TW200618697A - Aluminum-silicon carbide composite - Google Patents
Aluminum-silicon carbide compositeInfo
- Publication number
- TW200618697A TW200618697A TW094131533A TW94131533A TW200618697A TW 200618697 A TW200618697 A TW 200618697A TW 094131533 A TW094131533 A TW 094131533A TW 94131533 A TW94131533 A TW 94131533A TW 200618697 A TW200618697 A TW 200618697A
- Authority
- TW
- Taiwan
- Prior art keywords
- aluminum
- silicon carbide
- carbide composite
- mainly containing
- metal mainly
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/05—Insulated conductive substrates, e.g. insulated metal substrate
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
- C04B41/515—Other specific metals
- C04B41/5155—Aluminium
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/88—Metals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/142—Metallic substrates having insulating layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/15—Ceramic or glass substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3733—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon having a heterogeneous or anisotropic structure, e.g. powder or fibres in a matrix, wire mesh, porous structures
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
- C04B2111/00844—Uses not provided for elsewhere in C04B2111/00 for electronic applications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0284—Details of three-dimensional rigid printed circuit boards
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0104—Properties and characteristics in general
- H05K2201/0116—Porous, e.g. foam
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09009—Substrate related
- H05K2201/09018—Rigid curved substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12007—Component of composite having metal continuous phase interengaged with nonmetal continuous phase
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249955—Void-containing component partially impregnated with adjacent component
- Y10T428/249956—Void-containing component is inorganic
- Y10T428/249957—Inorganic impregnant
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249971—Preformed hollow element-containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249971—Preformed hollow element-containing
- Y10T428/249974—Metal- or silicon-containing element
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249986—Void-containing component contains also a solid fiber or solid particle
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249987—With nonvoid component of specified composition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249987—With nonvoid component of specified composition
- Y10T428/24999—Inorganic
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Materials Engineering (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Manufacture Of Alloys Or Alloy Compounds (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004266144 | 2004-09-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200618697A true TW200618697A (en) | 2006-06-01 |
| TWI357788B TWI357788B (enExample) | 2012-02-01 |
Family
ID=36059931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094131533A TW200618697A (en) | 2004-09-14 | 2005-09-13 | Aluminum-silicon carbide composite |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7838107B2 (enExample) |
| EP (1) | EP1796164B1 (enExample) |
| JP (1) | JP4761157B2 (enExample) |
| KR (1) | KR101021450B1 (enExample) |
| CN (1) | CN100472766C (enExample) |
| TW (1) | TW200618697A (enExample) |
| WO (1) | WO2006030676A1 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI699346B (zh) * | 2014-12-18 | 2020-07-21 | 日商電化股份有限公司 | 碳化矽質複合體之製造方法 |
| TWI796503B (zh) * | 2018-07-13 | 2023-03-21 | 日商電化股份有限公司 | 金屬-碳化矽質複合體、及金屬-碳化矽質複合體之製造方法 |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9506197D0 (en) | 1995-03-27 | 1995-05-17 | Hoffmann La Roche | Inhibition of tau-tau association. |
| JP4996600B2 (ja) * | 2006-04-26 | 2012-08-08 | 電気化学工業株式会社 | アルミニウム−炭化珪素質複合体及びそれを用いた放熱部品 |
| CN101438401B (zh) * | 2006-05-09 | 2013-08-28 | 电气化学工业株式会社 | 铝-碳化硅质复合体及其加工方法 |
| JP2010024077A (ja) * | 2008-07-17 | 2010-02-04 | Denki Kagaku Kogyo Kk | アルミニウム−炭化珪素質複合体及びその製造方法 |
| WO2010140541A1 (ja) * | 2009-06-02 | 2010-12-09 | 電気化学工業株式会社 | アルミニウム-黒鉛質複合体、それを用いた放熱部品及びled発光部材 |
| JP5602566B2 (ja) * | 2010-09-30 | 2014-10-08 | 日本ファインセラミックス株式会社 | アルミニウム−炭化珪素質複合体からなる伝熱部材 |
| JP5662834B2 (ja) * | 2011-02-22 | 2015-02-04 | 電気化学工業株式会社 | アルミニウム−炭化珪素質複合体の製造方法 |
| CN103433491B (zh) * | 2013-09-18 | 2015-05-13 | 湖南航天工业总公司 | 一种碳化硅igbt基板骨架真空压力渗铝装置及双面覆铝方法 |
| CN103658659A (zh) * | 2013-12-05 | 2014-03-26 | 湖南航天诚远精密机械有限公司 | 双面覆铝铝碳化硅igbt基板的近净成形方法 |
| JPWO2016002943A1 (ja) * | 2014-07-04 | 2017-06-08 | デンカ株式会社 | 放熱部品及びその製造方法 |
| WO2016013648A1 (ja) * | 2014-07-24 | 2016-01-28 | 電気化学工業株式会社 | 複合体及びその製造方法 |
| WO2016017689A1 (ja) * | 2014-07-31 | 2016-02-04 | 電気化学工業株式会社 | アルミニウム‐炭化珪素質複合体及びその製造方法 |
| CN106796920B (zh) * | 2014-08-06 | 2019-09-24 | 电化株式会社 | 散热部件及其制造方法 |
| CN104617204B (zh) * | 2015-01-16 | 2017-07-14 | 隆科电子(惠阳)有限公司 | 一种碳化硅基电路板及其制备方法 |
| CN106145952B (zh) * | 2015-03-23 | 2019-06-11 | 隆科电子(惠阳)有限公司 | 高绝缘碳化硅陶瓷基板与碳化硅基电路板及其制备方法 |
| CN109309066B (zh) * | 2017-07-27 | 2020-10-20 | 比亚迪股份有限公司 | 一种陶瓷覆铝铜板及其制备方法、散热元件和igbt模组 |
| JP2022013968A (ja) * | 2018-11-14 | 2022-01-19 | デンカ株式会社 | 放熱基板を収容するパッケージおよび梱包箱 |
| JP7116689B2 (ja) * | 2019-01-30 | 2022-08-10 | デンカ株式会社 | 放熱部材およびその製造方法 |
| CN112552079B (zh) * | 2019-09-26 | 2023-09-12 | 航天特种材料及工艺技术研究所 | 一种金属化陶瓷基复合材料及曲面金属化的方法 |
| EP3958302A1 (de) | 2020-08-17 | 2022-02-23 | Infineon Technologies AG | Bodenplatte für ein halbleitermodul und verfahren zum herstellen einer bodenplatte |
| CN114603315B (zh) * | 2022-02-28 | 2023-03-24 | 江南大学 | 一种金属基陶瓷复合材料基板拱形表面的车削成形方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5119864A (en) | 1988-11-10 | 1992-06-09 | Lanxide Technology Company, Lp | Method of forming a metal matrix composite through the use of a gating means |
| US5004035A (en) * | 1988-11-10 | 1991-04-02 | Lanxide Technology Company, Lp | Method of thermo-forming a novel metal matrix composite body and products produced therefrom |
| US5465481A (en) * | 1993-10-04 | 1995-11-14 | Motorola, Inc. | Method for fabricating a semiconductor package |
| JPH1129379A (ja) * | 1997-02-14 | 1999-02-02 | Ngk Insulators Ltd | 半導体ヒートシンク用複合材料及びその製造方法 |
| JP3468358B2 (ja) * | 1998-11-12 | 2003-11-17 | 電気化学工業株式会社 | 炭化珪素質複合体及びその製造方法とそれを用いた放熱部品 |
| JP3496816B2 (ja) * | 1999-06-25 | 2004-02-16 | 電気化学工業株式会社 | 金属−セラミックス複合体とそれを用いた放熱部品 |
| JP2001291809A (ja) * | 2000-04-07 | 2001-10-19 | Denki Kagaku Kogyo Kk | 放熱部品 |
| JP2004022964A (ja) * | 2002-06-19 | 2004-01-22 | Hitachi Metals Ltd | Al−SiC系複合体およびそれを用いた放熱部品、半導体モジュール装置 |
| JP3792180B2 (ja) | 2002-07-10 | 2006-07-05 | 電気化学工業株式会社 | 放熱部品の製造方法 |
| JP3913130B2 (ja) * | 2002-07-16 | 2007-05-09 | 電気化学工業株式会社 | アルミニウム−炭化珪素質板状複合体 |
| US20040246682A1 (en) * | 2003-06-09 | 2004-12-09 | Sumitomo Metal (Smi) Eectronics Devices Inc. | Apparatus and package for high frequency usages and their manufacturing method |
-
2005
- 2005-09-07 KR KR1020067027916A patent/KR101021450B1/ko not_active Expired - Lifetime
- 2005-09-07 WO PCT/JP2005/016453 patent/WO2006030676A1/ja not_active Ceased
- 2005-09-07 US US11/575,262 patent/US7838107B2/en not_active Expired - Lifetime
- 2005-09-07 EP EP05782084.7A patent/EP1796164B1/en not_active Expired - Lifetime
- 2005-09-07 JP JP2006535802A patent/JP4761157B2/ja not_active Expired - Lifetime
- 2005-09-07 CN CNB2005800212860A patent/CN100472766C/zh not_active Expired - Lifetime
- 2005-09-13 TW TW094131533A patent/TW200618697A/zh not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI699346B (zh) * | 2014-12-18 | 2020-07-21 | 日商電化股份有限公司 | 碳化矽質複合體之製造方法 |
| TWI796503B (zh) * | 2018-07-13 | 2023-03-21 | 日商電化股份有限公司 | 金屬-碳化矽質複合體、及金屬-碳化矽質複合體之製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1977378A (zh) | 2007-06-06 |
| WO2006030676A1 (ja) | 2006-03-23 |
| US20070248829A1 (en) | 2007-10-25 |
| CN100472766C (zh) | 2009-03-25 |
| JP4761157B2 (ja) | 2011-08-31 |
| TWI357788B (enExample) | 2012-02-01 |
| JPWO2006030676A1 (ja) | 2008-05-15 |
| US7838107B2 (en) | 2010-11-23 |
| EP1796164A4 (en) | 2011-11-09 |
| KR20070064293A (ko) | 2007-06-20 |
| EP1796164B1 (en) | 2020-01-01 |
| EP1796164A1 (en) | 2007-06-13 |
| KR101021450B1 (ko) | 2011-03-15 |
Similar Documents
| Publication | Publication Date | Title |
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