KR100937726B1 - 질량 유량 장치를 구성 및 사용하기 위한 시스템 및 방법 - Google Patents

질량 유량 장치를 구성 및 사용하기 위한 시스템 및 방법 Download PDF

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Publication number
KR100937726B1
KR100937726B1 KR1020047005401A KR20047005401A KR100937726B1 KR 100937726 B1 KR100937726 B1 KR 100937726B1 KR 1020047005401 A KR1020047005401 A KR 1020047005401A KR 20047005401 A KR20047005401 A KR 20047005401A KR 100937726 B1 KR100937726 B1 KR 100937726B1
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KR
South Korea
Prior art keywords
fluid
restrictor
flow rate
flow
pressure
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KR1020047005401A
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English (en)
Korean (ko)
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KR20050035159A (ko
Inventor
화이트윌리엄더블유
화이트윌리엄에이치
머드다니엘티
데이비스크리스토퍼비
폰테인벤자민
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호리바 스텍, 인크.
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Application filed by 호리바 스텍, 인크. filed Critical 호리바 스텍, 인크.
Publication of KR20050035159A publication Critical patent/KR20050035159A/ko
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Details Of Flowmeters (AREA)
  • Paper (AREA)
  • Automobile Manufacture Line, Endless Track Vehicle, Trailer (AREA)
KR1020047005401A 2001-10-12 2002-10-11 질량 유량 장치를 구성 및 사용하기 위한 시스템 및 방법 KR100937726B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US32903101P 2001-10-12 2001-10-12
US60/329,031 2001-10-12
US40651102P 2002-08-28 2002-08-28
US60/406,511 2002-08-28

Publications (2)

Publication Number Publication Date
KR20050035159A KR20050035159A (ko) 2005-04-15
KR100937726B1 true KR100937726B1 (ko) 2010-01-20

Family

ID=26986624

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020047005401A KR100937726B1 (ko) 2001-10-12 2002-10-11 질량 유량 장치를 구성 및 사용하기 위한 시스템 및 방법

Country Status (7)

Country Link
EP (1) EP1442343B1 (fr)
JP (1) JP5069839B2 (fr)
KR (1) KR100937726B1 (fr)
CN (2) CN1606721A (fr)
AT (1) ATE395652T1 (fr)
DE (1) DE60226626D1 (fr)
WO (1) WO2003032101A1 (fr)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4874576B2 (ja) * 2004-08-11 2012-02-15 サーパス工業株式会社 流量制御システム
CN1318930C (zh) * 2005-04-27 2007-05-30 杭州电子科技大学 智能执行器用阀门流量特性实现方法
WO2006132025A1 (fr) * 2005-06-07 2006-12-14 Surpass Industry Co., Ltd. Instrument de mesure de débit et système de commande de débit idoine
US7971604B2 (en) 2006-04-20 2011-07-05 Hitachi Metals, Ltd. Flow controller delivery of a specified-quantity of a fluid
US8219329B2 (en) * 2006-05-26 2012-07-10 Horiba Stec, Co., Ltd. Thermal type mass flow meter, and thermal type mass flow control device
JP5094202B2 (ja) * 2007-05-14 2012-12-12 アイシン精機株式会社 流体送出装置、改質器および燃料電池システム
JP5361147B2 (ja) 2007-06-25 2013-12-04 アズビル株式会社 流量計の調整方法、流量計測装置及び調整データ管理システム
US8528427B2 (en) 2010-10-29 2013-09-10 Becton, Dickinson And Company Dual feedback vacuum fluidics for a flow-type particle analyzer
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
US9690301B2 (en) 2012-09-10 2017-06-27 Reno Technologies, Inc. Pressure based mass flow controller
EP3043228B1 (fr) * 2015-01-09 2018-09-19 Levitronix GmbH Régulateur d'écoulement et procédé de réglage d'un débit volumique prédéfini
US10247324B2 (en) * 2015-02-24 2019-04-02 General Electric Technology Gmbh Thermostatic flow control device and method of use
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
JP2019200181A (ja) * 2018-05-18 2019-11-21 株式会社デンソー 気体流量測定装置および気体流量測定方法
WO2022186971A1 (fr) 2021-03-03 2022-09-09 Ichor Systems, Inc. Système de régulation de débit de fluide comprenant un ensemble collecteur

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4096746A (en) * 1977-02-25 1978-06-27 The Perkin-Elmer Corporation Flow controller-flow sensor assembly for gas chromatographs and the like
US5080131A (en) * 1989-09-26 1992-01-14 Lintec Co., Ltd. Mass flow controller
US5190068A (en) * 1992-07-02 1993-03-02 Brian Philbin Control apparatus and method for controlling fluid flows and pressures

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JPH03156509A (ja) * 1989-11-14 1991-07-04 Stec Kk マスフローコントローラ
US5311762A (en) * 1991-12-16 1994-05-17 Dxl Usa Flow sensor calibration
US5606513A (en) * 1993-09-20 1997-02-25 Rosemount Inc. Transmitter having input for receiving a process variable from a remote sensor
BG98808A (en) * 1993-10-16 1995-05-31 Koenig Method and device for determining the m discharge of fluids in pipelines
US5660207A (en) * 1994-12-29 1997-08-26 Tylan General, Inc. Flow controller, parts of flow controller, and related method
US5868159A (en) * 1996-07-12 1999-02-09 Mks Instruments, Inc. Pressure-based mass flow controller
US5911238A (en) * 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
US5944048A (en) * 1996-10-04 1999-08-31 Emerson Electric Co. Method and apparatus for detecting and controlling mass flow
DE19713668A1 (de) * 1997-04-02 1998-10-08 Wagner Int Vorrichtung und Verfahren zum Messen und zum Regeln des Durchflusses eines Fluids
US6152162A (en) * 1998-10-08 2000-11-28 Mott Metallurgical Corporation Fluid flow controlling
US6119710A (en) * 1999-05-26 2000-09-19 Cyber Instrument Technologies Llc Method for wide range gas flow system with real time flow measurement and correction
JP2003529051A (ja) * 1999-09-03 2003-09-30 マイクロブリッジ テクノロジーズ インコーポレイテッド ガス流量測定装置およびそれに適用可能な信号処理方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4096746A (en) * 1977-02-25 1978-06-27 The Perkin-Elmer Corporation Flow controller-flow sensor assembly for gas chromatographs and the like
US5080131A (en) * 1989-09-26 1992-01-14 Lintec Co., Ltd. Mass flow controller
US5190068A (en) * 1992-07-02 1993-03-02 Brian Philbin Control apparatus and method for controlling fluid flows and pressures

Also Published As

Publication number Publication date
JP5069839B2 (ja) 2012-11-07
EP1442343B1 (fr) 2008-05-14
ATE395652T1 (de) 2008-05-15
EP1442343A1 (fr) 2004-08-04
WO2003032101A1 (fr) 2003-04-17
KR20050035159A (ko) 2005-04-15
JP2005507996A (ja) 2005-03-24
CN103838261A (zh) 2014-06-04
DE60226626D1 (de) 2008-06-26
EP1442343A4 (fr) 2005-11-09
CN103838261B (zh) 2017-05-03
CN1606721A (zh) 2005-04-13

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