KR100905996B1 - Method for fabricating semiconductor device using dual damascene process - Google Patents

Abstract

The present invention relates to a dual damascene process of a semiconductor device, and more particularly, a method of manufacturing a semiconductor device using a dual damascene process suitable for improving an etching profile due to loss of an insulating film during trench formation in a via first type dual damascene process. To this end, the present invention provides a method for forming a via hole exposing the conductive layer by selectively etching the insulating film on the conductive layer; Forming a barrier film buried in the via hole and planarized thereon to prevent damage to the conductive layer through the via hole in a subsequent trench etching process; Curing the barrier film; Forming a photoresist pattern on the barrier layer to form trenches overlapping the via holes to form a dual damascene structure; Etching a portion of the insulating layer using the photoresist pattern as an etching mask to form a trench; And it provides a semiconductor device manufacturing method using a dual damascene process comprising the step of removing the photoresist pattern and the barrier film.

Dual damascene, via hole, trench, faceting, metallization, trench, SADD, VFDD, TFDD, hardening, barrier film.

Description

Method for manufacturing semiconductor device using dual damascene process {METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING DUAL DAMASCENE PROCESS}             

1A to 1D are cross-sectional views schematically showing the dual damascene process by the via first method.

2A to 2E are cross-sectional views illustrating a semiconductor device manufacturing process using a dual damascene process according to an embodiment of the present invention.

* Explanation of symbols for the main parts of the drawings

30 conductive layer 31 first insulating film

32: etching stop film 33: second insulating film

36 barrier film 37 photoresist pattern

38: trench

The present invention relates to a method for manufacturing a semiconductor device, and more particularly, to a method for manufacturing a semiconductor device using a dual damascene process.

In general, in the manufacture of semiconductor devices, metal wiring is used to electrically connect the devices and the devices, or the wiring and the wiring.

Aluminum (Al) or tungsten (W) is widely used as the metallization material, but due to low melting point and high resistivity, it is no longer applicable to ultra-high density semiconductor devices. As ultra-high integration of semiconductor devices requires the use of materials with low specific resistance and highly reliable materials such as electromigration (hereinafter referred to as EM) and stress migration (hereinafter referred to as SM). Copper has recently been of interest as a suitable material.

The reason why copper is used as a metal wiring material is not only that the melting point of copper is relatively high as 1080 ° C. (aluminum: 660 ° C., tungsten: 3400 ° C.), but the specific resistance is 1.7 μm cm, aluminum (2.7 μΩ cm) and tungsten (5.6 μΩ). It is because it is much lower than cm).

However, the wiring process using copper has a problem that the etching is difficult and the corrosion is diffused, and thus, there is a considerable difficulty in practical use.

The single damascene process or the dual damascene process is applied to improve and put this into practical use. In particular, the dual damascene process is mainly applied.

Here, the damascene process is to form a trench by patterning a dielectric layer through a photolithography process, the conductive material such as tungsten (W), aluminum (Al), copper (Cu), etc. The conductive material other than the necessary wiring is filled in by using a technique such as etching back or chemical mechanical polishing (hereinafter referred to as CMP) to form the wiring in the trench shape formed earlier.

The damascene process, in particular the dual damascene process, is mainly used for forming bit lines, word lines, and metal interconnections such as DRAMs. In particular, the upper and lower metal interconnections are connected in a multilayer metal interconnection. Not only can the via holes to be formed at the same time, but also can eliminate the step caused by the metal wiring has the advantage of facilitating subsequent processes.

The dual damascene process is mainly referred to as Via First Dual Damascene (hereinafter referred to as VFDD), Trench First Dual Damascene (hereinafter referred to as TFDD) and Self-Align Dual Damascene (hereinafter referred to as SADD). 1A to 1D are cross-sectional views schematically illustrating a dual damascene process using a via first method, which will be described with reference to the drawings.

Referring to FIG. 1A, a nitride-based first etch stop layer 11, an oxide-based first insulating layer 12, and a nitride-based second etch stop layer 11 may be formed on a conductive layer 10 such as a plug or a metal wiring. 13), an oxide-based second insulating film 14 and a nitride-based third etch stop film 15 are formed, and a photoresist pattern 16 for defining a via hole is formed thereon. Here, 'V' illustrated represents a via hole planned area.                         

Meanwhile, the above-described first and second insulating films 12 and 14 may include a multi-layered structure, and as illustrated, the conductive layer 10 and each insulating film are formed between the insulating films and on the conductive layer 10 by an etching process. In order to prevent the damage and to obtain an etching profile, a plurality of nitride stop films of the nitride film series which serve as an etch stop are formed.

As shown in FIG. 1B, the first and second insulating layers 12 and 14 and the second and third etch stop layers 13 and 15 are selectively etched by using the photoresist pattern 12 as an etch mask. The etch stop is performed on the film 11 and then removed through a subsequent etching process to form a via hole 17 exposing the surface of the conductive layer 10, and then a photoresist pattern through a photoresist strip process. (16) is removed and the etching residue is removed by a cleaning process.

Subsequently, as shown in FIG. 1C, an antireflection film 18 is formed on the entire structure in which the via hole 17 is formed, which serves to prevent reflection of light during exposure of the photoresist and to form the via hole 18. Accordingly, the conductive layer 10 serves as a barrier for preventing damage caused by the subsequent trench etching process of the exposed conductive layer 10 and is thick enough to fill the via hole 17 using an organic layer. To form.

The photoresist is coated on the antireflection film 18 to a predetermined thickness, and then a predetermined portion of the photoresist is selectively selected using an exposure source (not shown) such as ArF or KrF and a predetermined reticle (not shown). The photoresist pattern 19 for defining the trench structure is formed by exposing and leaving portions exposed or unexposed through the exposure process through the developing process, and then removing the etching residue through the post-cleaning process or the like. . 'T' shown represents the trench formation region. At this time, the via hole 17 region is overlapped in the trench formation region.

Meanwhile, in the process of forming the anti-reflection film 18, a non-uniformity of the thickness of the deposited thickness becomes thinner, such as 'X' shown in the edge portion of the upper portion of the second insulating film 14 in the via hole 17 region.

Subsequently, as shown in FIG. 1D, the trench 20 is formed by selectively etching the anti-reflection film 18 and the second insulating film 14 using the photoresist pattern 19 as an etch mask. The conductive layer 10 exposed by 17 is protected by an antireflection film 18.

On the other hand, due to the non-uniform coating characteristics of the anti-reflection film 18 as described above, during the formation of the trench 20, the etching target at the edge portion of the insulating film is reduced and deformation of the etching profile occurs. This is a problem that occurs because the etching selectivity of the oxide film and the nitride film used as the insulating film and the etch stop film reaches a limit.

This faceting phenomenon accelerates the penetration of chemicals and the like into the first anti-reflection film 18 and the photoresist strip and cleaning process along the damaged part in the cleaning process, resulting in an electrical short between the conductive layers. Or deterioration of electrical characteristics, resulting in lower yield and reliability of semiconductor devices.

The present invention is to solve the above problems of the prior art, a semiconductor device manufacturing method using a dual damascene process suitable for improving the etching profile due to the loss of the insulating film during the trench formation in the via-first dual damascene process The purpose is to provide.

The present invention for achieving the above object, the step of selectively etching the insulating film on the conductive layer to form a via hole for exposing the conductive layer; Forming a barrier film buried in the via hole and planarized thereon to prevent damage to the conductive layer through the via hole in a subsequent trench etching process; Curing the barrier film; Forming a photoresist pattern on the barrier layer to form trenches overlapping the via holes to form a dual damascene structure; Etching a portion of the insulating layer using the photoresist pattern as an etching mask to form a trench; And it provides a semiconductor device manufacturing method using a dual damascene process comprising the step of removing the photoresist pattern and the barrier film.

Hereinafter, the most preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the technical idea of the present invention. 2A to 2E are cross-sectional views illustrating a semiconductor device manufacturing process using a dual damascene process according to an embodiment of the present invention, which will be described later in detail.

Referring to FIG. 2A, an oxide-based first insulating layer 31, a nitride-based etching stop layer 32, and an oxide-based second insulating layer 33 are formed on a conductive layer 30 such as a plug or a metal wiring. The photoresist pattern 34 for defining the via hole is formed on the upper portion thereof. Here, 'V' illustrated represents a via hole planned area.

Meanwhile, the above-described first and second insulating films 31 and 33 may include a BSG (Boro Silicate Glass) film, a BPSG (Boro Phospho Silicate Glass) film, a PSG (Phospho Silicate Glass) film, a TEOS (Tetra Ethyl Ortho Silicate) film, and an HDP. (High Density Plasma) oxide film or USG (Undoped Silicate Glass) film, etc. may include a multi-layered structure, and as shown, between the insulating layer and the conductive layer 30 above the conductive layer 30 and each of the etching process according to the etching process. In order to prevent damage to the insulating film and to obtain an etching profile, a plurality of nitride stop films of the nitride film series serving as an etch stop are formed, and thus are omitted for simplicity of the drawings.

On the other hand, the etch stop film 32 is preferably formed to a thickness of 100 kPa to 1000 kPa.

As shown in FIG. 2B, via holes exposing the surface of the conductive layer 30 by selectively etching the first and second insulating layers 31 and 33 and the etch stop layer 32 using the photoresist pattern 34 as an etch mask. (35) is formed.

On the other hand, on the conductive layer 30, an etching stop film of a nitride film series is usually used.

Subsequently, the photoresist pattern 34 is removed through a photoresist strip process, and the etching residue is removed through a cleaning process.                     

Subsequently, as shown in FIG. 2C, the barrier layer 18 is formed on the entire structure in which the via hole 35 is formed, which serves as an anti-reflection film that prevents reflection of light when the photoresist is exposed and the via hole 35 is formed. In order to simultaneously serve as a barrier for preventing damage caused by the subsequent trench etching process of the exposed conductive layer 30, the thickness of the conductive layer 30 is large enough to fill the via hole 35 using an organic material. To form.

Subsequently, the upper portion of the barrier layer 36 is planarized through a CMP process and then cured to improve the etching resistance of the barrier layer 36.

Specifically, the hardening method includes a method of stuffing an inert gas such as He, Ne, Ar, or N ₂ into the barrier layer 36 through an ion implantation method, a method through electron beam scanning, or the like. After the ion implantation, the organic anti-reflection film or the photoresist component barrier film 35 is baked at a temperature that will not flow. For 10 seconds to 1800 seconds at a temperature of about 100 ° C. to 150 ° C. It is preferable to carry out.

Since the film density of the barrier layer 36 is increased through the above-described curing treatment, etching resistance is improved accordingly.

Next, as shown in FIG. 2D, a photoresist is applied to the barrier layer 36 to a predetermined thickness, and then an exposure source (not shown) such as ArF or KrF and a predetermined reticle (not shown) are applied. Define a trench structure by selectively exposing a predetermined portion of the photoresist, remaining exposed or unexposed through a developing process, and then removing etching residues through a post-cleaning process. A photoresist pattern 37 for forming is formed. 'T' shown represents the trench formation region. At this time, the via hole 35 region is overlapped in the trench formation region.

Subsequently, the barrier layer 36 and the second insulating layer 33 are selectively etched using the photoresist pattern 37 as an etch mask to form the trench 38. In this case, the conductive layer exposed by the via hole 35 is formed. 30 is protected by the antireflection film 36, and the etch stop occurs in the etch stop film 32.

On the other hand, the barrier layer 36 whose etch resistance is increased through the above-described curing is significantly lower than that of the oxide-based second insulating layer 33, so that the barrier layer 36 filling the via hole 35 is formed. Loss rarely occurs.

Therefore, when the trench 38 is etched, deformation of the etching profile due to the loss of the etch stop layer 32 and the first insulating layer 31 can be prevented.

Subsequently, the photoresist pattern 37 and the barrier layer 30 are removed through a conventional photoresist strip process. At this time, the second insulating layer 33 made of an oxide film is lost because of the removal using the O ₂ plasma. It can be removed with little generation.

Subsequently, the process of forming the dual damascene structure is completed by removing the etch residue in the photoresist strip process through a conventional cleaning.

FIG. 2E illustrates a cross section in which a conductive film pattern for filling the via hole 35 and the trench 38 is formed, in which the barrier metal film 39 and the metal wiring 40 are stacked to form the second insulating film 33 through CMP. ) And flattened as an example.

Here, the barrier metal film 39 is formed using at least one material selected from the group consisting of TiW, Ti, TiN, WN, TaW, and TaN, and the metal wire 40 may be formed of a material such as Al, W, or Cu. use.

Meanwhile, in the above-described example, the barrier metal film 39 and the metal wiring 40 are stacked as an example, but the conductive film pattern includes TiW, Ti, TiN, WN, TaW, Al, W, Cu, and TaN. It is also possible to have a structure in which at least one selected from the group constitutes one metal wiring.

On the other hand, when depositing the above-described Al, W or Cu and the like (Electroless), Metal Organic Chemical Vapor Deposition (hereinafter referred to as MOCVD) method, Physical Vapor Deposition (hereinafter referred to as PVD) ) And the like.

According to the present invention made as described above, by curing the anti-reflection film of the organic series formed to protect the etch damage in the via hole during the trench etching after the definition of the via hole, it is possible to prevent the putting phenomenon of the insulating film during the trench etching. I found out.

Although the technical spirit of the present invention has been described in detail according to the above preferred embodiment, it should be noted that the above embodiment is for the purpose of description and not of limitation. In addition, those skilled in the art will understand that various embodiments are possible within the scope of the technical idea of the present invention.

As described above, the present invention can suppress the perching phenomenon during the trench etching in the via-first dual damascene process, and ultimately, an excellent effect of improving the yield and reliability of the semiconductor device can be expected.

Claims (8)

Selectively etching the insulating film on the conductive layer to form a via hole exposing the conductive layer; Forming a barrier film buried in the via hole and planarized thereon to prevent damage to the conductive layer through the via hole in a subsequent trench etching process; Curing the barrier film; Forming a photoresist pattern on the barrier layer to form trenches overlapping the via holes to form a dual damascene structure; Etching a portion of the insulating layer using the photoresist pattern as an etching mask to form a trench; And Removing the photoresist pattern and the barrier layer Semiconductor device manufacturing method using a dual damascene process comprising a. The method of claim 1, The barrier film is a semiconductor device manufacturing method using a dual damascene process, characterized in that the organic anti-reflection film. The method of claim 1, Curing the barrier film, Performing ion implantation or electron beam irradiation using an inert gas on the barrier film; And Baking steps A semiconductor device manufacturing method using a dual damascene process comprising a. The method of claim 3, wherein The baking step is a semiconductor device manufacturing method using a dual damascene process, characterized in that carried out for 10 seconds to 1800 seconds at a temperature of 100 ℃ to 150 ℃. The method of claim 1, A method of manufacturing a semiconductor device using a dual damascene process characterized in that an O ₂ plasma is used to remove the barrier layer and the photoresist pattern. The method of claim 1, A method of manufacturing a semiconductor device using a dual damascene process, further comprising forming a conductive layer pattern filling the via hole and the trench. The method of claim 6, The conductive layer pattern is characterized in that the metal barrier layer using any one of Al, W or Cu and a metal barrier layer using at least one selected from the group consisting of TiW, Ti, TiN, WN, TaW and TaN is laminated. Semiconductor device manufacturing method using a dual damascene process. The method of claim 6, The conductive film pattern is a semiconductor device manufacturing method using a dual damascene process, characterized in that using at least one selected from the group consisting of TiW, Ti, TiN, WN, TaW, Al, W, Cu and TaN.

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