KR101077796B1 - Levitation transportation device - Google Patents

Abstract

The floating conveying apparatus for floating and conveying an object with a fluid includes an upper surface, a ejection hole for ejecting the fluid opened on the upper surface, and the fluid. A plurality of floating devices each having a fluid supply device for supplying pressure to the ejection hole through a flow path, a communication path communicating with each of the flow paths, and a sensor for detecting pressure in the communication path; And a conveying device for conveying the object and a control device for determining an abnormality in pressure in accordance with the output of the sensor.

Floating conveying device, blower hole, communication path, control device

Description

Injury Return Device {LEVITATION TRANSPORTATION DEVICE}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a floating conveying apparatus for conveying a floating object while using a fluid such as compressed air.

There have been some proposals for a floating conveying device which conveys an object while using a fluid such as compressed air. These flotation conveying apparatus is typically provided with the blowing apparatus, such as a fan or blower which supplies fluids, such as air, and the flotation device provided with the blowing hole which the said fluid passes. The fluid ejected between the flotation device and the object generates pressure, and the object floats by the pressure. The floated object is conveyed under the driving force by the conveying apparatus. Related arts are disclosed in Japanese Patent Laid-Open No. 2006-182563.

Usually, the floating conveying apparatus is equipped with the several floating apparatus aligned along the direction which conveys an object. The supply of compressed air to the plurality of floating apparatuses may be performed by a single blower or by a plurality of blowers separately provided in each floating apparatus.

If an abnormality occurs in any one of the plurality of blowers, the buoyancy may be insufficient on the corresponding injured device, and the object may fall down from the portion and come into contact with the injured device, resulting in damage. . That is, when the floating conveying apparatus has a plurality of blowers, it is necessary to detect it quickly even if any abnormality occurs. On the other hand, if a sensor is provided in each blower in order to detect an abnormality, the floating conveying device becomes complicated, and therefore, no new problem occurs.

The present invention has been made to solve the above-described problem, and an object of the present invention is to provide a floating conveying apparatus which enables a simple configuration to detect abnormality somewhere in a plurality of blower devices.

One aspect of the present invention provides a floating conveying apparatus for floating a conveyed object with a fluid. The float conveying apparatus includes a plurality of floats each having an upper surface, a ejection hole for ejecting the fluid opened on the upper surface, and a fluid supply device for pressurizing the fluid to supply the ejection hole through a flow path. A device, a communication path communicating with each of the flow paths, a sensor for detecting pressure in the communication path, a conveying device for conveying the object, and a control device for determining an abnormality in pressure in accordance with the output of the sensor. Include.

Preferably, the sensor is a single sensor. Also preferably, the control device includes alarm means for issuing an alarm when an abnormality is determined. Also preferably, the floating conveying apparatus further includes a plurality of opening / closing valves which are provided in the communication path and open and close to control the communication between the respective flow paths, respectively. Also preferably, the fluid supply device is provided with a filter. Also preferably, the control device includes determining means for determining an abnormality of the pressure by comparing the output of the sensor with a reference value. Also preferably, the determining means further includes a storage device that stores the reference value and a conversion device that converts the output of the sensor into a value comparable with the reference value. Also preferably, the control device is connected to the respective on / off valves so as to independently control the on / off valves.

There is provided a floating conveying apparatus which makes it possible to detect, by a simple configuration, that an abnormality has occurred somewhere among a plurality of blowers.

An embodiment of the present invention will be described below with reference to the drawings. Throughout this specification, claims, and drawings, the front, rear, left and right sides are defined in the directions written as FF, FR, L and R, respectively, in the drawings. This definition is for convenience of description, and the present invention is not necessarily limited thereto.

1 to 5, the floating conveying apparatus 1 according to an embodiment of the present invention is an apparatus for conveying an object W in a vertical direction and conveying it in a horizontal conveying direction (for example, a rear FR). to be. As the object W, a thin plate, such as a relatively thin object which is generally planar, for example, a glass substrate for an LCD (liquid crystal display), is preferable. The object W does not necessarily need to be planar as a whole, and at least part of its lower surface may be planar. To float, a fluid such as air is used, for example.

When the object W needs to be conveyed in a clean environment, such as a thin glass substrate for LCD, the said floating conveyance apparatus 1 is used in clean environments, such as a clean room.

Referring to FIG. 1, the floating conveying device 1 supplies a fluid to the floating device 33 through a floating device 33 having a blowing hole for ejecting a fluid and a flow path such as a chamber 25. Outputs of the fluid supply device 37, the communication paths 41 and 43 in communication with each flow path (chamber 25), the sensor 47 for detecting the pressure in the communication path 43, and the sensor 47 The control device 49 which determines abnormality of a pressure is provided. Moreover, as shown in FIG. 4, the floating conveying apparatus 1 is further equipped with the conveying apparatus 11, and conveys the floated object.

As can be understood from FIG. 3 and FIG. 4, the main elements such as the floating device 33, the fluid supply device 37, the conveying device 11, and the like are placed on the base 3 extending in the front-back direction. Is loaded. The base 3 consists of the ceiling plate 5, the support | pillar 7, the reinforcement member 9, etc., It is not limited to these, You may use what kind of structure which can be reliably supported.

The conveying apparatus 11 has the several roller 13 which forms a row in the conveyance direction of the target object W in the vicinity of the left end and the right end on the base 3, respectively. Each roller 13 is integrally connected with the worm wheel 17 via the rotation shaft, respectively, and is rotatably supported by the bracket. A pair of drive shafts 19 are provided to penetrate the base 3 in the front-rear direction, and each drive shaft 19 is provided with a worm 21 which is in engagement with each worm wheel 17 so as to be driven. . The output shaft of the motor 23 is connected to the front end of each drive shaft 19 so that driving is possible. Thereby, each roller 13 receives a drive force of the motor 23, and is made to rotate at the same rotational speed. The upper end part of each said roller 13 is arrange | positioned so that it may protrude slightly upward rather than the upper surface of the said floating apparatus 33, and is aligned on a single surface. The object W can be in contact with the roller 13 to receive the driving force even in a floating state.

The motors 23 do not need to be a pair, and the two drive shafts 19 may be connected to a single motor through suitable coupling means such as a chain. In addition, you may apply the conveying means, such as a clamper which can be driven, a belt conveyor, to the conveying apparatus 11 instead of a roller.

2 to 5, the floating device 33, the chamber 25, and the fluid supply device 37 are supported by the ceiling plate 5 of the base 3.

Each floating device 33 has a flat upper surface and is fixed to the chamber 25 via a leg. On the base 3, the flotation device 33 forms heat along the chamber 25 in the width direction, and also heats in the longitudinal direction. Preferably, the plurality of floating devices 33 align the heights such that their upper surfaces form a single plane. This is advantageous for stabilizing the floating height of the object W.

As shown in FIG. 2, the upper surface of the floating apparatus 33 is rectangular as an example, and has the blowing hole 35 opened in the upper surface. The blowhole 35 is, for example, a rectangular annular shape, but is not limited thereto, and may be any of various other shapes such as an elliptical annular shape, a partially closed annular shape, and a shape in which a plurality of small holes are arranged in an annular shape. It is preferable that the blowing hole 35 is inclined at least in the vicinity of an upper surface toward the area | region which it encloses (namely toward an inner side). The air passing through the blowing hole having the inclination toward the inside increases the pressure generated between the objects as the flow rate increases, causing the object W to rise higher. Therefore, the blowing hole 35 which inclined inward as an annular shape provides controllability of the height of the float of the object W through the flow rate control of air.

The plurality of chambers 25 are provided on the ceiling plate 5 in rows along the interval in the longitudinal direction, and each chamber 25 extends in the width direction. Referring to FIG. 5, each chamber 25 is in communication with the flotation device 33 through an opening 27 in the upper portion thereof, and in communication with a fluid supply device 37 through the opening 29 in the lower portion thereof. Therefore, it functions as a flow path which enables the flow of fluid between them. If it functions as a flow path, it is not limited to the form of a chamber, You may apply another form.

The fluid supply device 37 is fixed to the chamber 25 via the bracket 39. The fluid supply device 37 is a device for supplying a fluid such as air, but a fan or blower driven by a motor can be used, but is not limited thereto. Air may be supplied by a compressor, or a compressed air, a cylinder containing nitrogen or argon, or the like may be used. The fluid supply apparatus 37 may be equipped with the appropriate filter so that the fluid from which the dust was removed may be supplied. A so-called fan filter unit in which the filter and the fan are integrated can be used. Alternatively, the filter may be separated from the fan and provided in each chamber 25 or each floating device 33.

Returning to FIG. 1, the floating conveying apparatus 1 is provided with the communication path 41 and 43 which communicated with each chamber 25. As shown in FIG. The communication path is any structure or mechanism that attempts to deliver pressure to a remote location. As such a structure, a pipe that allows flow of a fluid can be used. Alternatively, instead of the pipe, any medium to transmit pressure may be used, and in special cases, the pressure may be converted into an electrical signal or an optical signal so that a medium such as a cable or an optical fiber may transmit the signal. The communication path 41 is connected to every chamber 25, and the communication path 43 is connected so that the some communication path 41 may be connected. Preferably, the open / close valve 45 which opens and closes controlably is provided for each communication path 41. As the on-off valve 45, a solenoid valve can be used in order to facilitate electrical control, but is not limited thereto.

The communication path 43 is in communication with a single sensor 47 that detects pressure. The sensor 47 is connected to the control device 49 by a suitable cable or optical fiber, so that the pressure in the communication path 43 is measured and output to the control device 49. The control apparatus 49 determines abnormality of a pressure according to the output of the sensor 47. The communication path 43, the sensor 47, and the control apparatus 49 may be provided in the base 3, and may be provided in the remote place.

Preferably, the control device 49 includes a storage device, an appropriate I / O device, and determination means 51 including a so-called CPU. The storage device stores a reference value corresponding to the reference pressure. Alternatively, instead of a single reference value, a database of reference values may be stored in the storage device in the form of a table of reference pressures related to the operating conditions of the floating conveying device 1. The sensor 47 is connected to the I / O device. The I / O device is a conversion device that converts the output of the sensor 47 into a value comparable to a reference value and inputs it to the CPU. The storage device also stores a program that compares the value input to the CPU from the sensor 47 through the I / O device with the reference value, and causes the CPU to determine whether an abnormality in pressure has occurred. The judging means 51 determines the abnormality of the pressure in accordance with the output of the sensor 47 by causing the CPU to use the above program.

Appropriate alarm means is connected to the control apparatus 49. Preferably, the alarm means is an alarm sound generator 53 or an alarm lamp 55 or both. In addition, the above-described program includes an operation of operating these when an abnormality in pressure is detected. That is, when the determination means 51 detects an abnormality of the pressure in accordance with the above program, it generates an alarm sound in the alarm sound generator 53, turns on the alarm lamp 55, or both of them. Run Instead of the alarm sound generator 53 or the alarm lamp 55, another suitable alarm device may be used.

The floating conveying apparatus 1 operates as follows.

When air is supplied to the chamber 25 from the fluid supply apparatus 37, the chamber 25 distributes air uniformly to each floating apparatus 33, and air blows out from each blowing hole 35. FIG. The blown-out air is generated between the upper surface of the floating apparatus 33 and the lower surface of the object W to generate a uniform pressure in the space surrounding the opening of the ejection hole 35, so that the object W is buoyant and floated. . On the other hand, by driving the pair of motors 23, the pair of drive shafts 19 rotate in synchronization. By the engagement of the worm wheel 17 and the worm 21, the rotation of the drive shaft 19 can be transmitted to each roller 13. The object W is conveyed in a floating state by contacting the rotating roller 13.

While the floating device 33 is operating normally, a constant pressure is generated in the communication path 43. When all the fluid supply devices 37 are operating normally, this pressure matches the reference pressure stored in the storage device. The control apparatus 49 determines this to be normal by comparing the output of the sensor 47 with a reference value. When abnormality occurs in any one fluid supply apparatus 37, the pressure in the communication path 43 shifts from a reference pressure. The control apparatus 49 determines this as an abnormality of pressure by comparing the output of the sensor 47 with a reference value. Subsequently, the control device 49 operates the alarm sound generator 53, the alarm lamp 55, or both, thereby informing the operator of the abnormality.

As can be understood from the foregoing, even if abnormality does not occur in the plurality of fluid supply apparatuses 37 at the same time, only one of them has been abnormally generated, and the control unit 49 reliably detects abnormality to the operator. I can inform. It is not necessary to provide a sensor in each chamber 25, and the abnormality of the fluid supply apparatus 37 can be detected by the simple structure provided with only a single sensor.

The above-described configuration can be modified as follows. The control apparatus 47 is connected with each open / close valve 45, and controls the opening / closing individually. The above-described program stored in the storage device includes the following repetitive operation performed after detecting an abnormality in pressure. In other words, one of the plurality of open / close valves 45 is closed, and then, by comparing the output of the sensor 47 with a reference value, it is determined whether or not the abnormality of the pressure is eliminated. When the abnormality of the pressure is not solved, the closed opening / closing valve 45 is opened again, the next opening / closing valve 45 is closed, and it is determined whether or not the abnormality of the pressure has been resolved. This operation is repeated, and when the abnormality of pressure is eliminated, the on-off valve 45 which was closed at that time is memorize | stored. The control apparatus 47 notifies an operator of the code | symbol which specifies the memorize | opened valve 45 by appropriate display apparatuses, such as a display.

The on-off valve 45 when the abnormality of the pressure is released will be in communication with the fluid supply device 37 in which the abnormality has occurred. That is, the operator can specify which fluid supply apparatus 37 has abnormality from the above-mentioned notified code | symbol. Without providing a sensor in each chamber 25 or each style body supply apparatus 37, the fluid supply apparatus 37 which an abnormality generate | occur | produced can be specified by the simple structure provided with only a single sensor.

In the above description, the control device 49 has been provided with a storage device, an appropriate I / O device, and a so-called CPU processor. However, the determination may be made using an appropriate analog circuit or mechanical means instead. do.

Although the present invention has been described with reference to the preferred embodiments, the present invention is not limited to the above embodiments. Based on the above disclosure, a person having ordinary skill in the art can carry out the present invention by modification or modification of the embodiment.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram of the floating conveyance apparatus which concerns on the Example of this invention.

2 is a partial plan view of the floating conveying apparatus.

3 is a partial cross-sectional view taken along the line III-III of FIG. 2.

4 is an elevation view seen from the arrow line IV in FIG.

5 is a partial cross-sectional view taken along the line VV of FIG. 2.

Claims (8)

A floating conveying device for floating and conveying an object by a fluid, A plurality of floating apparatuses each having an upper surface, a ejection hole for ejecting the fluid opened in the upper surface, and a fluid supply device for pressurizing the fluid to supply the ejection hole through a flow path; A communication path communicating with each of the flow paths, A sensor for detecting pressure in the communication path, A conveying apparatus for conveying the object, Control device for determining an abnormality of the pressure in accordance with the output of the sensor Including, And the sensor is a single sensor. delete The method of claim 1, The said control apparatus is an injury conveying apparatus containing the alarm means which alerts when an abnormality is determined. The method of claim 1, It is provided in the said communication path, The floating conveying apparatus further includes a some opening / closing valve which controls each opening and closing of communication between each said flow path. The method of claim 1, And the fluid supply device includes a filter. The method of claim 1, The said control apparatus is a float conveyance apparatus containing determination means which determines the abnormality of the said pressure by comparing the said output of the said sensor with a reference value. The method of claim 6, The determination means further includes a storage device that stores the reference value and a conversion device that converts the output of the sensor into a value comparable with the reference value. 5. The method of claim 4, The control apparatus is connected to the respective on-off valves so as to independently control the on-off valves.

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