KR100964655B1 - Method for fabricating large area x-ray detector - Google Patents

Abstract

The present invention relates to a method for manufacturing a large-area X-ray detection device, and more particularly, by spraying silicon on the front surface in a state where the large-area TFT panel is up, the silicon flows in one day to maintain a constant thickness of the adhesive layer. The present invention relates to a method for manufacturing a large-area X-ray detection apparatus for roller compaction or vacuum compaction of a scintillator panel.

In the manufacturing method of a large-area X-ray detection apparatus according to an embodiment of the present invention, the first step of providing a front surface of the sensor T-panel that receives visible light and outputs a constant electric signal is provided to form a constant angle with a horizontal plane in space, A second step of spraying an adhesive on an upper surface of the sensor panel, a third step of spraying the sprayed adhesive from an upper surface of the front surface of the sensor panel to form an adhesive layer having a predetermined thickness, and an X-ray on the front surface of the adhesive layer And a fourth step of adhering the scintillator panel to convert the light into visible light.

Large area X-ray detector, vacuum chamber, scintillator, large area TFT panel, silicon

Description

Manufacturing method of large area X-ray detector {Method for fabricating large area x-ray detector}

The present invention relates to a method for manufacturing a large-area X-ray detection apparatus, and more particularly, by spraying silicon on the front surface in a state in which the large-area sensor panel is up, the silicon flows in one day to maintain a constant thickness of the adhesive layer. The present invention relates to a method for manufacturing a large-area X-ray detection apparatus for roller compaction or vacuum compaction of a scintillator panel.

In medical and industrial X-ray imaging, X-ray photosensitive films have been used in the past, but in recent years, the spread of X-ray detection devices excellent in the convenience of imaging and preservation of imaging results has been activated.

On the other hand, the structure of the X-ray detecting device briefly, the X-ray detecting device is generally composed of an aluminum layer and a CsI layer receives a scintillator panel converting X-rays to visible light and the visible light converted from the scintillator panel It consists of a TFT panel which outputs an electric signal according to the intensity of visible light.

At this time, the scintillator panel and the TFT panel are manufactured and adhered to each other, but it is very difficult to uniformly bond the scintillator panel and the TFT panel at the time of adhesion.

In general, an adhesive is applied between the scintillator panel and the TFT panel to be bonded to each other. In the bonding process, first, the TFT panel is placed on the bottom so that the front side faces upward, and the adhesive layer is applied to the front surface at the portion to form an adhesive layer. After that, it is made by bonding the scintillator panel.

The general X-ray detection apparatus is manufactured by manufacturing the scintillator panel and the TFT panel and bonding them to each other. At the time of adhesion, the scintillator panel and the TFT panel are uniformly spaced so as not to adhere or contain bubbles. It is very difficult to do.

In addition, it is difficult to construct a manufacturing apparatus capable of joining a large area scintillator panel or a TFT panel, and there are a number of process difficulties caused by the large size of the scintillator panel.

This difficulty is not a big problem in the manufacture of small area X-ray detectors such as oral sensors that acquire images of teeth, arches, etc., but large area X-rays acquire images of a wide range of parts such as the chest, head and neck. The manufacturing of the detection device is a big problem.

For this reason, the development of the technique which joins a scintillator panel and TFT panel uniformly, or the technique which can reduce the content of foam | bubble is urgently required.

The present invention was devised to solve the above problems, and an object of the present invention is to provide a large area X-ray detection apparatus capable of uniformly bonding the sensor panel and the scintillator panel to improve the performance of the large area X-ray detection apparatus. It is to provide a manufacturing method.

In addition, another object of the present invention is to provide a manufacturing method of the X-ray detection apparatus that can reduce the cost by simplifying the process of applying the adhesive.

In order to achieve the above object, the present invention provides a method for manufacturing a large-area X-ray detection apparatus for detecting an X-ray to obtain an image, wherein a front surface of a sensor panel that receives visible light and outputs a constant electric signal is a horizontal plane in space. A first step of providing a constant angle with the second step of spraying the adhesive on the front surface of the sensor panel, the sprayed adhesive flows from the top of the front surface of the sensor panel to the bottom of the front surface to form an adhesive layer having a constant thickness And a fourth step of adhering a scintillator panel for converting X-rays into visible light on the entire surface of the adhesive layer.

In a preferred embodiment, the thickness of the adhesive layer of the third step is 10㎛ to 40㎛.

In a preferred embodiment, the width and length of the sensor panel are 8 to 20 inches, respectively, and the length and width of the scintillator panel are 8 to 20 inches, respectively. In addition, the manufacturing method may be applied to manufacturing a super-large X-ray detection apparatus having a horizontal and vertical length of the sensor panel is 20 inches or more, respectively, and the horizontal and vertical length of the scintillator panel are also 20 inches or more.

In a preferred embodiment, the length of the width × length of the sensor panel and the scintillator panel is any one of 8 × 8 inches, 10 × 12 inches and 17 × 17 inches.

In a preferred embodiment, the adhesive is provided with silicone.

In a preferred embodiment, the fourth step is a step 4-1 of positioning the sensor panel with the adhesive layer upwards, and a fourth step of contacting a lower portion of the scintillator panel with an upper portion of the adhesive layer. Step 2, Step 4-3 to position the roller on the upper side of the scintillator panel, the roller is rotated and moved from one side of the scintillator panel to the other side of the lower surface of the scintillator panel and the adhesive layer And a fourth step of attaching the upper surface to a close contact, and a fourth step of attaching the sensor panel to the scintillator panel by curing the adhesive layer.

In a preferred embodiment, the fourth step is carried out inside the vacuum chamber.

In a preferred embodiment, the fourth step is a step 4-1 of providing the sensor panel on the first support table of the vacuum chamber with the adhesive layer upward, using a second support table in the vacuum chamber. Step 4-2 to position the scintillator panel in the upper spaced apart from the sensor panel, Step 4-3 to make the interior of the vacuum chamber into a vacuum state, the distance between the sensor panel and the scintillator panel Steps 4 and 4 of descending the second support table until reaching a certain distance, and release of the support of the second support table and dropping the scintillator panel to contact the scintillator panel with the adhesive layer. Step 5 and step 4-6 of releasing the vacuum in the vacuum chamber to compress the sensor panel and the scintillator panel.

In a preferred embodiment, after the scintillator panel is in contact with the adhesive layer, the second support table is lowered or the first support table is raised to apply a physical pressure to the upper portion of the scintillator panel. It further includes step 5-1.

In a preferred embodiment, the vacuum release is by nitrogen purging.

In a preferred embodiment, the constant distance of steps 4-4 is between 5 mm and 10 mm.

As described above, according to the present invention, the thickness of the adhesive layer can be made uniform by allowing silicon injected into the TFT panel to flow down and applied by gravity, thereby improving the performance of the large-area X-ray detecting apparatus.

In addition, the present invention has the effect that the process can be simplified to reduce the cost.

Therefore, the present invention can manufacture a large-area X-ray detection device, so that one X-ray detection device can obtain chest images or mammoth images as well as cephaloscopic images, CT images, and panoramic images of the oral cavity or head. have.

In addition, according to the present invention, the second support table is lowered to apply pressure once, and the pressure is again applied by nitrogen purging to increase the adhesion between the sensor panel and the scintillator panel.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. Various means can be used as a means for converting a visible light signal into an electric signal, but since TFTs are generally used, the present invention will be described using a TFT panel as a sensor panel.

1 is a view showing a large area X-ray detection device manufactured by embodiments of the present invention.

Referring to FIG. 1, a large area X-ray detecting apparatus 100 manufactured by embodiments of the present invention includes a TFT panel 110, a scintillator panel 120, and an adhesive layer 130.

The TFT panel 110 is a panel including a plurality of TFTs that receive visible light and output a constant electric signal as a photoelectric conversion panel.

That is, the TFT panel 110 is a panel including a plurality of photoelectric conversion elements.

Accordingly, the TFT panel 110 may be any panel as long as the panel is formed of elements that produce a photoelectric effect.

For example, the panel may be formed of not only a TFT panel 110 using a TFT but also a CCD, a CMOS, a photodiode, and the like.

In this case, the TFT panel 140 has a large area TFT panel having a length of 8 to 20 inches and a width of 8 to 20 inches. In addition, the scintillator panel 130 also used a large area scintillator panel having a length of 8 to 20 inches in both length and width.

That is, the present invention can manufacture a super-large X-ray detection apparatus by bonding using a sensor panel having a length of 20 inches or more and a scintillator panel having a length of 20 inches or more, respectively. On the other hand, as a preferred embodiment, a large-area X-ray detection apparatus having a length × width of the sensor panel and the scintillator panel having a length of 8 × 8 inches, 10 × 12 inches, or 17 × 17 inches can be manufactured.

Therefore, the X-ray image sensor 100 manufactured by the embodiments of the present invention is a large-area X-ray detection device, so the cephalo image, CT image, panoramic image of the oral cavity or head is obtained as well as chest image or mammoth image. There is an advantage to this.

The scintillator panel 120 is a panel that converts the X-rays 10 into visible light, and is made of a fluorescent material that emits visible light when the radiation is incident and collides. According to the type of the fluorescent material, an inorganic scintillator and an organic scintillator are used. It is classified as a rater.

In general, the inorganic scintillator is made of NaI, ZnS and the like, and the organic scintillator is made of CsI or LiI.

In the embodiments of the present invention, the scintillator panel 120 uses a scintillator panel 120 made of CsI.

In addition, the scintillator panel 120 generally includes an aluminum plate 121 that transmits X-rays 10 and a CsI layer formed under the aluminum plate 121.

The adhesive layer 130 serves to bond the TFT panel 110 and the scintillator panel 120.

In addition, the adhesive layer 130 is formed of an adhesive layer 130 having a uniform thickness by allowing the adhesive 20 in a liquid or gel state to be sprayed on a portion of the TFT panel 110 instead of being applied to the entire surface of the TFT panel 110.

Detailed description will be given with reference to FIGS. 2 and 3.

In addition, the adhesive uses silicon (20).

That is, in the related art, the adhesive layer 130 is formed in such a manner as to directly apply an adhesive to the TFT panel 110 in its entirety, thereby bonding the TFT panel 110 and the scintillator panel 120 to a uniform thickness. It was very problematic to do.

2 is a view for explaining a method for manufacturing a large area X-ray detection apparatus according to a first embodiment of the present invention.

Referring to FIG. 2, the manufacturing method of the large-area X-ray detecting apparatus according to the first embodiment of the present invention is first provided with the TFT panel 110 standing up so that the entire surface thereof forms a constant angle with a horizontal plane in space.

In the first embodiment of the present invention, the silicon 20 is provided vertically so that the silicon 20 flows down to the top of the front of the TFT panel 110 well.

Next, silicon 20 is sprayed on the front surface of the TFT panel 110 using the silicon injector 30. In addition, the front edge of the TFT panel 110 is provided with a bonding portion protection jaw 140 to prevent the silicon 20 is applied to the edge.

The reason is that the general TFT panel 110 has a bonding portion (Outline bonding) for connecting external substrates (not shown) to a predetermined portion of the front edge, when the silicon 20 is applied to the bonding portion This is because connection or replacement of the external substrates (not shown) is not easy.

In addition, although the bonding portion protection jaw 140 is illustrated to cover the entire front edge of the TFT panel 110, the bonding portion protection jaw 140 may be provided to cover only the portion where the bonding portion is formed.

Next, the silicon 20 sprayed on the upper front of the TFT panel 110 flows down to the lower front of the TFT panel 110 by gravity so that the silicon 20 is uniform on the front of the TFT panel 110. An adhesive layer 130 having a thickness is formed.

In other words, the process of the silicon injector 30 is moved and the process is simpler than the conventional method of coating silicon on the entire surface of the TFT panel 110. Since the silicon 20 flows down by gravity, It is easy to form the adhesive layer 130.

In addition, the thickness of the adhesive layer 130 is sprayed to the silicon 20 to have a thickness between 10㎛ 40㎛.

Next, the TFT panel 110 is laid on the inside of the vacuum chamber with the adhesive layer 130 upward, and one side lower portion of the scintillator panel 120 is in contact with an upper portion of the adhesive layer 130. The roller 40 is positioned on one side of the scintillator panel 120.

Next, the roller 40 is rotated and moved in contact with the other side of the scintillator panel 120 and the bottom surface of the scintillator panel 120 is in close contact with the upper surface of the adhesive layer 130.

Next, the adhesive layer 130 is cured and the TFT panel 110 and the scintillator panel 130 are bonded by the adhesive layer 130.

3 is a view for explaining a manufacturing method of a large area X-ray detection apparatus according to a second embodiment of the present invention.

If the manufacturing method of the large-area X-ray detection apparatus according to the first embodiment of the present invention is a roller pressing method, the room for manufacturing the large-area X-ray detection apparatus according to the second embodiment of the present invention is a vacuum chamber 200. By vacuum compression method.

Hereinafter, the process of forming the adhesive layer 130 on the TFT panel 110 is the same as that of the first embodiment of the present invention and will not be described.

Referring to FIG. 3, first, the TFT panel 110 having the adhesive layer 130 is placed on the first support table 120 provided in the vacuum chamber 200 with the adhesive layer 130 facing upward, and the scintillator panel ( 120 is positioned above the TFT panel 110 using the second support table 220.

The second support table 220 has a hole formed therein for transmitting pressure therein and a cavity connected to the hole therein so that the second support table 220 is provided on the lower surface by pressure control by a first vacuum pump (not shown). It is a vacuum chuck capable of sucking the scintillator panel 120.

However, the second support table 220 may be provided as an electrostatic chuck pulling the scintillator panel 120 due to an electrostatic phenomenon.

Next, the inside of the vacuum chamber 200 is made into a vacuum state by using a second vacuum pump (not shown).

Next, the second support table 200 is lowered until the distance between the TFT panel 110 and the scintillator panel 120 becomes a constant distance.

In the second embodiment of the present invention, the second support table 200 is lowered until the distance between the TFT panel 110 and the scintillator panel 120 is between 5 mm and 10 mm mm. The reason is to freely drop the scintillator panel 120 in a vacuum so that the scintillator panel 120 is in uniform contact with the adhesive layer 130.

On the other hand, the second support table 220 is lowered by a moving bar 222, which is formed with a screw on the motor 221 and the outside and moves up and down by the rotation of the motor 221.

However, the motor 221 may be any means as long as it can move the second support table 220 up and down, such as a hydraulic actuator, a pneumatic actuator.

Next, the pressure inside the second support table 220 is released and the scintillator panel 120 freely falls to contact the scintillator panel 120 with the adhesive layer 130.

Next, the second support table 220 is lowered to physically apply pressure to the scintillator panel 120 so that the scintillator panel 120 is in uniform contact with the adhesive layer 130.

Next, the vacuum inside the vacuum chamber 200 is released by purging means (not shown) so that the TFT panel 110 and the scintillator panel 120 are vacuum compressed.

In addition, the purging means (not shown) is nitrogen purging means for increasing the internal pressure of the vacuum chamber 200 by introducing nitrogen into the vacuum chamber 200.

Meanwhile, the steps of physically applying pressure to the scintillator panel 120 by descending the second support table 220 and the steps of nitrogen purging may be reversed.

Therefore, since the pressure is applied once by lowering the second support table 220, and the pressure is applied again by nitrogen purging, the adhesion between the TFT panel 110 and the scintillator panel 120 can be improved. There is.

The large-area X-ray detection device manufactured by the manufacturing method of the X-ray detection device according to the embodiment of the present invention may be applied to various equipments such as dental equipment, for example, a panoramic device, a CT device, and a cephalo device. In addition, it can be applied to a variety of medical equipment such as chest X-ray apparatus or mammoth device.

In particular, when using a 17 x 17 inch large area X-ray detector, a super large X-ray detector can be manufactured by attaching four 17 x 17 inch scintillator panels and 17 x 17 inch sensor panels. have.

In the above, the configuration and operation of the present invention has been shown in accordance with the above description and drawings, but this is merely described, for example, and various changes and modifications are possible without departing from the spirit and scope of the present invention. .

1 is a view showing a large area X-ray detection device manufactured by embodiments of the present invention,

2 is a view for explaining a manufacturing method of a large-area X-ray detection apparatus according to a first embodiment of the present invention,

3 is a view for explaining a manufacturing method of a large area X-ray detection apparatus according to a second embodiment of the present invention.

In the drawings according to the present invention, the same reference numerals are used for components having substantially the same configuration and function.

<Description of the symbols for the main parts of the drawings>

10: X-ray 20: Silicone

30: silicon injector 40: roller

100: large area X-ray detector 110: TFT panel

120: scintillator panel 130: adhesive layer

140: bonding jaw 200: vacuum chamber

210: first support table 220: second support table

Claims (11)

In the manufacturing method of a large-area X-ray detection apparatus for detecting an X-ray to obtain an image, A first step of providing a front surface of a sensor panel that receives visible light and outputs a constant electric signal to form a predetermined angle with a horizontal plane in space; Spraying an adhesive on the front surface of the sensor panel; A third step of spraying the sprayed adhesive from the top of the front of the sensor panel to the bottom of the front to form an adhesive layer having a predetermined thickness; And And a fourth step of adhering a scintillator panel for converting X-rays into visible light on the entire surface of the adhesive layer. The fourth step is: Step 4-1 of positioning the sensor panel with the adhesive layer upward; Step 4-2 of contacting the bottom of one side of the scintillator panel on the top of one side of the adhesive layer; Placing a roller on an upper portion of one side of the scintillator panel; A fourth step of the roller contacting the upper part of the scintillator panel and rotating and moving to the upper part of the scintillator panel to contact the lower surface of the scintillator panel with the upper surface of the adhesive layer; And And a fourth step of attaching the sensor panel to the scintillator panel by curing the adhesive layer. The method of claim 1, The thickness of the adhesive layer of the third step is a manufacturing method of a large area X-ray detection apparatus, characterized in that 10㎛ to 40㎛. The method according to claim 1 or 2, The horizontal and vertical lengths of the sensor panel are 8 to 20 inches, respectively, and the horizontal and vertical lengths of the scintillator panel are 8 to 20 inches, respectively. . The method of claim 3, wherein The length of the width X length of the said sensor panel and the said scintillator panel is any one of 8x8 inch, 10x12 inch, and 17x17 inch. The method of claim 3, wherein The adhesive is a manufacturing method of a large area X-ray detection apparatus, characterized in that the silicon. delete The method of claim 1, The fourth step is a manufacturing method of a large area X-ray detection apparatus, characterized in that the inside of the vacuum chamber. In the manufacturing method of a large-area X-ray detection apparatus for detecting an X-ray to obtain an image, A first step of providing a front surface of a sensor panel that receives visible light and outputs a constant electric signal to form a predetermined angle with a horizontal plane in space; Spraying an adhesive on the front surface of the sensor panel; A third step of spraying the sprayed adhesive from the top of the front of the sensor panel to the bottom of the front to form an adhesive layer having a predetermined thickness; And And a fourth step of adhering a scintillator panel for converting X-rays into visible light on the entire surface of the adhesive layer. The fourth step is: A fourth step of providing the sensor panel on the first support table of the vacuum chamber with the adhesive layer upward; A step 4-2 in which the scintillator panel is positioned above the sensor panel by using a second support table in the vacuum chamber; Step 4-3 of making the inside of the vacuum chamber into a vacuum state; 4-4 step of lowering the second support table until the distance between the sensor panel and the scintillator panel is a constant distance; A step 4-5 of releasing the support of the second support table and dropping the scintillator panel to contact the scintillator panel with the adhesive layer; And And releasing the vacuum in the vacuum chamber to compress the sensor panel and the scintillator panel. The method of claim 8, Manufacturing a large area X-ray detection apparatus further comprises the step 4-5-1 of lowering the second support table after the step 4-5 to apply a physical pressure to the upper portion of the scintillator panel Way. The method of claim 8, The vacuum release of the step 4-6 is a method of manufacturing a large area X-ray detection apparatus, characterized in that by nitrogen purging. The method of claim 8, The method of manufacturing a large area X-ray detection apparatus, characterized in that the constant distance of the 4-4 step is 5mm to 10mm.

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