KR101100461B1 - 증기 수집 방법 및 장치 - Google Patents

증기 수집 방법 및 장치 Download PDF

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Publication number
KR101100461B1
KR101100461B1 KR1020057020012A KR20057020012A KR101100461B1 KR 101100461 B1 KR101100461 B1 KR 101100461B1 KR 1020057020012 A KR1020057020012 A KR 1020057020012A KR 20057020012 A KR20057020012 A KR 20057020012A KR 101100461 B1 KR101100461 B1 KR 101100461B1
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South Korea
Prior art keywords
chamber
delete delete
gap
gas
substrate
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Expired - Fee Related
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KR1020057020012A
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English (en)
Korean (ko)
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KR20050114726A (ko
Inventor
크레이그 에이. 밀러
니르말 케이. 제인
윌리암 비. 콜브
Original Assignee
쓰리엠 이노베이티브 프로퍼티즈 컴파니
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Publication of KR20050114726A publication Critical patent/KR20050114726A/ko
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Publication of KR101100461B1 publication Critical patent/KR101100461B1/ko
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B13/00—Machines and apparatus for drying fabrics, fibres, yarns, or other materials in long lengths, with progressive movement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B13/00—Machines and apparatus for drying fabrics, fibres, yarns, or other materials in long lengths, with progressive movement
    • F26B13/10—Arrangements for feeding, heating or supporting materials; Controlling movement, tension or position of materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B13/00—Machines and apparatus for drying fabrics, fibres, yarns, or other materials in long lengths, with progressive movement
    • F26B13/005—Seals, locks, e.g. gas barriers for web drying enclosures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
    • F26B25/005—Treatment of dryer exhaust gases
    • F26B25/006—Separating volatiles, e.g. recovering solvents from dryer exhaust gases

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Drying Of Solid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
KR1020057020012A 2003-04-23 2004-03-08 증기 수집 방법 및 장치 Expired - Fee Related KR101100461B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/421,195 2003-04-23
US10/421,195 US20030230003A1 (en) 2000-09-24 2003-04-23 Vapor collection method and apparatus
PCT/US2004/007193 WO2004094930A1 (en) 2003-04-23 2004-03-08 Vapor collection method and apparatus

Publications (2)

Publication Number Publication Date
KR20050114726A KR20050114726A (ko) 2005-12-06
KR101100461B1 true KR101100461B1 (ko) 2011-12-29

Family

ID=33309574

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020057020012A Expired - Fee Related KR101100461B1 (ko) 2003-04-23 2004-03-08 증기 수집 방법 및 장치

Country Status (9)

Country Link
US (3) US20030230003A1 (enExample)
EP (1) EP1620688B1 (enExample)
JP (2) JP2006524309A (enExample)
KR (1) KR101100461B1 (enExample)
CN (1) CN100422678C (enExample)
AT (1) ATE518105T1 (enExample)
BR (1) BRPI0409605A (enExample)
MX (1) MXPA05011288A (enExample)
WO (1) WO2004094930A1 (enExample)

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WO2005085730A2 (en) 2004-03-02 2005-09-15 Nv Bekaert Sa Infrared drier installation for passing web
JP4527670B2 (ja) * 2006-01-25 2010-08-18 東京エレクトロン株式会社 加熱処理装置、加熱処理方法、制御プログラムおよびコンピュータ読取可能な記憶媒体
US20090007453A1 (en) * 2006-01-25 2009-01-08 Nv Bekaert Sa Flame Dryer
US7877895B2 (en) * 2006-06-26 2011-02-01 Tokyo Electron Limited Substrate processing apparatus
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CN101865852A (zh) * 2010-03-16 2010-10-20 苏州市玮琪生物科技有限公司 一种总胆固醇比色卡
ES2625072T3 (es) 2011-08-11 2017-07-18 Avery Dennison Corporation Secador de placas y método de secado de revestimientos a base de disolvente
US20190283063A1 (en) * 2018-03-14 2019-09-19 Adam Zax Method and apparatus for inline coating of substrates
DE102018124521A1 (de) * 2018-10-04 2020-04-09 Brückner Maschinenbau GmbH & Co. KG Behandlungsanlage für eine durch einen Behandlungsofen hindurchführbare flexible Materialbahn, insbesondere Kunststofffolie
US20220287244A1 (en) * 2021-03-08 2022-09-15 Monsanto Technology Llc Systems and methods for long-term pollen storage
KR102472215B1 (ko) 2022-01-11 2022-11-30 주식회사 강원이솔루션 전기히터를 구비한, 이차전지 제조용 분말원료 건조장치
CN116288940B (zh) * 2023-03-17 2023-10-10 浙江中超新材料股份有限公司 一种三层式喷胶干燥箱及其控制方法

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Also Published As

Publication number Publication date
US20060179680A1 (en) 2006-08-17
US7971370B2 (en) 2011-07-05
BRPI0409605A (pt) 2006-04-18
US20060191160A1 (en) 2006-08-31
EP1620688A1 (en) 2006-02-01
ATE518105T1 (de) 2011-08-15
CN1777784A (zh) 2006-05-24
EP1620688B1 (en) 2011-07-27
US20030230003A1 (en) 2003-12-18
JP2006524309A (ja) 2006-10-26
JP2010281563A (ja) 2010-12-16
CN100422678C (zh) 2008-10-01
MXPA05011288A (es) 2006-01-24
KR20050114726A (ko) 2005-12-06
US7918038B2 (en) 2011-04-05
WO2004094930A1 (en) 2004-11-04

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