KR101021450B1 - 알루미늄-탄화 규소질 복합체 - Google Patents

알루미늄-탄화 규소질 복합체 Download PDF

Info

Publication number
KR101021450B1
KR101021450B1 KR1020067027916A KR20067027916A KR101021450B1 KR 101021450 B1 KR101021450 B1 KR 101021450B1 KR 1020067027916 A KR1020067027916 A KR 1020067027916A KR 20067027916 A KR20067027916 A KR 20067027916A KR 101021450 B1 KR101021450 B1 KR 101021450B1
Authority
KR
South Korea
Prior art keywords
aluminum
silicon carbide
carbide composite
heat dissipation
aluminum layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020067027916A
Other languages
English (en)
Korean (ko)
Other versions
KR20070064293A (ko
Inventor
고 이와모토
히데키 히로츠루
가즈노리 히라하라
Original Assignee
덴끼 가가꾸 고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 덴끼 가가꾸 고교 가부시키가이샤 filed Critical 덴끼 가가꾸 고교 가부시키가이샤
Publication of KR20070064293A publication Critical patent/KR20070064293A/ko
Application granted granted Critical
Publication of KR101021450B1 publication Critical patent/KR101021450B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/05—Insulated conductive substrates, e.g. insulated metal substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
    • C04B41/515—Other specific metals
    • C04B41/5155—Aluminium
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/88—Metals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/12—Mountings, e.g. non-detachable insulating substrates
    • H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/12—Mountings, e.g. non-detachable insulating substrates
    • H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
    • H01L23/142—Metallic substrates having insulating layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/12—Mountings, e.g. non-detachable insulating substrates
    • H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
    • H01L23/15—Ceramic or glass substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3733—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon having a heterogeneous or anisotropic structure, e.g. powder or fibres in a matrix, wire mesh, porous structures
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00844—Uses not provided for elsewhere in C04B2111/00 for electronic applications
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0284—Details of three-dimensional rigid printed circuit boards
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0104—Properties and characteristics in general
    • H05K2201/0116—Porous, e.g. foam
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09009—Substrate related
    • H05K2201/09018—Rigid curved substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12007—Component of composite having metal continuous phase interengaged with nonmetal continuous phase
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249955—Void-containing component partially impregnated with adjacent component
    • Y10T428/249956—Void-containing component is inorganic
    • Y10T428/249957—Inorganic impregnant
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249971—Preformed hollow element-containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249971—Preformed hollow element-containing
    • Y10T428/249974—Metal- or silicon-containing element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249986—Void-containing component contains also a solid fiber or solid particle
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249987—With nonvoid component of specified composition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249987—With nonvoid component of specified composition
    • Y10T428/24999—Inorganic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Manufacture Of Alloys Or Alloy Compounds (AREA)
  • Ceramic Products (AREA)
KR1020067027916A 2004-09-14 2005-09-07 알루미늄-탄화 규소질 복합체 Expired - Lifetime KR101021450B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2004-00266144 2004-09-14
JP2004266144 2004-09-14

Publications (2)

Publication Number Publication Date
KR20070064293A KR20070064293A (ko) 2007-06-20
KR101021450B1 true KR101021450B1 (ko) 2011-03-15

Family

ID=36059931

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020067027916A Expired - Lifetime KR101021450B1 (ko) 2004-09-14 2005-09-07 알루미늄-탄화 규소질 복합체

Country Status (7)

Country Link
US (1) US7838107B2 (enExample)
EP (1) EP1796164B1 (enExample)
JP (1) JP4761157B2 (enExample)
KR (1) KR101021450B1 (enExample)
CN (1) CN100472766C (enExample)
TW (1) TW200618697A (enExample)
WO (1) WO2006030676A1 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9506197D0 (en) 1995-03-27 1995-05-17 Hoffmann La Roche Inhibition of tau-tau association.
JP4996600B2 (ja) * 2006-04-26 2012-08-08 電気化学工業株式会社 アルミニウム−炭化珪素質複合体及びそれを用いた放熱部品
CN101438401B (zh) * 2006-05-09 2013-08-28 电气化学工业株式会社 铝-碳化硅质复合体及其加工方法
JP2010024077A (ja) * 2008-07-17 2010-02-04 Denki Kagaku Kogyo Kk アルミニウム−炭化珪素質複合体及びその製造方法
WO2010140541A1 (ja) * 2009-06-02 2010-12-09 電気化学工業株式会社 アルミニウム－黒鉛質複合体、それを用いた放熱部品及びｌｅｄ発光部材
JP5602566B2 (ja) * 2010-09-30 2014-10-08 日本ファインセラミックス株式会社 アルミニウム−炭化珪素質複合体からなる伝熱部材
JP5662834B2 (ja) * 2011-02-22 2015-02-04 電気化学工業株式会社 アルミニウム−炭化珪素質複合体の製造方法
CN103433491B (zh) * 2013-09-18 2015-05-13 湖南航天工业总公司 一种碳化硅igbt基板骨架真空压力渗铝装置及双面覆铝方法
CN103658659A (zh) * 2013-12-05 2014-03-26 湖南航天诚远精密机械有限公司 双面覆铝铝碳化硅igbt基板的近净成形方法
JPWO2016002943A1 (ja) * 2014-07-04 2017-06-08 デンカ株式会社 放熱部品及びその製造方法
WO2016013648A1 (ja) * 2014-07-24 2016-01-28 電気化学工業株式会社 複合体及びその製造方法
WO2016017689A1 (ja) * 2014-07-31 2016-02-04 電気化学工業株式会社 アルミニウム‐炭化珪素質複合体及びその製造方法
CN106796920B (zh) * 2014-08-06 2019-09-24 电化株式会社 散热部件及其制造方法
JP6623173B2 (ja) * 2014-12-18 2019-12-18 デンカ株式会社 炭化珪素質複合体の製造方法
CN104617204B (zh) * 2015-01-16 2017-07-14 隆科电子(惠阳)有限公司 一种碳化硅基电路板及其制备方法
CN106145952B (zh) * 2015-03-23 2019-06-11 隆科电子(惠阳)有限公司 高绝缘碳化硅陶瓷基板与碳化硅基电路板及其制备方法
CN109309066B (zh) * 2017-07-27 2020-10-20 比亚迪股份有限公司 一种陶瓷覆铝铜板及其制备方法、散热元件和igbt模组
WO2020013300A1 (ja) * 2018-07-13 2020-01-16 デンカ株式会社 金属－炭化珪素質複合体、及び金属－炭化珪素質複合体の製造方法
JP2022013968A (ja) * 2018-11-14 2022-01-19 デンカ株式会社 放熱基板を収容するパッケージおよび梱包箱
JP7116689B2 (ja) * 2019-01-30 2022-08-10 デンカ株式会社 放熱部材およびその製造方法
CN112552079B (zh) * 2019-09-26 2023-09-12 航天特种材料及工艺技术研究所 一种金属化陶瓷基复合材料及曲面金属化的方法
EP3958302A1 (de) 2020-08-17 2022-02-23 Infineon Technologies AG Bodenplatte für ein halbleitermodul und verfahren zum herstellen einer bodenplatte
CN114603315B (zh) * 2022-02-28 2023-03-24 江南大学 一种金属基陶瓷复合材料基板拱形表面的车削成形方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000281468A (ja) * 1998-11-12 2000-10-10 Denki Kagaku Kogyo Kk 炭化珪素質複合体及びその製造方法とそれを用いた放熱部品

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5119864A (en) 1988-11-10 1992-06-09 Lanxide Technology Company, Lp Method of forming a metal matrix composite through the use of a gating means
US5004035A (en) * 1988-11-10 1991-04-02 Lanxide Technology Company, Lp Method of thermo-forming a novel metal matrix composite body and products produced therefrom
US5465481A (en) * 1993-10-04 1995-11-14 Motorola, Inc. Method for fabricating a semiconductor package
JPH1129379A (ja) * 1997-02-14 1999-02-02 Ngk Insulators Ltd 半導体ヒートシンク用複合材料及びその製造方法
JP3496816B2 (ja) * 1999-06-25 2004-02-16 電気化学工業株式会社 金属−セラミックス複合体とそれを用いた放熱部品
JP2001291809A (ja) * 2000-04-07 2001-10-19 Denki Kagaku Kogyo Kk 放熱部品
JP2004022964A (ja) * 2002-06-19 2004-01-22 Hitachi Metals Ltd Ａｌ−ＳｉＣ系複合体およびそれを用いた放熱部品、半導体モジュール装置
JP3792180B2 (ja) 2002-07-10 2006-07-05 電気化学工業株式会社 放熱部品の製造方法
JP3913130B2 (ja) * 2002-07-16 2007-05-09 電気化学工業株式会社 アルミニウム−炭化珪素質板状複合体
US20040246682A1 (en) * 2003-06-09 2004-12-09 Sumitomo Metal (Smi) Eectronics Devices Inc. Apparatus and package for high frequency usages and their manufacturing method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000281468A (ja) * 1998-11-12 2000-10-10 Denki Kagaku Kogyo Kk 炭化珪素質複合体及びその製造方法とそれを用いた放熱部品

Also Published As

Publication number Publication date
CN1977378A (zh) 2007-06-06
WO2006030676A1 (ja) 2006-03-23
US20070248829A1 (en) 2007-10-25
CN100472766C (zh) 2009-03-25
JP4761157B2 (ja) 2011-08-31
TW200618697A (en) 2006-06-01
TWI357788B (enExample) 2012-02-01
JPWO2006030676A1 (ja) 2008-05-15
US7838107B2 (en) 2010-11-23
EP1796164A4 (en) 2011-11-09
KR20070064293A (ko) 2007-06-20
EP1796164B1 (en) 2020-01-01
EP1796164A1 (en) 2007-06-13

Similar Documents

Publication Publication Date Title
KR101021450B1 (ko) 알루미늄-탄화 규소질 복합체
US8025962B2 (en) Aluminum-silicon carbide composite and heat dissipation device employing the same
KR101344152B1 (ko) 알루미늄-탄화규소질 복합체 및 그것을 사용한 방열 부품
KR100637635B1 (ko) 탄화규소질 복합체 및 그 제조 방법과 이를 사용한 방열부품
US20090075056A1 (en) Aluminum-silicon carbide composite body and method for processing the same
EP3121847B1 (en) Aluminium-silicon carbide composite, and power-module base plate
JP6636924B2 (ja) アルミニウム‐炭化珪素質複合体及びその製造方法
JP3907620B2 (ja) セラミックス回路基板一体型アルミニウム−炭化珪素質複合体及びその製造方法
JP4864593B2 (ja) アルミニウム−炭化珪素質複合体の製造方法
JP5662834B2 (ja) アルミニウム−炭化珪素質複合体の製造方法
JP3732193B2 (ja) アルミニウム−炭化珪素質複合体及びその製造方法
US20240404913A1 (en) Heat dissipation member
JP2025183379A (ja) 放熱部材

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20061229

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20081110

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20101019

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20101221

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20110304

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20110304

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
FPAY Annual fee payment

Payment date: 20140221

Year of fee payment: 4

PR1001 Payment of annual fee

Payment date: 20140221

Start annual number: 4

End annual number: 4

FPAY Annual fee payment

Payment date: 20150224

Year of fee payment: 5

PR1001 Payment of annual fee

Payment date: 20150224

Start annual number: 5

End annual number: 5

FPAY Annual fee payment

Payment date: 20160218

Year of fee payment: 6

PR1001 Payment of annual fee

Payment date: 20160218

Start annual number: 6

End annual number: 6

FPAY Annual fee payment

Payment date: 20170220

Year of fee payment: 7

PR1001 Payment of annual fee

Payment date: 20170220

Start annual number: 7

End annual number: 7

FPAY Annual fee payment

Payment date: 20180219

Year of fee payment: 8

PR1001 Payment of annual fee

Payment date: 20180219

Start annual number: 8

End annual number: 8

FPAY Annual fee payment

Payment date: 20200129

Year of fee payment: 10

PR1001 Payment of annual fee

Payment date: 20200129

Start annual number: 10

End annual number: 10

PR1001 Payment of annual fee

Payment date: 20210218

Start annual number: 11

End annual number: 11