KR100926535B1 - 전기적 접속 장치 및 그 조립 방법 - Google Patents

전기적 접속 장치 및 그 조립 방법 Download PDF

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Publication number
KR100926535B1
KR100926535B1 KR1020070106514A KR20070106514A KR100926535B1 KR 100926535 B1 KR100926535 B1 KR 100926535B1 KR 1020070106514 A KR1020070106514 A KR 1020070106514A KR 20070106514 A KR20070106514 A KR 20070106514A KR 100926535 B1 KR100926535 B1 KR 100926535B1
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KR
South Korea
Prior art keywords
probe
plate
plate member
guide holes
straight line
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KR1020070106514A
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English (en)
Korean (ko)
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KR20080049612A (ko
Inventor
요시에이 하세가와
Original Assignee
가부시키가이샤 니혼 마이크로닉스
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Application filed by 가부시키가이샤 니혼 마이크로닉스 filed Critical 가부시키가이샤 니혼 마이크로닉스
Publication of KR20080049612A publication Critical patent/KR20080049612A/ko
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Publication of KR100926535B1 publication Critical patent/KR100926535B1/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
KR1020070106514A 2006-11-30 2007-10-23 전기적 접속 장치 및 그 조립 방법 Active KR100926535B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2006-00322825 2006-11-30
JP2006322825A JP5337341B2 (ja) 2006-11-30 2006-11-30 電気的接続装置およびその組み立て方法

Publications (2)

Publication Number Publication Date
KR20080049612A KR20080049612A (ko) 2008-06-04
KR100926535B1 true KR100926535B1 (ko) 2009-11-12

Family

ID=39600675

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070106514A Active KR100926535B1 (ko) 2006-11-30 2007-10-23 전기적 접속 장치 및 그 조립 방법

Country Status (3)

Country Link
JP (1) JP5337341B2 (https=)
KR (1) KR100926535B1 (https=)
TW (1) TW200829921A (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5341456B2 (ja) * 2008-10-06 2013-11-13 日本電子材料株式会社 プローブカード
CN102565470B (zh) * 2010-12-03 2014-06-04 日本麦可罗尼克斯股份有限公司 探针组合体
KR101813283B1 (ko) 2011-08-23 2018-01-30 삼성전기주식회사 프로브 및 이를 이용하는 전자 부품 테스트 장치
TWI467180B (zh) * 2012-11-29 2015-01-01 Winbond Electronics Corp 探針卡
CN103941049A (zh) * 2013-01-21 2014-07-23 华邦电子股份有限公司 探针卡
KR101398550B1 (ko) * 2013-04-22 2014-05-27 리노공업주식회사 컨택트 프로브 및 그 제조방법
WO2016146499A1 (en) * 2015-03-13 2016-09-22 Technoprobe S.P.A. Testing head with vertical probes having an improved sliding movement within respective guide holes and correct holding of the probes within the testing head under different operative conditions
TWI596346B (zh) 2016-08-24 2017-08-21 中華精測科技股份有限公司 垂直式探針卡之探針裝置
IT201800021253A1 (it) * 2018-12-27 2020-06-27 Technoprobe Spa Testa di misura a sonde verticali avente un contatto perfezionato con un dispositivo da testare
KR102852504B1 (ko) 2019-10-04 2025-08-29 (주)포인트엔지니어링 프로브 카드
KR102857322B1 (ko) 2020-03-27 2025-09-09 (주)포인트엔지니어링 양극산화막 구조체 및 이를 포함하는 프로브 헤드 및 이를 포함하는 프로브 카드
KR102896286B1 (ko) * 2020-04-24 2025-12-05 (주)포인트엔지니어링 적층형 양극산화막 구조체 및 이를 이용한 프로브 카드의 가이드 플레이트 및 이를 구비하는 프로브 카드
CN114720736B (zh) 2021-01-07 2025-04-08 旺矽科技股份有限公司 具有能横向微调的导板的探针头与导板组以及探针头调整方法
TWI782576B (zh) * 2021-01-07 2022-11-01 旺矽科技股份有限公司 具有能橫向微調之導板的探針頭與導板組以及探針頭調整方法
KR102597311B1 (ko) * 2021-08-24 2023-11-02 윌테크놀러지(주) 미세피치 대응이 가능한 프로브 카드

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0750321A (ja) * 1993-08-04 1995-02-21 Yokowo Co Ltd プローブカード
JP2006003191A (ja) * 2004-06-17 2006-01-05 Micronics Japan Co Ltd 電気的接続装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004072661A1 (ja) * 2003-02-17 2004-08-26 Kabushiki Kaisha Nihon Micronics 電気的接続装置
JP2006003252A (ja) * 2004-06-18 2006-01-05 Micronics Japan Co Ltd 電気的接続装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0750321A (ja) * 1993-08-04 1995-02-21 Yokowo Co Ltd プローブカード
JP2006003191A (ja) * 2004-06-17 2006-01-05 Micronics Japan Co Ltd 電気的接続装置

Also Published As

Publication number Publication date
JP2008139034A (ja) 2008-06-19
JP5337341B2 (ja) 2013-11-06
TW200829921A (en) 2008-07-16
KR20080049612A (ko) 2008-06-04
TWI342401B (https=) 2011-05-21

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