KR100993005B1 - Method for fabricating large area x-ray detector - Google Patents

Abstract

The present invention relates to a method for manufacturing a large area X-ray detection apparatus. The invention comprises a first step of positioning a first panel on a first support table; Positioning a second support table on the first panel, the second support table having a second panel, the second support table having a plurality of blocks, the vacuum holding being adjusted for each block; And sequentially releasing the block of the second support table from one side to the other side to sequentially contact the surface of the first panel from one side of the second panel, and by using the roller. And a third step of sequentially bonding one side of the second panel to attach the second panel to the first panel, and to maintain a uniform distance between the scintillator panel and the sensor panel. It provides the effect of improving the quality of the images obtained by reducing the content.

Optical tape, TFT panel, scintillator, roller, vacuum chamber, large area X-ray detector

Description

Manufacturing method of large area X-ray detector {Method for fabricating large area x-ray detector}

The present invention relates to a method for manufacturing a large area X-ray detector, and more particularly, to a method for manufacturing a large area X-ray detector for uniformly bonding a sensor panel and a scintillator panel.

The X-ray detection apparatus is a device for reconstructing the internal structure of the subject into an image by outputting different X-rays passing through each part of the subject as different electric signals according to the amount of transmission.

The X-ray detection apparatus is used in various fields, such as industrial, medical, and, in particular, in the medical field, active research and development has been made to obtain high-quality images of various body parts.

Looking at the structure of the X-ray detection device briefly, a scintillator panel which generally consists of an aluminum layer and a CsI layer and converts the X-rays into visible light and an electric signal according to the intensity of visible light by receiving the visible light converted from the scintillator panel It consists of a TFT panel for outputting.

A general X-ray detection apparatus has a problem that image quality is degraded due to various causes such as optical diffusion or scattering while X-rays pass through the scintillator panel to the TFT panel.

The general X-ray detection apparatus is manufactured by manufacturing the scintillator panel and the TFT panel and bonding them to each other. At the time of adhesion, the scintillator panel and the TFT panel are uniformly spaced so as not to adhere or contain bubbles. It is very difficult to do.

In addition, it is difficult to construct a manufacturing apparatus capable of joining a large area scintillator panel or a TFT panel, and there are a number of process difficulties caused by the large size of the scintillator panel.

This difficulty is not a big problem in the manufacture of small area X-ray detectors such as oral sensors that acquire images of teeth, arches, etc., but large area X-rays acquire images of a wide range of parts such as the chest, head and neck. The manufacturing of the detection device is a big problem.

For this reason, the development of the technique which joins a scintillator panel and TFT panel uniformly, or the technique which can reduce the content of foam | bubble is urgently required.

Accordingly, the present invention is to solve the above-described general power failure and problems, it is possible to uniformly compress and adsorb between the sensor panel and the scintillator panel using a support table or a vacuum chamber having a roller or a block. It is an object of the present invention to provide a method for manufacturing a large area X-ray detection apparatus.

The manufacturing method of the large area X-ray detection apparatus according to the embodiment of the present invention for achieving the above object is a method of manufacturing a large area X-ray detection apparatus for detecting an X-ray to obtain an image, the first support table Positioning a first panel in the first stage; Positioning a second support table on the first panel, the second support table having a second panel, the second support table having a plurality of blocks, the vacuum holding being adjusted for each block; And sequentially releasing the block of the second support table from one side to the other side to sequentially contact the surface of the first panel from one side of the second panel, and by using the roller. And a third step of sequentially bonding one side of the second panel to adhere the second panel to the first panel.

In a preferred embodiment, the first panel may be a sensor panel, and the second panel may be an optical tape.

In a preferred embodiment, the first panel may be a sensor panel to which an optical tape is attached, and the second panel may be a scintillator panel.

In a preferred embodiment, the width and length of the first panel are 8 to 20 inches, respectively, and the width and length of the second panel are 8 to 20 inches, respectively. In addition, the manufacturing method may be applied to manufacturing a super-large X-ray detection apparatus having a horizontal length and a vertical length of the first panel of 20 inches or more, and a horizontal length and a vertical length of the second panel of each of 20 inches or more. .

In a preferred embodiment, the length of the width × length of the first panel and the second panel is any one of 8 × 8 inches, 10 × 12 inches and 17 × 17 inches.

According to another aspect of the present invention, there is provided a manufacturing method of a large-area X-ray detecting apparatus according to another embodiment of the present invention. Positioning a sensor panel on the substrate; Both sides of the adhesive layer includes an optical tape protected by the first protective film and the second protective film, and comprises a plurality of blocks, the second support table for positioning the vacuum support is controlled on each sensor block for each block on the sensor panel Two steps; A third step of exposing one surface of the adhesive layer by removing the first protective film of the optical tape; The vacuum of the block of the second support table is sequentially released from one side to the other side to sequentially contact the surface of the sensor panel from one side of the adhesive layer, and one of the optical tapes using a roller. A fourth step of adhering the adhesive layer to the sensor panel by sequentially pressing the sides; A fifth step of removing the second protective film of the optical tape to expose the other surface of the adhesive layer; And a sixth step of adhering the scintillator panel to the other surface of the adhesive layer.

In a preferred embodiment, the sixth step may include: a sixth step of positioning the scintillator panel on the sensor panel on which the adhesive layer is formed; And compressing the scintillator panel with a roller and attaching the scintillator panel to the sensor panel.

In a preferred embodiment, the sixth step may be performed in the vacuum chamber, the sixth step is provided in the vacuum chamber, the sixth step of mounting the scintillator panel on the second support table provided on the first support table -Stage 1; Step 6-2 of making the inside of the vacuum chamber into a vacuum state; A step 6-3 of descending the second support table until a distance between the sensor panel and the scintillator panel reaches a constant distance; And removing the support of the second support table and dropping the scintillator panel to contact the scintillator panel with the adhesive layer. The method may further include a step 6-4-1 of applying a physical pressure to the upper portion of the scintillator panel by lowering the second support table after the step 6-4. The method may further include a 6-4-2 step of releasing the vacuum by nitrogen purging after the 6-4-1 step to compress the TFT panel and the scintillator panel. It is preferable that the constant distance of the 6-3 step is 5mm to 10mm.

According to another aspect of the present invention, there is provided a manufacturing method of a large-area X-ray detecting apparatus according to another embodiment of the present invention. Positioning a sensor panel on the substrate; Adhering an optical tape having an adhesive layer to the sensor panel; A third step of placing a second support table on the sensor panel to which the optical tape is attached, the second supporting table having a scintillator panel and having a plurality of blocks, the vacuum holding of which is controlled for each block; And sequentially releasing the block of the second support table from one side to the other side so as to contact the surface of the sensor panel sequentially from one side of the scintillator panel, and using the roller. And sequentially bonding one side of the radar panel to adhere the scintillator panel to the sensor panel.

In a preferred embodiment, the second step: Step 2-1 to position the optical tape on both sides of the adhesive layer of the first protective film and the second protective film on the sensor panel; Removing the first protective film of the optical tape to expose one surface of the adhesive layer; A third step of attaching the optical tape to the sensor panel by compressing the optical tape with a roller; And 2-4 step of removing the second protective film of the optical tape; may include.

In a preferred embodiment, the second step: is provided on the first support table in the vacuum chamber, both sides of the adhesive layer is provided with an optical tape protected by the first protective film and the second protective film, a plurality of A second step of placing a second support table on the sensor panel, the second support table having a block, the vacuum holding of which is adjusted for each block; Removing the first protective film of the optical tape to expose one surface of the adhesive layer; Making a vacuum inside the vacuum chamber; Steps 2-4 of descending the second support table until the distance between the sensor panel and the optical tape reaches a constant distance; A step 2-5 of releasing support of the second support table and attaching the optical tape to the sensor panel by dropping the optical tape; And 2-6 to remove the second protective film of the optical tape.

In a preferred embodiment, the second step: an optical tape on which both surfaces of the adhesive layer is protected by the first protective film and the second protective film, the plurality of blocks are provided and the vacuum holding is controlled for each block. Step 2-1 of placing a support table on the sensor panel; Removing the first protective film of the optical tape to expose one surface of the adhesive layer; The vacuum of the block of the second support table is sequentially released from one side to the other side to sequentially contact the surface of the sensor panel from one side of the optical tape, and the roller may be used to Compressing one side sequentially to attach the adhesive layer to the sensor panel; And 2-4 step of removing the second protective film of the optical tape; may include.

In a preferred embodiment, the optical tape has a transmittance of 90% or more and a refractive index of 1.45 to 1.47 is preferred.

In a preferred embodiment, the width and length of the sensor panel are 8 to 20 inches, respectively, and the length and width of the scintillator panel are 8 to 20 inches, respectively. In addition, the manufacturing method may be applied to manufacturing a super-large X-ray detection apparatus having a horizontal and vertical length of the sensor panel is 20 inches or more, respectively, and the horizontal and vertical length of the scintillator panel are also 20 inches or more.

In a preferred embodiment, the length of the width × length of the sensor panel and the scintillator panel is any one of 8 × 8 inches, 10 × 12 inches and 17 × 17 inches.

The present invention compresses a large area scintillator panel and a large area sensor panel by using a support table or a vacuum chamber equipped with a roller or a block to uniformly maintain the distance between the scintillator panel and the sensor panel and contain air bubbles. It can reduce the number of images and improve the quality of the acquired image.

 In addition, the present invention has the effect of obtaining accurate and efficient data by increasing the amount of light reaching the sensor panel by bonding using an optical tape.

In general, a large-area X-ray detection device is a wavelength converter capable of converting X-rays into visible light, which includes a scintillator and a sensor element that converts the light into an electrical signal, and includes a pixel arranged in a matrix and a signal from the pixel. It contains a sensor panel containing an optical sensor connected to each pixel for continuous transmission.

That is, the large-area X-ray detection apparatus is manufactured by attaching a sensor panel that receives the visible light signal and converts it into an electrical signal on the back of the scintillator panel that converts X-rays into visible light.

The present invention relates to a method for bonding the sensor panel and the scintillator panel using an optical tape to manufacture the large-area X-ray detection device as described above, with reference to the accompanying drawings an embodiment of the present invention It explains in detail. Various means can be used as a means for converting the visible light signal into an electric signal, but since TFT is generally used, the present invention will be described using a TFT panel as a sensor panel.

1 is a block diagram of a large-area X-ray detection device manufactured according to an embodiment of the present invention.

Referring to FIG. 1, an X-ray detecting apparatus 100 according to an exemplary embodiment of the present invention may include a large area scintillator panel 110, a large area TFT panel 140, and a large area scintillator panel 110. The bonding layer 230 is bonded to the large area TFT panel 140.

The large area scintillator panel 110 includes an aluminum plate 120 and a scintillator 130.

The aluminum plate 120 reflecting film is installed on the surface of the scintillator panel 110 to increase the light output of the scintillator panel 110 to obtain a clear image.

The scintillator 130 is a panel that converts incident X-rays into visible light, and has a columnar crystal structure in which cesium iodide (Csl) or the like, which is a high-brightness fluorescent material, is deposited and deposited. In this case, in the present invention, the cesium iodide forming the scintillator 130 was manufactured to have a thickness of 0.5 mm, which is an appropriate thickness to optimize the resolution of the X-ray sensor.

The TFT panel 140 is formed of a TFT and a photodiode capable of sensing visible light.

In this case, the TFT panel 140 has a large area TFT panel having a length of 8 to 20 inches and a width of 8 to 20 inches. In addition, the scintillator panel 130 also used a large area scintillator panel having a length of 8 to 20 inches in both length and width.

That is, the present invention can manufacture a super-large X-ray detection apparatus by bonding using a sensor panel having a length of 20 inches or more and a scintillator panel having a length of 20 inches or more, respectively. On the other hand, as a preferred embodiment, a large-area X-ray detection apparatus having a length × width of the sensor panel and the scintillator panel having a length of 8 × 8 inches, 10 × 12 inches, or 17 × 17 inches can be manufactured.

2A to 2C are flowcharts illustrating a method of manufacturing the large-area X-ray detection apparatus 100 according to the embodiment of the present invention.

Referring to FIGS. 2A to 2C, first, the first panel 30 is positioned on the first support table 10.

Subsequently, the second panel 40 is attracted to the second support table 20 and positioned on the first panel 30. In this case, the second support table 20 may include a plurality of blocks, and may maintain a vacuum for each block, or release the vacuum for each block. In addition, the end of the block of the second support table 20 is interconnected with a vacuum pump (not shown) for generating a vacuum.

In addition, the number and location of the blocks are preferably disposed so that the adsorption force can be fixed to uniformly fix the second panel.

Subsequently, the one side of the blocks of the second support table 20 is sequentially released in the other direction so that the second panel 40 contacts the surface of the first support table 10. do.

At the same time, the second panel 40, which is in contact with the first panel 30, begins to be pressed using the roller 250. At this time, the roller 250 is positioned between the second panel 40 and the second support table 20, and attaches the second panel to the first panel by rotating while moving in the other direction.

That is, the first panel 30 and the second panel 40 are adhered to each other by releasing the blocks of the second support table 20 sequentially and pressing them using the roller 250.

The first panel may be a TFT panel or a TFT panel to which an optical tape is attached, and the second panel may be an optical tape or a scintillator panel.

That is, the first embodiment of the present invention can be used when adhering an optical tape onto a TFT panel or adhering a scintillator panel onto a TFT panel to which the optical tape is attached.

In this case, the optical tape to be used has a high visible light passing rate, it may be a double-sided tape is protected both sides of the adhesive layer with the first protective film and the second protective film.

3A to 3F are flowcharts illustrating a method of manufacturing a large area X-ray detection apparatus using a second support table and a roller having blocks according to a second embodiment of the present invention.

Referring to FIGS. 3A to 3F, the TFT panel 140 is first positioned on the first support table 10.

Here, the TFT panel 140 may further include a sub glass supporting the TFT panel 140 and protecting it from external resistance.

In this case, the TFT panel 140 has a large area TFT panel having a length of 8 to 20 inches and a width of 8 to 20 inches.

Subsequently, the optical tape 200 is adsorbed on the TFT panel 140 by a second support table 20 having a plurality of blocks and capable of maintaining a vacuum for each block.

Subsequently, the first protective film 210 of the optical tape 200 is removed to expose one surface of the adhesive layer 230. The optical tape 200 has a high visible light passing rate, and a double-sided tape in which both surfaces of the adhesive layer 230 are protected by the first protective film 210 and the second protective film 220.

Subsequently, vacuum is sequentially released from one side to the other side of each block of the second support table 20 so that the adhesive layer 230 of the optical tape 200 contacts the surface of the TFT panel 140. Do it. At the same time, the optical tape 200 in contact with the TFT panel 140 begins to be compressed using the roller 250. In this case, the roller 250 is positioned between the optical tape 200 and the second support table 20 and moves while rotating in the other direction to move the optical tape 200 on the TFT panel 140. Attach to.

Subsequently, the second protective film 220 of the optical tape 200 is removed to expose the other surface of the adhesive layer 230.

Subsequently, the scintillator panel 1100 is positioned on the adhesive layer 230 adhered to the TFT panel 140.

Subsequently, the scintillator panel 110 in contact with the TFT panel 140 begins to be compressed using the roller 250. In this case, the roller 250 moves while rotating in the other direction to attach the scintillator panel 110 to the TFT panel 140.

In this case, the scintillator panel 110 also used a large area scintillator panel having a length of 8 to 20 inches in both length and width.

That is, the present invention can manufacture a super-large X-ray detection apparatus by bonding using a sensor panel having a length of 20 inches or more and a scintillator panel having a length of 20 inches or more, respectively. On the other hand, as a preferred embodiment, a large-area X-ray detection apparatus having a length × width of the sensor panel and the scintillator panel having a length of 8 × 8 inches, 10 × 12 inches, or 17 × 17 inches can be manufactured.

On the other hand, the method for manufacturing a large area X-ray detection apparatus according to a second embodiment of the present invention can be made in a vacuum chamber.

Therefore, the large-area X-ray detector manufactured according to the manufacturing method of the large-area X-ray detection apparatus according to the second embodiment of the present invention can not only maintain the thickness of the adhesive layer between the TFT panel and the scintillator panel uniformly. By reducing the content of bubbles it is possible to improve the quality of the acquired image.

The large-area X-ray detection device manufactured by the manufacturing method of the X-ray detection device according to the embodiment of the present invention may be applied to various equipments such as dental equipment, for example, a panoramic device, a CT device, and a cephalo device. In addition, it can be applied to a variety of medical equipment such as chest X-ray apparatus or mammoth device.

In particular, when using a 17 x 17 inch large area X-ray detector, a super large X-ray detector can be manufactured by attaching four 17 x 17 inch scintillator panels and 17 x 17 inch sensor panels. .

4A to 4G are flowcharts of a method of manufacturing a large area X-ray detection apparatus using a vacuum chamber and a second support table having blocks according to a third embodiment of the present invention.

If the manufacturing method of the large area X-ray detection apparatus according to the second embodiment of the present invention is a method using a support table and a roller, the manufacturing method of the large area X-ray detection apparatus according to the third embodiment of the present invention is a support table and a vacuum. In the chamber 300 is made by a method by vacuum compression.

First, the adhesive layer 200 is formed on the TFT panel 140. 4A to 4D are the same as in the second embodiment of the present invention, and thus description thereof will be omitted.

4E to 4G, in the manufacturing method according to the second embodiment of the present invention, the process of adhering the scintillator panel 110 and the TFT panel 140 is performed in the vacuum chamber 300.

After the second protective film 220 of the optical tape 200 is removed, the scintillator panel 110 is adsorbed using the second support table 20 provided in the vacuum chamber 300. It is located on the TFT panel 140.

In this case, the first support table 10 and the second support table 20 generate a stronger vacuum than the vacuum inside the vacuum chamber 300, thereby respectively separating the TFT panel 140 and the scintillator panel 110. Adsorb.

In addition, the scintillator panel 110 is lowered by the second support table 20 until it reaches a predetermined distance from the TFT panel 140, and the TFT panel 140 and the scintillator panel 110 Most preferably, the interval is about 5 m to 10 mm.

When the interval between the TFT panel 140 and the scintillator panel 110 is about 5 mm to 10 mm, the scintillator panel 110 and the scintillator panel 110 are formed through a plurality of pores provided in the second support table 20. The gas is blown between the second support tables 20 to release the scintillator panel 110 adsorbed to the second support table 20 and drop the support to the adhesive layer 120.

Finally, after the TFT panel 140 and the scintillator panel 110 are bonded together, the second support table 20 is lowered to apply physical pressure to the upper portion of the scintillator panel 110. 140 and the scintillator panel 110 are compressed to complete a large area X-ray detection device.

In this case, the TFT panel 140 and the scintillator panel 110 may be compressed by instantly purging nitrogen in the vacuum chamber 300 to form atmospheric pressure.

Except for the above, the manufacturing method according to the third embodiment of the present invention is the same as the manufacturing method of the large area X-ray detecting apparatus according to the second embodiment of the present invention.

5A to 5F are flowcharts of a method of manufacturing a large area X-ray detection apparatus using a second support table having a roller and a block according to a fourth embodiment of the present invention.

Referring to FIGS. 5A to 5F, the TFT panel 140 is first positioned on the first support table 10.

Subsequently, the optical tape 200 on which both surfaces of the adhesive layer 230 are protected by the first protective film 210 and the second protective film 220 is positioned on the TFT panel 140.

Subsequently, the adhesive layer 230 of the optical tape 200 is brought into contact with the surface of the TFT panel 140. At the same time, the optical tape 200 in contact with the TFT panel 140 is pressed using the roller 250. In this case, the roller 250 moves while rotating in the other direction to attach the optical tape 200 to the TFT panel 140.

Subsequently, the second protective film 220 of the optical tape 200 is removed to expose the other surface of the adhesive layer 230.

Subsequently, the scintillator panel 110 is absorbed and positioned on the TFT panel 140 by the second support table 20 which is provided with a plurality of blocks and can maintain a vacuum for each block.

Subsequently, the vacuum is sequentially released from one side to the other side of each block of the second support table 20 so that the scintillator panel 110 adheres to the TFT panel 140 of the adhesive layer 230. Make contact with the surface. At the same time, the scintillator panel 110 in contact with the TFT panel 140 begins to be compressed using the roller 250.

In this case, the roller 250 is located between the scintillator panel 110 and the second support table 20 and moves while rotating in the other direction to move the scintillator panel 110 to the TFT panel 140. The large area X-ray detection apparatus is completed by attaching on the film.

Except for the above, the manufacturing method according to the fourth embodiment of the present invention is the same as the manufacturing method of the large-area X-ray detecting apparatus according to the second embodiment of the present invention.

6A to 6G are flowcharts of a method of manufacturing a large area X-ray detection apparatus using a second support table having a vacuum chamber and a block according to a fifth embodiment of the present invention.

If the manufacturing method of the large area X-ray detection apparatus according to the fourth embodiment of the present invention is a method using a roller and a block, the manufacturing method of the large area X-ray detection apparatus according to the fifth embodiment of the present invention is a vacuum chamber and a block. It is made by the method used.

6A to 6G, the manufacturing method according to the fifth embodiment of the present invention is performed in the vacuum chamber 300.

First, the TFT panel 140 is positioned on the first support table 10 provided in the vacuum chamber 300.

Subsequently, the optical tape 200 is adsorbed using the second support table 20 provided in the vacuum chamber 300 and then positioned on the TFT panel 140.

The optical tape 200 protects both surfaces of the adhesive layer 230 with the first protective film 210 and the second protective film 22, and the second support table 20 includes a plurality of blocks, respectively. Vacuum can be maintained for each block.

In this case, the first support table 10 and the second support table 20 generate a stronger vacuum than the vacuum inside the vacuum chamber 300 to adsorb the TFT panel 140 and the optical tape 200, respectively. Let's do it.

Subsequently, the first protective film 210 of the optical tape 200 is removed to expose one surface of the adhesive layer 230.

Subsequently, the inside of the vacuum chamber 300 is maintained in a vacuum state.

Subsequently, the second support table 20 is lowered until the interval between the TFT panel 140 and the optical tape 200 reaches a constant interval. At this time, the interval between the TFT panel 140 and the optical tape 200 is most preferably about 5m to 10mm.

 When the interval between the TFT panel 140 and the optical tape 200 is about 5 mm to 10 mm, the optical tape 200 and the optical tape 200 may be formed through a plurality of pores provided in the second support table 20. By blowing a gas between the two support tables 20, the support of the optical tape 200 adsorbed to the second support table 20 is released and then dropped onto the TFT panel 140 to be bonded.

In this case, after the TFT panel 140 and the optical tape 200 are adhered to each other, the second support table 20 is lowered to apply a physical pressure to the upper portion of the optical tape 200. ) And the thickness of the adhesive layer 230 between the optical tape 200 can be made uniform.

Subsequently, the second protective film 220 of the optical tape 200 is removed to expose the other surface of the adhesive layer 230.

Subsequently, the scintillator panel 110 is absorbed and positioned on the TFT panel 140 by the second support table 20 which is provided with a plurality of blocks and can maintain a vacuum for each block.

Subsequently, the vacuum is sequentially released from one side to the other side of each block of the second support table 20 so that the scintillator panel 110 adheres to the TFT panel 140 of the adhesive layer 230. Make contact with the surface. At the same time, the scintillator panel 110 in contact with the TFT panel 140 begins to be compressed using the roller 250.

In this case, the roller 250 is positioned between the scintillator panel 110 and the second support table 20 and moves while rotating in the other direction to move the scintillator panel 110 to the TFT panel 140. The large-area X-ray detection device is completed by attaching it on the substrate.

Except for the above, the manufacturing method according to the fifth embodiment of the present invention is the same as the manufacturing method of the large-area X-ray detecting apparatus according to the second embodiment of the present invention.

7A to 7F are flowcharts of a method of manufacturing a large area X-ray detection apparatus using a second support table having blocks according to a sixth embodiment of the present invention.

If the manufacturing method of the large-area X-ray detection apparatus according to the fourth embodiment of the present invention is a method using a roller and a block, the manufacturing method of the large-area X-ray detection apparatus according to the sixth embodiment of the present invention is a method using a block. Is done.

Referring to FIGS. 7A to 7F, the TFT panel 140 is first positioned on the first support table 10.

Subsequently, the optical tape 200 is adsorbed on the TFT panel 140 by a second support table 20 having a plurality of blocks and capable of maintaining a vacuum for each block.

Subsequently, the first protective film 210 of the optical tape 200 is removed to expose one surface of the adhesive layer 230.

Subsequently, vacuum is sequentially released from one side to the other side of each block of the second support table 20 so that the adhesive layer 230 of the optical tape 200 contacts the surface of the TFT panel 140. Let's do it. At the same time, the optical tape 200 in contact with the TFT panel 140 begins to be compressed using the roller 250. At this time, the roller 250 is located between the optical tape 200 and the second support table 20, and moves the optical tape 200 on the TFT panel 140 by rotating while moving in the other direction. Attach.

Subsequently, the second protective film 220 of the optical tape 200 is removed to expose the other surface of the adhesive layer 230.

Hereinafter, the process of forming the scintillator panel 110 on the TFT panel 140 (FIGS. 7E and 7F) is the same as that of the fourth embodiment of the present invention, and thus description thereof will be omitted. Except for the above, the manufacturing method according to the sixth embodiment of the present invention is the same as the manufacturing method of the large-area X-ray detection apparatus according to the fourth embodiment of the present invention.

As described above, the large-area X-ray detection device manufactured by the same method as the embodiments of the present invention has a high transmittance by using an optical tape, thereby increasing the amount of light reaching the large-area X-ray detection device to obtain accurate data. You get the effect.

In addition, by pressing and adsorbing between the TFT panel and the scintillator panel using a roller, a second support table with blocks and a vacuum chamber, the bubble generation is suppressed and the thickness is kept constant so that the light generated by the bubble generation can be maintained. No refraction occurs.

The size of the horizontal X length of the large-area X-ray detection device manufactured as described above is a large-area large area X-ray detection device of 8 × 8 (inch), 10 × 12 (inch) or 17 × 17 (inch). The X-ray sensor panel may be applied to a dental X-ray apparatus which photographs a wide range of areas such as the head, neck, and chest, such as a panoramic device, a cephalo device, a CT device, and a mammoth device.

Although the above has been described with reference to a preferred embodiment of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention as set forth in the claims below. Could be.

1 is a block diagram of a large-area X-ray detection apparatus according to an embodiment of the present invention.

2A to 2C are flowcharts illustrating a method of manufacturing a large area X-ray detection apparatus according to a first embodiment of the present invention.

3A to 3F are flowcharts illustrating a method of manufacturing a large area X-ray detection apparatus using a second support table and a roller having blocks according to a second embodiment of the present invention.

4A to 4G are flowcharts of a method of manufacturing a large area X-ray detection apparatus using a vacuum chamber and a second support table having blocks according to a third embodiment of the present invention.

5A to 5F are flowcharts of a method of manufacturing a large area X-ray detection apparatus using a second support table having a roller and a block according to a fourth embodiment of the present invention.

6A to 6G are flowcharts of a method of manufacturing a large area X-ray detection apparatus using a second support table having a vacuum chamber and a block according to a fifth embodiment of the present invention.

7A to 7F are flowcharts of a method of manufacturing a large area X-ray detection apparatus using a second support table having blocks according to a sixth embodiment of the present invention.

<Description of Major Symbols in Drawings>

10: first support table 20: second support table

100: large area X-ray detector 110: scintillator panel

140: TFT panel 200: light tape

210: first protective film 220: second protective film

230: adhesive layer 250: roller

300: vacuum chamber

Claims (19)

delete delete delete delete delete In the manufacturing method of a large-area X-ray detection apparatus for detecting an X-ray to obtain an image, A first step of positioning the sensor panel on the first support table; Both sides of the adhesive layer comprise an optical tape protected by the first protective film and the second protective film, and having a plurality of blocks, and positioning a second support table on the sensor panel, the vacuum holding is controlled for each block Second step; A third step of exposing one surface of the adhesive layer by removing the first protective film of the optical tape; The vacuum of the block of the second support table is sequentially released from one side to the other side to sequentially contact the surface of the sensor panel from one side of the adhesive layer, and one of the optical tapes using a roller. A fourth step of adhering the adhesive layer to the sensor panel by sequentially pressing the sides; A fifth step of removing the second protective film of the optical tape to expose the other surface of the adhesive layer; And And a sixth step of adhering the scintillator panel to the other surface of the adhesive layer. The method of claim 6, The sixth step is: Step 6-1 of placing the scintillator panel on the sensor panel on which the adhesive layer is formed; And And a step 6-2 of pressing the scintillator panel with a roller and attaching the scintillator panel to the sensor panel. The method of claim 6, The sixth step is a manufacturing method of a large area X-ray detection apparatus, characterized in that the inside of the vacuum chamber. The method of claim 8, The sixth step is: A step 6-1 provided in the vacuum chamber and mounting the scintillator panel on a second support table provided above the first support table; Step 6-2 of making the inside of the vacuum chamber into a vacuum state; A step 6-3 of descending the second support table until a distance between the sensor panel and the scintillator panel reaches a constant distance; And And discharging the scintillator panel and contacting the scintillator panel with the adhesive layer by releasing the support of the second support table and manufacturing the large area X-ray detection apparatus. The method of claim 9, Manufacturing a large area X-ray detection apparatus further comprises the step 6-4-1 after applying the physical pressure to the upper portion of the scintillator panel by lowering the second support table after step 6-4 Way. The method of claim 10, And a 6-4-2 step of compressing the sensor panel and the scintillator panel by releasing the vacuum by nitrogen purging after the 6-4-1 step. Method of preparation. The method of claim 9, Method of manufacturing a large area X-ray detection apparatus, characterized in that the constant distance of step 6-3 is 5mm to 10mm. In the manufacturing method of a large-area X-ray detection apparatus for detecting an X-ray to obtain an image, A first step of positioning the sensor panel on the first support table; Adhering an optical tape having an adhesive layer to the sensor panel; A third step of placing a second support table on the sensor panel to which the optical tape is attached, the second supporting table having a scintillator panel and having a plurality of blocks, the vacuum holding of which is controlled for each block; And The block of the second support table is sequentially released from one side to the other side to sequentially contact the surface of the sensor panel from one side of the scintillator panel, and the scintillator using a roller. And compressing one side of the panel in sequence to adhere the scintillator panel to the sensor panel. 4. The method of claim 13, The second step: Placing the optical tape on both sides of the adhesive layer protected by the first protective film and the second protective film on the sensor panel; Removing the first protective film of the optical tape to expose one surface of the adhesive layer; A third step of attaching the optical tape to the sensor panel by compressing the optical tape with a roller; And Step 2-4 of removing the second protective film of the optical tape; manufacturing method of a large area X-ray detecting apparatus comprising a. The method of claim 13, The second step: It is provided on the first support table in the vacuum chamber, wherein both sides of the adhesive layer is provided with an optical tape protected by the first protective film and the second protective film, and provided with a plurality of blocks, the vacuum holding is adjusted for each block. Step 2-1 of positioning the second support table on the sensor panel; Removing the first protective film of the optical tape to expose one surface of the adhesive layer; Making a vacuum inside the vacuum chamber; A step 2-4 of descending the second support table until a distance between the sensor panel and the optical tape reaches a constant distance; A step 2-5 of releasing support of the second support table and attaching the optical tape to the sensor panel by dropping the optical tape; And And a second step (6) of removing the second protective film of the optical tape. The method of claim 13, The second step: Both sides of the adhesive layer includes an optical tape protected by the first protective film and the second protective film, and comprises a plurality of blocks, the second support table for positioning the vacuum support is controlled on each sensor block for each block on the sensor panel Step 2-1; And Removing the first protective film of the optical tape to expose one surface of the adhesive layer; The vacuum of the block of the second support table is sequentially released from one side to the other side to sequentially contact the surface of the sensor panel from one side of the optical tape, and the roller may be used to Compressing one side sequentially to attach the adhesive layer to the sensor panel; And Step 2-4 of removing the second protective film of the optical tape; manufacturing method of a large area X-ray detecting apparatus comprising a. The method according to any one of claims 6 to 16, The optical tape has a transmittance of 90% or more and a refractive index of 1.45 to 1.47. The method according to any one of claims 6 to 16, The horizontal and vertical lengths of the sensor panel are 8 to 20 inches, respectively, and the horizontal and vertical lengths of the scintillator panel are 8 to 20 inches, respectively. . The method of claim 18, The length of the width X length of the said sensor panel and the said scintillator panel is any one of 8x8 inch, 10x12 inch, and 17x17 inch.

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