KR100968055B1 - 압력 센서 모듈 - Google Patents
압력 센서 모듈 Download PDFInfo
- Publication number
- KR100968055B1 KR100968055B1 KR1020027013842A KR20027013842A KR100968055B1 KR 100968055 B1 KR100968055 B1 KR 100968055B1 KR 1020027013842 A KR1020027013842 A KR 1020027013842A KR 20027013842 A KR20027013842 A KR 20027013842A KR 100968055 B1 KR100968055 B1 KR 100968055B1
- Authority
- KR
- South Korea
- Prior art keywords
- pressure sensor
- sensor module
- pressure
- sensor chip
- adapter
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/142—Multiple part housings
- G01L19/143—Two part housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/003—Fluidic connecting means using a detachable interface or adapter between the process medium and the pressure gauge
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0672—Leakage or rupture protection or detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
Claims (14)
- 압력 측정을 위한 압력 센서 칩을 포함하고, 상기 압력 센서 칩은 압력 피팅부에 연결되고, 상기 압력 피팅부는 상기 압력 센서 칩에 압력을 전달하는, 압력 센서 모듈에 있어서,상기 압력 피팅부(19)에 어댑터(21)가 연결되고, 상기 어댑터는 압력을 흡수하여 상기 압력 피팅부(19)를 통해 상기 압력 센서 칩(7)에 전달하고, 상기 압력 센서 칩(7)을 손상시킬 수 있는 매체로부터 상기 압력 센서 칩(7)을 보호하고,상기 압력 센서 모듈(1)은 벽(53)의 삽입 개구(69) 내에 배치되고, 상기 압력 센서 모듈(1)은 분리 멤브레인(29)을 갖고, 상기 벽(53)은 상기 분리 멤브레인(29)과 접촉하는 매체(59)에 인접하고, 상기 매체(59)가 결빙되고 팽창될 때 상기 압력 센서 모듈(1)은 부분적으로 스프링 힘에 대항해서 삽입 개구(69) 밖으로 이동될 수 있는 것을 특징으로 하는 압력 센서 모듈.
- 제 1 항에 있어서, 상기 어댑터(21)는, 센서측(25)에서 상기 압력 피팅부(19)에 연결되며 매체측(27)에서 분리 멤브레인(29)에 의해 폐쇄된 홀(23)을 포함하는 것을 특징으로 하는 압력 센서 모듈.
- 제 2 항에 있어서, 상기 압력 피팅부(19) 및 상기 어댑터(21)의 홀(23)과 충전 홀(32)은 유체로 채워지고,상기 충전 홀(32)은 상기 홀(23)에 연결되고, 상기 충전 홀을 통해 유체가 채워지는 것을 특징으로 하는 압력 센서 모듈.
- 제 1 항에 있어서, 상기 압력 센서 칩(7)은 본딩 와이어(13)가 전기 접속된 상측면(47)과, 상기 압력 피팅부(19)에 연결된 하측면(49)을 갖는 것을 특징으로 하는 압력 센서 모듈.
- 삭제
- 제 1 항에 있어서, 상기 압력 센서 칩(7)은 외부 전기 센서 접속 소자(15)를 포함하는 센서 셀(5) 내에 배치되고, 상기 센서 접속 소자(15)에 프린트 회로기판(36)이 전기 접속되는 것을 특징으로 하는 압력 센서 모듈.
- 제 6 항에 있어서, 상기 프린트 회로기판(36)은 전기 플러그 접속부(39)에 전기적으로 접속되고, 상기 압력 센서 모듈(1)은 압력 센서 모듈 하우징(45)을 갖고, 상기 전기 플러그 접속부(39)는 상기 압력 센서 모듈 하우징(45)과 함께 플러그 커넥터(43)를 형성하는 것을 특징으로 하는 압력 센서 모듈.
- 제 1 항에 있어서, 상기 압력 센서 칩(7)은 전기 플러그 접속부(39)에 연결되고, 상기 압력 센서 모듈(1)은 압력 센서 모듈 하우징(45)을 갖고, 상기 전기 플러그 접속부(39)는 상기 압력 센서 모듈 하우징(45)과 함께 플러그 커넥터(43)를 형성하는 것을 특징으로 하는 압력 센서 모듈.
- 제 1 항, 제 4 항 또는 제 8 항중 어느 한 항에 있어서, 상기 압력 센서 칩(7)은 외부 전기 센서 접속 소자(15)를 포함하는 미리 제조된 센서 셀(5) 내에 배치되는 것을 특징으로 하는 압력 센서 모듈.
- 제 1 항, 제 4 항, 제 6 항, 또는 제 8 항중 어느 한 항에 있어서, 상기 압력 센서 칩(7)은 압력에 의존하는 측정 신호를 발생하는 멤브레인(17)을 포함하는 것을 특징으로 하는 압력 센서 모듈.
- 제 7 항 또는 제 8 항에 있어서, 상기 압력 센서 모듈(1)은 어댑터(21)를 갖고, 상기 압력 센서 모듈 하우징(45)은 상기 어댑터(21)에 연결되는 것을 특징으로 하는 압력 센서 모듈.
- 삭제
- 제 1 항에 있어서, 상기 압력 센서 모듈(1)은 탄성적으로 구현된 고정 플랜지(51)에 배치되므로, 상기 고정 플랜지(51)는 벽(53)에 대해 적어도 부분적으로 변위될 수 있고, 상기 압력 센서 모듈(1)은 부분적으로 상기 삽입 개구(69) 밖으로 이동될 수 있는 것을 특징으로 하는 압력 센서 모듈.
- 제 1 항에 있어서, 상기 압력 센서 모듈(1)은 고정 플랜지(51)에 배치되고, 상기 고정 플랜지는, 스프링(55)에 특정된 힘이 작용하면, 벽(53)에 대해 변위될 수 있도록 스프링(55)에 고정되고, 따라서 상기 압력 센서 모듈(1)은 부분적으로 상기 삽입 개구(69) 밖으로 이동될 수 있는 것을 특징으로 하는 압력 센서 모듈.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10107813A DE10107813A1 (de) | 2001-02-20 | 2001-02-20 | Drucksensormodul |
DE10107813.7 | 2001-02-20 | ||
PCT/DE2002/000519 WO2002066948A1 (de) | 2001-02-20 | 2002-02-14 | Drucksensormodul |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20030003256A KR20030003256A (ko) | 2003-01-09 |
KR100968055B1 true KR100968055B1 (ko) | 2010-07-08 |
Family
ID=7674635
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020027013842A KR100968055B1 (ko) | 2001-02-20 | 2002-02-14 | 압력 센서 모듈 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6871546B2 (ko) |
EP (1) | EP1269135B1 (ko) |
JP (1) | JP4268802B2 (ko) |
KR (1) | KR100968055B1 (ko) |
CN (1) | CN1235024C (ko) |
DE (2) | DE10107813A1 (ko) |
WO (1) | WO2002066948A1 (ko) |
Cited By (1)
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KR101176003B1 (ko) | 2012-04-18 | 2012-08-24 | 두온 시스템 (주) | 오일 공급부를 구비된 차압 센서와, 오일 충진 장치 및 방법 |
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2001
- 2001-02-20 DE DE10107813A patent/DE10107813A1/de not_active Withdrawn
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2002
- 2002-02-14 WO PCT/DE2002/000519 patent/WO2002066948A1/de active Application Filing
- 2002-02-14 DE DE50214382T patent/DE50214382D1/de not_active Expired - Lifetime
- 2002-02-14 CN CNB028011732A patent/CN1235024C/zh not_active Expired - Fee Related
- 2002-02-14 KR KR1020027013842A patent/KR100968055B1/ko active IP Right Grant
- 2002-02-14 EP EP02708245A patent/EP1269135B1/de not_active Expired - Lifetime
- 2002-02-14 JP JP2002566623A patent/JP4268802B2/ja not_active Expired - Fee Related
- 2002-02-14 US US10/257,894 patent/US6871546B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US20050222397A1 (en) * | 2001-12-11 | 2005-10-06 | Johannes Benkhoff | Process for the preparation of 4-methyl-7-aminoquinolones |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101176003B1 (ko) | 2012-04-18 | 2012-08-24 | 두온 시스템 (주) | 오일 공급부를 구비된 차압 센서와, 오일 충진 장치 및 방법 |
Also Published As
Publication number | Publication date |
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WO2002066948A1 (de) | 2002-08-29 |
DE50214382D1 (de) | 2010-06-02 |
JP2004518973A (ja) | 2004-06-24 |
US20030151126A1 (en) | 2003-08-14 |
US6871546B2 (en) | 2005-03-29 |
JP4268802B2 (ja) | 2009-05-27 |
DE10107813A1 (de) | 2002-09-05 |
EP1269135A1 (de) | 2003-01-02 |
KR20030003256A (ko) | 2003-01-09 |
CN1235024C (zh) | 2006-01-04 |
EP1269135B1 (de) | 2010-04-21 |
CN1461406A (zh) | 2003-12-10 |
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