KR100929718B1 - 볼 커플링을 구비한 밸브 도어 - Google Patents

볼 커플링을 구비한 밸브 도어 Download PDF

Info

Publication number
KR100929718B1
KR100929718B1 KR1020070064271A KR20070064271A KR100929718B1 KR 100929718 B1 KR100929718 B1 KR 100929718B1 KR 1020070064271 A KR1020070064271 A KR 1020070064271A KR 20070064271 A KR20070064271 A KR 20070064271A KR 100929718 B1 KR100929718 B1 KR 100929718B1
Authority
KR
South Korea
Prior art keywords
chamber
door member
lever arm
ball
sealing surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020070064271A
Other languages
English (en)
Korean (ko)
Other versions
KR20080001649A (ko
Inventor
샘 형삼 김
재철 이
윌리엄 엔. 스텔링
폴 브라운
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 어플라이드 머티어리얼스, 인코포레이티드 filed Critical 어플라이드 머티어리얼스, 인코포레이티드
Publication of KR20080001649A publication Critical patent/KR20080001649A/ko
Application granted granted Critical
Publication of KR100929718B1 publication Critical patent/KR100929718B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H10P72/3406—
    • H10P72/0441—
    • H10P72/0464—

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Details Of Valves (AREA)
KR1020070064271A 2006-06-28 2007-06-28 볼 커플링을 구비한 밸브 도어 Expired - Fee Related KR100929718B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US80606606P 2006-06-28 2006-06-28
US60/806,066 2006-06-28

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020090045004A Division KR101274963B1 (ko) 2006-06-28 2009-05-22 볼 커플링을 구비한 밸브 도어

Publications (2)

Publication Number Publication Date
KR20080001649A KR20080001649A (ko) 2008-01-03
KR100929718B1 true KR100929718B1 (ko) 2009-12-03

Family

ID=39035470

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020070064271A Expired - Fee Related KR100929718B1 (ko) 2006-06-28 2007-06-28 볼 커플링을 구비한 밸브 도어
KR1020090045004A Expired - Fee Related KR101274963B1 (ko) 2006-06-28 2009-05-22 볼 커플링을 구비한 밸브 도어

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020090045004A Expired - Fee Related KR101274963B1 (ko) 2006-06-28 2009-05-22 볼 커플링을 구비한 밸브 도어

Country Status (4)

Country Link
JP (1) JP5519099B2 (enExample)
KR (2) KR100929718B1 (enExample)
CN (1) CN101101066B (enExample)
TW (1) TWI360614B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101105671B1 (ko) 2010-03-12 2012-01-18 (주)동광 방폭 도어용 로커 핀의 가이드구조
KR20240000018U (ko) * 2022-06-27 2024-01-03 김영수 믹서트럭 수거통의 개폐장치

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101007711B1 (ko) * 2008-05-19 2011-01-13 주식회사 에스에프에이 플라즈마 처리장치
JP5490435B2 (ja) * 2009-03-31 2014-05-14 東京エレクトロン株式会社 ゲートバルブ装置
TWM476362U (en) * 2012-09-07 2014-04-11 Applied Materials Inc Load lock chamber with slit valve doors
KR101327251B1 (ko) * 2012-11-15 2013-11-13 주식회사 선익시스템 회전형 챔버도어
USD755153S1 (en) * 2014-06-20 2016-05-03 Zuna Designz, Llc Cell phone case with resilient suspension hook
WO2019067948A1 (en) * 2017-09-29 2019-04-04 Applied Materials, Inc. VACUUM CHAMBER INSULATION DEVICE OF CLOSURE MECHANISM AND SUBSYSTEM
CN108531871A (zh) * 2018-07-09 2018-09-14 山东三齐能源有限公司 一种连续镀膜溅镀系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4785962A (en) * 1987-04-20 1988-11-22 Applied Materials, Inc. Vacuum chamber slit valve
KR930009811A (ko) * 1991-11-08 1993-06-21 원본미기재 볼조인트(ball joint) 조립체와 만드는 방법
KR20060049583A (ko) * 2004-06-14 2006-05-19 어플라이드 머티어리얼스, 인코포레이티드 곡선의 슬릿 밸브 도어

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LU74745A1 (enExample) * 1976-04-12 1976-11-11
DE3047295A1 (de) * 1980-12-16 1982-07-29 Basf Ag, 6700 Ludwigshafen Verfahren zur kontinuierlichen herstellung alterungsbestaendiger aes-polymerisate
US5259881A (en) * 1991-05-17 1993-11-09 Materials Research Corporation Wafer processing cluster tool batch preheating and degassing apparatus
CN2709730Y (zh) * 2004-06-16 2005-07-13 锦州电炉有限责任公司 高真空转阀
US8061920B2 (en) 2006-11-29 2011-11-22 Wimberley, Inc. Pivoting ball mount having four equally spaced contact points

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4785962A (en) * 1987-04-20 1988-11-22 Applied Materials, Inc. Vacuum chamber slit valve
KR930009811A (ko) * 1991-11-08 1993-06-21 원본미기재 볼조인트(ball joint) 조립체와 만드는 방법
KR20060049583A (ko) * 2004-06-14 2006-05-19 어플라이드 머티어리얼스, 인코포레이티드 곡선의 슬릿 밸브 도어

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101105671B1 (ko) 2010-03-12 2012-01-18 (주)동광 방폭 도어용 로커 핀의 가이드구조
KR20240000018U (ko) * 2022-06-27 2024-01-03 김영수 믹서트럭 수거통의 개폐장치
KR200498912Y1 (ko) * 2022-06-27 2025-03-12 김영수 믹서트럭 수거통의 개폐장치

Also Published As

Publication number Publication date
TWI360614B (en) 2012-03-21
JP5519099B2 (ja) 2014-06-11
KR101274963B1 (ko) 2013-06-13
CN101101066B (zh) 2010-06-02
KR20090077030A (ko) 2009-07-14
KR20080001649A (ko) 2008-01-03
CN101101066A (zh) 2008-01-09
TW200809123A (en) 2008-02-16
JP2008006437A (ja) 2008-01-17

Similar Documents

Publication Publication Date Title
KR101274963B1 (ko) 볼 커플링을 구비한 밸브 도어
US7575220B2 (en) Curved slit valve door
US7497414B2 (en) Curved slit valve door with flexible coupling
US7845618B2 (en) Valve door with ball coupling
US7282097B2 (en) Slit valve door seal
US7845891B2 (en) Decoupled chamber body
KR101046966B1 (ko) 튜브에 히터를 구비한 로드락 챔버
US9580956B2 (en) Methods and apparatus for providing a floating seal for chamber doors
JP2010500740A (ja) 分離されたスリットバルブドアシールコンパートメントを備えたロードロックチャンバ
CN101794709B (zh) 真空装置和基板处理装置
JPWO2007148657A1 (ja) 弁体部及びゲートバルブ装置
US20030168175A1 (en) Substrate alignment apparatus
TW202512354A (zh) 高壓基板處理裝置

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

A107 Divisional application of patent
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0107 Divisional application

St.27 status event code: A-0-1-A10-A18-div-PA0107

St.27 status event code: A-0-1-A10-A16-div-PA0107

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R13-asn-PN2301

St.27 status event code: A-5-5-R10-R11-asn-PN2301

FPAY Annual fee payment

Payment date: 20121030

Year of fee payment: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

FPAY Annual fee payment

Payment date: 20131030

Year of fee payment: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20141030

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

FPAY Annual fee payment

Payment date: 20161028

Year of fee payment: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

FPAY Annual fee payment

Payment date: 20170929

Year of fee payment: 9

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 9

FPAY Annual fee payment

Payment date: 20181112

Year of fee payment: 10

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 10

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 11

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20201126

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20201126

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000