KR100969285B1 - 전자 장치, 메모리 장치, 자기 메모리 장치 어레이, 전자장치 제조 방법, 하부 구조 자기 메모리 장치 제조 방법및 상부 구조 자기 메모리 장치 제조 방법 - Google Patents
전자 장치, 메모리 장치, 자기 메모리 장치 어레이, 전자장치 제조 방법, 하부 구조 자기 메모리 장치 제조 방법및 상부 구조 자기 메모리 장치 제조 방법 Download PDFInfo
- Publication number
- KR100969285B1 KR100969285B1 KR1020030026705A KR20030026705A KR100969285B1 KR 100969285 B1 KR100969285 B1 KR 100969285B1 KR 1020030026705 A KR1020030026705 A KR 1020030026705A KR 20030026705 A KR20030026705 A KR 20030026705A KR 100969285 B1 KR100969285 B1 KR 100969285B1
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- magnetic
- sink
- pinned
- pinning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/14—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements
- G11C11/15—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements using multiple magnetic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Hall/Mr Elements (AREA)
- Mram Or Spin Memory Techniques (AREA)
- Semiconductor Memories (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/135,241 US6794695B2 (en) | 2002-04-29 | 2002-04-29 | Magneto resistive storage device having a magnetic field sink layer |
| US10/135,241 | 2002-04-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20030085496A KR20030085496A (ko) | 2003-11-05 |
| KR100969285B1 true KR100969285B1 (ko) | 2010-07-09 |
Family
ID=29215644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020030026705A Expired - Fee Related KR100969285B1 (ko) | 2002-04-29 | 2003-04-28 | 전자 장치, 메모리 장치, 자기 메모리 장치 어레이, 전자장치 제조 방법, 하부 구조 자기 메모리 장치 제조 방법및 상부 구조 자기 메모리 장치 제조 방법 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US6794695B2 (enExample) |
| EP (1) | EP1359590B1 (enExample) |
| JP (1) | JP2004006844A (enExample) |
| KR (1) | KR100969285B1 (enExample) |
| CN (1) | CN100397674C (enExample) |
| DE (1) | DE60301294T2 (enExample) |
| TW (1) | TW200305977A (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6794695B2 (en) * | 2002-04-29 | 2004-09-21 | Hewlett-Packard Development Company, L.P. | Magneto resistive storage device having a magnetic field sink layer |
| US6956257B2 (en) * | 2002-11-18 | 2005-10-18 | Carnegie Mellon University | Magnetic memory element and memory device including same |
| US7072209B2 (en) * | 2003-12-29 | 2006-07-04 | Micron Technology, Inc. | Magnetic memory having synthetic antiferromagnetic pinned layer |
| US6980455B2 (en) * | 2004-02-03 | 2005-12-27 | Hewlett-Packard Development Company, L.P. | Remote sensed pre-amplifier for cross-point arrays |
| US7193889B2 (en) * | 2004-02-11 | 2007-03-20 | Hewlett-Packard Development Company, Lp. | Switching of MRAM devices having soft magnetic reference layers |
| US7884403B2 (en) * | 2004-03-12 | 2011-02-08 | Japan Science And Technology Agency | Magnetic tunnel junction device and memory device including the same |
| US7172786B2 (en) * | 2004-05-14 | 2007-02-06 | Hitachi Global Storage Technologies Netherlands B.V. | Methods for improving positioning performance of electron beam lithography on magnetic wafers |
| US7611912B2 (en) * | 2004-06-30 | 2009-11-03 | Headway Technologies, Inc. | Underlayer for high performance magnetic tunneling junction MRAM |
| US7646568B2 (en) * | 2005-12-23 | 2010-01-12 | Headway Technologies, Inc. | Ultra thin seed layer for CPP or TMR structure |
| US9136463B2 (en) * | 2007-11-20 | 2015-09-15 | Qualcomm Incorporated | Method of forming a magnetic tunnel junction structure |
| US7826258B2 (en) * | 2008-03-24 | 2010-11-02 | Carnegie Mellon University | Crossbar diode-switched magnetoresistive random access memory system |
| US8587993B2 (en) | 2009-03-02 | 2013-11-19 | Qualcomm Incorporated | Reducing source loading effect in spin torque transfer magnetoresisitive random access memory (STT-MRAM) |
| US8313960B1 (en) * | 2011-05-03 | 2012-11-20 | Avalanche Technology, Inc. | Magnetic tunnel junction (MTJ) formation using multiple etching processes |
| US8148174B1 (en) * | 2011-05-03 | 2012-04-03 | Avalanche Technology, Inc. | Magnetic tunnel junction (MTJ) formation with two-step process |
| KR101849677B1 (ko) * | 2011-05-19 | 2018-04-19 | 삼성전자주식회사 | 자기 터널 접합 소자 |
| US9343656B2 (en) * | 2012-03-02 | 2016-05-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Magnetic tunnel junction (MTJ) structure in magnetic random access memory |
| US8900884B2 (en) * | 2012-06-18 | 2014-12-02 | Headway Technologies, Inc. | MTJ element for STT MRAM |
| EP2741296B1 (en) * | 2012-12-07 | 2019-01-30 | Crocus Technology S.A. | Self-referenced magnetic random access memory (MRAM) and method for writing to the MRAM cell with increased reliability and reduced power consumption |
| KR20150103527A (ko) | 2014-03-03 | 2015-09-11 | 에스케이하이닉스 주식회사 | 전자 장치 |
| US9734850B1 (en) | 2016-06-28 | 2017-08-15 | Western Digital Technologies, Inc. | Magnetic tunnel junction (MTJ) free layer damping reduction |
| US10534047B2 (en) * | 2017-03-30 | 2020-01-14 | Qualcomm Incorporated | Tunnel magneto-resistive (TMR) sensors employing TMR devices with different magnetic field sensitivities for increased detection sensitivity |
| JP2020042882A (ja) * | 2018-09-12 | 2020-03-19 | キオクシア株式会社 | 磁気メモリ |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19980041891A (ko) * | 1996-11-27 | 1998-08-17 | 포만제프리엘 | 자기 모멘트가 고정된 강자성 다층을 갖는 자기 터널 접속 장치 |
| KR20010007425A (ko) * | 1999-06-17 | 2001-01-26 | 가네꼬 히사시 | 자기저항헤드 및 이를 이용한 자기저항검출시스템 및자기기억시스템 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2538645B1 (fr) | 1982-12-28 | 1986-04-11 | Thomson Csf | Procede et dispositif d'interpolation de la parole dans un systeme de transmission de parole numerisee |
| US5764567A (en) * | 1996-11-27 | 1998-06-09 | International Business Machines Corporation | Magnetic tunnel junction device with nonferromagnetic interface layer for improved magnetic field response |
| US5902690A (en) * | 1997-02-25 | 1999-05-11 | Motorola, Inc. | Stray magnetic shielding for a non-volatile MRAM |
| US6259644B1 (en) | 1997-11-20 | 2001-07-10 | Hewlett-Packard Co | Equipotential sense methods for resistive cross point memory cell arrays |
| US6127053A (en) * | 1998-05-27 | 2000-10-03 | International Business Machines Corporation | Spin valves with high uniaxial anisotropy reference and keeper layers |
| US6292389B1 (en) | 1999-07-19 | 2001-09-18 | Motorola, Inc. | Magnetic element with improved field response and fabricating method thereof |
| US6297983B1 (en) * | 2000-02-29 | 2001-10-02 | Hewlett-Packard Company | Reference layer structure in a magnetic storage cell |
| JP3593652B2 (ja) * | 2000-03-03 | 2004-11-24 | 富士通株式会社 | 磁気ランダムアクセスメモリ装置 |
| US6429497B1 (en) * | 2000-11-18 | 2002-08-06 | Hewlett-Packard Company | Method for improving breakdown voltage in magnetic tunnel junctions |
| TW560095B (en) * | 2001-04-02 | 2003-11-01 | Canon Kk | Magnetoresistive element, memory element having the magnetoresistive element, and memory using the memory element |
| DE10142594A1 (de) | 2001-08-31 | 2003-03-27 | Infineon Technologies Ag | Kompensation eines magnetischen Biasfeldes in einer Speicherschicht einer magnetoresistiven Speicherzelle |
| US6794695B2 (en) * | 2002-04-29 | 2004-09-21 | Hewlett-Packard Development Company, L.P. | Magneto resistive storage device having a magnetic field sink layer |
-
2002
- 2002-04-29 US US10/135,241 patent/US6794695B2/en not_active Expired - Lifetime
- 2002-12-17 TW TW091136373A patent/TW200305977A/zh unknown
-
2003
- 2003-03-10 CN CNB031201474A patent/CN100397674C/zh not_active Expired - Lifetime
- 2003-04-24 JP JP2003120171A patent/JP2004006844A/ja not_active Withdrawn
- 2003-04-24 DE DE60301294T patent/DE60301294T2/de not_active Expired - Lifetime
- 2003-04-24 EP EP03252587A patent/EP1359590B1/en not_active Expired - Lifetime
- 2003-04-28 KR KR1020030026705A patent/KR100969285B1/ko not_active Expired - Fee Related
- 2003-10-30 US US10/696,991 patent/US6919594B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19980041891A (ko) * | 1996-11-27 | 1998-08-17 | 포만제프리엘 | 자기 모멘트가 고정된 강자성 다층을 갖는 자기 터널 접속 장치 |
| KR20010007425A (ko) * | 1999-06-17 | 2001-01-26 | 가네꼬 히사시 | 자기저항헤드 및 이를 이용한 자기저항검출시스템 및자기기억시스템 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1455463A (zh) | 2003-11-12 |
| DE60301294D1 (de) | 2005-09-22 |
| CN100397674C (zh) | 2008-06-25 |
| US6919594B2 (en) | 2005-07-19 |
| EP1359590A1 (en) | 2003-11-05 |
| DE60301294T2 (de) | 2006-08-10 |
| EP1359590B1 (en) | 2005-08-17 |
| US20040090842A1 (en) | 2004-05-13 |
| JP2004006844A (ja) | 2004-01-08 |
| TW200305977A (en) | 2003-11-01 |
| KR20030085496A (ko) | 2003-11-05 |
| US6794695B2 (en) | 2004-09-21 |
| US20030202375A1 (en) | 2003-10-30 |
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