) on the mask, and screen-printed. By moving the said electroconductive fine particles etc. with a squeegee by the method, arrange | positioning electroconductive fine particles etc. in the opening pattern of a mask is performed.

Although some squeegee used for this is manufactured by rubber | gum and a polyurethane material (polymer), since squeegee is produced with such a material, since static electricity and a cutting chip generate | occur | produce by friction with a mask etc., it is not preferable. . In addition, in the squeegee in which the soft conductive fibers are planted, as in the above-described conventional example, even if the generation of static electricity can be suppressed, the generation of cutting chips cannot be suppressed, and the current tends to become smaller and smaller. There is a limit to planting at pitch and becomes problem.

In view of the above fact, an object of the present invention is to make it possible to cope with conductive fine particles while suppressing generation of static electricity and cutting chips due to friction with a mask.

The first aspect (squeegee) is produced by electroforming, and a plurality of needle-like protrusions are arranged with a predetermined gap along the end edge of the base.

2nd aspect is a squeegee which concerns on a 1st aspect WHEREIN: One surface of the said needle-shaped protrusion in the thickness direction is formed in the curved surface of cross-sectional convex shape.

According to a third aspect, in the squeegee according to the first aspect, the width of the needle protrusion and the width of the gap are 5 to 400 μm.

In a 4th aspect, in the squeegee according to the first aspect, the length of the needle protrusion is 0.05 to 4 mm.

5th aspect is 1-100 micrometers in thickness in the squeegee which concerns on a 1st aspect.

In the squeegee according to the first aspect, the sixth aspect uses nickel, copper, palladium, platinum, gold, silver, or an alloy thereof as the electroforming material.

A 7th form (squeegee assembly) uses at least one squeegee which concerns on the form in any one of the 1st form-6th form, and is made to clamp and fix the said base from both sides of the thickness direction by the fitting support member. .

Since the squeegee which concerns on a 1st aspect is produced by the electroforming which can form a minute shape, it can respond to electroconductive fine particles. In addition, since the squeegee is made of metal, a mask is placed on the substrate, and conductive fine particles such as solder balls are placed on the mask, the conductive fine particles are moved by the needle protrusion of the squeegee, and the conductive fine particles are formed in the opening pattern formed in the mask. When arranging, even if friction occurs between the needle protrusion and the mask, generation of static electricity and cutting chips can be suppressed.

In the squeegee according to the second aspect, when the electroconductive fine particles are pushed and moved by the needle protrusion, the occurrence of scratches on the surface of the electroconductive fine particles can be suppressed by using the curved surface side of the needle protrusion.

In the squeegee according to the third aspect, the width of the needle-like protrusion in the squeegee and the width of the gap can be made to be suitable for the particle diameter of the conductive fine particles. In addition, it is also possible to partially change the density of the needle protrusions by changing the width of the gap.

In the squeegee according to the fourth aspect, the squeegee can be miniaturized by appropriately setting the length of the needle-like protrusion.

In the squeegee according to the fifth aspect, the strength of the needle-shaped protrusion can be controlled by setting the thickness appropriately.

In the squeegee according to the sixth aspect, by appropriately selecting an electroforming material, necessary mechanical properties and durability such as hardness, deformation strength, flexibility, and wear resistance can be ensured.

In the squeegee assembly according to the seventh aspect, since the squeegee is fitted to the fitting support member, handling of the squeegee is easy, and the attachment and detachment of the conductive fine particles into the device for disposing the conductive fine particles in the opening pattern of the mask is also easy. By foaming a plurality of squeegee, the strength of the entire squeegee can be controlled.

As described above, according to the squeegee according to the first aspect, an excellent effect that the squeegee can suppress the generation of static electricity and the generation of cutting chips due to friction with the mask, and can cope with the conductive fine particles.

According to the squeegee according to the second aspect, an excellent effect of being able to suppress the occurrence of scratches on the surface of the conductive fine particles is obtained.

According to the squeegee which concerns on 3rd aspect, the outstanding effect which can be adapted to the particle diameter of electroconductive fine particles is acquired.

According to the squeegee according to the fourth aspect, an excellent effect of miniaturizing the squeegee can be obtained.

According to the squeegee according to the fifth aspect, an excellent effect of being able to control the strength of the needle protrusion is obtained.

According to the squeegee according to the sixth aspect, an excellent effect that the required mechanical properties and durability such as hardness, deformation strength, flexibility, and wear resistance can be ensured can be obtained.

According to the squeegee assembly which concerns on 7th aspect, the outstanding effect that handling of a squeegee becomes easy and attachment / detachment to the apparatus which arrange | positions electroconductive fine particles in the opening pattern of a mask also becomes easy is acquired.

1 is a plan view showing a squeegee.
2 is a perspective view showing a squeegee in which the tip side of the needle-shaped protrusion is thinner than the base side;
3 is an exploded perspective view illustrating the squeegee assembly.
4 is a perspective view showing a squeegee assembly.
Fig. 5 is a side view showing a squeegee assembly sandwiched between one squeegee fitting member.
Fig. 6 is a side view showing a squeegee assembly in which three squeegees are sandwiched between the fitting support members through spacers.
7 is a partial cross-sectional side view showing a state in which conductive fine particles on a mask are moved and disposed in an opening pattern by a squeegee assembly having one squeegee.
8 is a partial cross-sectional side view showing a state in which conductive fine particles on a mask are moved and disposed in an opening pattern by a squeegee assembly having three squeegees.
9 is a state in which one surface in the thickness direction of the needle-like protrusion in the squeegee is formed on a curved surface having a convex cross section, and the conductive fine particles on the mask are moved and disposed in the opening pattern using the curved surface side. Some cross-sectional perspective view showing the.
Fig. 10 is a side view showing a state in which photoresist is applied on a conductive substrate, a mask is disposed on the photoresist, and ultraviolet rays are irradiated from the mask side in this state.
FIG. 11 is a partial cross-sectional side view showing a state in which a region to which ultraviolet light is not irradiated remains on the substrate as a convex portion by developing a photoresist. FIG.
It is a schematic diagram which shows the principle of an electroforming process.
13 is a partial cross-sectional side view showing a state in which electroforming material is electrodeposited on a substrate by electroforming.
FIG. 14 is a partial cross-sectional side view showing a state in which the photoresist is removed in FIG. 13. FIG.
15 is a partial cross-sectional side view showing a state in which the electroforming material is peeled off from the substrate.

EMBODIMENT OF THE INVENTION Hereinafter, the form for implementing this invention is demonstrated based on drawing.

(Squeegee)

In FIG. 1, the squeegee 10 which concerns on this embodiment is produced by electroforming, and the some needle-like protrusion 12 is arrange | positioned with the predetermined clearance 16 along the edge of the edge of the base 14. In FIG. . As the electroforming material, nickel, copper, palladium, platinum, gold, silver or alloys thereof are used.

The base 14 has a plurality of through holes 18 for passing through positioning pins (not shown) and a plurality of through holes 22 for passing through bolts 20 to be described later, for example. It is.

The width of the needle protrusion 12 and the width of the gap 16 are 5 to 400 μm. Here, the lower limit is set to 5 µm because the lower limit value becomes a dimension that cannot be resolved due to the diffraction phenomenon of ultraviolet rays used for photolithography. The upper limit is set to 400 µm because the upper limit value becomes larger than the mounting circuit, and therefore becomes meaningless. In addition, by changing the width of the gap 16, it is also possible to partially change the density of the needle-like protrusion 12 to have a compact structure.

In the example shown in FIG. 1, the needle-shaped protrusion 12 is formed in a straight shape. In addition, the needle-like protrusion 12 and the gap 16 have a line-and-space structure in which the ratio of the respective widths is 1: 1. In addition, the shape of the needle-shaped protrusion 12 is not limited to this, and as shown in FIG. 2, the tip side may be thinner than the base side. This is because the flexibility can be increased while securing the strength of the needle-shaped protrusion 12.

The needle-shaped protrusion 12 has a length of 0.05 to 4 mm. Here, the lower limit is set to 0.05 mm because the flexibility is lost when it is lower than this. In addition, the upper limit is 4 mm because the bending becomes large when it exceeds this, and the strength which carries electroconductive fine particles 40 (FIGS. 7-9) is lacking. By appropriately setting the length of the needle protrusion 12, the squeegee 10 can be downsized.

The thickness of one squeegee 10 is 1-100 micrometers. Here, the lower limit is 1 µm because the mechanical strength is lowered below this value, which is not practical. The upper limit is set to 100 µm because the flexibility is insufficient when the upper limit is exceeded, and smooth operation is impossible when the conductive fine particles 40 (FIGS. 7 to 9) are transported. By setting the thickness of the squeegee 10 appropriately, the strength of the needle-shaped protrusion 12 can be controlled.

In FIGS. 2 and 3, the needle-like protrusions 12 are formed on both sides in a planar shape, but are not limited thereto, and the thickness of the needle-shaped protrusions 12 is shown in FIGS. 9 and 13 to 15. One surface in the direction may be formed as a curved surface 24 having a convex cross section. This is because, by using the curved surface 24 side when the conductive fine particles 40 are pushed and moved by the needle-shaped protrusions 12, scratches can be suppressed from occurring on the surface of the conductive fine particles 40. This curved surface 24 can be formed by the manufacturing method of a squeegee mentioned later.

The conductive fine particles 40 are, for example, solder balls, but the material is not particularly limited. Therefore, the conductive fine particles 40 may be fine particles such as gold, silver, and copper.

(Squeegee assembly)

3 to 6, the squeegee assembly 30 is constituted by using the at least one squeegee 10 to sandwich and fix the base 14 from both sides in the thickness direction by the fitting support member 26. . In the example shown in FIG. 3, three squeegees 10 are stacked, and the two squeegees 10 are sandwiched and supported by two fitting members 26 and 28 from both sides in the thickness direction. 20 is inserted into the through-hole 22 and fastened and fixed.

Specifically, in one of the fitting supporting members 26, a through hole 36 for passing a positioning pin or the like (not shown) and a through hole 32 for passing the bolt 20 are squeegee. A plurality of the through holes 18 and 22 is formed in the number 10. Positioning through-hole 36 is formed in the other fitting support member 28 similarly to the fitting support member 26, and the bolt 20 corresponds to the through-hole 32 of the said fitting support member 26. ) Is formed with a screw hole 34. In addition, the squeegee assembly 30 is provided in the fitting support members 26 and 28 in an apparatus (not shown) which arrange | positions the electroconductive fine particle 40 in the opening pattern 52 (refer FIG. 7-9) of the mask 50. FIG. ), A through hole 38 and a cutout portion 42 for use in the case of installing a) are formed. This notch part 42 is formed so that it may open to the opposite side to the protrusion direction of the needle-like protrusion 12, for example.

When assembling the squeegee assembly 30, the through hole 36 of the corresponding fitting support member 26, the through hole 18 of the squeegee 10, and the through hole 36 of the fitting support member 28, respectively, Passing through the through hole 32 of the support member 26 and the through hole 22 of the squeegee 10 in the state which carried out the positioning by passing through the positioning pin etc. (not shown). To the screw hole 34 of the fitting support member 28. When widening the space | interval between each needle protrusion 12 in the thickness direction of the squeegee 10, the spacer 48 is sandwiched between the squeegee 10 as shown in FIG. By widening the space | interval between the needle-like protrusions 12, more bending area | regions of the said needle-shaped protrusion 12 can be ensured. In addition, the screw hole 34 may be a through hole, and the bolt 20 may be fastened to the nut which is not shown in figure.

In addition, the fitting support members 26 and 28 are not limited to the flat plate shape shown in FIG. In the example shown in FIG. 4, the both ends 26A, 28A of the longitudinal direction of the fitting support members 26 and 28 are slightly bent and curved in one side of the thickness direction, and the both ends of the longitudinal direction of the squeegee 10 are curved. Moreover, according to the shape of the fitting support members 26 and 28, it curves to one side of the thickness direction. By such a configuration, the conductive fine particles 40 can be enclosed at both ends in the longitudinal direction of the squeegee 10, and when the conductive fine particles 40 are pushed and moved by the squeegee 10, the conductive fine particles 40 are squeeged ( It can be suppressed to push out to the side of 10). Moreover, the electroconductive fine particles 40 can be arrange | positioned more efficiently in the opening pattern 52 of the mask 50 by this.

In addition, as shown in FIG. 5, one squeegee 10 to be sandwiched between the fitting supporting members 26 and 28 may be provided. In addition, as shown in FIG. 6, when the plurality of squeegees 10 are stacked and used, each squeegee 10 protrudes from the needle protrusions 12 so that the tip of the needle protrusion 12 is stepped. You may offset in the direction. As shown in FIG. 8, when the squeegee 10 is inclined to be in contact with the normal direction of the mask 50, the pressure applied to the opening pattern 52 from the squeegee 10 can be made more uniform. to be.

In the case where a plurality of squeegees 10 are stacked and used, each squeegee 10 is offset in the width direction of the needle-like protrusions 12, for example, in the thickness direction of the squeegee 10, the needle-shaped protrusions ( 12) may be arranged in a zigzag arrangement. By increasing the density of the needle-like protrusions 12 in the squeegee assembly 30, while using the squeegee 10 in which the gap 16 between the needle-like protrusions 12 is set relatively large, This is because the conductive fine particles 40 can be supported.

(Action)

This embodiment is comprised as mentioned above, and the action is demonstrated below. In FIG. 7, the mask 50 is arrange | positioned on the board | substrate 44, such as a semiconductor substrate and a printed wiring board, the electroconductive fine particle 40 is arrange | positioned on the said mask 50, and the needle shape of the squeegee 10 is shown. By continuously moving the conductive fine particles 40 by the projections 12, the conductive fine particles 40 can be sequentially arranged in the opening pattern 52 formed in the mask 50. Here, the pad 46 as an electrode is provided on the board | substrate 44, and adhesives, such as a flux, are coat | covered in the upper part in many cases. Since the opening pattern 52 of the mask 50 is formed corresponding to the pad 46, the conductive fine particles 40 are placed on the pad 46.

At this time, since the squeegee 10 which concerns on this embodiment is produced by electroforming, is made of metal, and the needle-like protrusion 12 has spring property, the needle-like protrusion 12 moves while contacting the mask 50. Even if it is, generation | occurrence | production of the static electricity and a cutting chip in between can be suppressed. In particular, when a metal mask is used as the mask 50, cutting chips are more difficult to generate. By selecting the electroforming material used for the squeegee 10 appropriately, necessary mechanical characteristics and durability, such as hardness, deformation strength, flexibility, and wear resistance, can be ensured.

When using one squeegee 10, the clearance gap 16 between the needle protrusions 12 is set smaller than the diameter of the electroconductive fine particle 40 made into the object. The width of the needle protrusion 12 and the width of the gap 16 can be appropriately selected from 10 to 300 µm, and the width of the needle protrusion 12 and the width of the gap 16 in the squeegee 10 are conductive. The particle diameter of the fine particles 40 can be adapted. In a part of the squeegee 10, it is also possible to make the arrangement of the needle protrusions 12 dense. Thereby, when there exists a site | part in which the electroconductive fine particle 40 is hard to enter in the opening pattern 52 of the mask 50, correspondence, such as arrange | positioning the needle-like protrusions 12 of the area | region corresponding to the said site closely, etc. It becomes possible.

As illustrated in FIG. 2, the needle protrusion 12 is devised by devising the shape of the needle protrusion 12 such as setting the tip side of the needle protrusion 12 in the squeegee 10 to be thinner than the base side. You can control the strength and elasticity of

5 and 6, in the squeegee assembly 30 according to the present embodiment, since the squeegee 10 is fitted to the fitting support members 26 and 28, the handling of the squeegee 10 is easy and conductive. Desorption to and from an apparatus (not shown) which arrange | positions the microparticle 40 in the opening pattern of the mask 50 is also easy. As shown in FIG. 4, FIG. 6, by wrapping a plurality of squeegee 10, it is possible to control the intensity of the whole squeegee 10. As shown in FIG.

In addition, as illustrated in FIG. 8, in the squeegee assembly 30, when the plurality of squeegees 10 are stacked and used, the respective squeegees 10 are formed such that the tip of the needle protrusion 12 is stepped. By offsetting in the protruding direction of the needle protrusion 12, the pressure applied from the squeegee 10 to the opening pattern 52 in the case of contacting the squeegee 10 inclined with respect to the normal direction of the mask 50 is more uniform. can do. At this time, it is necessary to incline the squeegee assembly 30 to the short side of the protrusion amount of the needle-like protrusion 12. Thereby, the electroconductive fine particle 40 once arrange | positioned in the opening pattern 52 of the mask 50 is peeled off and scattered by the needle protrusion 12, or the said electroconductive fine particle 40 is not damaged.

In addition, as shown in FIG. 9, one surface in the thickness direction of the needle protrusion 12 is used as the curved surface 24 having a convex cross-sectional shape, and the fine particles on the mask 50 are formed by the needle protrusion 12. When the 40 is pushed and moved, the curved surface 24 side can be used to suppress the occurrence of scratches on the surface of the conductive fine particles 40.

(Method for producing squeegee)

Here, the manufacturing method of a squeegee is demonstrated. First, the electroforming die 62 corresponding to the shape of the squeegee 10 is produced by the photolithography method. Specifically, as shown in Fig. 10, an ultraviolet mask 60 having an opening pattern 58 corresponding to the shape of the squeegee 10 (Fig. 1, Fig. 2, etc.) is prepared to have an example of having conductivity. For example, the positive photoresist 56 is apply | coated on the stainless steel substrate 54, and the ultraviolet mask 60 is arrange | positioned on the said photoresist 56. As shown in FIG.

In this state, ultraviolet rays are irradiated from the ultraviolet mask 60 side. Then, the ultraviolet rays are irradiated only to the portion of the opening pattern 58 of the ultraviolet mask 60 in the photoresist 56. When the photoresist 56 is developed, as shown in FIG. 11, the region irradiated with ultraviolet rays is removed from the photoresist 56, and the region not irradiated with ultraviolet rays remains as the convex portion 56A. .

In the portion where the photoresist 56 is removed, the surface of the substrate 54 is exposed. Thereby, the electroforming die 62 corresponding to the squeegee 10 (FIG. 1, FIG. 2, etc.) is completed. In addition, when manufacturing the electroforming die 62, instead of photolithography using ultraviolet rays, an X-ray lithography method using X-rays may be used. In that case, instead of the ultraviolet mask 60, the X-ray mask (not shown) which can block an X-ray is used.

Next, as shown in FIG. 12, the electrolytic solution 66 in which the electroforming material is dissolved is placed in the container 64, and the positive electrode 68 and the substrate 54 become the negative electrode in the electrolytic solution 66. The casting die 62 is inserted in a state spaced apart from each other. Then, a voltage is applied between the anode 68 and the substrate 54 to perform electrolysis of the electrolyte 66. Then, the electroforming material 70 is electrodeposited and grows in the part where the photoresist 56 is removed among the electroforming dies 62.

This electroforming material 70 is only in the longitudinal direction (thickness direction of the substrate 54) along the side wall 56B of the convex portion 56A, up to the height of the convex portion 56A of the photoresist 56. To grow. Therefore, when the application of the voltage is finished within the height of the convex portion 56A, the needle projection 12 of the squeegee 10 can be formed into a flat shape on both sides shown in Figs.

On the other hand, if the application of voltage is continued until the electroforming material 70 exceeds the height of the convex portion 56A, the electroforming material 70 is not only in the thickness direction of the substrate 54 but also the convex portion 56A. It also grows in the transverse direction (plane direction of the substrate 54) along the upper surface of the substrate. Thereby, as shown in FIG. 13, the surface on the opposite side to the board | substrate 54 in the electroforming material 70 can be formed by the curved surface 24 of convex cross section.

Next, as shown in FIG. 14, when the photoresist 56 is removed using an alkaline solution, a solvent, or the like, only the electroforming material 70 electrodeposited on the substrate 54 is left. And as shown in FIG. 15, the squeegee 10 can be obtained by peeling the electroforming material 70 from the board | substrate 54 in the arrow A direction. In addition, in consideration of this peeling operation | work, the release agent is apply | coated to the board | substrate 54 previously.

In the needle protrusion 12 of the squeegee 10 manufactured in this way, one surface in the thickness direction is a curved surface 24 having a convex cross section. The other surface 25 is flat because it is a surface electrodeposited to the substrate 54. The side wall 27 connected to the other surface 25 is a portion formed by the side wall 56B (FIGS. 12 and 13) of the convex portion 56A of the photoresist 56. The curved surface 24 protrudes from the side wall 27 in the width direction of the needle-shaped protrusion 12, whereby the cross-sectional shape of the needle-shaped protrusion 12 is mushroom-shaped. The side wall 27 of the needle protrusion 12 can be inclined by making the side wall 56B of the convex portion 56A of the photoresist 56 inclined.

By using photolithography or X-ray lithography and electroforming, the squeegee 10 having the fine needle protrusions 12 and the gaps 16 can be easily manufactured, and one side of the needle protrusions 12 can be produced. It is also easy to form the curved surface 24 of convex cross section.

12 is a schematic diagram showing the principle in the electroforming step, and the scale of each member, the electrodeposition position of the electroforming material 70, and the like are not limited to those shown.

10: squeegee
12: couch projection
14: Donate
16: gap curved surface
24: fitting support member
26: fitting support member
28: squeegee
30: assembly

Claims

A squeegee manufactured by electroforming, wherein a plurality of needle-like protrusions are arranged with a predetermined gap along the end edge of the base, and have a thickness of 1 to 100 µm, for moving the conductive fine particles on the mask.

The squeegee according to claim 1, wherein one surface of the needle-like protrusion in the thickness direction is formed by a curved surface having a convex cross section.

The squeegee according to claim 1, wherein the width of the needle protrusion and the width of the gap are 5 to 400 µm.

The squeegee according to claim 1, wherein the needle-like protrusion is 0.05 to 4 mm in length.

delete

The squeegee according to claim 1, wherein nickel, copper, palladium, platinum, gold, silver, or an alloy thereof is used as the electroforming material.

A squeegee assembly comprising at least one squeegee according to any one of claims 1 to 4 or 6, wherein the base is fitted and fixed from both sides in the thickness direction by a fitting support member.