KR101077796B1 - 부상 반송 장치 - Google Patents

부상 반송 장치 Download PDF

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Publication number
KR101077796B1
KR101077796B1 KR1020090072265A KR20090072265A KR101077796B1 KR 101077796 B1 KR101077796 B1 KR 101077796B1 KR 1020090072265 A KR1020090072265 A KR 1020090072265A KR 20090072265 A KR20090072265 A KR 20090072265A KR 101077796 B1 KR101077796 B1 KR 101077796B1
Authority
KR
South Korea
Prior art keywords
floating
sensor
conveying
pressure
fluid
Prior art date
Application number
KR1020090072265A
Other languages
English (en)
Korean (ko)
Other versions
KR20100019362A (ko
Inventor
겐스케 히라타
도시타카 오노
Original Assignee
가부시키가이샤 아이에이치아이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 가부시키가이샤 아이에이치아이 filed Critical 가부시키가이샤 아이에이치아이
Publication of KR20100019362A publication Critical patent/KR20100019362A/ko
Application granted granted Critical
Publication of KR101077796B1 publication Critical patent/KR101077796B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Fluid Mechanics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control Of Conveyors (AREA)
KR1020090072265A 2008-08-08 2009-08-06 부상 반송 장치 KR101077796B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008206216A JP5151795B2 (ja) 2008-08-08 2008-08-08 浮上搬送装置
JPJP-P-2008-206216 2008-08-08

Publications (2)

Publication Number Publication Date
KR20100019362A KR20100019362A (ko) 2010-02-18
KR101077796B1 true KR101077796B1 (ko) 2011-10-28

Family

ID=41655250

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090072265A KR101077796B1 (ko) 2008-08-08 2009-08-06 부상 반송 장치

Country Status (4)

Country Link
JP (1) JP5151795B2 (zh)
KR (1) KR101077796B1 (zh)
CN (1) CN101643151B (zh)
TW (1) TWI428268B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101811415B1 (ko) * 2016-05-24 2017-12-21 남한우 플로팅 롤러
KR20180051248A (ko) * 2016-11-08 2018-05-16 디아이티 주식회사 기판 이송 장치

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011219209A (ja) * 2010-04-07 2011-11-04 Ihi Corp 浮上搬送装置、方向転換装置、及び浮上ユニット
JP5688609B2 (ja) * 2012-09-21 2015-03-25 Smc株式会社 位置検出装置
KR102536251B1 (ko) * 2016-03-25 2023-05-25 삼성디스플레이 주식회사 표시 장치의 제조장치
CN106938785B (zh) * 2017-02-28 2022-07-19 江苏科技大学 一种具有形变检测功能的玻璃基板气浮装置及检测方法
JP7102177B2 (ja) * 2018-03-15 2022-07-19 ヤマハ発動機株式会社 基板検出装置及び基板処理装置
JP7404937B2 (ja) * 2020-03-06 2023-12-26 富士電機株式会社 給気システム
CN111957601B (zh) * 2020-08-10 2022-05-10 安徽明视光电技术有限公司 一种手机显示屏的压力检测装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006182563A (ja) 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0546090U (ja) * 1991-11-27 1993-06-18 日本電気株式会社 フアンユニツト
CN1138097C (zh) * 2000-11-07 2004-02-11 王敏 工业炉窑多路煤粉浓相传输系统
JP3451251B2 (ja) * 2001-07-30 2003-09-29 ケル株式会社 冷却ファン作動検出装置
JP4217963B2 (ja) * 2003-07-08 2009-02-04 株式会社ダイフク 板状体搬送装置
TWI295658B (en) * 2003-08-21 2008-04-11 Daifuku Kk Transporting apparatus
KR100523040B1 (ko) * 2003-11-11 2005-10-24 삼성전자주식회사 기판이송장치
KR100531209B1 (ko) * 2004-12-30 2005-11-29 지 . 텍 (주) 기판부상 반송장치
KR100665715B1 (ko) * 2005-01-27 2007-01-09 주식회사 태성기연 판유리 이송장치
JP4570545B2 (ja) * 2005-09-22 2010-10-27 東京エレクトロン株式会社 基板処理装置及び基板処理方法
JP4594241B2 (ja) * 2006-01-06 2010-12-08 東京エレクトロン株式会社 基板搬送装置、基板搬送方法及びコンピュータプログラム
JP4333925B2 (ja) * 2006-01-19 2009-09-16 株式会社 太星技研 板ガラス搬送装置
CN2917313Y (zh) * 2006-06-28 2007-07-04 深圳卷烟厂 烟丝风送管道风速控制装置
KR101038844B1 (ko) * 2006-10-10 2011-06-03 가부시키가이샤 니혼 셋케이 고교 박판 형상 재료 반송 장치

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006182563A (ja) 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101811415B1 (ko) * 2016-05-24 2017-12-21 남한우 플로팅 롤러
KR20180051248A (ko) * 2016-11-08 2018-05-16 디아이티 주식회사 기판 이송 장치
KR101889827B1 (ko) * 2016-11-08 2018-08-20 디아이티 주식회사 기판 이송 장치

Also Published As

Publication number Publication date
CN101643151A (zh) 2010-02-10
CN101643151B (zh) 2012-07-25
TWI428268B (zh) 2014-03-01
KR20100019362A (ko) 2010-02-18
JP2010045072A (ja) 2010-02-25
JP5151795B2 (ja) 2013-02-27
TW201022115A (en) 2010-06-16

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