KR100869053B1 - 반도체 모듈의 인쇄회로기판 세척용 공급장치 - Google Patents
반도체 모듈의 인쇄회로기판 세척용 공급장치 Download PDFInfo
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- KR100869053B1 KR100869053B1 KR1020070056286A KR20070056286A KR100869053B1 KR 100869053 B1 KR100869053 B1 KR 100869053B1 KR 1020070056286 A KR1020070056286 A KR 1020070056286A KR 20070056286 A KR20070056286 A KR 20070056286A KR 100869053 B1 KR100869053 B1 KR 100869053B1
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- Prior art keywords
- semiconductor module
- cleaning
- circuit board
- printed circuit
- pcb
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- 238000004140 cleaning Methods 0.000 title claims abstract description 38
- 239000004065 semiconductor Substances 0.000 title claims abstract description 35
- IYZWUWBAFUBNCH-UHFFFAOYSA-N 2,6-dichlorobiphenyl Chemical compound ClC1=CC=CC(Cl)=C1C1=CC=CC=C1 IYZWUWBAFUBNCH-UHFFFAOYSA-N 0.000 claims abstract description 31
- 150000003071 polychlorinated biphenyls Chemical class 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims abstract description 6
- 230000003028 elevating effect Effects 0.000 claims description 24
- 238000001179 sorption measurement Methods 0.000 claims description 21
- 238000005406 washing Methods 0.000 claims description 8
- 230000002950 deficient Effects 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 3
- 238000005192 partition Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67333—Trays for chips
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (9)
- 삭제
- 반도체 모듈의 PCB(10)를 다수열로 구획 적층시키며 바닥벽(130)에는 관통공(160)이 형성된 통형상의 지그(100)와, 상기 지그(100)에 적층된 PCB(10)를 단속적으로 승강시키는 승강수단(200)과, 상기 지그(100)에 적층된 다수의 PCB(10)를 픽업하여 세척장치(2)의 이송콘베이어(3)에 이송 공급시키는 픽업공급수단(300)을 구비한 반도체 모듈의 인쇄회로기판 세척용 공급장치에 있어서, 상기 승강수단(200)은 상기 관통공(160)에 배치되는 승강판(210)과, 승강판(210)에 연결되어 승강판(210)을 일정피치씩 단속적으로 상승시키는 승강작동수단으로 구성된 것을 특징으로 하는 반도체 모듈의 인쇄회로기판 세척용 공급장치.
- 제 2항에 있어서, 상기 지그(100)의 양측벽 상단에는 서로 마주보도록 한 쌍의 센서공(125,126)이 관통 형성되고, 상기 한 쌍의 센서공(125,126)에는 광(光)을 조사하고 이 광을 수신하는 발광소자(192)와 수광소자(195)로 이루어진 감지센서가 구비된 것을 특징으로 하는 반도체 모듈의 인쇄회로기판 세척용 공급장치.
- 제 2항에 있어서, 상기 픽업공급수단(300)은 상기 지그(100)의 일측에 이송콘베이어(3) 방향으로 수평왕복이송수단(330)에 의해 왕복이송 가능하게 장착되는 이송프레임(310)과, 상기 이송프레임(330)에 승강왕복이송수단(360)에 의해 왕복승강 가능하게 장착되는 픽업프레임(370)과, 상기 픽업프레임(270)에 일정간격으로 고정 배치되어 다수열로 적층된 PCB(10)를 진공 흡착하는 흡착부(370)로 구성된 것을 특징으로 하는 반도체 모듈의 인쇄회로기판 세척용 공급장치.
- 제 4항에 있어서, 상기 수평왕복이송수단(330)은 상기 지그(100) 일측의 프레임(105)에 이송콘베이어(3) 방향으로 장착되어 회전되며 둘레부에 상기 이송프레임(310)이 결합되는 리드스크류(332)와, 상기 리드스크류(332)를 정역회전시키는 정역회전 가능한 모터(335)로 구성된 것을 특징으로 하는 반도체 모듈의 인쇄회로기판 세척용 공급장치.
- 제 4항에 있어서, 상기 승강왕복이송수단(360)은 일단부가 상기 이송프레임(310)에 고정되고 타단은 상기 픽업프레임(350)에 고정되며 공압 또는 유압에 의해 작동되는 승강실린더로 이루어진 것을 특징으로 하는 반도체 모듈의 인쇄회로기판 세척용 공급장치.
- 제 4항에 있어서, 상기 픽업프레임(350)의 상면에는 일방향으로 길게 상측으로 개구되는 T홈(355)이 형성되되 상기 T홈(355)에는 너트(356)가 위치 이동 가능하게 결합되고, 상기 픽업프레임(350)의 상면에는 길이방향을 따라 장공(392)이 형성된 지지바아(390)가 안착되되 고정축(357)에 의해 너트(356)에 체결되어 고정되 는 지지바아(390)가 구비되어, 상기 지지바아(390)의 장공(392)에 흡착부(370)가 위치 이동가능하게 결합되는 것을 특징으로 하는 반도체 모듈의 인쇄회로기판 세척용 공급장치.
- 제 7항에 있어서, 상기 흡착부(370)는 상기 장공(392)에 일정간격으로 관통 고정되는 슬리브관(372)과, 상기 슬리브관(372)에 슬라이드 관통 결합되며 상측에는 슬리브관(372)의 상면에 걸려지도록 직경이 확관되는 걸림턱(374)이 형성되고 중앙부에는 위치 이동 가능하게 결합되는 지지관체(375)가 결합되며 상단에 진공수단이 연결되는 노즐관(373)과, 상기 지지바아(390)와 지지관체(375) 사이의 노즐관(373) 둘레부에 결합되어 노즐관(373)을 하향 탄성적으로 지지하는 스프링(376)과, 상기 노즐관(373)의 하단부에 결합되어 PCB(10)를 흡착하는 흡착패드(377)로 구성된 것을 특징으로 하는 반도체 모듈의 인쇄회로기판 세척용 공급장치.
- 제 7항에 있어서, 상기 지지바아(390)의 일측에는 진공수단에 연결되는 바아형태의 진공챔버(395) 구비되고, 상기 진공챔버(395)에는 상기 각각의 흡착부(370)가 연결되는 밸브(376)가 다수 고정되어, 상기 각각의 밸브(376)을 통해 각각의 흡착부(370)에 연결관으로 연결된 것을 특징으로 하는 반도체 모듈의 인쇄회로기판 세척용 공급장치.
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KR1020070056286A KR100869053B1 (ko) | 2007-06-08 | 2007-06-08 | 반도체 모듈의 인쇄회로기판 세척용 공급장치 |
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KR1020070056286A KR100869053B1 (ko) | 2007-06-08 | 2007-06-08 | 반도체 모듈의 인쇄회로기판 세척용 공급장치 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101302049B1 (ko) * | 2011-10-26 | 2013-08-29 | (주)삼원피씨비 | 이동통신 단말기용 진동모터 pcb의 포장방법 |
KR101505923B1 (ko) | 2013-10-01 | 2015-03-26 | (주)대일테크 | 인쇄회로기판 프로세스 장치 |
CN115119404A (zh) * | 2022-05-13 | 2022-09-27 | 迅得机械(东莞)有限公司 | 一种用于电路板水浴浸泡的自动进出装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR19980074070A (ko) * | 1997-03-21 | 1998-11-05 | 마봉태 | 인쇄회로기판(pcb)의 낱장 공급장치 |
KR20000063704A (ko) * | 2000-07-31 | 2000-11-06 | 백남현 | 인쇄회로기판 제조 공정의 로더 장치 및 그 방법 |
KR20040090554A (ko) * | 2003-04-17 | 2004-10-26 | 이주영 | 회로기판 공급장치 |
-
2007
- 2007-06-08 KR KR1020070056286A patent/KR100869053B1/ko active IP Right Grant
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR19980074070A (ko) * | 1997-03-21 | 1998-11-05 | 마봉태 | 인쇄회로기판(pcb)의 낱장 공급장치 |
KR20000063704A (ko) * | 2000-07-31 | 2000-11-06 | 백남현 | 인쇄회로기판 제조 공정의 로더 장치 및 그 방법 |
KR20040090554A (ko) * | 2003-04-17 | 2004-10-26 | 이주영 | 회로기판 공급장치 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101302049B1 (ko) * | 2011-10-26 | 2013-08-29 | (주)삼원피씨비 | 이동통신 단말기용 진동모터 pcb의 포장방법 |
KR101505923B1 (ko) | 2013-10-01 | 2015-03-26 | (주)대일테크 | 인쇄회로기판 프로세스 장치 |
CN115119404A (zh) * | 2022-05-13 | 2022-09-27 | 迅得机械(东莞)有限公司 | 一种用于电路板水浴浸泡的自动进出装置 |
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