KR100856687B1 - 유전체로 사용한 소재에 전도체 물질을 형성하는 무전해도금방법 - Google Patents
유전체로 사용한 소재에 전도체 물질을 형성하는 무전해도금방법 Download PDFInfo
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- KR100856687B1 KR100856687B1 KR1020070122725A KR20070122725A KR100856687B1 KR 100856687 B1 KR100856687 B1 KR 100856687B1 KR 1020070122725 A KR1020070122725 A KR 1020070122725A KR 20070122725 A KR20070122725 A KR 20070122725A KR 100856687 B1 KR100856687 B1 KR 100856687B1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1655—Process features
- C23C18/1664—Process features with additional means during the plating process
- C23C18/1666—Ultrasonics
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/42—Coating with noble metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/54—Contact plating, i.e. electroless electrochemical plating
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76871—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers
- H01L21/76874—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers for electroless plating
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- Chemical & Material Sciences (AREA)
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- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
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- Mechanical Engineering (AREA)
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- Organic Chemistry (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrochemistry (AREA)
- Chemically Coating (AREA)
Abstract
Description
항목 | 촉매반응 촉진제 |
pH (20℃) | 1 이하 |
비중 (20℃) | 27 (건욕시 13) |
외관 | 무색의 액체 |
냄새 | 없음 |
P.N의 유무 | P:없음 N:없음 |
COD (건욕시) | 0 ppm |
킬레이트제의 유무 | 없음 |
항목 | 제 1 무전해 동도금 약품 (DJ-CU-A) | 제 2 무전해 동도금 약품 (DJ-CU-B) | 제 3 무전해 동도금 약품 (DJ-CU-C) | 제 4 무전해 동도금 약품 (DJ-CU-안정제) |
pH(20℃) | 8.2~3.5 | 11.0~12.0 | 약 알칼리성 | 13.7~13.9 |
비중(20℃) | 1.120~1.130 | 1.050~1.080 | 1.364~1.384 | 1.03~1.05 |
외관 | 진청색 액체 | 무색~황갈색 액체 | 무색~담황색 액체 | 무색 액체 |
냄새 | 포르말린 냄새 | 약한 냄새 | 무취 | 무취 |
P.N의 유무 | P:없음 N:있음 | P:없음 N:있음 | P:없음 N:있음 | P:없음 N:있음 |
COD(건욕시) | 3.3~3.6mg/ℓ | 0mg/ℓ | 0mg/ℓ | 0mg/ℓ |
킬레이트제의 유무 | 없음 | 없음 | 없음 | 없음 |
항목 | 제 1 무전해 니켈도금 약품 (DJ-NI-A) | 제 2 무전해 니켈도금 약품 (DJ-NI-B) |
pH(20℃) | 1.3~1.7 | 9.5~9.9 |
비중(20℃) | 1.246~1.266 | 1.110~1.130 |
외관 | 짙은 녹색 액체 | 무색~옅은 황색 액체 |
냄새 | 유기산 냄새 | 암모니아 냄새 |
P.N의 유무 | P:없음 N:없음 | P:있음 N:있음 |
COD(건욕액) | 840mg/ℓ | 12200mg/ℓ |
킬레이트제의 유무 | 있음 | 있음 |
항목 | 규격 | 분석방법 |
외관 | 우유빛 액체 | 육안검사 |
비중 | 0.994±0.03 | 비중계 |
pH | 2.16±0.2 | pH meter |
Claims (5)
- 전처리 공정, 무전해 도금 공정, 후처리 공정, 세척 및 건조 공정을 포함하며,여기에서, 상기 전처리 공정은 초음파 탈지 단계, 활성화 단계, 제 1 촉매 활성화 단계, 제 2 촉매 활성화 단계를 포함하며,이때, 상기 초음파 탈지 단계에서는 PBT/PET 소재에 LDS(Laser Direct Structuring) 가공을 실시한 피도금물을 5~30중량% 농도의 초음파 세척제 수용액인 온도 40~50℃의 처리액에서 30초 내지 2분 동안 침지하였다가 수세하며,상기 활성화 단계에서는 상기 피도금물을 순수 60~65중량부에 촉매반응 촉진제 35~40중량부가 혼합된 pH 1이하, 온도 20~30℃의 처리액에서 10~15분 동안 침지하였다가 수세하며,상기 제 1 촉매 활성화 단계에서는 상기 피도금물을 순수 960~970㎖/ℓ에 무전해 도금용 촉매부여제 20~30㎖/ℓ 및 37중량% 염산 5~15㎖/ℓ가 혼합된 온도 20~30℃의 처리액에서 1~10분 동안 침지하였다가 수세하며,상기 제 2 촉매 활성화 단계에서는 상기 피도금물을 순수 850~950㎖/ℓ에 화학동 반응촉진제 50~150㎖/ℓ가 혼합된 20~40℃ 온도의 처리액에서 2~10분 동안 침치하였다가 수세하는 것을 특징으로 하는 유전체로 사용한 소재에 전도체 물질을 형성하는 무전해 도금방법.
- 제 1항에 있어서,상기 무전해 도금 공정은 무전해 동도금 단계, 제 3 촉매 활성화 단계, 무전해 니켈도금 단계, 무전해 금도금 단계를 포함하는 것을 특징으로 하는 유전체로 사용한 소재에 전도체 물질을 형성하는 무전해 도금방법.
- 제 1항에 있어서,상기 후처리 공정은 봉공처리 단계인 것을 특징으로 하는 유전체로 사용한 소재에 전도체 물질을 형성하는 무전해 도금방법.
- 제 2항에 있어서,상기 무전해 동도금 단계에서는 상기 피도금물을 저속도 금욕 또는 고속도 금욕에 따른 방법으로 처리하며,이때, 상기 저속도 금욕은 상기 피도금물을 순수 또는 이온교환수 850~870㎖/ℓ에 제 1 무전해 동도금 약품 50~70㎖/ℓ, 제 2 무전해 동도금 약품 50~70㎖/ℓ, 제 3 무전해 동도금 약품 20~25㎖/ℓ 및 제 4 무전해 동도금 약품 0.1~0.2㎖/ℓ를 차례로 첨가하여 제조한 온도 43~46℃인 처리액에 0.4~0.6㎛/5~10분의 석출속도로 침지하였다가 수세하는 것이고,상기 고속도 금욕은 상기 피도금물을 순수 또는 이온교환수 820~840㎖/ℓ에 제 1 무전해 동도금 약품 70~90㎖/ℓ, 제 2 무전해 동도금 약품 55~75㎖/ℓ, 제 3 무전해 동도금 약품 20~30㎖/ℓ 및 제 4 무전해 동도금 약품 0.1~0.2㎖/ℓ를 차례 로 첨가하여 제조한 온도 45~48℃인 처리액에 1.0~1.3㎛/10~15분의 석출속도로 침지하였다가 수세하는 것이며,상기 제 3 촉매 활성화 단계에서는 상기 피도금물을 순수 960~970㎖/ℓ에 무전해 도금용 촉매부여제 20~30㎖/ℓ 및 37중량% 염산 5~15㎖/ℓ가 혼합된 20~30℃ 온도의 처리액에서 1~10분 동안 침치하였다가 수세하며,상기 무전해 니켈도금 단계에서는 상기 피도금물을 순수 또는 이온교환수 740~770㎖/ℓ에 제 1 무전해 니켈도금 약품 40~70㎖/ℓ 및 제 2 무전해 니켈도금 약품 180~210㎖/ℓ를 혼합하여 제조한 온도 40~80℃, pH 5.0~7.0, 금속 니켈농도 5.0~6.0g/ℓ인 처리액에 침지하였다가 수세하며,상기 무전해 금도금 단계에서는 상기 피도금물을 순수 또는 이온교환수 850~950㎖/ℓ에 치환 금도금 약품 80~120㎖/ℓ 및 시안화금칼륨 2.5~3.3g/ℓ를 혼합하여 제조한 온도 90~92℃, pH 4.3~4.7인 처리액에 0.06~0.09㎛/10분의 치환속도로 처리하였다가 수세하는 것을 특징으로 하는 유전체로 사용한 소재에 전도체 물질을 형성하는 무전해 도금방법.
- 제 3항에 있어서,상기 봉공처리 단계는 상기 피도금물을 10~30중량% 농도의 침적식 봉공처리제 수용액인 온도 25~60℃의 처리액에서 5~20초 동안 침지하였다가 수세하는 것을 특징으로 하는 유전체로 사용한 소재에 전도체 물질을 형성하는 무전해 도금방법.
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101167569B1 (ko) | 2012-01-13 | 2012-08-09 | 동진P&I산업(주) | 무전해 동 스트라이크 공정을 갖는 무전해 도금방법 |
KR101167570B1 (ko) | 2012-01-13 | 2012-08-09 | 동진P&I산업(주) | 무전해 도금방법 |
KR101167568B1 (ko) | 2012-01-13 | 2012-08-23 | 동진P&I산업(주) | 클리너 공정을 갖는 무전해 도금방법 |
CN105019221A (zh) * | 2014-08-20 | 2015-11-04 | 太仓市璜泾太华化纤助剂厂 | 一种提高化纤白度的化纤助剂 |
KR20200110887A (ko) | 2019-03-18 | 2020-09-28 | 주식회사 엠에스씨 | 자동차 lds 전장 부품용 무전해 중성-중온 니켈도금액 |
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Patent Citations (4)
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JPH06192842A (ja) * | 1992-12-24 | 1994-07-12 | Nippon G Ii Plast Kk | 樹脂成形品の塗装方法 |
KR20050037440A (ko) * | 2005-01-19 | 2005-04-21 | 동진P&I산업(주) | 폴리카보네이트 성분이 함유된 수지 제품의 표면 특성을개선하기 위한 도금방법 |
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KR20070058986A (ko) * | 2005-12-05 | 2007-06-11 | 롬 앤드 하스 일렉트로닉 머트어리얼즈, 엘.엘.씨. | 유전체의 금속화 |
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