KR100798144B1 - Apparatus for manufacturing flat panel display - Google Patents

Abstract

Apparatus for manufacturing a flat panel display is provided to secure effective area of the apparatus by using an injection unit integrated with a nozzle for injecting a chemical liquid and a nozzle for injecting air. A transfer unit is formed in a process chamber. The transfer unit supports a substrate and transfers it to one direction. A first discharge channel(202) and a second discharge channel(204) are formed on a united injection unit(200). The first discharge channel injects a chemical liquid to the substrate received on the transfer unit. The second discharge channel injects air to the substrate. The united injection unit includes a first body unit(201), a second body unit(203), and a spacer(205). The first body unit has the first discharge channel. The second body unit faces the first body unit and has the second discharge channel. The spacer is arranged between the first body unit and the second body unit to separate them.

Description

Equipment for manufacturing flat panel display {Apparatus for manufacturing flat panel display}

1 is a schematic configuration diagram of equipment for manufacturing a flat panel display.

2 is a conceptual diagram of an integrated injection unit according to an embodiment of the present invention.

3 is a partial cross-sectional view of the etching part and the cleaning part according to FIG. 1.

* Description of the symbols for the main parts of the drawings

130: etching part 140: washing part

200: integrated injection portion 201: first body portion

202: first discharge path 203: second body portion

204: second discharge path 205: spacer

206: first damper 207: second damper

The present invention relates to equipment for manufacturing flat panel displays, and more particularly, to equipment for manufacturing flat panel displays having an integrated jet unit for injecting a chemical liquid or air.

Recently, information processing devices have been rapidly developed to have various types of functions and faster information processing speeds. Such an information processing apparatus has a display device for displaying information. Until now, a cathode ray tube monitor has been mainly used as a display device, but in recent years, with the rapid development of semiconductor technology, the use of a flat display device that is light and occupies a small space is rapidly increasing. There are various types of flat panel displays. Among them, liquid crystal displays, which are small in power consumption and small in volume, and low voltage driven, are widely used.

Various processes are performed to produce such a liquid crystal display. Such a process includes an etching, washing, drying or heat treatment process performed in a substrate processing apparatus such as a chamber or a diffusion furnace.

Among these processes, the etching process may use dry etching or wet etching. In particular, the wet etching process etches the exposed material layer by dipping the substrate into the etchant or spraying the etchant on the substrate.

At this time, a nozzle for spraying a chemical liquid to form a wet etching, for example to perform a wet etching is formed. In addition, when the etching process is completed, the cleaning process is performed. The air is sprayed so that the ultrapure water of the cleaning chamber does not flow into the etching chamber. That is, a nozzle for injecting air in the etching chamber is formed to act as an air curtain (Air curtain) at the pressure.

If each nozzle is provided separately, the area occupied by the equipment can be large by installing so as to be spaced apart from each other. This can increase the footprint of the facility on the facility line by increasing the foot print of the device. In addition, manufacturing costs can be increased by using each expensive knife provided with each nozzle. In addition, it can be cumbersome to maintain and maintain each knife in terms of equipment maintenance.

The technical problem to be achieved by the present invention is to provide an apparatus for manufacturing a flat panel display having an integrated injection unit for injecting a chemical liquid and air.

The technical problem to be achieved by the present invention is not limited to the above-mentioned problem, and other problems not mentioned will be clearly understood by those skilled in the art from the following description.

In order to achieve the above technical problem, a flat panel display manufacturing apparatus according to an embodiment of the present invention is formed in a process chamber, a process chamber, and supports a substrate and transports in one direction, and the spraying the chemical liquid to the substrate seated on the transfer unit Each of the first discharge path and the second discharge path for injecting air is formed, but includes an integrated injection part provided integrally.

Specific details of other embodiments are included in the detailed description and the drawings. Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various different forms, only the embodiments are to make the disclosure of the present invention complete, and common knowledge in the art to which the present invention belongs It is provided to fully inform the person having the scope of the invention, which is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic diagram of a flat panel display manufacturing equipment 100.

Referring to FIG. 1, an apparatus for manufacturing a flat panel display includes a loading unit 110, a buffer unit 120, an etching unit 130, a cleaning unit 140, a drying unit 150, and an unloading unit 160. .

Specifically, the loading unit 110 is formed with a conveying roller for conveying the substrate to the space waiting to convey the substrate.

The buffer unit 120 is formed between the loading unit 110 and the etching unit 130 and is a space for stability of the etching process.

The etching unit 130 formed between the buffer unit 120 and the cleaning unit 140 etches the exposed deposition film on the substrate to form a pattern. Here, the etching process for pattern formation is taken as an example, but is not limited thereto. It may be a strip process to remove the photoresist. In the etching unit 130, an etching process may be performed by dipping the substrate on which the deposition layer is formed into an etching solution or by spraying the etching solution on the substrate. However, in the exemplary embodiment of the present invention, the etching unit 130 performs an etching process by spraying the etching solution on the substrate. In particular, the etching unit 130 according to an embodiment of the present invention is formed with a chemical liquid discharge passage and an air discharge passage, respectively, is formed with an integrated injection unit (not shown) provided integrally. Therefore, by providing an integrated integrated injection unit, it is possible to reduce the volume of the equipment and to reduce the equipment cost. And, if the integrated injection unit is integrated into one, it is easy to maintain and manage the equipment. This will be described later.

The cleaning unit 140 formed between the etching unit 130 and the drying unit 150 cleans the substrate to remove the etching liquid from the substrate. That is, when the substrate etched by the etching unit 130 is transferred to the cleaning unit 140, the cleaning unit 140 sprays de-ionized water to remove the etching liquid remaining on the etched substrate. Therefore, the nozzle of the means for spraying ultrapure water may be formed in the cleaning unit 140.

In addition, the drying unit 150 formed between the cleaning unit 140 and the unloading unit 160 may dry the cleaned substrate. The drying unit 150 is also provided with drying means capable of supplying air to the cleaned substrate and drying it. The drying means may be an air knife, but is not limited thereto.

The unloading unit 160 located next to the drying unit 150 is a space for transferring the etched substrate to a subsequent process.

In the exemplary embodiment of the present invention, the flat panel display manufacturing apparatus 100 is exemplified as described above, but is not limited thereto. Depending on the configuration of the equipment there may be additional process chambers and vice versa.

Referring to Figure 2 will be described an integrated injection unit 200 which is an embodiment of the present invention.

2 is a conceptual view schematically illustrating the integrated injection unit 200.

The integrated injection unit 200 includes a first body portion 201 having a first discharge passage 202, a second body portion 203 having a second discharge passage 204, and a spacer 205.

In more detail, the first discharge passage 202 is a slit nozzle into which the chemical liquid is introduced to inject the fluid. The chemical liquid injected through the first discharge path 202 may be an etching liquid for forming a pattern on the substrate. The first discharge passage 202 may be connected to a chemical liquid supply source (not shown) to receive and spray the chemical liquid. The first discharge path 202 may be in the form of a slit nozzle formed long in a width direction of the substrate.

A first damper 206 may be formed in the first body portion 201 in which the first discharge passage 202 is formed to temporarily store the chemical liquid and adjust the flow rate. A plurality of first dampers 206 may be formed and arranged at regular intervals along the length direction of the first discharge path 202. Since the first damper 206 and the first discharge passage 202 are connected, the chemical liquid introduced into the first body 201 may be injected through the first discharge passage 202 while filling the first damper 206. Can be. Here, the first body portion 201 may be in the form of an aqua knife including the first discharge passage 202.

In particular, according to an embodiment of the present invention, the second discharge passage 204 is provided in the second body portion 203 disposed to face the first body portion 201 and spaced apart from the spacer 205.

The spacer 205 maintains the distance between the first body portion 201 and the second body portion 203 so as to distinguish the respective functions.

The etching portion (see 130 of FIG. 1) needs a means for preventing the ultrapure water of the cleaning portion (see 140 of FIG. 1) from entering the etching portion 130 in order to require and maintain the high purity of the etching solution. This prevention means is implemented through the second body portion 203.

That is, the second discharge passage 204 of the second body portion 203 may be connected to an air supply source (not shown) to receive and spray air. The second discharge path 204 may be in the form of a slit nozzle formed long in a width direction of the substrate. The air injected by the second discharge passage 204 can prevent the chemical liquid from being diluted by ultrapure water by forming an air curtain at the pressure of the air. In addition, by preventing the chemical liquid from overflowing, it is possible to prevent the chemical liquid from flowing into the cleaning unit 140 to contaminate ultrapure water.

A second damper 207 may be formed in the second body 203 in which the second discharge passage 204 is formed to temporarily store air and adjust the flow rate. The second dampers 207 may be formed in plural and may be arranged at regular intervals along the length direction of the second discharge passage 204. Since the second damper 207 and the second discharge passage 204 are connected, air introduced into the second body 203 may be injected through the second discharge passage 204 while filling the second damper 207. Can be. Here, the second body portion 203 may be in the form of an air knife including the second discharge passage 204.

Here, the gap of the first discharge passage 202 and the second discharge passage 204 may be about 0.3 to 0.5um. However, the present invention is not limited thereto, and the gap between the first and second discharge paths 202 and 204 may also vary according to the lengths of the first body portion 201 and the second body portion 203. Further, the inclined slope portion of the second discharge passage 204 is further inclined such that the chemical liquid injection by the first discharge passage 202 is performed at a position before the air injection by the second discharge passage 204. It can be provided.

In particular, according to an embodiment of the present invention by providing an integrated injection unit 200 having a first body portion 201 in the form of an aqua knife and a second body portion 203 in the form of an air knife as an integral unit. By reducing the space in the plant, the volume of the plant can be reduced. In addition, the integrated integrated injection unit 200 may reduce the time required to separate and reinstall each knife, thereby facilitating maintenance management of the facility. In addition, cost reduction can be achieved by combining expensive knives into a single knife.

Next, an operation of the flat panel display manufacturing apparatus 100 will be described with reference to FIG. 3.

3 is a partial cross-sectional view of the etching part and the cleaning part according to FIG. 1.

Referring to FIG. 3, the substrate G is transferred to the etching unit 130 according to an embodiment of the present invention. At this time, the substrate G is conveyed by the conveying roller 132.

The etchant is sprayed onto the substrate G by the first discharge path 202 of the integrated jet unit 200. When the etching liquid is injected onto the substrate G by the first discharge path 202 having a nozzle shape, a predetermined region may be etched to form a pattern.

In addition, by injecting air by the second discharge passage 204 of the integrated injection unit 200 to form an air curtain at the pressure of the air it is possible to prevent the ultrapure water from the cleaning unit 140. In addition, the second discharge path 204 may also be a liquid saving means for preventing the etching liquid of the etching unit 130 from flowing into the cleaning unit 140.

The substrate G on which the etching process is completed is transferred to the cleaning unit 140 by the transfer roller 132.

The cleaning unit 140 is provided with cleaning means 145 for cleaning. Although the cleaning means 145 is illustrated as a cleaning means in the form of a nozzle, it is not limited thereto and may be in the form of a shower.

After the etching solution remaining on the substrate G is washed, the substrate G is transferred for the next process.

Although embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art to which the present invention pertains have various permutations, modifications, and modifications without departing from the spirit or essential features of the present invention. It is to be understood that modifications may be made and other embodiments may be embodied. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive.

As described above, the flat panel display manufacturing equipment of the present invention has one or more of the following effects.

First, the effective area of the facility can be secured by providing a single nozzle (injection part) integrated with a nozzle for injecting chemical liquid and a nozzle for injecting air.

Second, maintenance of the facility is facilitated by managing one integrated injection unit.

Third, by incorporating expensive knives into one, there is a reduction in production cost.

Claims (4)

Process chambers; A transfer part formed in the process chamber and supporting the substrate and moving in one direction; And Including an integrated injection port formed with a first discharge path for injecting the chemical liquid and a second discharge path for injecting air to the substrate seated on the transfer unit, respectively, The integrated injection unit, A first body part provided with the first discharge path; A second body part disposed opposite the first body part and provided with the second discharge path; And And a spacer disposed between the first body portion and the second body portion to separate the first body portion and the second body portion. delete The method of claim 1, Equipment for manufacturing a flat panel display further comprises a damper formed in the first body portion and the second body portion for temporarily storing fluid and adjusting the flow rate. The method of claim 1, Wherein the gap between the first and second discharge paths is 0.3 to 0.5 um.

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