KR101093675B1 - 글래스 이송장치 - Google Patents
글래스 이송장치 Download PDFInfo
- Publication number
- KR101093675B1 KR101093675B1 KR1020090047770A KR20090047770A KR101093675B1 KR 101093675 B1 KR101093675 B1 KR 101093675B1 KR 1020090047770 A KR1020090047770 A KR 1020090047770A KR 20090047770 A KR20090047770 A KR 20090047770A KR 101093675 B1 KR101093675 B1 KR 101093675B1
- Authority
- KR
- South Korea
- Prior art keywords
- air
- suction
- unit
- floating
- glass
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Fluid Mechanics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (6)
- 다수의 플로팅스테이지가 서로 인접하게 형성되고, 상부에 글래스가 배치되는 플로팅스테이지유닛;상기 다수의 플로팅스테이지 각각에 구비되고, 에어를 분출 및 흡입하여 상기 글래스가 상기 플로팅스테이지유닛의 상면에 대하여 부상하도록 하는 에어플로팅유닛; 및상기 에어플로팅유닛을 통하여 부상된 상기 글래스를 이송시키는 이송장치를 포함하되,상기 플로팅스테이지의 상면에는 다수의 분출홀과 다수의 흡입홀이 격자구조로 서로 교차되게 형성되고,상기 에어플로팅유닛은, 상기 다수의 분출홀과 연통되어 상기 분출홀로 에어를 분출하는 에어분사유닛과, 상기 다수의 흡입홀과 연통되어 상기 분출홀을 통하여 분출된 에어를 흡입하는 에어흡입유닛을 포함하고,상기 에어분사유닛은, 상기 플로팅스테이지의 내부에 형성되어 상기 다수의 분출홀과 연통되는 다수의 블로잉챔버와, 상기 다수의 블로잉챔버와 연결되는 에어공급라인과, 상기 에어공급라인으로 에어를 공급하는 에어공급장치를 포함하며,상기 에어흡입유닛은, 상기 플로팅스테이지의 내부에 형성되어 상기 다수의 흡입홀과 연통되는 다수의 흡입챔버와, 상기 흡입챔버와 연결되는 흡입라인과, 상기 흡입라인으로 상기 에어를 흡입하여 배출하는 진공펌핑유닛을 포함하고,상기 블로잉챔버는 단면이 원통형상이고, 상기 흡입챔버는 단면이 직사각형 형상인 글래스 이송장치.
- 삭제
- 삭제
- 청구항 1에 있어서,상기 에어공급장치와 상기 진공펌핑유닛 각각에는 상기 에어의 유동량을 정밀하게 제어하기 위한 레귤레이터를 더 구비하는 글래스 이송장치.
- 삭제
- 청구항 1에 있어서,상기 분출홀의 단면적은 상기 흡입홀의 단면적 보다 큰 글래스 이송장치.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020090047770A KR101093675B1 (ko) | 2009-05-29 | 2009-05-29 | 글래스 이송장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020090047770A KR101093675B1 (ko) | 2009-05-29 | 2009-05-29 | 글래스 이송장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20100129034A KR20100129034A (ko) | 2010-12-08 |
KR101093675B1 true KR101093675B1 (ko) | 2011-12-15 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020090047770A KR101093675B1 (ko) | 2009-05-29 | 2009-05-29 | 글래스 이송장치 |
Country Status (1)
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KR (1) | KR101093675B1 (ko) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101274640B1 (ko) * | 2010-05-25 | 2013-06-13 | 주식회사 에이엠에이치시스템즈 | 비접촉 반송플레이트 |
KR101276064B1 (ko) * | 2011-02-15 | 2013-06-17 | 박봉선 | 비접촉 평판 이송장치 |
KR101277070B1 (ko) * | 2011-05-17 | 2013-06-20 | 주식회사 에스에프에이 | 기판 이송장치 |
CN107814200A (zh) * | 2017-10-31 | 2018-03-20 | 武汉华星光电技术有限公司 | 一种气浮式阵列涂布机及其传送装置 |
KR102578464B1 (ko) * | 2020-06-10 | 2023-09-14 | 세메스 주식회사 | 기판 이송 모듈 및 이를 포함하는 다이 본딩 장치 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100834734B1 (ko) * | 2006-04-06 | 2008-06-05 | 주식회사 에스에프에이 | 기판 이송장치 |
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2009
- 2009-05-29 KR KR1020090047770A patent/KR101093675B1/ko active IP Right Grant
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100834734B1 (ko) * | 2006-04-06 | 2008-06-05 | 주식회사 에스에프에이 | 기판 이송장치 |
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KR20100129034A (ko) | 2010-12-08 |
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