KR101020766B1 - 투명성 전도박막 제조방법 - Google Patents

투명성 전도박막 제조방법 Download PDF

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Publication number
KR101020766B1
KR101020766B1 KR1020100078447A KR20100078447A KR101020766B1 KR 101020766 B1 KR101020766 B1 KR 101020766B1 KR 1020100078447 A KR1020100078447 A KR 1020100078447A KR 20100078447 A KR20100078447 A KR 20100078447A KR 101020766 B1 KR101020766 B1 KR 101020766B1
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KR
South Korea
Prior art keywords
oxide
thin film
substrate
transparent conductive
conductive thin
Prior art date
Application number
KR1020100078447A
Other languages
English (en)
Korean (ko)
Inventor
손영호
최승훈
정명효
Original Assignee
(주)유시스텍
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)유시스텍 filed Critical (주)유시스텍
Priority to KR1020100078447A priority Critical patent/KR101020766B1/ko
Priority to TW99146006A priority patent/TWI431131B/zh
Priority to CN2011100008866A priority patent/CN102373418A/zh
Application granted granted Critical
Publication of KR101020766B1 publication Critical patent/KR101020766B1/ko

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Manufacturing & Machinery (AREA)
  • Human Computer Interaction (AREA)
KR1020100078447A 2010-08-13 2010-08-13 투명성 전도박막 제조방법 KR101020766B1 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020100078447A KR101020766B1 (ko) 2010-08-13 2010-08-13 투명성 전도박막 제조방법
TW99146006A TWI431131B (zh) 2010-08-13 2010-12-27 透明導電薄膜的製造方法
CN2011100008866A CN102373418A (zh) 2010-08-13 2011-01-05 透明导电薄膜的制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020100078447A KR101020766B1 (ko) 2010-08-13 2010-08-13 투명성 전도박막 제조방법

Publications (1)

Publication Number Publication Date
KR101020766B1 true KR101020766B1 (ko) 2011-03-09

Family

ID=43938644

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020100078447A KR101020766B1 (ko) 2010-08-13 2010-08-13 투명성 전도박막 제조방법

Country Status (3)

Country Link
KR (1) KR101020766B1 (zh)
CN (1) CN102373418A (zh)
TW (1) TWI431131B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101161730B1 (ko) * 2011-12-13 2012-07-02 (주)유시스텍 태양전지용 저반사 박막 제조방법
KR101168662B1 (ko) * 2011-12-12 2012-07-26 (주)유시스텍 박막 태양전지 제조방법

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103902117B (zh) * 2012-12-31 2018-10-02 昆山维信诺显示技术有限公司 一种电容式触摸屏及其制备方法
CN107777898B (zh) * 2016-08-26 2020-12-18 河源力友通讯科技有限公司 一种双面镀膜导电玻璃的抗干扰加工方法
CN106569639A (zh) * 2016-10-27 2017-04-19 广东星弛光电科技有限公司 一种高硬度耐刮花手机触摸屏制备工艺
CN114645264A (zh) * 2022-03-14 2022-06-21 上海德瀛睿创半导体科技有限公司 镀膜系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003276109A (ja) 2002-03-26 2003-09-30 Dainippon Printing Co Ltd 透明積層フィルムの製造方法及び透明積層フィルム及び反射防止フィルム
JP2007213886A (ja) 2006-02-08 2007-08-23 Toppan Printing Co Ltd 透明導電性積層体
JP2009283348A (ja) 2008-05-23 2009-12-03 Toyobo Co Ltd 透明導電性フィルム及びこれを用いたタッチパネル

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1800441B (zh) * 2005-01-05 2010-09-01 鸿富锦精密工业（深圳）有限公司 等离子体增强薄膜沉积方法及装置
CN101429645A (zh) * 2007-11-09 2009-05-13 徐进成 氧化锌铝透明导电薄膜的制备方法及专用设备
CN201309893Y (zh) * 2008-10-10 2009-09-16 无锡康力电子有限公司 高透过率触摸屏用透明导电玻璃

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003276109A (ja) 2002-03-26 2003-09-30 Dainippon Printing Co Ltd 透明積層フィルムの製造方法及び透明積層フィルム及び反射防止フィルム
JP2007213886A (ja) 2006-02-08 2007-08-23 Toppan Printing Co Ltd 透明導電性積層体
JP2009283348A (ja) 2008-05-23 2009-12-03 Toyobo Co Ltd 透明導電性フィルム及びこれを用いたタッチパネル

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101168662B1 (ko) * 2011-12-12 2012-07-26 (주)유시스텍 박막 태양전지 제조방법
KR101161730B1 (ko) * 2011-12-13 2012-07-02 (주)유시스텍 태양전지용 저반사 박막 제조방법

Also Published As

Publication number Publication date
CN102373418A (zh) 2012-03-14
TWI431131B (zh) 2014-03-21
TW201207133A (en) 2012-02-16

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