JP5519099B2 - ボール継手を有するバルブドア - Google Patents

ボール継手を有するバルブドア Download PDF

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Publication number
JP5519099B2
JP5519099B2 JP2007166103A JP2007166103A JP5519099B2 JP 5519099 B2 JP5519099 B2 JP 5519099B2 JP 2007166103 A JP2007166103 A JP 2007166103A JP 2007166103 A JP2007166103 A JP 2007166103A JP 5519099 B2 JP5519099 B2 JP 5519099B2
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JP
Japan
Prior art keywords
door member
chamber
sealing surface
lever arm
door
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2007166103A
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English (en)
Japanese (ja)
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JP2008006437A5 (enExample
JP2008006437A (ja
Inventor
ヒュングサム キム サム
チュル リー ジャエ
エヌ スターリング ウィリアム
ブラウン ポール
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
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Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of JP2008006437A publication Critical patent/JP2008006437A/ja
Publication of JP2008006437A5 publication Critical patent/JP2008006437A5/ja
Application granted granted Critical
Publication of JP5519099B2 publication Critical patent/JP5519099B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H10P72/3406—
    • H10P72/0441—
    • H10P72/0464—

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Details Of Valves (AREA)
JP2007166103A 2006-06-28 2007-06-25 ボール継手を有するバルブドア Active JP5519099B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US80606606P 2006-06-28 2006-06-28
US60/806,066 2006-06-28

Publications (3)

Publication Number Publication Date
JP2008006437A JP2008006437A (ja) 2008-01-17
JP2008006437A5 JP2008006437A5 (enExample) 2010-08-12
JP5519099B2 true JP5519099B2 (ja) 2014-06-11

Family

ID=39035470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007166103A Active JP5519099B2 (ja) 2006-06-28 2007-06-25 ボール継手を有するバルブドア

Country Status (4)

Country Link
JP (1) JP5519099B2 (enExample)
KR (2) KR100929718B1 (enExample)
CN (1) CN101101066B (enExample)
TW (1) TWI360614B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101007711B1 (ko) * 2008-05-19 2011-01-13 주식회사 에스에프에이 플라즈마 처리장치
JP5490435B2 (ja) * 2009-03-31 2014-05-14 東京エレクトロン株式会社 ゲートバルブ装置
KR101105671B1 (ko) 2010-03-12 2012-01-18 (주)동광 방폭 도어용 로커 핀의 가이드구조
TWM476362U (en) * 2012-09-07 2014-04-11 Applied Materials Inc Load lock chamber with slit valve doors
KR101327251B1 (ko) * 2012-11-15 2013-11-13 주식회사 선익시스템 회전형 챔버도어
USD755153S1 (en) * 2014-06-20 2016-05-03 Zuna Designz, Llc Cell phone case with resilient suspension hook
WO2019067948A1 (en) * 2017-09-29 2019-04-04 Applied Materials, Inc. VACUUM CHAMBER INSULATION DEVICE OF CLOSURE MECHANISM AND SUBSYSTEM
CN108531871A (zh) * 2018-07-09 2018-09-14 山东三齐能源有限公司 一种连续镀膜溅镀系统
KR200498912Y1 (ko) * 2022-06-27 2025-03-12 김영수 믹서트럭 수거통의 개폐장치

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LU74745A1 (enExample) * 1976-04-12 1976-11-11
DE3047295A1 (de) * 1980-12-16 1982-07-29 Basf Ag, 6700 Ludwigshafen Verfahren zur kontinuierlichen herstellung alterungsbestaendiger aes-polymerisate
US5259881A (en) * 1991-05-17 1993-11-09 Materials Research Corporation Wafer processing cluster tool batch preheating and degassing apparatus
US4785962A (en) * 1987-04-20 1988-11-22 Applied Materials, Inc. Vacuum chamber slit valve
KR930009811A (ko) * 1991-11-08 1993-06-21 원본미기재 볼조인트(ball joint) 조립체와 만드는 방법
US7575220B2 (en) * 2004-06-14 2009-08-18 Applied Materials, Inc. Curved slit valve door
CN2709730Y (zh) * 2004-06-16 2005-07-13 锦州电炉有限责任公司 高真空转阀
US8061920B2 (en) 2006-11-29 2011-11-22 Wimberley, Inc. Pivoting ball mount having four equally spaced contact points

Also Published As

Publication number Publication date
KR100929718B1 (ko) 2009-12-03
TWI360614B (en) 2012-03-21
KR101274963B1 (ko) 2013-06-13
CN101101066B (zh) 2010-06-02
KR20090077030A (ko) 2009-07-14
KR20080001649A (ko) 2008-01-03
CN101101066A (zh) 2008-01-09
TW200809123A (en) 2008-02-16
JP2008006437A (ja) 2008-01-17

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