KR101044379B1 - Method for forming dual damascene pattern of semiconductor device - Google Patents

Method for forming dual damascene pattern of semiconductor device Download PDF

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KR101044379B1
KR101044379B1 KR1020030095689A KR20030095689A KR101044379B1 KR 101044379 B1 KR101044379 B1 KR 101044379B1 KR 1020030095689 A KR1020030095689 A KR 1020030095689A KR 20030095689 A KR20030095689 A KR 20030095689A KR 101044379 B1 KR101044379 B1 KR 101044379B1
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forming
photoresist pattern
pattern
oxide film
rich
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KR20050064331A (en
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신대웅
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매그나칩 반도체 유한회사
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
    • H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31144—Etching the insulating layers by chemical or physical means using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step

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  • Condensed Matter Physics & Semiconductors (AREA)
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  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

본 발명은 듀얼 다마신 패턴(Dual Damascene Pattern)의 오정렬(Misalignment) 발생을 방지하는 반도체 소자의 듀얼 다마신 패턴 형성방법을 개시한다. 개시된 본 발명의 방법은, 하부 금속배선이 형성된 반도체 기판을 제공하는 단계; 상기 반도체 기판 상에 TEOS막, SiN막, 실리콘 성분이 풍부한 산화막 및 트렌치 형성영역을 한정하는 제1감광막패턴을 차례로 형성하는 단계; 상기 제1감광막패턴을 식각 장벽으로 이용하여 상기 실리콘 성분이 풍부한 산화막 및 SiN막을 식각하여 트렌치를 형성하는 단계; 상기 제1감광막패턴을 제거하는 단계; 상기 결과물 상에 상기 식각후 잔류된 실리콘 성분이 풍부한 산화막의 측벽 및 상기 실리콘 성분이 풍부한 산화막 상부의 일부를 덮고, 비아 홀 형성영역을 노출시키는 제2감광막패턴을 형성하는 단계; 상기 제2감광막패턴을 식각 장벽으로 이용하여 상기 TEOS막을 식각하여 상기 하부 금속배선의 일부를 노출시키는 비아 홀을 형성하는 단계; 및 상기 제2감광막패턴을 제거하는 단계를 포함한다.The present invention discloses a method for forming a dual damascene pattern of a semiconductor device to prevent misalignment of the dual damascene pattern. The disclosed method includes providing a semiconductor substrate having a lower metallization formed thereon; Sequentially forming a TEOS film, a SiN film, an oxide film rich in a silicon component, and a first photoresist pattern defining a trench formation region on the semiconductor substrate; Forming a trench by etching the silicon-rich oxide film and the SiN film by using the first photoresist pattern as an etch barrier; Removing the first photoresist pattern; Forming a second photoresist pattern on the resultant layer, the second photoresist pattern covering the sidewalls of the oxide-rich oxide film remaining after the etching and a portion of an upper portion of the oxide-rich oxide film and exposing a via hole forming region; Etching the TEOS layer using the second photoresist pattern as an etch barrier to form a via hole exposing a portion of the lower metal wiring; And removing the second photoresist pattern.

Description

반도체 소자의 듀얼 다마신 패턴 형성방법{METHOD FOR FORMING DUAL DAMASCENE PATTERN OF SEMICONDUCTOR DEVICE}Dual damascene pattern formation method of semiconductor device {METHOD FOR FORMING DUAL DAMASCENE PATTERN OF SEMICONDUCTOR DEVICE}

도 1a 내지 도 1d는 종래의 기술에 따른 반도체 소자의 듀얼 다마신 패턴 형성방법을 설명하기 위한 공정 단면도.1A to 1D are cross-sectional views illustrating a method of forming a dual damascene pattern of a semiconductor device according to the related art.

도 2는 종래의 기술에 따른 문제점을 설명하기 위한 단면도.2 is a cross-sectional view for explaining a problem according to the prior art.

도 3a 내지 도 3d는 본 발명의 실시예에 따른 반도체 소자의 듀얼 다마신 패턴 형성방법을 설명하기 위한 공정 단면도.3A to 3D are cross-sectional views illustrating a method of forming a dual damascene pattern of a semiconductor device according to an embodiment of the present invention.

-도면의 주요 부분에 대한 부호의 설명-Explanation of symbols on main parts of drawing

31 : 반도체 기판 32 : TEOS막31 semiconductor substrate 32 TEOS film

33 : SiN막 34 : 실리콘 성분이 풍부한 산화막33 SiN film 34 Oxide film rich in silicon

35 : 제1감광막패턴 36 : 트렌치35: first photosensitive film pattern 36: trench

37 : 제2감광막패턴 38 : 비아 홀37: second photosensitive film pattern 38: via hole

본 발명은 반도체 소자의 제조방법에 관한 것으로, 보다 상세하게는, 듀얼 다마신 패턴(Dual Damascene Pattern)의 오정렬(Misalignment) 발생을 방지하기 위 한 반도체 소자의 듀얼 다마신 패턴 형성방법에 관한 것이다.The present invention relates to a method for manufacturing a semiconductor device, and more particularly, to a method for forming a dual damascene pattern of a semiconductor device for preventing misalignment of a dual damascene pattern.

반도체 소자가 고집적화됨에 따라, 금속 배선이 다층 구조로 형성되고, 금속 배선의 폭도 줄어들고 있다. 따라서, 지금까지 일반적으로 사용된 알루미늄을 금속 배선으로 이용하는데 한계가 있으며, 최근에는 구리를 이용하여 금속 배선을 형성하는 새로운 공정이 도입되고 있다. As semiconductor devices are highly integrated, metal wirings are formed in a multilayer structure, and the width of the metal wirings is also reduced. Therefore, there is a limit to using aluminum generally used as metal wiring until now, and recently, a new process for forming metal wiring using copper has been introduced.

구리는 특성상 식각하기 어렵기 때문에, 트렌치와 비아홀로 이루어진 듀얼 다마신 패턴(Dual Damascene Pattern)을 먼저 형성한 후 비아홀과 트렌치에만 구리가 선택적으로 매립되도록 하여 구리 배선을 형성한다. Since copper is difficult to etch due to its characteristics, a dual damascene pattern including a trench and a via hole is first formed, and then copper is selectively formed in the via hole and the trench.

듀얼 다마신 공정은 상부 절연층에 트렌치를 형성하고 노출된 하부 절연층에 비아홀을 형성한 후 구리와 같은 전도성 물질을 매립하여 금속 배선과 플러그를 동시에 형성하는 공정으로써, 듀얼 다마신 공정을 실시하는 방법에는 여러 가지 방법이 있는데, 일반적으로, 트렌치(Trench)를 먼저 형성하고 비아홀(Via Hole)을 형성하는 방법과 비아홀(Via Hole)을 먼저 형성하고 트렌치(Trench)를 형성하는 방법이 있다. The dual damascene process is a process of forming a trench in an upper insulating layer, a via hole in an exposed lower insulating layer, and then embedding a conductive material such as copper to simultaneously form a metal wire and a plug. There are a number of methods. In general, there are a method of forming a trench first and forming a via hole, and a method of forming a via hole first and forming a trench.

도 1a 내지 도 1d는 종래의 기술에 따른 반도체 소자의 듀얼 다마신 패턴 형성방법을 설명하기 위한 공정 단면도이다.1A to 1D are cross-sectional views illustrating a method of forming a dual damascene pattern of a semiconductor device according to the related art.

상기 트렌치(Trench)를 먼저 형성한 다음, 비아홀(Via Hole)을 형성하는 방법을 이용한 종래의 반도체 소자의 듀얼 다마신 패턴 형성방법에 대하여 도 1a 내지 도 1d를 참조하여 간략하게 설명하면 다음과 같다.A method of forming a dual damascene pattern of a conventional semiconductor device using a method of forming the trench first and then forming a via hole will be briefly described with reference to FIGS. 1A to 1D. .

종래의 반도체 소자의 듀얼 다마신 패턴 형성방법은, 도 1a에 도시된 바와 같이, 먼저, 하부 금속배선(미도시)이 형성된 반도체 기판(1) 상에 제1TEOS(Tetra Ethyl Ortho Silicate)막(2), SiN막(3), 제2TEOS(Tetra Ethyl Ortho Silicate)막(4) 및 트렌치(Trench) 형성영역(미도시)을 한정하는 제1감광막패턴(5)을 차례로 형성한다. In the conventional method of forming a dual damascene pattern of a semiconductor device, as shown in FIG. 1A, first, a first Tetra Ethyl Ortho Silicate (TEOS) film 2 is formed on a semiconductor substrate 1 on which a lower metal wiring (not shown) is formed. ), A SiN film 3, a second TEOS (Tetra Ethyl Ortho Silicate) film 4, and a first photoresist film pattern 5 defining a trench formation region (not shown) are sequentially formed.

다음으로, 도 1b에 도시된 바와 같이, 상기 제1감광막패턴을 식각 장벽으로 이용하여 상기 제2TEOS막(4) 및 SiN막(3)을 식각하여 트렌치(6)를 형성한다. 그리고, 상기 제1감광막패턴을 제거한다. Next, as shown in FIG. 1B, the trench 6 is formed by etching the second TEOS film 4 and the SiN film 3 using the first photoresist pattern as an etch barrier. Then, the first photoresist pattern is removed.

이어서, 도 1c에 도시된 바와 같이, 상기 결과물 상에 비아 홀(Via Hole) 형성영역(미도시)을 한정하는 제2감광막패턴(7)을 형성한다.Subsequently, as illustrated in FIG. 1C, a second photoresist layer pattern 7 defining a via hole formation region (not shown) is formed on the resultant.

그런다음, 도 1d에 도시된 바와 같이, 상기 제2감광막패턴을 식각 장벽으로 이용하여 상기 제1TEOS막(2)을 식각하여 상기 하부 금속배선의 일부를 노출시키는 비아 홀(Via Hole)(8)을 형성한다. 이어서, 상기 제2감광막패턴을 제거한다.Next, as illustrated in FIG. 1D, a via hole 8 exposing a part of the lower metal wiring by etching the first TEOS layer 2 using the second photoresist pattern as an etch barrier. To form. Subsequently, the second photoresist pattern is removed.

그러나, 종래의 기술에서는, 상기 비아 홀 형성을 위한 상기 제2감광막패턴은 매우 미세한 제작을 필요로 하는 까다로운 문제점이 있다. 도 2는 종래의 기술에 따른 문제점을 설명하기 위한 단면도이다. 종래의 기술에 따르면, 도 2에 도시된 바와 같이, 상기 트렌치(6)의 형성 후, 상기 비아 홀(8)을 형성하기 위한 상기 제2감광막패턴(7)을 형성할 시에 정렬(Alignment) 조건을 만족시키지 못할 경우, 듀얼 다마신 패턴의 오정렬(Misalignment)이 발생하여 상기 비아 홀(8)의 크기를 감소시키거나, 심할 경우에는 상기 비아 홀(8)이 식각되지 않는 문제점이 발생된다.However, in the related art, the second photoresist pattern for forming the via holes has a difficult problem of requiring very fine fabrication. 2 is a cross-sectional view illustrating a problem according to the prior art. According to the related art, as shown in FIG. 2, after the formation of the trench 6, alignment is performed when the second photoresist pattern 7 for forming the via hole 8 is formed. If the condition is not satisfied, misalignment of the dual damascene pattern occurs to reduce the size of the via hole 8 or, in severe cases, the via hole 8 may not be etched.

도 2에서 미설명된 도면부호 1은 반도체 기판, 2는 제1TEOS막, 3은 SiN막 및 4는 제2TEOS막을 각각 나타낸 것이다.In FIG. 2, reference numeral 1 denotes a semiconductor substrate, 2 denotes a first TEOS film, 3 denotes a SiN film, and 4 denotes a second TEOS film.

따라서, 본 발명은 상기와 같은 문제점을 해결하기 위하여 안출된 것으로서, 상기 트렌치 형성 후, 상기 비아 홀 형성을 위한 상기 제2감광막패턴 형성에 있어서, 그 까다로움을 극복하여, 듀얼 다마신 패턴의 오정렬(Misalignment)이 발생됨을 방지하여, 비아 홀 식각공정 마진(Margin)을 확보할 수 있는 반도체 소자의 듀얼 다마신 패턴 형성방법을 제공함에 그 목적이 있다.Accordingly, the present invention has been made to solve the above problems, in the formation of the second photoresist pattern for forming the via hole after the trench formation, to overcome the difficulty, misalignment of the dual damascene pattern It is an object of the present invention to provide a method for forming a dual damascene pattern of a semiconductor device which prevents misalignment from occurring and secures a margin of a via hole etching process.

상기와 같은 목적을 달성하기 위한 본 발명의 반도체 소자의 듀얼 다마신 패턴 형성방법은, 하부 금속배선이 형성된 반도체 기판을 제공하는 단계; 상기 반도체 기판 상에 TEOS막, SiN막, 실리콘 성분이 풍부한 산화막 및 트렌치 형성영역을 한정하는 제1감광막패턴을 차례로 형성하는 단계; 상기 제1감광막패턴을 식각 장벽으로 이용하여 상기 실리콘 성분이 풍부한 산화막 및 SiN막을 식각하여 트렌치를 형성하는 단계; 상기 제1감광막패턴을 제거하는 단계; 상기 결과물 상에 상기 식각후 잔류된 실리콘 성분이 풍부한 산화막의 측벽 및 상기 실리콘 성분이 풍부한 산화막 상부의 일부를 덮고, 비아 홀 형성영역을 노출시키는 제2감광막패턴을 형성하는 단계; 상기 제2감광막패턴을 식각 장벽으로 이용하여 상기 TEOS막을 식각하여 상기 하부 금속배선의 일부를 노출시키는 비아 홀을 형성하는 단계; 및 상기 제2감광막패턴을 제거하는 단계를 포함한다. The dual damascene pattern forming method of the semiconductor device of the present invention for achieving the above object comprises the steps of: providing a semiconductor substrate formed with a lower metal wiring; Sequentially forming a TEOS film, a SiN film, an oxide film rich in a silicon component, and a first photoresist pattern defining a trench formation region on the semiconductor substrate; Forming a trench by etching the silicon-rich oxide film and the SiN film by using the first photoresist pattern as an etch barrier; Removing the first photoresist pattern; Forming a second photoresist pattern on the resultant layer, the second photoresist pattern covering the sidewalls of the oxide-rich oxide film remaining after the etching and a portion of an upper portion of the oxide-rich oxide film and exposing a via hole forming region; Etching the TEOS layer using the second photoresist pattern as an etch barrier to form a via hole exposing a portion of the lower metal wiring; And removing the second photoresist pattern.                     

여기서, 상기 실리콘 성분이 풍부한 산화막의 식각 공정은, 식각 가스로 02와 C4F8의 혼합 가스를 사용한다.Here, in the etching process of the oxide film rich in the silicon component, a mixed gas of 02 and C4F8 is used as an etching gas.

본 발명에 따르면, 비아 홀 형성을 위한 제2감광막패턴 형성에 있어서, 그 까다로움을 극복하여 듀얼 다마신 패턴의 오정렬(Misalignment) 발생을 방지할 수 있다.According to the present invention, in the formation of the second photoresist pattern for forming the via hole, it is possible to overcome the difficulty to prevent misalignment of the dual damascene pattern.

(실시예)(Example)

이하, 첨부된 도면에 의거하여 본 발명의 바람직한 실시예를 보다 상세하게 설명하도록 한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

도 3a 내지 도 3d는 본 발명의 실시예에 따른 반도체 소자의 듀얼 다마신 패턴 형성방법을 설명하기 위한 각 공정별 단면도이다.3A to 3D are cross-sectional views of respective processes for explaining a method of forming a dual damascene pattern of a semiconductor device according to an embodiment of the present invention.

본 발명의 실시예에 따른 반도체 소자의 듀얼 다마신 패턴 형성방법은, 도 3a에 도시된 바와 같이, 먼저, 하부 금속배선(미도시)이 형성된 반도체 기판(31) 상에 TEOS(Tetra Ethyl Ortho Silicate)막(32), SiN막(33), 실리콘 성분이 풍부한 산화막(Silicon Rich Oxide)(34) 및 트렌치(Trench) 형성영역(미도시)을 한정하는 제1감광막패턴(35)을 차례로 형성한다. 여기서, 상기 실리콘 성분이 풍부한 산화막(34)은 내부에 실리콘(Silicon)성분이 다량 포함되어 있어, 일반적인 산화막에 비해 견고하고, 식각률(Etch Rate)이 낮은 성질을 갖고 있다.In the method of forming a dual damascene pattern of a semiconductor device according to an embodiment of the present invention, first, as shown in FIG. 3A, first, a Tetra Ethyl Ortho Silicate (TEOS) is formed on a semiconductor substrate 31 on which a lower metal wiring (not shown) is formed. ), A SiN film 33, a silicon rich oxide 34, and a first photoresist pattern 35 defining a trench formation region (not shown) are formed in this order. . Here, the oxide film 34 rich in the silicon component contains a large amount of silicon (silicon) components therein, and is stronger than a general oxide film, and has a low etching rate.

다음으로, 도 3b에 도시된 바와 같이, 상기 제1감광막패턴을 식각 장벽으로 이용하여 상기 실리콘 성분이 풍부한 산화막(34) 및 SiN막(33)을 식각하여 트렌치(36)를 형성한다. 여기서, 상기 실리콘 성분이 풍부한 산화막(34)을 식각하 기 위한 가스로는 02와 C4F8의 혼합 가스를 사용한다. 그리고, 상기 제1감광막패턴을 제거한다. Next, as shown in FIG. 3B, the trench 36 is formed by etching the oxide film 34 and the SiN film 33 rich in the silicon component using the first photoresist pattern as an etch barrier. Here, a mixed gas of 02 and C4F8 is used as a gas for etching the oxide film 34 rich in the silicon component. Then, the first photoresist pattern is removed.

이어서, 도 3c에 도시된 바와 같이, 상기 결과물 상에 비아 홀 형성 영역 외부의 트렌치(36) 부위 및 이에 인접한 상기 실리콘 성분이 풍부한 산화막(34)의 일부를 덮고, 비아 홀 형성영역(36) 및 일부를 제외한 실리콘 성분이 풍부한 산화막(34)의 나머지 부분을 노출하는 제2감광막패턴(37)을 형성한다.Subsequently, as shown in FIG. 3C, a portion of the trench 36 outside the via hole forming region and a portion of the oxide layer 34 rich in the silicon component adjacent thereto are covered on the resultant, and the via hole forming region 36 and A second photosensitive film pattern 37 exposing the remaining portion of the oxide film 34 rich in silicon components except for a portion thereof is formed.

그런다음, 도 3d에 도시된 바와 같이, 상기 제2감광막패턴을 식각 장벽으로 이용하여 상기 TEOS막(32)을 식각하여 상기 하부 금속배선의 일부를 노출시키는 비아 홀(Via Hole)(38)을 형성한다. 이어서, 상기 제2감광막패턴을 제거한다. Next, as shown in FIG. 3D, a via hole 38 exposing a portion of the lower metal wiring by etching the TEOS layer 32 using the second photoresist pattern as an etch barrier. Form. Subsequently, the second photoresist pattern is removed.

이와 같이 하면, 상기 제2감광막패턴에 의해 노출된 상기 실리콘 성분이 풍부한 산화막(34)은 그 하부의 TEOS막(32)에 비해 식각률이 매우 낮기 때문에, 상기 노출된 실리콘 성분이 풍부한 산화막(34)의 손상이 일어날 염려가 없다. 다시 말하면, 트렌치(36) 외부의 실리콘 성분이 풍부한 산화막(34) 상에 제2감광막패턴이 형성되지 않더라도, 트렌치(36) 내부의 비아 홀(38) 영역만 노출시키는 제2감광막패턴을 형성하면 되므로, 종래의 비아 홀 형성을 위한 제2감광막패턴 형성의 까다로움을 극복할 수 있다.In this way, the oxide film 34 rich in the silicon component exposed by the second photosensitive film pattern has a very low etching rate compared to the TEOS film 32 below, and thus the oxide film 34 rich in the exposed silicon component. There is no fear of damage. In other words, even if the second photoresist pattern is not formed on the oxide layer 34 rich in the silicon component outside the trench 36, the second photoresist pattern that exposes only the via hole 38 region inside the trench 36 is formed. Therefore, it is possible to overcome the difficulty of forming the second photoresist layer pattern for forming the conventional via hole.

이상에서와 같이, 본 발명은 듀얼 다마신 패턴을 형성함에 있어서, TEOS막에 비해 식각률이 매우 낮고, 견고한 실리콘 성분이 풍부한 산화막을 상기 TEOS막 상에 형성함으로써, 트렌치 형성 후의 비아 홀 형성을 위한 제2감광막패턴의 형성 시, 상기 트렌치 외부의 상기 실리콘 성분이 풍부한 산화막 상에 상기 제2감광막패턴을 형성하지 않더라도, 상기 트렌치 내부의 비아 홀 영역만 노출시키는 제2감광막패턴을 형성하면 된다. As described above, the present invention provides a method for forming via holes after trench formation by forming an oxide film having a very low etching rate and a rich silicon component on the TEOS film in forming a dual damascene pattern. When forming the second photoresist layer pattern, the second photoresist layer pattern exposing only the via hole region inside the trench may be formed even if the second photoresist layer pattern is not formed on the oxide-rich oxide film outside the trench.

즉, 상기 트렌치 외부의 상기 실리콘 성분이 풍부한 산화막이 상기 제2감광막패턴에 노출되더라도, 상기 노출된 실리콘 성분이 풍부한 산화막은, 그 막의 특성상 손상될 염려가 없으므로, 제2감광막패턴 형성의 까다로움을 극복하여 듀얼 다마신 패턴의 오정렬(Misalignment)이 발생됨을 방지할 수 있으며, 결국, 비아 홀 식각 공정 마진(Margin)을 확보할 수 있다.That is, even if the oxide film rich in the silicon component outside the trench is exposed to the second photoresist pattern, the oxide film rich in the exposed silicon component does not have to be damaged due to the characteristics of the film, thus making it difficult to form the second photoresist pattern. By overcoming, misalignment of the dual damascene pattern may be prevented and, as a result, a via hole etching process margin may be secured.

Claims (2)

하부 금속배선이 형성된 반도체 기판을 제공하는 단계;Providing a semiconductor substrate having a lower metal wiring formed thereon; 상기 반도체 기판 상에 TEOS막, SiN막, 실리콘 성분이 풍부한 산화막 및 트렌치 형성영역을 한정하는 제1감광막패턴을 차례로 형성하는 단계;Sequentially forming a TEOS film, a SiN film, an oxide film rich in a silicon component, and a first photoresist pattern defining a trench formation region on the semiconductor substrate; 상기 제1감광막패턴을 식각 장벽으로 이용하여 상기 실리콘 성분이 풍부한 산화막 및 SiN막을 식각하여 트렌치를 형성하는 단계;Forming a trench by etching the silicon-rich oxide film and the SiN film by using the first photoresist pattern as an etch barrier; 상기 제1감광막패턴을 제거하는 단계;Removing the first photoresist pattern; 비아 홀 형성 영역 외부의 상기 트렌치 부위 및 이에 인접한 상기 실리콘 성분이 풍부한 산화막의 일부를 덮고, 상기 비아 홀 형성영역 및 상기 일부를 제외한 실리콘 성분이 풍부한 산화막의 나머지 부분을 노출하는 제2감광막패턴을 형성하는 단계;Forming a second photoresist pattern covering the trench portion outside the via hole forming region and a portion of the oxide film rich in the silicon component adjacent thereto and exposing the remaining portion of the oxide film rich in the silicon component except the via hole forming region and the portion; Making; 상기 제2감광막패턴을 식각 장벽으로 이용하여 상기 TEOS막을 식각하여 상기 하부 금속배선의 일부를 노출시키는 비아 홀을 형성하는 단계; 및 Etching the TEOS layer using the second photoresist pattern as an etch barrier to form a via hole exposing a portion of the lower metal wiring; And 상기 제2감광막패턴을 제거하는 단계를 포함하는 것을 특징으로 하는 반도체 소자의 듀얼 다마신 패턴 형성방법.Removing the second photoresist pattern; and forming a dual damascene pattern of the semiconductor device. 제 1항에 있어서, 상기 실리콘 성분이 풍부한 산화막의 식각 공정은, 식각 가스로 02와 C4F8의 혼합 가스를 사용하는 것을 특징으로 하는 반도체 소자의 듀얼 다마신 패턴 형성방법. The method for forming a dual damascene pattern of a semiconductor device according to claim 1, wherein the etching process of the oxide film rich in the silicon component uses a mixed gas of 02 and C4F8 as an etching gas.
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KR20000046075A (en) * 1998-12-31 2000-07-25 김영환 Method for forming copper metal interconnect of semiconductor device
KR100389041B1 (en) * 2000-08-04 2003-06-25 삼성전자주식회사 Method of forming an interconnection line using an hsq layer as an interdielectric layer
KR20030064985A (en) * 2002-01-29 2003-08-06 삼성전자주식회사 Dry etching method for oxide film in dual damascene process

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KR20000046075A (en) * 1998-12-31 2000-07-25 김영환 Method for forming copper metal interconnect of semiconductor device
KR100389041B1 (en) * 2000-08-04 2003-06-25 삼성전자주식회사 Method of forming an interconnection line using an hsq layer as an interdielectric layer
KR20030064985A (en) * 2002-01-29 2003-08-06 삼성전자주식회사 Dry etching method for oxide film in dual damascene process

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