KR101018963B1 - Substrate processing apparatus and cleaning method - Google Patents

Abstract

As the rotary cup 50 rotates at a predetermined rotational speed, the washing liquid 21 stored in the storage tank 52 flows outward with centrifugal force, and the washing liquid flows upward from the hole 52a as it is by the flowing force. It is discharged and scattered. Since the holes 52a are formed at an angle, the discharge direction of the cleaning liquid becomes the inclined direction. Thereby, in the lid | cover body 37, a washing | cleaning liquid can be extended even to the area | region near the outer side of the board | substrate G (region of the right side rather than the broken line shown by the code | symbol A).

Description

Substrate Processing Equipment and Cleaning Method {SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD}

BRIEF DESCRIPTION OF THE DRAWINGS The top view which shows the whole structure of the coating and developing process system which concerns on one Embodiment of this invention.

FIG. 2 is a front view of the coating and developing treatment system shown in FIG. 1. FIG.

3 is a rear view of the coating and developing treatment system shown in FIG. 1.

4 is a cross-sectional view of a resist coating processing unit according to one embodiment.

FIG. 5 is a plan view of the resist coating process unit shown in FIG. 4; FIG.

6 is an enlarged cross-sectional view showing the inside of a rotary cup for explaining a storage tank according to one embodiment;

7 is an enlarged plan view of the vicinity of a supply port of a cleaning liquid in a storage tank.

8 is a plan view of a rotary cup and its interior for explaining a storage tank according to another embodiment;

9 is an enlarged cross-sectional view showing the inside of a rotary cup for explaining a storage tank according to another embodiment.

The top view which shows a part inside the rotating cup for demonstrating the storage tank which concerns on other embodiment.                 

11 is a cross-sectional view of the storage tank shown in FIG. 10.

12 is a perspective view of the partition member shown in FIG. 10.

13 is a cross-sectional view showing a part of a rotary cup according to another embodiment.

14 is a plan view of a resist coating processing unit according to another embodiment.

15 is a plan view of a cleaning liquid supply mechanism according to another embodiment.

The flowchart which shows the washing | cleaning liquid supply method which concerns on another embodiment.

17 is a cross-sectional view of the rotary cup and the fixed cup at the time of washing the rotary cup shown in FIG.

The top view which shows the modification of the storage tank which concerns on another embodiment.

The side view which shows the coupling part of the washing | cleaning liquid supply mechanism which concerns on other embodiment.

<Explanation of symbols on main parts of the drawings>

G: Glass substrate CT: Resist coating unit

37: cover 40: drive part

41: resist liquid supply mechanism 43: motor

44: cleaning liquid nozzle 50: rotary cup

50b: opening 51, 151: spin chuck

52, 62, 72: reservoir 52a, 72a: hole

52b, 152b: supply port 57: cleaning liquid supply nozzle

62a: slit 157: cleaning liquid supply mechanism

161: fixed cup 162: rotating cup                 

201: Floor cleaning nozzle 201: Side wall cleaning nozzle

203, 205, 206: cleaning nozzle

In the LCD manufacturing process, a photolithography technique similar to that used in the manufacture of semiconductor devices is used to form a thin film of ITO (Indium Tin Oxide) or an electrode pattern on a glass substrate for LCD. In photolithography, a photoresist is applied to a glass substrate, which is then exposed to light for further development.

As a photoresist coating process, for example, a glass substrate is accommodated in a rotating cup, a resist is supplied onto the substrate, a lid is covered on the cup, and the resist is rotated integrally by rotating the cup and the substrate. Diffusion is carried out over the entire surface to form a resist film.

By the way, the inside of the cup used in such a coating process adheres to the resist scattered by centrifugal force and the mist-like resist by the rotation. This deposit is responsible for the generation of particles after drying. In order to solve this problem, a nozzle is provided in the cup to discharge the cleaning liquid, and the cleaning liquid is discharged to the deposit to remove the deposit. Such an apparatus is disclosed in, for example, FIG. 6 of Japanese Patent Application Laid-Open No. 8-255789 issued by the Japanese Patent Office.

In particular, an apparatus has been proposed in which a cleaning jig for storing a cleaning liquid by scattering the cleaning liquid from a hole formed in the container by storing the cleaning liquid in an exclusive container and rotating the container in the cup. Such an apparatus is disclosed, for example, in FIGS. 2, 4, and 6 of Japanese Patent Application Laid-Open No. 5-82435 issued by the Japan Patent Office (for example, in this publication, a semiconductor wafer is processed, not a glass substrate). Device).

However, in the apparatus shown in the first literature, for example, in Fig. 6, a lid cleaning nozzle body for cleaning the lid is provided, but a spin chuck (member holding the substrate by vacuum action to rotate the substrate). ) Blocks the cleaning liquid discharged from the lid cleaning nozzle body. Therefore, in this example, the lid can hardly be washed. The inside of such a cover is contaminated by a resist that has become a mist shape, and it is necessary to remove the contamination of the cover.

In the apparatus shown in the first document, the cover body can be cleaned by designing less spin chucks. However, in view of the enlargement of glass substrates in recent years, reducing the spin chuck has problems such as safety. Considering that the current spin chuck has a mainstream size almost the same as the size of the substrate, it is increasingly difficult to clean the lid.

On the other hand, in the coating apparatus shown in the following document, a lid for closing the opening of the upper part of the cup is not provided, but the cleaning jig must be attached to and detached from the spin chuck every time the cup is cleaned, resulting in an increase in the number of workings. In addition, even if such a cleaning jig is applied to the apparatus shown in the first document, the lid of the container cannot be cleaned.

In view of the above circumstances, an object of the present invention is to clean a container such as a cup or a cover for opening and closing the container, and to eliminate a time for work for performing the cleaning treatment. And a cleaning method.

In order to achieve the above object, the substrate processing apparatus according to the present invention includes a holding member for holding a substrate rotatably, an opening for entering and exiting a substrate, and at the same time receiving the holding substrate by the holding member. A container capable of rotating in synchronism with the member, a cover body detachably installed in the opening, for opening and closing the container, and attached to the container and installed on at least part of the periphery of the holding member, at least the cover body And a storage tank for storing the cleaning liquid therein for cleaning the liquid, and a rotating drive unit for rotating the container and scattering the cleaning liquid stored in the storage tank by the centrifugal force of the rotation toward the lid.

In this invention, after apply | coating a coating liquid on a board | substrate, for example, the container is rotated in the state which covered the cover body, and the cleaning liquid is scattered from a storage tank toward a cover body by the centrifugal force. Since the storage tank is provided around the holding member, the cleaning liquid can be scattered even by the central portion of the lid, for example, without blocking the washing liquid scattered by the holding member as in the prior art, and the lid can be cleaned. . Moreover, since the washing | cleaning liquid adhering to a cover body flows outward of rotation by centrifugal force, since the flowing washing liquid reaches to a container, a container can also be wash | cleaned. Further, in the present invention, it is not necessary to attach or detach the cleaning jig every time the container is cleaned, as in the prior art, so that the working time for the cleaning process can be omitted.

In the present invention, as the cleaning liquid, for example, thinner or the like, more specifically, ethyl lactate (EL, boiling point: 154) other than methyl-3-methoxypropionate (MMP, boiling point: 145 ° C, viscosity: 1.1 cps) ℃, viscosity: 2.6 cps), ethyl-3-ethoxypropionate (EEP, boiling point: 170 ℃, viscosity: 1.3 cps), ethyl fibrate (EP, boiling point: 144 ℃, viscosity: 1.2cps), propylene glycol Monomethyl ether acetate (PGMEA, boiling point: 146 DEG C, viscosity: 1.3 cps), 2-heptanone (boiling point: 152 DEG C, viscosity: 1.1 cps), cyclohexanone (solvent of ARC) and the like are used. Can be.

In the present invention, the term "synchronize" means that the holding member and the container rotate integrally, for example, or that the holding member and the container are synchronized by, for example, a separate driving source. Included.

In one embodiment of the present invention, a hole for discharging the cleaning liquid stored in the storage tank is formed on the side facing the lid in the storage tank. As a result, the cleaning liquid can be reliably scattered toward the lid. Alternatively, a linear slit may be used instead of the hole.

In one form of this invention, the said hole is formed so that the direction of discharge of the said washing | cleaning liquid may face the rotation center side rather than the rotation axis direction of the rotation of the said container. As a result, the cleaning liquid can be reliably discharged toward the center of the lid. In this case, a linear slit may be used instead of the hole.

In one aspect of the present invention, there is further provided three semen supply mechanisms for supplying a cleaning liquid into the storage tank. Further, the cleaning liquid supply mechanism includes a nozzle for discharging the cleaning liquid toward the inside of the storage tank, and a moving mechanism for moving the nozzle between a predetermined position outside the container and a position immediately above the holding member. . As a result, for example, each time the coating process of the predetermined number of substrates is finished, the cleaning liquid can be automatically supplied and cleaned, thereby facilitating the work. Alternatively, if the cleaning liquid is supplied each time the coating process of one substrate is finished, the container and the cover can be kept uncontaminated at all times, and the occurrence of particles can be reliably prevented.

In one aspect of the present invention, a plurality of partition members are arranged inside the storage tank and partition the interior of the storage tank into a plurality of chambers in the circumferential direction of the substrate held by the holding member. Thereby, the relative movement of the washing | cleaning liquid and the storage tank which generate | occur | produces by rotation of a container can be suppressed extremely, and the discharge amount of discharge of the washing liquid can be increased.

In one aspect of the present invention, the plurality of partition members each have a side surface facing the storage tank, a part of the side surface being disposed with a gap between the storage tank, and the other part is in contact with the storage tank. Alternatively, at least one of the plurality of partition members is provided with a communication port through which the plurality of threads are connected in series. As a result, the cleaning liquid can be widely spread through the gap or the communication port without leaving the cleaning liquid in each chamber.

In one form of this invention, the said clearance gap is provided near the rotation center side of the said container in the said storage tank. Alternatively, the communication port is provided near the center of rotation of the container in the partition member. Thus, for example, when the cleaning liquid is stored in the storage tank by the cleaning liquid supply mechanism, the cleaning liquid is spread through the gap or the communication port, and at the time of the cleaning treatment, the cleaning liquid is formed inside the storage tank by the rotation of the container. It flows on the outer circumference side by centrifugal force. As a result, the cleaning liquid can remain in each chamber without distributing a plurality of chambers, and discharge the cleaning liquid satisfactorily.

In one aspect of the present invention, at least one of the plurality of partition members forms a plate shape and is provided at an angle to the arrangement direction in which the plurality of partition members are arranged. Thereby, the cleaning liquid in the storage tank can be flowed in accordance with the direction of rotation of the container, and a better discharge of the cleaning liquid can be hoped for.

The cleaning method according to the present invention has an opening for entering and exiting a substrate, uses a cleaning liquid in a container accommodating the substrate through the opening, and is detachably installed in the opening to at least cover the lid for opening and closing the container. A cleaning method for cleaning, comprising: a step of supplying the cleaning liquid to a storage tank attached to the container and installed in at least a portion of a holding member holding a substrate in the container and storing the cleaning liquid, and rotating the container; It is equipped with the process of scattering the washing | cleaning liquid stored in the said storage tank toward the said cover body by the centrifugal force of the rotation.

In this invention, after apply | coating a coating liquid on a board | substrate, for example, after supplying a washing | cleaning liquid to a storage tank, a container is rotated in the state which covered the cover body, and the washing liquid is moved from a storage tank toward a lid | cover body by the centrifugal force. I'm trying to scatter. Since the storage tank is provided around the holding member, the cleaning liquid can be scattered even by the central portion of the lid, for example, without blocking the washing liquid scattered by the holding member as in the prior art, and the lid can be cleaned. .

Another substrate processing apparatus according to the present invention has a holding member for holding a substrate rotatably, an opening for entering and exiting the substrate, and accommodates the substrate held by the holding member and rotates in synchronization with the holding member. A container capable of opening the container, a lid body detachably installed in the opening, a lid body for opening and closing the container, and a cleaning liquid attached to the container and installed on at least a portion of the periphery of the holding member, at least for cleaning the lid body. A storage tank for storing therein, a rotating drive portion capable of rotating the container and scattering the cleaning liquid stored in the storage tank by the centrifugal force of the rotation toward the lid, a second container for accommodating the first container; And a cleaning nozzle set in said second container for cleaning at least the outer periphery of said first container. And a regular sphere.

In this invention, after apply | coating a coating liquid on a board | substrate, for example, the container is rotated in the state which covered the cover body, and the cleaning liquid is scattered from a storage tank toward a cover body by the centrifugal force. Since the storage tank is provided around the holding member, the cleaning liquid can be scattered even by the central portion of the lid, for example, without blocking the cleaning liquid scattered by the holding member as in the prior art, so that the lid can be washed. have. In addition, a cleaning nozzle for cleaning the outer periphery of the first container is installed in the second container. For this reason, for example, by rotating the first container by the rotary drive unit and discharging the cleaning liquid from the cleaning nozzle, at least the outer periphery of the first container can be cleaned simultaneously with the lid body.

In one form of this invention, the said cleaning mechanism is a said cleaning nozzle, The 1st nozzle which can wash | clean the outer peripheral surface of the side wall of the said 1st container, and the 2nd for cleaning the outer bottom surface of the said 1st container Has a nozzle. Accordingly, for example, by rotating the first container by the rotary drive unit and discharging the cleaning liquid from the first nozzle and the second nozzle, respectively, the outer circumferential surface of the side wall of the first container and the outer bottom surface of the first container. Can be cleaned.

In one aspect of the present invention, the cleaning mechanism has, as the cleaning nozzle, a third nozzle for cleaning the bottom surface of the second container. In this way, the bottom surface inside the second container can be cleaned by discharging the cleaning liquid from the third nozzle.

In one aspect of the present invention, a discharge nozzle for discharging the cleaning liquid into the storage tank through a supply port formed in the storage tank, and the discharge nozzle at least between the outside of the first container and directly above the supply port. Further provided with a moving mechanism for moving in. Thereby, for example, the cleaning nozzle can be stored by aligning the discharge nozzle with the supply port of the storage tank by the moving mechanism.

In one aspect of the present invention, there is provided a fourth nozzle capable of cleaning an inner bottom surface of the first container, a fifth nozzle for cleaning the inner circumferential surface and the surface of the side wall of the first container, and the discharge nozzle; A support for integrally supporting the fourth nozzle and the fifth nozzle is further provided. Accordingly, even when the fourth nozzle and the fifth nozzle are moved, for example, above the first container and above the side wall of the first container, a moving mechanism used for storing the cleaning liquid can be used. Further, by discharging the cleaning liquid from the fourth nozzle and the fifth nozzle while the fourth nozzle and the fifth nozzle are moved above the first container and above the side wall of the first container, the inner bottom surface of the first container, And the inner circumference and surface of the side wall of a 1st container can be cleaned.

In one embodiment of the present invention, at least two of the supply ports are formed. Thus, for example, when the cleaning liquid is stored in the storage tank, injection can be started from one supply port, and the first container can be rotated by the rotary drive unit during the storage, and can be injected from another supply port of the storage tank. . Therefore, since the cleaning liquid can be spread widely in the storage tank from another supply port, the time for collecting the cleaning liquid can be shortened.

Another substrate processing apparatus according to the present invention has a holding member for holding a substrate rotatably, an opening for entering and exiting the substrate, and accommodates the substrate held by the holding member and rotates in synchronization with the holding member. A first container capable of being installed, a lid body detachably installed in the opening, a lid body for opening and closing the first container, and attached to the first container and installed on at least a portion of the periphery of the holding member, at least the lid body A storage tank for storing therein a cleaning liquid for cleaning the inside, a rotation driving unit capable of rotating the first container and scattering of the cleaning liquid stored in the storage tank by the centrifugal force of the rotation toward the cover body; It is provided so that a movement is possible between the outer side of a container and just above the supply port formed in the said storage tank, and passes through the said supply port. A discharge nozzle for discharging the cleaning liquid into the storage tank, a bottom cleaning nozzle capable of cleaning the inner bottom surface of the first container, and a sidewall cleaning nozzle for cleaning the inner circumference and the upper surface of the side wall of the first container; And a support that integrally supports the discharge nozzle, the bottom cleaning nozzle, and the side wall cleaning nozzle.

In the present invention, the cleaning nozzle can be stored by moving the discharge nozzle just above the supply port of the storage tank by the moving mechanism. The same moving mechanism can also be used for moving the bottom cleaning nozzle and the side wall cleaning nozzle, for example, above the first container and above the side wall of the first container. Further, by discharging the cleaning liquid from the bottom cleaning nozzle and the side wall cleaning nozzle while the bottom cleaning nozzle and the side wall cleaning nozzle are moved above the first container and above the side wall of the first container, the inner bottom surface of the first container is discharged. And the inner circumference and the upper surface of the side wall of the first container.

Another cleaning method according to the present invention comprises (a) aligning a discharge nozzle for discharging a cleaning liquid to a first supply port formed in a storage tank mounted in a first container containing a substrate through an opening for entering and leaving the substrate. (B) discharging the cleaning liquid into the storage tank from the discharge nozzle through the first supply port after the step (a), and (c) rotating the first container after the step (b), Positioning the discharge nozzle in a second supply port formed at a portion separate from the first supply port of the storage tank; and (d) after the step (c), through the second supply port from the discharge nozzle. (E) a bottom cleaning nozzle capable of cleaning the inner bottom surface of the first container, and a side wall cleaning nozzle for cleaning the inner circumference and surface of the side wall of the first container. Go to (F) discharging the cleaning liquid from the bottom surface cleaning nozzle and the side wall cleaning nozzle while rotating the first container at a first rotational speed; and (g) opening and closing the first container detachably attached to the opening to the cleaning liquid stored in the storage tank by the centrifugal force of the rotation by rotating the first container at a second rotation speed which is faster than the first rotation speed. It is equipped with the process of flying toward the cover body for this.

In the present invention, in the step (a) to the step (d), since the cleaning liquid can be widely spread in the storage tank from the first supply port and the second supply port different from the first supply port, the collected time can be shortened. In the step (e), the bottom surface cleaning nozzle and the side wall cleaning nozzle are integrally positioned with respect to the first container. For this reason, since other moving mechanisms are unnecessary, for example, cost reduction and space saving can be attained. In addition, in the step (f), since the cleaning liquid is discharged while the first container is rotated at the first rotational speed, the cleaning can be performed over the entire circumference of the first container. In the step (g), the first container is rotated at a second rotation speed faster than the first rotation speed, whereby the cleaning liquid stored in the storage tank can be scattered toward the lid to wash the lid.

In one embodiment of the present invention, (h) after the step (g), the cleaning nozzle provided in the second container housing the first container by rotating the first container at a third rotation speed slower than the second rotation speed. And discharging the cleaning liquid from the outer peripheral portion of the first container. Thereby, for example, the outer periphery of a 1st container can be wash | cleaned, suppressing the rotation speed of a 1st container to a 3rd rotation speed.

In one aspect of the present invention, after the step (h), the method further includes a step of rotating the first container at a fourth rotational speed faster than the third rotational speed. Thereby, for example, the cleaning liquid discharged from the first nozzle can be reflected on the outer circumferential surface of the side wall of the first container, and the side surface inside the second container can be cleaned.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described based on drawing.

1 is a plan view showing a coating and developing processing system for an LCD substrate to which the present invention is applied, FIG. 2 is a front view thereof, and FIG. 3 is a rear view thereof.

The coating and developing processing system 1 includes a cassette station 2 on which a cassette C containing a plurality of glass substrates G is placed, and a series of processes including resist coating and development on a substrate G. And a processing unit 3 having a plurality of processing units for carrying out, and an interface unit 4 for exchanging the substrate G between the exposure apparatus 32 and the amount of the processing unit 3. At the ends, a cassette station 2 and an interface unit 4 are arranged.

The cassette station 2 is provided with a conveyance mechanism 10 for conveying the LCD substrate between the cassette C and the processing unit 3. Then, the cassette C is loaded and unloaded in the cassette station 2. Moreover, the conveyance mechanism 10 is equipped with the conveyance arm 11 which can move on the conveyance path 12 provided along the arrangement direction of a cassette, and this conveyance arm 11 carries the cassette C and the process part 3 ), The substrate G is conveyed.

In the processing section 3, a main transport section 3a provided in a direction perpendicular to the arrangement direction (Y direction) of the cassette C in the cassette station 2 and extending in the vertical direction (X direction), and the main transport section 3a. ), An upstream part 3b in which each processing unit including a resist coating process unit CT is provided, and a downstream part 3c in which each processing unit including a developing process unit DEV are provided in parallel.

The main conveying section 3a includes a conveying path 31 extending in the X direction and a conveying shuttle 23 configured to be movable along the conveying path 31 to convey the glass substrate G in the X direction. Is installed. This transfer shuttle 23 is for holding and conveying the board | substrate G with a support pin, for example. Further, a vertical transfer unit 7 is provided at the end of the interface portion 4 side of the main transfer portion 3a to transfer the substrate G between the processing portion 3 and the interface portion 4. have.

In the upstream portion 3b, a scrubber cleaning processing unit (SCR) 20 for cleaning the substrate G is provided at the end of the cassette station 2 side, and this scrubber cleaning processing unit (SCR) ( An excimer UV treatment unit (e-UV) 19 for removing organic matter on the substrate G is disposed at the upper end of 20).

In the vicinity of the scrubber cleaning processing unit (SCR) 20, heat treatment system blocks 24 and 25 in which units for thermal processing on the glass substrate G are stacked in multiple stages are arranged. Between these heat treatment system blocks 24 and 25, the vertical conveyance unit 5 is arrange | positioned, and the conveyance arm 5a is movable in a Z direction and a horizontal direction, and also the rotational movement to a (theta) direction is possible. Therefore, the substrate G is conveyed by accessing the respective heat treatment system units in both blocks 24 and 25. The vertical transfer unit 7 in the processing unit 3 also has the same configuration as the vertical transfer unit 5.

As shown in Fig. 2, in the heat treatment system block 24, the baking unit BAKE, which heat-treats the resist coating on the substrate G, is provided in two stages, and an advice unit in which the hydrophobization treatment is performed by HMDS gas ( AD) is laminated sequentially from the bottom. On the other hand, in the heat treatment system block 25, the cooling unit COL which cools the board | substrate G is laminated | stacked in two steps, and theadhesion unit AD is laminated | stacked sequentially from the bottom.

The resist processing block 15 extends in the X direction adjacent to the heat treatment block 25. The resist processing block 15 includes a resist coating process unit CT for applying a resist to the substrate G, a reduced pressure drying unit VD for drying the applied resist under reduced pressure, and a substrate according to the present invention ( The edge remover ER which removes the resist of the peripheral part of G) is comprised integrally, and is comprised. The resist processing block 15 is provided with a sub-arm, not shown, which moves from the resist coating process unit CT over the edge remover ER. The sub-arms provide a substrate in the resist processing block 15. (G) is to be conveyed.

Adjacent to the resist processing block 15, a multi-stage heat treatment system block 26 is disposed. The heat treatment block 26 includes a prebaking unit PREBAKE for performing a heat treatment after applying a resist on the substrate G. Three steps are laminated.                     

In the downstream part 3c, as shown in FIG. 3, the heat processing system block 29 is provided in the edge part of the interface part 4 side, and it heat-processes before a cooling unit COL and post-exposure image development process. Post-exposure baking units (PEBAKE) are laminated in two stages, sequentially from below.

A developing treatment unit (DEV) for developing is provided adjacent to the heat treatment block 29 to extend in the X direction. Heat treatment system blocks 28 and 27 are arranged near the development processing unit DEV, and between these heat treatment system blocks 28 and 27 have the same configuration as that of the vertical transfer unit 5. Vertical transfer units 6 accessible to the respective heat treatment system units in blocks 28 and 27 are provided. In addition, an i-line processing unit (i-UV) 33 is provided on the end portion of the development processing unit DEV.

In the heat treatment system block 28, the post-baking unit POBAKE which heat-processes post-development to the cooling unit COL and the board | substrate G is laminated | stacked two steps sequentially from the bottom. On the other hand, the heat treatment system block 27 also has a cooling unit COL and a post-baking unit POBAKE stacked in two stages and sequentially from below.

The interface unit 4 is provided with a titler and a peripheral exposure unit (Titler / EE) 22 on the front side, and an extension cooling unit (EXTCOL) 35 on the rear side adjacent to the vertical transfer unit 7. A buffer cassette 34 is disposed on the side, and the title and peripheral exposure units (Titler / EE) 22, the extension cooling unit (EXTCOL) 35, and the buffer cassette 34 are adjacent to the exposure apparatus 32. The vertical conveyance unit 8 which exchanges the board | substrate G between them is arrange | positioned. This vertical transfer unit 8 also has the same configuration as the vertical transfer unit 5.

In the processing step of the coating and developing processing system 1 configured as described above, first, the substrate G in the cassette C is conveyed to the upstream portion 3b of the processing portion 3. In the upstream part 3b, surface modification and the organic matter removal process are performed in the excimer UV process unit (e-UV) 19, and then in the scrubber cleaning process unit (SCR) 20, the board | substrate G is carried out. The washing process and the drying process are performed while being conveyed substantially horizontally. Subsequently, the substrate G is picked up by the transfer arm 5a in the vertical transfer unit at the lowermost end of the heat treatment system block 24, and heated by a baking unit BAKE of the same heat treatment system block 24. In the Advance Unit AD, in order to enhance the adhesion between the glass substrate G and the resist film, a process of spraying HMDS gas on the substrate G is performed. Thereafter, cooling treatment by the cooling unit COL of the heat treatment system block 25 is performed.

Next, the board | substrate G is passed to the conveyance shuttle 23 by the conveyance arm 5a. After the transfer to the resist coating unit CT, the resist coating process is performed, the reduced pressure drying unit VD is subjected to the reduced pressure drying process and the edge remover ER to remove the resist around the substrate. .

Next, the board | substrate G is passed from the conveyance shuttle 23 to the conveyance arm of the vertical conveyance unit 7, and is heat-processed by the prebaking unit PREBAKE in the heat processing system block 26, The cooling process is performed by the cooling unit COL in the heat treatment block 29. Subsequently, the substrate G is cooled by the extension cooling unit EXTCOL 35 and exposed by the exposure apparatus.                     

Subsequently, the substrate G is conveyed to the post exposure baking unit PEBAKE of the heat treatment system block 29 through the conveyance arms of the vertical conveying units 8 and 7, and after the heat treatment is performed, the cooling unit ( COL) is performed for cooling. Subsequently, the substrate G is conveyed through the conveyance arm of the vertical conveyance unit 7, and the development process, the rinse process and the drying process are performed while the substrate G is conveyed substantially horizontally in the development process unit DEV.

Next, the board | substrate G is passed by the conveyance arm 6a of the vertical transfer unit 6 from the lowest end in the heat treatment system block 28, and the post-baking unit in the heat treatment system block 28 or 27 is carried out. The heating treatment is performed by (POBAKE), and the cooling treatment is performed by the cooling unit (COL). And the board | substrate G is passed to the conveyance mechanism 10, and is accommodated in the cassette C.

4 is a cross-sectional view showing a resist coating process unit CT according to an embodiment of the present invention, and FIG. 5 is a plan view thereof.

The resist coating unit CT is provided with a rotary cup for accommodating the substrate G, and an opening 50b for entering and exiting the substrate G is formed in the upper portion of the rotary cup 50. have. The cover body 37 becomes a detachable free material in this opening part 50b, and a cover body 37 is attached to the cover body 37 by the grip arm 37a attached to the cover body 37, and the cover body is detached. Is being done.

In the vicinity of the rotary cup 50, a resist liquid supply mechanism 41 and a cleaning liquid supply mechanism 57 are disposed.

As shown in FIG. 5, the resist liquid supply mechanism 41 has a resist nozzle 55 for ejecting the resist liquid to the substrate G accommodated in the rotary cup 50. The resist nozzle 55 is a retainer. It is held at its tip by (38). The holder 38 is connected to the motor 39 at the other end thereof, and is rotated in the horizontal direction by the motor 39 in the θ direction. A tube (not shown) is connected to the resist nozzle 55, and a resist is supplied to the resist nozzle 55 through the tube from a resist receiving tank (not shown).

The cleaning liquid supply mechanism 57 has a cleaning liquid nozzle 44 for discharging the cleaning liquid in the rotary cup 50, and the cleaning liquid nozzle 44 is supported by the horizontal support 42. As the cleaning liquid, for example, thinners can be used. This horizontal support 42 is connected to the motor 43, and is rotated by the motor 43 in the horizontal direction in the horizontal direction. The cleaning liquid nozzle 44 is supplied with a cleaning liquid from a storage tank of a cleaning liquid (not shown).

In the rotary cup 50, a spin chuck 51 for holding the substrate G by vacuum suction, for example, is disposed. The spin chuck 51 is attached to the rotary shaft member 48, and the rotary shaft member 48 is connected to a drive unit 40 having a motor or the like to rotate the spin chuck 51. The lower seal part 54 connected to the vacuum pump 53 is provided in the lower part of the rotating shaft member 48, for example, and the exhaust path not shown is formed in the inside of the rotating shaft member 48. As shown in FIG. As a result, the vacuum chuck of the spin chuck 51 is enabled.

In addition, the rotating shaft member 48 is capable of lifting and lowering by an air cylinder or the like included in the drive unit 40, and the spin chuck 51 is rotated by the rotation cup (with the lid 37 removed from the rotating cup 50). It is settled in the opening part 50b of 50. Accordingly, as will be described later, the substrate G is exchanged between the sub arm and the spin chuck 51, which are not shown. The spin chuck 51 is the lowest position in the state shown in FIG. 4, and in this position comes into contact with the O-ring 60 attached to the bottom 50c of the rotary cup 50.

Moreover, the rotor base 49 is attached to the rotating shaft member 48, and this rotor base 49 is being fixed to the cylinder 50a which protruded in the center of the rotating cup 50. As shown in FIG. By this structure, the rotating shaft member 48, the rotor base 49, the rotating cup 50, and the lid | cover body 37 are integrally rotated by the rotation drive of the drive part 40. As shown in FIG.

With reference to FIG. 6, in the circumference | surroundings of the spin chuck 51 arrange | positioned at the lowest position in the bottom part 50c of the rotating cup 50, the washing | cleaning liquid supplied by the washing | cleaning liquid supply mechanism 57 mentioned above is stored. The storage tank 52 is arrange | positioned. This storage tank 52 has a structure capable of storing the cleaning liquid in the interior 52d surrounded by the box body. On the surface of the storage tank 52, a supply port 52b (see Fig. 5) for supplying the cleaning liquid to the interior 52d and a plurality of holes 52a for discharging the cleaning liquid stored as described later are formed. . These holes 52a are formed obliquely toward the rotation center side from the rotation axis direction of the rotation of the rotation cup 50, for example. As for the storage tank 52, the some screw 56 is screwed in the recessed part 52c provided in the inside, and is being fixed to the bottom part 50c of the rotating cup 50. As shown in FIG.

The supply port 52b is provided on the trajectory in which the distal end portion of the cleaning liquid nozzle 44 of the cleaning liquid supply mechanism 57 moves in the planar direction shown in FIG. 5. As a result, the cleaning liquid discharged from the cleaning liquid nozzle 44 at the position indicated by the horizontal support member 42 is poured into the supply port 52b. 7 is an enlarged plan view of the vicinity of the supply port 52b. The supply port 52b is arrange | positioned inside (rotation center side of the rotating cup 50) from the arrangement position of the hole 52a. The reason for this arrangement relationship is to prevent the cleaning liquid from being discharged from the supply port 52b when the rotary cup 50 is rotated as described later. That is, according to this arrangement relationship, since the cleaning liquid stored in the interior 52d when the rotary cup 50 is rotated flows outward from the interior 52d by centrifugal force, it is disposed outside the supply port 52b. The cleaning liquid can be discharged from only the plurality of holes 52a.

In the cylinder 50a of the lower part of the rotating cup, for example, a nitrogen gas supply nozzle 45 for ejecting nitrogen gas is provided. This nitrogen gas is supplied from the nitrogen gas supply part 47 through the gas pipe 46. Such nitrogen gas is ejected, for example, when the air in the rotary cup 50 is exhausted from an exhaust device not shown, so that the inside of the rotary cup 50 does not become a negative pressure.

Next, the operation of the resist coating processing unit CT configured as described above will be described. In the state in which the cover body 37 is lifted by the robot arm 36, the board | substrate is conveyed to the just above the rotating cup 50 by the sub-arm not shown. As a result, the spin chuck 51 rises to a position higher than the upper end of the rotary cup 50 through the opening 50b to receive the substrate from the sub-arm. As the spin chuck 51 receiving the substrate is lowered to the lowest position through the opening 50b of the rotary cup 50, the substrate G is accommodated in the rotary cup 50. At this time, the resist nozzle 55 and the cleaning liquid nozzle 44 are waiting outside the rotary cup 50.

Next, the resist nozzle 55 moves to the center on the substrate G as indicated by the broken line in FIG. 5, and a predetermined amount of the resist liquid is supplied onto the substrate G from the resist nozzle 55. The lid 37 is covered by the rotary cup 50, and the spin chuck 51 rotates at the predetermined rotational speed simultaneously with the rotary cup 50, so that a resist is applied to the entire surface of the substrate by the centrifugal force.

Next, the lid 37 is lifted by the robot arm 36 again, the spin chuck 51 is raised, and the substrate held by the spin chuck 51 is picked up by a sub-arm (not shown). . When the substrate G is picked up, the spin chuck 51 is lowered to the lowest position.

Next, the cleaning liquid nozzle 44 is moved to the position indicated by the symbol M in FIG. 5, and the cleaning liquid is poured into the storage tank 52. When the washing liquid is stored, the washing liquid nozzle 44 is evacuated to the outside of the rotating cup 50 so that the lid 37 is covered with the rotating cup 50 again. Then, as the rotary cup 50 rotates at a predetermined rotational speed, as shown in FIG. 6, the washing liquid 21 stored in the storage tank 52 flows outward with centrifugal force, and the hole 52a is intact by the flowing force. The cleaning liquid is discharged upward and scatters. Since the holes 52a are formed at an angle, the discharge direction of the cleaning liquid becomes the inclined direction. Thereby, the washing | cleaning liquid can be extended to the area | region (region shown by the code | symbol A, ie, area to the right of a broken line) of the outer side of the board | substrate G in the lid | cover body 37. FIG.

Most of the resist scattering in the rotary cup 50 is the region on the A side. This is because the resist diffuses on the substrate by centrifugal force and scatters from the outside of the substrate. The area of B opposite to A has less scattering of the resist. Therefore, what is necessary is just to be able to wash | clean the area | region of A side in the lid | cover body 37.

Thus, in order to wash | clean the area | region on the A side in the cover body 37, the width | variety (the length of the left-right direction of the storage tank 52 shown in FIG. 6) of the storage tank 52, the angle of the hole 52a, or rotation Although it depends also on the rotational speed of the cup 50, etc., each of these parameters can be changed suitably and designed.

As described above, the washing liquid scattered from the hole 52a and attached to the lid 37 flows outward from the rotation of the lid by centrifugal force. Thereby, the resist liquid adhering to the cover body 37 can be removed and washed. In addition, since the washing | cleaning liquid attached to the cover body 37 reaches the rotating cup 50 by centrifugal force as it is, the rotating cup 50 can also be wash | cleaned.

In this embodiment, since the storage tank 52 is provided around the spin chuck 51, the resist attached to the lid | cover body 37 is removed and cleaned, without blocking the cleaning liquid which a spin chuck scatters like conventionally. You can do it. In addition, each time the cup is cleaned, it is not necessary to attach or detach a special device such as a cleaning jig, so that the working time for the cleaning process can be omitted.

Next, another embodiment of the storage tank will be described with reference to FIG. 8. In this storage tank 62, the storage tank 52 shown in the above embodiment is different from the storage tank 52 in that the means for discharging the cleaning liquid is not a hole but a slit 62a. This slit 62a is formed along each side of the board | substrate G as shown, for example, and penetrates into the inside of the storage tank (it is shown with the code | symbol 52d in FIG. 6). Even with such a configuration, it is possible to reliably clean the predetermined region of the lid 37, and it is not necessary to attach or detach a special device such as a cleaning jig, so that the working time for the cleaning process can be omitted.

9 is an enlarged cross-sectional view of the inside of a rotary cup according to another embodiment.

In the example shown in this figure, the hole 72a for discharging the cleaning liquid is formed in the vertical direction on the surface of the storage tank 72. And the nozzle 72b for discharging the washing | cleaning liquid 21 is attached to this hole 72a. The tip of the nozzle 72b is mounted toward the rotation center side with respect to the rotation axis direction of the rotation cup 50. As a result, the cleaning liquid can be discharged toward the rotation center side, and the predetermined region of the lid 37 can be cleaned.

Next, another embodiment of the storage tank will be described with reference to FIGS. 10, 11, and 12. As shown to FIG. 10 and FIG. 11, the some partition member 89 is provided in the storage tank 82 which concerns on this embodiment. These partition members 89 are arranged in the circumferential direction of the substrate G, whereby the interior of the storage tank 82 is partitioned into a plurality of chambers 83. As shown in FIGS. 10 and 12, the partition members 89 form a plate shape, and are inclined at an angle with respect to the arrangement direction of the partition members 89 (in this example, the circumferential direction of the substrate G) (see FIG. 12). In degrees θ).

As shown in FIG. 12, in this partition member 89, the upper surface 89a of the side surfaces 89a and 89b is in contact with the inner surface 82e (refer FIG. 11) of the storage tank 82. As shown in FIG. On the other hand, the clearance 85 (refer FIG. 11) is provided without contacting the side surface 89b and the inner side surface 82g of the storage tank 82. As shown in FIG. This clearance 85 is provided in order to distribute | circulate the washing | cleaning liquid through the whole inside of the storage tank 82, and it is what makes the several chamber 83 pass through.

In addition, the number of the holes 82a for discharging the cleaning liquid in the storage tank 82 according to the present embodiment is larger than the number of the holes in the above-described embodiments.

As described above, when the partition member 89 is provided, for example, when the cleaning liquid is stored in the storage tank 82 by the cleaning liquid supply mechanism 57 (see FIG. 5), the cleaning liquid is provided with a gap 85. Spread throughout. In the cleaning process, the rotary cup 50 is rotated so that the cleaning liquid flows to the outer circumferential side by centrifugal force, so that the cleaning liquid is partitioned by the partition member 89 without flowing the plurality of chambers 83. Stay at). Thereby, the relative movement of the washing | cleaning liquid and the storage tank 82 produced by rotation of the rotating cup 50 can be suppressed extremely. That is, although the washing | cleaning liquid stored in the inside of the storage tank 82 has the property to stop with respect to the rotating storage tank 82 by inertia, such a problem can be avoided in this embodiment, The momentum of discharge and the amount of discharge increase, and discharge of favorable washing | cleaning liquid is performed.

Moreover, since the partition member 89 is arrange | positioned obliquely with respect to the arrangement direction, it can distribute | circulate the washing | cleaning liquid inside the storage tank 82 according to the direction of rotation of the rotating cup 50. As shown in FIG. Thus, better discharge of the cleaning liquid may be desired.                     

This invention is not limited to embodiment described above, A various deformation | transformation is possible.

For example, the number of holes 52a may be one, not necessarily a plurality. In addition, one of the four slits in FIG. 8 may have one long slit 62a.

The method of applying the resist in the resist coating unit CT is not limited to the above embodiment, but may be a so-called scan coating in which the resist is discharged while the nozzle is moved on the substrate G.

In addition, the gap 85 in FIG. 11 may not be provided, but the communication port which distribute | circulates a washing | cleaning liquid may be formed in the partition member 89 instead.

Moreover, although the glass substrate for liquid crystal display devices was mentioned as the board | substrate in the said embodiment, if this cover is provided in the rotating cup, this invention can be applied also to a semiconductor wafer substrate.

13 is a cross-sectional view showing a part of the rotary cup 162 of the resist coating process unit according to another embodiment. In addition, about this embodiment, the same code | symbol is attached | subjected to the same structural member as embodiment mentioned above, and the description is abbreviate | omitted and demonstrated centering on another place.

The fixed cup 161 accommodates the rotary cup 162 and is provided for separating the flow of the air flow and the cleaning liquid flowing therein at the time of cleaning as described later.

The fixed cup 161 has an opening in an upper end portion, and has a substantially cylindrical shape having an air flow control portion 180 in an outer circumference portion thereof. For example, the airflow control unit 180 includes an inner wall 180a inclined downward toward the outside, an inner wall 180b folded at a height A that is the lower end of the inner wall 180a, and inclined downward inward. Furthermore, it is comprised by having the inner wall 180c which folds back and inclines upward toward inward.

On the upper outer surface of the airflow control unit 180, a nozzle insertion unit 185 provided with a cleaning nozzle 203 as a first nozzle for discharging the cleaning liquid is fixed. The cleaning nozzle 203 is connected to the receiving tank 220 for accommodating the cleaning liquid through the cleaning liquid supply pipe. At the time of washing | cleaning, the washing | cleaning liquid is supplied to the washing | cleaning nozzle 203, and the outer wall 162b of the rotating cup 162, etc. are cleaned. Instead of providing the cleaning nozzle 203 for cleaning, the nozzle insertion unit 185 may be provided with a hole for cleaning nozzle insertion, and another nozzle may be inserted into the hole to discharge the cleaning liquid to clean the nozzle.

On the surface of the nozzle insertion portion 185, for example, a V seal 102 is embedded. On the nozzle insertion portion 185, a disc-shaped fixed cup lid body 186 having an inner wall 186b is disposed freely through the V seal 102. The fixed cup cover body 186 is arrange | positioned so that the inner wall 186b may become substantially flush with the inner wall 180a.

An introduction port 182 is formed in the upper wall 186a of the fixed cup lid 186 to introduce an external gas at approximately the center. In addition, about the number and shape of the inlet_port | hole formed in the fixed cup cover body 186, you may make it form two inlet_port | holes of the half size of the area of the inlet_port | entrance 182, for example.

The disc-shaped cover member 137 is arranged on the upper wall 186a of the fixed cup lid member 186 at a first interval h1 (hereinafter, the gap between the first interval h1 is referred to as a 'first flow path'). Abbreviated). The upper circumferential edge of the rotary cup 162 is disposed with respect to the inner wall 180a at a second interval h2 that is narrower than the first interval h1 (hereinafter, referred to as a second gap h2). Abbreviated as Euro '). The outer wall 162b of the rotary cup 162 is provided so as to face the inner wall 180a and to extend downwardly from the inner wall 180a. On the upper part of the inner wall 180c, the guide member 197 as an annular protrusion member protrudes substantially horizontally outward.

The height A is configured to be lower than the height B of the outer bottom surface 162a of the rotary cup 162. For example, you may comprise so that height A may become lower than the horizontal height of the bottommost surface of the rotating cup 162. FIG.

On the bottom surface of the fixed cup 161, the exhaust pipes 183 having an exhaust port 183a for discharging the gas introduced into the fixed cup 161 from the inlet 182 project, for example, four downwards. It is installed. The exhaust pipe 183 is connected to an exhaust duct not shown.

In the lower portion of the side circumferential wall of the rotary cup 162, a discharge hole 104 capable of discharging the resist liquid on the inner wall 180a side of the fixed cup 161 by the rotation of the rotary cup 162 is formed.

In the bottom part of the airflow control part 180, the waste liquid pipe 181 which has the waste liquid opening 181d which waste-closes the resist liquid discharged | emitted from the discharge hole 104 is protruded toward four downwards, for example. have. The waste liquid pipe 181 is connected to a waste liquid pipe not shown.                     

The fixed cup 161 has a waste liquid pipe 194 formed with a waste liquid hole 194a for waste liquid for resist liquid being disposed inward of the waste liquid port 181d and outside the exhaust port 183a. The diameter of the waste liquid port 194a is set smaller than the diameter of the waste liquid port 181d.

On the inner bottom surface 161b of the fixed cup 161, a disk-shaped partition wall 192 is fixed. Steps are formed in the outer circumferential portion of the partition wall 192 to conform to the shape of the inner bottom surface 161b of the fixing cup 161, and the outer circumferential edge of the partition wall 192 is inclined according to the inclination of the inner wall 180c. It is bent downward. The space between the inner bottom surface 161b of the fixed cup 161 and the outer bottom surface 162a of the rotary cup 162 is spaced almost equally up and down by the partition 192. For example, a rectifying plate 195 having twelve through holes 196 is disposed between the exhaust port 183a and the bottom surface of the rotary cup 162. The rectifying plate 195 is disposed so that the through-hole 196 of the rectifying plate 195 and the exhaust port 183a do not overlap in the vertical direction.

On the bottom surface of the fixed cup 161, a plurality of cleaning nozzles 205 as the second nozzle and cleaning nozzles 206 as the third nozzle are disposed on the circumference between the waste liquid pipe 181 and the waste liquid pipe 194. It is stuck. The cleaning nozzle 205 and the cleaning nozzle 206 are respectively connected to the storage tank 220 for accommodating the cleaning liquid through the cleaning liquid supply pipe.

The cleaning nozzle 205 is used to clean the outer bottom surface 162a of the rotary cup 162. The front end of the cleaning nozzle 205 penetrates through the partition wall 192 and protrudes toward the outer bottom surface 162a of the rotary cup 162. For this reason, the washing | cleaning liquid can be discharged directly from the washing | cleaning nozzle 205 to the outer bottom surface 162a, and the outer bottom surface 162a can be wash | cleaned.                     

The cleaning nozzle 206 is used to clean the inner wall 180c of the airflow control unit 180. The distal end of the cleaning nozzle 206 is located below the partition wall 192, and a discharge port (not shown) for discharging the cleaning liquid is formed on the side of the distal end. For this reason, the cleaning liquid discharged from the cleaning nozzle 206 is discharged to the inner wall 180c. Therefore, the cleaning liquid can be discharged from the cleaning nozzle 206 to clean the inner wall 180c.

As a material of the inner wall of the storage tank 52, metal, such as aluminum, can be used, for example. Thereby, since the deformation | transformation by rotation can be prevented compared with the case where synthetic resin etc. are used, washing liquid can be supplied stably.

The cleaning mechanism is configured by the cleaning nozzle 203, the cleaning nozzle 205, the cleaning nozzle 206, the storage tank 220, and the like.

Fig. 14 is a plan view of a resist coating process unit CT. As shown in FIG. 14, the supply port 152b is formed in the storage tank 52 so that the center of the rotating cup 162 may be fitted in the supply port 52b.

The cleaning liquid supply mechanism 157 has a cleaning liquid nozzle 44 as a discharge nozzle supported by the horizontal support 142 as a support. The sidewall cleaning nozzle 201a as the fifth nozzle is supported by the horizontal support 142. The cleaning liquid nozzle 44 is rotated around the shaft of the motor 43 by the driving of the motor 43 at least between the outside of the rotary cup 162 and immediately above the position of the supply port 52b (position P1). It is configured to be movable. Therefore, when the cleaning liquid nozzle 44 is located just above the position P1, that is, the supply port 52b, the cleaning liquid can be discharged from the cleaning liquid nozzle 44 into the supply port 52b.                     

By driving such a motor 43, the cleaning liquid nozzle 44 can be further moved to the position P2 integrally with the side wall cleaning nozzle 201a and the bottom surface cleaning nozzle described later. When the cleaning liquid nozzle 44 is located at the position P2, the opening end 201b of the side wall cleaning nozzle 201a is located above the inner surface side of the side wall of the rotary cup 162.

15 is a plan view of the cleaning liquid supply mechanism 157 according to the present embodiment. As shown in FIG. 15, the cleaning liquid nozzle 44 and the bottom surface cleaning nozzle 201 as the fourth nozzle are supported by the horizontal support 142. At the distal end of the bottom cleaning nozzle 201, a slit 201c for discharging the cleaning liquid downward is formed. A side wall cleaning nozzle 201a is connected to a substantially center in the longitudinal direction of the bottom cleaning nozzle 201. The side wall cleaning nozzle 201a is used to clean the rotary cup 162. The side wall cleaning nozzle 201a is curved such that the open end 201b of the front end thereof faces the motor 43, for example. The bottom cleaning nozzle 201 and the cleaning liquid nozzle 44 are connected to the receiving tank 222 for accommodating the cleaning liquid through the switching valve 221 for switching the supply of the cleaning liquid.

Therefore, the cleaning liquid supplied into the bottom cleaning nozzle 201 is at the splitting point V between the side wall cleaning nozzle 201 a and the bottom cleaning nozzle 201, respectively, at the side wall cleaning nozzle 201 a side and the slit 201 c. It is classified into the side and discharged from the open end 201b and the slit 201c. In addition, the cleaning liquid nozzle 44, the bottom cleaning nozzle 201 and the side wall cleaning nozzle 201a are integrally movable by the motor 43. For this reason, since other moving mechanisms are unnecessary, it becomes a simple structure and can aim at cost reduction and space saving.

In addition, in this embodiment, the example in which the side wall cleaning nozzle 201a is fixed to the substantially longitudinal center of the horizontal support body 142 was shown. However, for example, the length of the slit 201c may be increased by making the sidewall cleaning nozzle 201a incline to the motor 43 side for connection. By doing in this way, a washing | cleaning liquid can be supplied to a wider area | region, and washing | cleaning can be performed efficiently.

Next, the operation and the like of the rotary cup 162 when the resist is applied to the substrate will be described with reference to FIG.

At the time of rotation of the rotary cup 162, the gas flowing into the fixed cup 161 flows into the first flow path from the inlet 182. The gas which flowed into the 1st flow path flows into a 2nd flow path along the inner wall 186b (inclined surface) of the fixed cup cover body 186. Since the space | interval h2 of a 2nd flow path is set smaller than the space | interval h1 of a 1st flow path, the flow velocity in a 2nd flow path becomes faster than the flow velocity in a 1st flow path.

The gas accelerated in the second flow path flows along the inclined surfaces of the inner wall 180a, the inner wall 180b, and the inner wall 180c. That is, in the airflow control unit 180, the gas becomes a vortex flow in the arrow C direction.

The resist mist generated in the airflow control unit 180 is suppressed from flowing into the exhaust port 183a side by the guide member 197 and flows out downward by the waste liquid pipe 181.

The gas flowing into the bottom surface side of the partition wall 192 in the vortic flow flowing in the arrow C direction, for example, is made uniform by the through-hole 196 of the rectifying plate 195, and is exhausted from the exhaust port 183a.

Next, the cleaning procedure of the rotary cup 162 and the fixed cup 161 of this embodiment is demonstrated, referring the flowchart shown in FIG.

As shown in FIG. 17, the spin chuck 151 is raised and made to stand by. The motor 43 shown in FIG. 14 is driven to position the cleaning liquid nozzle 44 at the position P1. After the alignment, the cleaning liquid is discharged from the cleaning liquid nozzle 44 into the supply port 52b, and the cleaning liquid is stored in the storage tank 52 (step 1 (S1)).

Next, the rotating cup 162 shown in FIG. 14 is rotated 180 degrees (S2). As a result, the supply port 152b is positioned directly under the cleaning liquid nozzle 44.

Subsequently, as in Step 1 (S1), the cleaning liquid is discharged from the cleaning liquid nozzle 44 into the supply port 152b, and the cleaning liquid is stored in the storage tank 52 (S3). Thereby, since the washing | cleaning liquid can spread widely in the storage tank 52 in supply ports 52b and 152b, the collection time can be shortened.

As shown in FIG. 14, the motor 43 is driven to position (scan) the cleaning liquid nozzle 44 at the position P2. Subsequently, the cleaning liquid is discharged from the open end 201b, the slit 201c, the cleaning nozzle 203, and the cleaning nozzle 205. At this time, the rotary cup 162 is rotated, for example, at 5 rpm at the first rotational speed (S4). In other words, each part is cleaned by discharging the cleaning liquid from each nozzle while rotating the rotary cup 162. Specifically, as shown in FIG. 17, the cleaning liquid is discharged from the open end 201b to the inner circumferential surface 162n and the upper end surface 162t of the side wall of the rotary cup 162. In addition, the cleaning liquid is discharged from the slit 201c to the inner bottom surface 162c of the rotary cup 162. Further, the cleaning liquid is discharged from the cleaning nozzle 203 to the outer wall 162b. Further, the cleaning liquid is discharged from the cleaning nozzle 205 to the outer bottom surface 162a of the rotary cup 162. In this way, each surface is washed.

Subsequently, the cleaning liquid nozzle 44 is allowed to stand outside of the fixed cup 161 to close the lid 137 (S5).

Subsequently, for example, nitrogen gas is ejected into the rotary cup 162 as in the above-described embodiment (S6).

Next, for example, the rotary cup 162 is rotated at 700 rpm as the second rotation speed (S7). Thereby, for example, while rotating the rotating cup 162, the washing | cleaning liquid is ejected from the storage tank 52, and the periphery edge part 137a of the lower surface of the cover body 137 can be wash | cleaned. By blowing nitrogen gas, the cleaning liquid can be discharged out of the rotary cup 162 from the discharge hole 104. Subsequently, the nitrogen gas is ejected until the washing is finished.

Subsequently, for example, the rotating cup 162 is rotated at 100 rpm as the third rotational speed, and the cleaning liquid is discharged from the cleaning nozzle 205, the cleaning nozzle 206, and the cleaning nozzle 203 (S8). Accordingly, the outer bottom surface 162a of the rotary cup 162, the inner wall 180c of the fixed cup 161, and the outer wall 162b of the rotary cup 162 while suppressing the rotation speed of the rotary cup 162. You can clean up any remaining contamination.

In this manner, first, in step 4, contamination of the resist or the like adhered to the rotary cup 162 is removed. Then, when the lid 137 is cleaned in step 7, the dirt adhering to the rotary cup 162 and the fixed cup 161 is further removed in step 8 to thoroughly clean the particles, thereby generating particles more reliably. Can be prevented.

Subsequently, the rotation speed of the rotary cup 162 is raised to 300 rpm as the fourth rotation speed, for example, and the cleaning liquid is discharged from the cleaning nozzle 203 to the outer wall 162b (S9). Thereby, the inner wall 180a can be cleaned with the cleaning liquid reflected by the cleaning liquid discharged from the cleaning nozzle 203 from the outer wall 162b by the rotation of the rotating cup 162.

In addition, in this embodiment, the example which does step 7 (S7) after step 6 (S6) was shown. However, the order of these two steps is not limited to this, and, for example, even if the rotation of the rotary cup 162 in step 7 is started at about the same time as or after the start of the nitrogen gas jet in step 6 good.

As shown in FIG. 18, for example, the shape of the storage tank 52 is deformed so that each part of the storage tank 52 may move away from the center side of the rotating cup 162 from the side wall of the rotating cup 162, and these are also A large number of holes 52a may be formed by the respective corner portions of. By doing in this way, even if the washing | cleaning liquid sprayed from the hole 52a scatters to the outer periphery side by centrifugal force at the time of washing | cleaning, the bottom peripheral part 137a of the cover body 137 shown in FIG. 13 can be reliably cleaned. In addition, by increasing the number of the holes 52a, more washing liquid can be scattered to the bottom circumferential edge portion 137a and thus can be washed efficiently. In addition, instead of deforming the storage tank 52, the same effect can be obtained by setting the position of the hole 52a in the storage tank 52 to the center side of the rotary cup 162.

Moreover, in the said embodiment, the example in which the supply ports 52b and 152b of the storage tank 52 are formed in the substantially center of the vicinity of the storage tank 52 was shown. However, the positions of the supply ports 52b and 152b are not limited to this, and may be formed near each of the largest centrifugal forces in the storage tank 52, for example. In this way, for example, by storing the cleaning liquid in the storage tank 52 and rotating the rotary cup 162, the cleaning liquid can be effectively dispersed in the storage tank 52 by utilizing the centrifugal force.

In addition, in the said embodiment, the example which aluminum is used for the material of the inner wall of the storage tank 52 was shown, for example. However, the inner wall of the storage tank 52 is not limited to this, For example, the inner wall may be fluorine-coated. By doing in this way, it becomes possible to improve the sliding of the cleaning liquid and further shorten the storage time of the cleaning liquid. In addition, the cleaning liquid can be easily scattered.

In addition, in the said embodiment, the example which discharged the washing | cleaning liquid by aligning the washing | cleaning liquid nozzle 44 in the supply port 52b was shown. For example, as shown in FIG. 19, in the storage tank 52, the engaging groove 52f of diameter larger than the supply port 52b is formed, and the engaging groove 52f is attached to the front-end | tip part of the cleaning liquid nozzle 44. As shown in FIG. For example, rubber coupling portions 44f may be provided. And when discharging | cleaning the washing | cleaning liquid in the storage tank 52 in step 1 or step 3 shown in FIG. 16, the horizontal support body 142 may be lowered, for example, and the engaging part 44f is engaged with the engaging groove 52f. Engage In this way, for example, during the storage of the cleaning liquid, the cleaning liquid can be prevented from leaking out of the storage tank 52, and the discharge speed can be increased to store the cleaning liquid in a shorter time.

According to the present invention, a container such as a cup and a lid for opening and closing the container can be reliably cleaned, and the time for work for the cleaning process can be omitted. Thereby, generation | occurrence | production of a particle from a cover body can be prevented.

Claims (24)

A holding member for holding the substrate rotatably; A container having an opening for entering and exiting the substrate and capable of receiving the substrate held by the holding member and rotating in synchronism with the holding member; A cover body detachably installed at the opening to open and close the container; It is attached to the container and is installed on at least a part of the periphery of the holding member, at least a cleaning liquid for cleaning the lid is stored therein, and the discharge direction of the stored cleaning liquid is on the rotation center side rather than the rotation axis direction of the container. A storage tank having a discharge part formed to be inclined so as to face the And a rotation driving portion for rotating the container and scattering the cleaning liquid stored in the storage tank toward the lid by the centrifugal force of the rotation. The substrate processing apparatus according to claim 1, wherein the discharge portion is formed by forming a hole for discharging the cleaning liquid stored in the storage tank on a side facing the lid body in the storage tank. delete The substrate processing apparatus according to claim 1, wherein the discharge portion is provided with a slit for discharging the cleaning liquid stored in the storage tank on a side facing the lid body in the storage tank. delete The substrate processing apparatus according to claim 1, further comprising a cleaning liquid supply mechanism for supplying the cleaning liquid to the inside of the storage tank. The method of claim 6, wherein the cleaning liquid supply mechanism, A nozzle for discharging the cleaning liquid toward the inside of the storage tank; And a moving mechanism for moving the nozzle between a predetermined position outside the vessel and a position immediately above the holding member. The substrate processing apparatus according to claim 1, further comprising a partition member arranged inside the storage tank along a circumferential direction of the substrate and partitioning the interior of the storage tank into a plurality of chambers. The method of claim 8, wherein the plurality of partition members each have a side facing the storage tank, Some of the side surfaces are disposed with a gap between the storage tank, the other side is in contact with the storage tank. The substrate processing apparatus according to claim 9, wherein the gap is provided near a rotation center side of the container in the storage tank. The substrate processing apparatus according to claim 8, wherein at least one of the plurality of partition members is provided with a communication port through which the plurality of threads are connected in series. The substrate processing apparatus according to claim 11, wherein the communication port is provided near a rotational center side of the container in the partition member. The substrate processing apparatus according to claim 8, wherein at least one of the plurality of partition members forms a plate shape and is inclined at an angle with respect to the arrangement direction in which the plurality of partition members are arranged. A cleaning method for cleaning at least a lid for opening and closing the container, having a opening for entering and exiting a substrate, and detachably installed in the opening using a cleaning liquid in a container containing the substrate through the opening. Supplying the cleaning liquid to a storage tank mounted on the container and installed in at least a portion of the surroundings of the holding member holding the substrate in the container, and storing the cleaning liquid; By rotating the container, the cleaning liquid stored in the storage tank by the centrifugal force of the rotation is discharged inclined so that the discharge direction of the cleaning liquid toward the rotation center side than the rotation axis direction of the container and scattered toward the cover body Washing method comprising the. A holding member for holding the substrate rotatably; A first container having an opening for entering and leaving the substrate, the first container being capable of receiving the substrate held by the holding member and rotating in synchronization with the holding member; A cover body detachably installed at the opening and configured to open and close the first container; A storage tank mounted to the first container and installed in at least a portion of the periphery of the holding member and storing therein at least a cleaning liquid for cleaning the lid; The first container is rotated, and the cleaning liquid stored in the storage tank by the centrifugal force of the rotation is discharged inclined so that the discharge direction of the cleaning liquid is toward the rotation center side rather than the rotation axis direction of the container, and is scattered toward the lid. Rotating drive part which can let you, A second container accommodating the first container; And a cleaning mechanism having a cleaning nozzle provided in the second container for cleaning at least the outer periphery of the first container. 16. The cleaning apparatus as set forth in claim 15, wherein the cleaning mechanism includes, as the cleaning nozzle, a cleaning nozzle capable of cleaning the outer circumferential surface of the side wall of the first container, and a cleaning nozzle for cleaning the outer circumferential bottom surface of the first container. Substrate processing apparatus characterized by. The substrate processing apparatus according to claim 15, wherein the cleaning mechanism has a cleaning nozzle for cleaning the bottom surface of the second container as the cleaning nozzle. The discharge nozzle according to claim 15, further comprising: a discharge nozzle for discharging the cleaning liquid into the storage tank through a supply port formed in the storage tank; And a moving mechanism for moving the discharge nozzle at least between the outside of the first container and directly above the supply port. The cleaning nozzle according to claim 18, further comprising: a cleaning nozzle capable of cleaning the inner bottom surface of the first container; A cleaning nozzle for cleaning the inner circumference and the upper surface of the side wall of the first container; And a support for integrally supporting the cleaning nozzle for cleaning the discharge nozzle, the inner bottom surface of the first container, and the cleaning nozzle for cleaning the inner circumference and the upper surface of the side wall of the first container. Substrate processing apparatus. 19. A substrate processing apparatus according to claim 18, wherein at least two supply ports are formed. A holding member for holding the substrate rotatably; A first container having an opening for entering and leaving the substrate, the first container being capable of receiving the substrate held by the holding member and rotating in synchronization with the holding member; A cover body detachably installed at the opening and configured to open and close the first container; A storage tank mounted to the first container and installed in at least a part of the periphery of the holding member and storing therein at least a cleaning liquid for cleaning the lid; The first container is rotated, and the cleaning liquid stored in the storage tank by the centrifugal force of the rotation is discharged inclined so that the discharge direction of the cleaning liquid is toward the rotation center side rather than the rotation axis direction of the container, and is scattered toward the lid. Rotating drive part which can let you, A discharge nozzle movably provided between an outer side of the first container and an upper portion of a supply port formed in the storage tank, for discharging the cleaning liquid into the storage tank through the supply port; A bottom cleaning nozzle capable of cleaning an inner bottom surface of the first container, A side wall cleaning nozzle for cleaning the inner and outer surfaces of the side wall of the first container; And a support for integrally supporting the discharge nozzle, the bottom cleaning nozzle, and the side wall cleaning nozzle. (a) positioning the discharge nozzle for discharging the cleaning liquid into a first supply port formed in the storage tank mounted in the first container accommodating the substrate through an opening for entering and leaving the substrate; (b) discharging the cleaning liquid into the storage tank from the discharge nozzle through the first supply port after the step (a); (c) positioning the discharge nozzle in a second supply port formed at a portion separate from the first supply port of the storage tank by rotating the first container after the step (b); (d) discharging the cleaning liquid into the storage tank from the discharge nozzle through the second supply port after the step (c); (e) The first container is moved by integrally moving a bottom surface cleaning nozzle for cleaning the inner bottom surface of the first container, and a side wall cleaning nozzle for cleaning the inner and upper surfaces of the side walls of the first container. Positioning with respect to the sidewalls of the (f) discharging said cleaning liquid from said bottom surface cleaning nozzle and said side wall cleaning nozzle while rotating said first container at a first rotational speed; (g) By rotating the first container at a second rotation speed faster than the first rotation speed, the cleaning liquid stored in the storage tank by the centrifugal force of the rotation is rotated in a discharge direction of the cleaning liquid rather than the rotation axis direction of the container. And discharging inclinedly toward the center side to scatter toward the lid for opening and closing the first container detachably attached to the opening. 23. The cleaning nozzle according to claim 22, wherein (h) after said step (g), said first container is rotated at a third rotational speed slower than a second rotational speed so that said cleaning nozzle is installed in a second container containing said first container. And a step of discharging the cleaning liquid into the outer peripheral portion of the first container. 24. The cleaning method according to claim 23, further comprising, after the step (h), rotating the first container at a fourth rotation speed faster than the third rotation speed.

Images