CN101643151A - Floating conveyor - Google Patents
Floating conveyor Download PDFInfo
- Publication number
- CN101643151A CN101643151A CN200910164106A CN200910164106A CN101643151A CN 101643151 A CN101643151 A CN 101643151A CN 200910164106 A CN200910164106 A CN 200910164106A CN 200910164106 A CN200910164106 A CN 200910164106A CN 101643151 A CN101643151 A CN 101643151A
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- CN
- China
- Prior art keywords
- sensor
- floating conveyor
- fluid
- open
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Abstract
The present invention provides a floating conveyor which floats an object for conveying and comprises the following components: a plurality of floating devices and each of which comprises an upper surface, a spraying-out opening which is provided on the upper surface for spraying out the fluid, and a fluid supplying device which pressurizes the fluid and supplies to the spraying-out opening through a flow path; a communicating path which is communicated with the flow path; a sensor for detecting the pressure in the communicating path; a conveying device for conveying the object; and a controller for determining the pressure abnormity according to the output of the sensor.
Description
Technical field
The present invention relates to the floating conveyor that uses fluids such as pressurized air object to be floated and transport.
Background technology
The floating conveyor that has had fluids such as a lot of use pressurized airs that object is floated and transported is suggested.Be typically in these floating conveyors and have: the air-supply arrangement of the fan of fluids such as air supply or blowing engine etc.; With float-up device with the squit hole that can pass through for described fluid.The fluid that sprays between float-up device and object produces pressure, and object floats by this pressure.The object that floats is subjected to the propulsive effort of conveyer and is transported.Related technology is disclosed in the open 2006-182563 communique of Japan's patent application.
Usually, floating conveyor has along the direction of transporting object a plurality of float-up devices arranged side by side.Supplying with pressurized air to these a plurality of float-up devices can be undertaken by same air-supply arrangement, also can be undertaken by a plurality of air-supply arrangements that are provided with respectively on each float-up device.
Any one of a plurality of air-supply arrangements takes place when unusual, and in this float-up device buoyancy deficiency, object hangs down in this position and contacts with float-up device, can sustain damage.That is, when floating conveyor has a plurality of air-supply arrangement,, just must rapidly it be detected as long as wherein any one takes place unusually.On the other hand, unusual in order to detect, and when on each air-supply arrangement sensor being set, it is complicated that floating conveyor becomes, thereby may produce more problems.
Summary of the invention
The present invention researches and develops in view of the above problems, and its objective is provides a kind of floating conveyor, and it can go out the unusual situation of any one generation of a plurality of air-supply arrangements by easy structure detection.
An aspect of of the present present invention is a kind of floating conveyor, object is floated and transport by fluid, it has: a plurality of float-up devices, the fluid supply apparatus of have upper surface respectively, exerting pressure and supplying with to described squit hole by stream at the squit hole that is used to spray described fluid of described upper surface open, to described fluid; The access that is communicated with each described stream; Detect the sensor of the pressure in the described access; Be used to transport the conveyer of described object; Judge the control setup of pressure anomaly according to the output of described sensor.
Preferably, described sensor is a single-sensor.In addition, preferably, described control setup has the alert mechanism that gives the alarm when unusual when judging into.Perhaps preferably also have a plurality of open and close valves, they are set at described access, and can open and close respectively with controlling they with each described stream between be communicated with.In addition preferably, described fluid supply apparatus has filter.Perhaps preferably, described control setup also has decision mechanism, and it compares by described output and a reference value with described sensor, and described pressure anomaly is judged.More preferably, described decision mechanism also has: the memory storage of having stored described a reference value; The described output transform of described sensor is become the converting means of the value that can compare with described a reference value.More preferably, described control setup is connected with each described open and close valve in the mode of controlling each described open and close valve independently.
Description of drawings
Fig. 1 is the mode chart of the floating conveyor of embodiments of the present invention.
Fig. 2 is the partial top view of described floating conveyor.
Fig. 3 is the part sectional view that the III-III line along Fig. 2 dissects.
Fig. 4 is the block diagram of observing from the arrow IV direction of Fig. 2.
Fig. 5 is the part sectional view that the V-V line along Fig. 2 dissects.
The specific embodiment
With reference to accompanying drawing one embodiment of the present invention is carried out following explanation.In this specification sheets, claims and accompanying drawing, the place ahead, rear, left and the right-hand direction of FF, FR, L and the R of mark respectively that is defined by in the accompanying drawings.So-called definition is for convenience of explanation, the invention is not restricted to this.
Referring to figs. 1 through Fig. 5, the floating conveyor 1 of one embodiment of the present invention is, object W floated in vertical direction and the device that transports on the carriage direction (for example rear FR) of level.As object W is whole for plane promptly thin object, for example, is suitable for the thin plates such as glass substrate of LCD (Liquid Crystal Display (LCD)) usefulness.Object W must not be the integral planar shape yet, and at least a portion of its lower surface is plane getting final product.Utilize for example such fluid of air in order to float.
When object W was the article that must transport under the cleaning ambient of LCD with thin glass substrate etc., described floating conveyor 1 waited under the cleaning ambient in dust free room and is used.
With reference to Fig. 1, floating conveyor 1 has: the float-up device 33 with the squit hole that is used for ejecting fluid; Supply with the fluid supply apparatus 37 of fluid to float-up device 33 by chamber 25 such streams; The access 41,43 that is communicated with each stream (chamber 25); Detect the sensor 47 of the pressure in the access 43; Judge the control setup 49 of pressure anomaly accordingly with the output of sensor 47.In addition, as shown in Figure 4, floating conveyor 1 also has conveyer 11, and the object that floats is transported.
By Fig. 3,4 as can be known, main member such as float-up device 33, fluid supply apparatus 37, conveyer 11 by stow on the base station 3 that extends along fore-and-aft direction.Base station 3 is made of top board 5, pillar 7 and strengthening part 9 etc., but is not limited thereto, and can adopt structure arbitrarily as long as can support reliably.
In the conveyer 11, near the left end and right-hand member on the base station 3, on the carriage direction of object W, have into a plurality of rollers 13 of row respectively.Each roller 13 links with worm gear 17 integratedly by S. A. respectively, and in the mode that can rotate by bracket supports.And have a pair of axle drive shaft 19, run through base station 3 along fore-and-aft direction.Each axle drive shaft 19 has with the mode that can drive and each worm gear 17 engaged worm 21.At the front end of each axle drive shaft 19, link the output shaft that motor 23 is arranged in the mode that can drive by coupler etc.Thus, each roller 13 is subjected to the propulsive effort of motor 23, with identical rotative speed rotation.The upper end of described each roller 13 is more outstanding slightly upward than the upper surface of described float-up device 33, configuration alignedly on same.Object W also can be activated power ground and contact with roller 13 under the state that floats.
Each float-up device 33 has smooth upper surface, is fixed in the chamber 25 by foot.Float-up device 33 is to become row along chamber 25 on Width respectively on base station 3, and end wise also becomes row.Preferably, a plurality of float-up devices 33 are to become same plane earth alignment height mutually with upper surface.This levitation height that makes object W stable aspect favourable.
As shown in Figure 2, the upper surface of float-up device 33 is a rectangle as an example, and has the squit hole 35 in upper surface open.Squit hole 35 is the ring-type of rectangle as an example, but is not limited thereto, and also can be that oval-shaped ring-type, the ring-type that a part is inaccessible, a plurality of aperture are with ring-type other different shapes such as shape arranged side by side.Squit hole 35 is towards its peripheral region (promptly towards the inboard) preferably, and tilts near upper surface at least.By the air towards inboard bevelled squit hole, the many more pressure that produce between itself and object of its flow are high more, and object W is floated than the highland.Therefore, ring-type and to the inside bevelled squit hole 35 provide levitation height controlled of object W by the flow control of air.
A plurality of chamber 25 end wise devices spaced apart arows are arranged on the top board 5, and each chamber 25 extends on Width.With reference to Fig. 5, each chamber 25 is communicated with float-up device 33 by the opening 27 on each top, and is communicated with fluid supply apparatus 37 by the opening 29 of each bottom, has the function that can make the stream of fluid flow between them thus.If will play a role as stream, be not limited to the form of chamber, also can adopt other forms.
Get back to Fig. 1, floating conveyor 1 has the access 41,43 that is communicated with each chamber 25.Access is any configuration or the mechanism that can transfer the pressure to the place of separation.As such structure, can use the pipe that allows fluid flow.Perhaps, replace pipe, use can be transmitted any medium of pressure, and under special situation, also can translate pressure into electric signal or optical signal and transmit signal by medium such as cable or optical fiber.Each chamber 25 is connected with access 41, and a plurality of access 41 bundles are connected with access 43 with pricking.Preferably, each access 41 is provided with the open and close valve 45 that can open and close with controlling.As open and close valve 45, utilize the solenoid type valve in order easily to carry out electric control, but be not limited thereto.
In control setup 49, be connected with suitable alert mechanism.Better, alert mechanism is alarm tone producer 53 or warning light 55, perhaps has both sides.In addition, said procedure comprises the operation that makes their work when detecting pressure anomaly.That is, when decision mechanism 51 detects pressure anomaly according to described program, make alarm tone producer 53 that alarm tone take place, or warning light 55 is lit a lamp, or carry out simultaneously.Replace alarm tone producer 53 or warning light 55, also can use other suitable alarm devices.
Floating conveyor 1 is following to carry out work.
When chamber 25 air supplies, chamber 25 is to each float-up device 33 air distribution equably, from each squit hole 35 ejection air from fluid supply apparatus 37.The air of ejection in the space of the opening that surrounds squit hole 35, produces uniform pressure between the lower surface of the upper surface of float-up device 33 and object W, provide buoyancy to described object W thus and float.On the other hand, by driving a pair of motor 23, a pair of axle drive shaft 19 rotates synchronously.By the engagement of worm gear 17 and worm screw 21, the rotation of axle drive shaft 19 is passed to each roller 13.Object W contacts by the roller 13 with rotation, and is transported under the state that floats.Float-up device 33 specified ground on period produce constant compression force in the access 43.When whole fluid supply apparatus 37 was normally worked, this pressure was consistent with the base pressure in being stored in memory storage.Control setup 49 compares by output and a reference value with sensor 47, and it is judged to be normally.When fluid supply apparatus 37 generations arbitrarily were unusual, the pressure in the access 43 departed from base pressure.Control setup 49 compares by output and a reference value with sensor 47, and it is judged as pressure anomaly.Then, control setup 49 makes alarm tone producer 53 or warning light 55, and they are worked simultaneously, and the operator is learnt unusually.
Hence one can see that, and unusual even a plurality of fluid supply apparatus 37 does not take place simultaneously, unusual as long as any one in them takes place, control setup 49 also can make the operator learn unusually reliably.There is no need in each chamber 25, sensor to be set, by only having the easy structure of same sensor, just can test fluid feedway 37 unusual.
Said structure can be out of shape as follows.Control setup 47 is connected with each open and close valve 45, can individually control its switching.The said procedure that memory storage is stored comprises to detect carries out following repeatable operation after the pressure anomaly.That is, close in a plurality of open and close valves 45, then,, judge thus whether pressure anomaly is removed the output and a reference value comparison of sensor 47.Under the situation that does not have to remove in pressure anomaly, open the open and close valve 45 of closing again, close next open and close valve 45, judge similarly whether pressure anomaly is removed.Carry out this operation repeatedly, when pressure anomaly is disengaged, the open and close valve 45 that storage is closed at this moment.Control setup 47 is by appropriate display devices such as telltales, and the open and close valve 45 of storage is reported to the operator with special symbol.
Open and close valve 45 when pressure anomaly is disengaged should with unusual fluid supply apparatus 37 takes place is communicated with.That is, from the above-mentioned symbol of reporting, it is unusual that the operator can judge which fluid supply apparatus 37 takes place.Not be used in each chamber 25 or each fluid supply apparatus 37 sensor is set,, just can judge unusual fluid supply apparatus 37 takes place by having the easy structure of same sensor.
In the above description, illustrated that control setup 49 has memory storage, suitable I/O device and is called as the treater of CPU, but also can replace them to utilize suitable analogous circuit or mechanical mechanism to judge.
With reference to preferred implementation the present invention has been described, but has the invention is not restricted to above-mentioned embodiment.Based on above-mentioned disclosed content, those skilled in the art can implement the present invention by correction or distortion to embodiment.
Industrial applicibility
The invention provides a kind of floating conveyor, can be by a plurality of air-supply arrangements of easy structure detection The situation of any one abnormal.
Claims (8)
1. floating conveyor floats object and transports with fluid, it is characterized in that having:
A plurality of float-up devices have respectively: upper surface, the fluid supply apparatus of exerting pressure and supplying with to described squit hole by stream at the squit hole that is used to spray described fluid of described upper surface open, to described fluid;
The access that is communicated with each described stream;
Detect the sensor of the pressure in the described access;
Be used to transport the conveyer of described object;
Judge the control setup of pressure anomaly according to the output of described sensor.
2. floating conveyor as claimed in claim 1 is characterized in that described sensor is a single-sensor.
3. floating conveyor as claimed in claim 1 is characterized in that, described control setup has the alert mechanism that gives the alarm when unusual when judging into.
4. floating conveyor as claimed in claim 1 is characterized in that, also has a plurality of open and close valves, and they are set at described access, and can open and close respectively with controlling they with each described stream between be communicated with.
5. floating conveyor as claimed in claim 1 is characterized in that described fluid supply apparatus has filter.
6. floating conveyor as claimed in claim 1 is characterized in that described control setup also has decision mechanism, and this decision mechanism is by with the described output of described sensor and a reference value comparison and described pressure anomaly is judged.
7. floating conveyor as claimed in claim 6 is characterized in that, described decision mechanism also has: the memory storage of having stored described a reference value; The described output transform of described sensor is become the converting means of the value that can compare with described a reference value.
8. floating conveyor as claimed in claim 4 is characterized in that, described control setup is connected with each described open and close valve in the mode of controlling each described open and close valve independently.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008-206216 | 2008-08-08 | ||
| JP2008206216 | 2008-08-08 | ||
| JP2008206216A JP5151795B2 (en) | 2008-08-08 | 2008-08-08 | Levitation transfer device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101643151A true CN101643151A (en) | 2010-02-10 |
| CN101643151B CN101643151B (en) | 2012-07-25 |
Family
ID=41655250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101641064A Active CN101643151B (en) | 2008-08-08 | 2009-08-04 | Floating conveyor |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5151795B2 (en) |
| KR (1) | KR101077796B1 (en) |
| CN (1) | CN101643151B (en) |
| TW (1) | TWI428268B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103677466A (en) * | 2012-09-21 | 2014-03-26 | Smc株式会社 | Position detecting device |
| CN106938785A (en) * | 2017-02-28 | 2017-07-11 | 江苏科技大学 | A kind of glass substrate air-floating apparatus and detection method with shape changing detection function |
| CN111957601A (en) * | 2020-08-10 | 2020-11-20 | 深圳市宏瑞来科技有限公司 | Pressure detection device of mobile phone display screen |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011219209A (en) * | 2010-04-07 | 2011-11-04 | Ihi Corp | Floating conveying device, direction changing device, and floating unit |
| KR102536251B1 (en) * | 2016-03-25 | 2023-05-25 | 삼성디스플레이 주식회사 | Apparatus for manufacturing a display apparatus |
| KR101811415B1 (en) * | 2016-05-24 | 2017-12-21 | 남한우 | Floating roller |
| KR101889827B1 (en) * | 2016-11-08 | 2018-08-20 | 디아이티 주식회사 | Apparatus for transferring substrate |
| JP7102177B2 (en) * | 2018-03-15 | 2022-07-19 | ヤマハ発動機株式会社 | Board detection device and board processing device |
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| JPH0546090U (en) * | 1991-11-27 | 1993-06-18 | 日本電気株式会社 | Juan Unit |
| CN1138097C (en) * | 2000-11-07 | 2004-02-11 | 王敏 | Multiway dense coal power phase conveying system for industrial furnaces |
| JP3451251B2 (en) * | 2001-07-30 | 2003-09-29 | ケル株式会社 | Cooling fan operation detection device |
| JP4217963B2 (en) * | 2003-07-08 | 2009-02-04 | 株式会社ダイフク | Plate-shaped body transfer device |
| TWI295658B (en) * | 2003-08-21 | 2008-04-11 | Daifuku Kk | Transporting apparatus |
| KR100523040B1 (en) * | 2003-11-11 | 2005-10-24 | 삼성전자주식회사 | Substrate conveyor |
| JP4613800B2 (en) | 2004-12-01 | 2011-01-19 | 株式会社Ｉｈｉ | Levitation device and transfer device |
| KR100531209B1 (en) * | 2004-12-30 | 2005-11-29 | 지 . 텍 (주) | A glass panel conveyance apparatus having the function for rising to the surface |
| KR100665715B1 (en) * | 2005-01-27 | 2007-01-09 | 주식회사 태성기연 | Apparatus for transferring of glass panel |
| JP4570545B2 (en) * | 2005-09-22 | 2010-10-27 | 東京エレクトロン株式会社 | Substrate processing apparatus and substrate processing method |
| JP4594241B2 (en) * | 2006-01-06 | 2010-12-08 | 東京エレクトロン株式会社 | Substrate transport apparatus, substrate transport method, and computer program |
| JP4333925B2 (en) * | 2006-01-19 | 2009-09-16 | 株式会社 太星技研 | Sheet glass conveyor |
| CN2917313Y (en) * | 2006-06-28 | 2007-07-04 | 深圳卷烟厂 | Wind speed controlled unit of shredded tobacco air supply duct |
| CN101489893B (en) * | 2006-10-10 | 2012-05-23 | 株式会社日本设计工业 | Sheet-like material conveying device |
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2008
- 2008-08-08 JP JP2008206216A patent/JP5151795B2/en active Active
-
2009
- 2009-07-29 TW TW098125532A patent/TWI428268B/en active
- 2009-08-04 CN CN2009101641064A patent/CN101643151B/en active Active
- 2009-08-06 KR KR1020090072265A patent/KR101077796B1/en active IP Right Grant
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103677466A (en) * | 2012-09-21 | 2014-03-26 | Smc株式会社 | Position detecting device |
| CN103677466B (en) * | 2012-09-21 | 2018-02-09 | Smc株式会社 | position detecting device |
| CN106938785A (en) * | 2017-02-28 | 2017-07-11 | 江苏科技大学 | A kind of glass substrate air-floating apparatus and detection method with shape changing detection function |
| CN106938785B (en) * | 2017-02-28 | 2022-07-19 | 江苏科技大学 | Glass substrate air floatation device with deformation detection function and detection method |
| CN111957601A (en) * | 2020-08-10 | 2020-11-20 | 深圳市宏瑞来科技有限公司 | Pressure detection device of mobile phone display screen |
| CN111957601B (en) * | 2020-08-10 | 2022-05-10 | 安徽明视光电技术有限公司 | Pressure detection device of mobile phone display screen |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201022115A (en) | 2010-06-16 |
| JP2010045072A (en) | 2010-02-25 |
| TWI428268B (en) | 2014-03-01 |
| KR101077796B1 (en) | 2011-10-28 |
| KR20100019362A (en) | 2010-02-18 |
| CN101643151B (en) | 2012-07-25 |
| JP5151795B2 (en) | 2013-02-27 |
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