KR100967641B1 - 유리기판용 세정패드 - Google Patents
유리기판용 세정패드Info
- Publication number
- KR100967641B1 KR100967641B1 KR1020080057320A KR20080057320A KR100967641B1 KR 100967641 B1 KR100967641 B1 KR 100967641B1 KR 1020080057320 A KR1020080057320 A KR 1020080057320A KR 20080057320 A KR20080057320 A KR 20080057320A KR 100967641 B1 KR100967641 B1 KR 100967641B1
- Authority
- KR
- South Korea
- Prior art keywords
- cleaning
- glass substrate
- elastic
- substrate
- foreign matter
- Prior art date
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 94
- 239000000758 substrate Substances 0.000 title claims abstract description 62
- 239000011521 glass Substances 0.000 title claims abstract description 61
- 239000013013 elastic material Substances 0.000 claims abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 11
- 238000005406 washing Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 description 6
- 239000000126 substance Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 3
- 238000005187 foaming Methods 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 239000005871 repellent Substances 0.000 description 2
- 230000002940 repellent Effects 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000001464 adherent effect Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 239000002216 antistatic agent Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000004088 foaming agent Substances 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000006082 mold release agent Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
- B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
- B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Cleaning In General (AREA)
Abstract
Description
Claims (4)
- 유리기판의 이송경로 상에 설치되어, 이물질을 제거하는 유리기판용 세정패드에 있어서,탄성 재질의 탄성부;상기 탄성부의 표면에 부착되며, 일정 패턴의 세정돌기가 복수 개 형성되어 있는 세정부를 포함하며,상기 세정돌기는,상기 유리기판의 진입동작시 상기 유리기판의 테두리와 접촉되는 모서리 부위에 라운드 가공 처리된 라운드부가 형성되어 있는 것을 특징으로 하는 유리기판용 세정패드.
- 제1항에 있어서,상기 세정돌기는,상기 유리기판 표면의 이물질 제거가 용이하도록 일정의 각도로 경사지게 형성되며, 그 측면은 제거된 이물질이 고착되지 않도록 표면처리되는 것을 특징으로 하는 유리기판용 세정패드.
- 제1항 또는 제2항에 있어서,상기 세정돌기는,상기 세정부의 중앙영역에서 외곽영역까지 연장 형성되는 원호 형상을 가지고 원주방향을 따라 일정 간격을 두고 복수 개 배치되는 것을 특징으로 하는 유리기판용 세정패드.
- 제3항에 있어서,상기 세정돌기 각각에는 세정시 발생되는 수막을 방지할 수 있도록 그 길이방향을 따라 일정 간격으로 수막방지홈이 형성되어 있는 것을 특징으로 하는 유리기판용 세정패드.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080057320A KR100967641B1 (ko) | 2008-06-18 | 2008-06-18 | 유리기판용 세정패드 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080057320A KR100967641B1 (ko) | 2008-06-18 | 2008-06-18 | 유리기판용 세정패드 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20090131442A KR20090131442A (ko) | 2009-12-29 |
KR100967641B1 true KR100967641B1 (ko) | 2010-07-07 |
Family
ID=41690654
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020080057320A KR100967641B1 (ko) | 2008-06-18 | 2008-06-18 | 유리기판용 세정패드 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100967641B1 (ko) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003067918A (ja) | 2001-08-27 | 2003-03-07 | Nippon Sheet Glass Co Ltd | クリーニングディスク、該クリーニングディスクを使用したスクラブ洗浄方法及び情報記録媒体用基板の製造方法 |
JP2004063669A (ja) | 2002-07-26 | 2004-02-26 | Oki Electric Ind Co Ltd | 半導体製造装置クリーニングウエハとその製造方法、およびそれを用いたクリーニング方法 |
JP2008066710A (ja) | 2006-08-11 | 2008-03-21 | Nitto Denko Corp | クリーニング部材、クリーニング機能付搬送部材、および基板処理装置のクリーニング方法 |
KR100818559B1 (ko) | 2007-03-22 | 2008-04-02 | 엠.씨.케이 (주) | 유리기판용 세정롤러 |
-
2008
- 2008-06-18 KR KR1020080057320A patent/KR100967641B1/ko active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003067918A (ja) | 2001-08-27 | 2003-03-07 | Nippon Sheet Glass Co Ltd | クリーニングディスク、該クリーニングディスクを使用したスクラブ洗浄方法及び情報記録媒体用基板の製造方法 |
JP2004063669A (ja) | 2002-07-26 | 2004-02-26 | Oki Electric Ind Co Ltd | 半導体製造装置クリーニングウエハとその製造方法、およびそれを用いたクリーニング方法 |
JP2008066710A (ja) | 2006-08-11 | 2008-03-21 | Nitto Denko Corp | クリーニング部材、クリーニング機能付搬送部材、および基板処理装置のクリーニング方法 |
KR100818559B1 (ko) | 2007-03-22 | 2008-04-02 | 엠.씨.케이 (주) | 유리기판용 세정롤러 |
Also Published As
Publication number | Publication date |
---|---|
KR20090131442A (ko) | 2009-12-29 |
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