KR100941928B1 - 광위상 간섭측정법 및 그 시스템 - Google Patents
광위상 간섭측정법 및 그 시스템 Download PDFInfo
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- KR100941928B1 KR100941928B1 KR1020047008930A KR20047008930A KR100941928B1 KR 100941928 B1 KR100941928 B1 KR 100941928B1 KR 1020047008930 A KR1020047008930 A KR 1020047008930A KR 20047008930 A KR20047008930 A KR 20047008930A KR 100941928 B1 KR100941928 B1 KR 100941928B1
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- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/0201—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal phase variation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02027—Two or more interferometric channels or interferometers
- G01B9/02028—Two or more reference or object arms in one interferometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
- G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/45—Multiple detectors for detecting interferometer signals
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Abstract
Description
Claims (47)
- 다중 표면으로부터 반사된 광학 파면의 다른 부분을 합하여 광학 간섭상을 형성하는 단계;간섭신호에 다르게 기여하기 위해 다른 광거리차를 가지는 다중 표면 쌍을 야기하는 광학 파면의 성질변화에 반응하여 광학 간섭상의 다른 위치에서 간섭신호를 기록하는 단계;다중표면쌍 각각에 대응하는 스펙트럼 좌표에서 피크를 가지는 스펙트럼을 만들기 위한 최소한 하나의 위치에 대한 간섭신호를 광위상 영역에서 스펙트럼 영역으로 변환하는 단계; 및다중 표면의 선택된 쌍에 대응하는 피크의 스펙트럼 좌표를 확인하는 단계로 이루어진 것을 특징으로 하는 광위상간섭측정법.
- 제1항에 있어서,각 위치에 대하여 선택된 표면쌍에 대응하는 피크의 스펙트럼 좌표에서의 간섭신호의 스펙트럼 위상을 도출하는 단계를 더 포함하는 것을 특징으로 하는 광위상간섭측정법.
- 제1항에 있어서,상기 간섭신호는, 광학 파면의 광주파수를 변화하는 것에 대하여 광학 간섭상의 다른 위치에서 기록되는 것을 특징으로 하는 광위상간섭측정법.
- 제1항에 있어서,상기 간섭신호는, 광학 파면의 진행방향이 변화하는 것에 대하여 광학 간섭상의 다른 위치에서 기록되는 것을 특징으로 하는 광위상간섭측정법.
- 제4항에 있어서,상기 광학 파면의 진행방향 변화는, 광학 파면을 발생하기 위해 사용되는 광원의 위치변화로 구성된 것을 특징으로 하는 광위상간섭측정법.
- 제4항에 있어서,상기 광학 파면의 진행 변화는, 광학 파면을 발생하기 위해 사용되는 링 모양의 광원의 지름 변화로 구성된 것을 특징으로 하는 광위상간섭측정법.
- 제1항에 있어서,상기 스펙트럼은, 간섭신호가 시간영역에서 주파수영역으로 변환됨으로써 얻어지는 것임을 특징으로 하는 광위상간섭측정법.
- 제1항에 있어서,상기 스펙트럼은, 간섭신호가 광위상영역에서 광거리차(OPD)영역으로 변환됨으로써 얻어지는 것임을 특징으로 하는 광위상간섭측정법.
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- 제2항에 있어서,상기 각 위치에 대한 간섭신호의 스펙트럼 위상을 도출하는 단계는, 선택된 표면쌍에 대응하는 피크를 가지는 대응하는 스펙트럼을 만들기 위하여 잔류위치의 각각에 대한 간섭신호를 광학위상에서 스펙트럼 위상으로 변환하는 단계로 이루어진 것을 특징으로 하는 광위상간섭측정법.
- 제2항에 있어서,상기 각 위치에 대한 간섭신호의 스펙트럼 위상을 도출하는 단계는, 선택된 표면쌍에 대응하는 피크의 스펙트럼 좌표에 대하여 잔류위치의 각각에 대한 간섭신호를 광학위상에서 스펙트럼 위상으로 변환하는 것으로 이루어진 것을 특징으로 하는 광위상간섭측정법.
- 제2항에 있어서,광학 간섭상의 다중위치에 대하여 도출된 위상에서의 변화에 기초한 선택된 표면쌍사이의 광학거리차에서의 변화를 결정하는 단계를 더 포함하는 것을 특징으로 하는 광위상간섭측정법.
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- 제1항에 있어서,상기 다중표면은, 최소한 하나의 기준면과 최소한 하나의 측정물의 표면으로 구성된 것을 특징으로 하는 광위상간섭측정법.
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- 제1항에 있어서,상기 선택된 표면쌍은, 70%이상의 반사도를 가지는 고미세(high-finesse) 캐비티의 표면인 것을 특징으로 하는 광위상간섭측정법.
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- 제1항에 있어서,두번째로 선택된 다중표면쌍에 대응하는 피크의 스펙트럼 좌표를 확인하는 단계를 더 포함하는 것을 특징으로 하는 광위상간섭측정법.
- 제29항에 있어서,각 위치에 대하여 첫번째로 선택된 표면쌍에 대응하는 피크의 좌표 및 두번째로 선택된 표면쌍에 대응하는 피크의 좌표에서 간섭신호의 스펙트럼 위상을 도출하는 단계를 더 포함하는 것을 특징으로 하는 광위상간섭측정법.
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- 제1항에 있어서,상기 선택된 표면은 광학요소의 표면으로 구성되고,상기 선택된 표면 중 하나에서 반사된 파면의 부분은 광학요소의 내부 표면에서의 반사를 통해 그 표면에 보내지는 것을 특징으로 하는 광위상간섭측정법.
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- 광원에서 나온 광학 파면의 성질을 변화하기 위해 안출된 변조요소를 포함하는 광원;동작 중 광학 파면의 다른 일부분은 다중표면으로 보내고, 그 다른 일부는 광학간섭상을 형성하기 위하여 재결합하는 간섭계;변조요소에 의해 광학 파면 성질변화에 반응하여 광학간섭상의 다른 위치에서 간섭신호를 기록하기 위해 위치하되, 광학 파면성질의 변화는 간섭신호에 다르게 기여하는 다른 광거리차를 가지는 다중 표면쌍을 야기하는 다중-요소 광검출기; 및다중표면쌍 각각에 대응하는 스펙트럼 좌표에서 피크를 가지는 스펙트럼을 만들기 위한 최소한 하나의 위치에 대하여 간섭신호를 변환하고; 다중 표면의 선택된 쌍에 대응하는 피크의 스펙트럼 좌표를 확정하는 전자적 제어기로, 상기 전자적 제어기는 광원과 광검출기와 연결되어 있는 전자적 제어기로 이루어진 것을 특징으로 하는 시스템.
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
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US33921401P | 2001-12-10 | 2001-12-10 | |
US60/339,214 | 2001-12-10 | ||
US10/304,209 US6924898B2 (en) | 2000-08-08 | 2002-11-26 | Phase-shifting interferometry method and system |
US10/304,209 | 2002-11-26 | ||
PCT/US2002/038660 WO2003050470A2 (en) | 2001-12-10 | 2002-12-04 | Phase-shifting interferometry method and system |
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KR1020087010355A Division KR100858447B1 (ko) | 2001-12-10 | 2002-12-04 | 광위상간섭측정법 및 그 시스템 |
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KR20040074069A KR20040074069A (ko) | 2004-08-21 |
KR100941928B1 true KR100941928B1 (ko) | 2010-02-11 |
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US (1) | US6924898B2 (ko) |
EP (1) | EP1451524B1 (ko) |
JP (1) | JP4250530B2 (ko) |
KR (1) | KR100941928B1 (ko) |
AU (1) | AU2002353038A1 (ko) |
TW (1) | TWI269022B (ko) |
WO (1) | WO2003050470A2 (ko) |
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AU2002364544A1 (en) * | 2001-12-10 | 2003-07-09 | Zygo Corporation | Method and apparatus for calibrating a wavelength-tuning interferometer |
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JP4250530B2 (ja) | 2009-04-08 |
EP1451524A2 (en) | 2004-09-01 |
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