KR100895367B1 - 마이크로 렌즈용 형의 제조 방법 - Google Patents

마이크로 렌즈용 형의 제조 방법 Download PDF

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Publication number
KR100895367B1
KR100895367B1 KR1020060095271A KR20060095271A KR100895367B1 KR 100895367 B1 KR100895367 B1 KR 100895367B1 KR 1020060095271 A KR1020060095271 A KR 1020060095271A KR 20060095271 A KR20060095271 A KR 20060095271A KR 100895367 B1 KR100895367 B1 KR 100895367B1
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KR
South Korea
Prior art keywords
mold
microlens
silicon substrate
lens
manufacturing
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Expired - Fee Related
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KR1020060095271A
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English (en)
Korean (ko)
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KR20070050344A (ko
Inventor
이리조오 나니와
마사또시 가나마루
다께시 시마노
시게오 나까무라
마사야 호리노
유미꼬 안자이
Original Assignee
가부시키가이샤 히타치세이사쿠쇼
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Publication of KR20070050344A publication Critical patent/KR20070050344A/ko
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Publication of KR100895367B1 publication Critical patent/KR100895367B1/ko
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00365—Production of microlenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00—Optical elements, e.g. lenses, prisms
    • B29L2011/0016—Lenses

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
KR1020060095271A 2005-11-10 2006-09-29 마이크로 렌즈용 형의 제조 방법 Expired - Fee Related KR100895367B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2005-00326152 2005-11-10
JP2005326152A JP2007133153A (ja) 2005-11-10 2005-11-10 マイクロレンズ用型の製造方法

Publications (2)

Publication Number Publication Date
KR20070050344A KR20070050344A (ko) 2007-05-15
KR100895367B1 true KR100895367B1 (ko) 2009-04-29

Family

ID=38002932

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060095271A Expired - Fee Related KR100895367B1 (ko) 2005-11-10 2006-09-29 마이크로 렌즈용 형의 제조 방법

Country Status (3)

Country Link
US (1) US20070102842A1 (enExample)
JP (1) JP2007133153A (enExample)
KR (1) KR100895367B1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007219303A (ja) * 2006-02-17 2007-08-30 Hitachi Ltd マイクロレンズ用型の製造方法
WO2008153102A1 (ja) 2007-06-14 2008-12-18 Aji Co., Ltd. 造形方法、レンズの製造方法、造形装置、スタンパの製造方法、マスタ製造装置、スタンパ製造システム、及びスタンパ製造装置
US7646551B2 (en) * 2007-12-05 2010-01-12 Aptina Imaging Corporation Microlenses with patterned holes to produce a desired focus location
ITRM20080610A1 (it) 2008-11-13 2010-05-14 Aptina Imaging Corp Procedimento per passivazione in umido di piazzole di unione per protezione contro un trattamento successivo basato su tmah.
US9149958B2 (en) * 2011-11-14 2015-10-06 Massachusetts Institute Of Technology Stamp for microcontact printing
US20130334594A1 (en) * 2012-06-15 2013-12-19 Jerome A. Imonigie Recessed gate memory apparatuses and methods
KR101919067B1 (ko) 2017-04-27 2018-11-19 세종공업 주식회사 저수차 렌즈 제조방법
JP6993837B2 (ja) * 2017-10-13 2022-02-04 株式会社エンプラス ドライエッチング法による成形型の製造方法
CN114530527B (zh) * 2022-02-18 2024-06-14 浙江拓感科技有限公司 光电子器件台面的制备方法及台面型光电子器件的刻蚀结构
CN115091664A (zh) * 2022-07-15 2022-09-23 西安交通大学 一种对称式复眼结构的防近视眼镜镜片模具的制备方法
CN117826286B (zh) * 2024-03-05 2024-05-28 苏州苏纳光电有限公司 阵列式级联微透镜组的制备方法、阵列化曝光装置及应用

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05150103A (ja) * 1991-11-29 1993-06-18 Asahi Glass Co Ltd 非球面マイクロレンズアレイの製造方法
JPH0763904A (ja) * 1993-08-25 1995-03-10 Asahi Glass Co Ltd 複合球面マイクロレンズアレイ及びその製造方法
JP2004069790A (ja) 2002-08-01 2004-03-04 Seiko Epson Corp 凹部付き基板の製造方法、凹部付き基板、マイクロレンズ用凹部付き基板、マイクロレンズ基板、液晶パネル用対向基板、液晶パネルおよび投射型表示装置
KR20040038348A (ko) * 2002-10-31 2004-05-08 엘지전자 주식회사 이방성 식각을 이용한 다단계 구조물 제조방법 및 다단계구조물

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11326603A (ja) * 1998-05-19 1999-11-26 Seiko Epson Corp マイクロレンズアレイ及びその製造方法並びに表示装置
US6700708B2 (en) * 2002-05-30 2004-03-02 Agere Systems, Inc. Micro-lens array and method of making micro-lens array
US7029944B1 (en) * 2004-09-30 2006-04-18 Sharp Laboratories Of America, Inc. Methods of forming a microlens array over a substrate employing a CMP stop

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05150103A (ja) * 1991-11-29 1993-06-18 Asahi Glass Co Ltd 非球面マイクロレンズアレイの製造方法
JPH0763904A (ja) * 1993-08-25 1995-03-10 Asahi Glass Co Ltd 複合球面マイクロレンズアレイ及びその製造方法
JP2004069790A (ja) 2002-08-01 2004-03-04 Seiko Epson Corp 凹部付き基板の製造方法、凹部付き基板、マイクロレンズ用凹部付き基板、マイクロレンズ基板、液晶パネル用対向基板、液晶パネルおよび投射型表示装置
KR20040038348A (ko) * 2002-10-31 2004-05-08 엘지전자 주식회사 이방성 식각을 이용한 다단계 구조물 제조방법 및 다단계구조물

Also Published As

Publication number Publication date
US20070102842A1 (en) 2007-05-10
KR20070050344A (ko) 2007-05-15
JP2007133153A (ja) 2007-05-31

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