KR100793270B1 - 반도체 패키지의 스트립 픽커 장치 - Google Patents
반도체 패키지의 스트립 픽커 장치 Download PDFInfo
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- KR100793270B1 KR100793270B1 KR1020060080468A KR20060080468A KR100793270B1 KR 100793270 B1 KR100793270 B1 KR 100793270B1 KR 1020060080468 A KR1020060080468 A KR 1020060080468A KR 20060080468 A KR20060080468 A KR 20060080468A KR 100793270 B1 KR100793270 B1 KR 100793270B1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (6)
- 다수의 반도체 패키지가 몰딩되어 이루어진 반도체자재를 절단 및 분류하는 소잉소터 시스템에 구비된 반도체 패키지의 스트립 픽커 장치에 있어서,실린더로 구비된 제1구동부 및 모터로 구비된 제2구동부가 설치된 본체;상기 본체의 하측에 설치되고, 상기 반도체 패키지를 픽업하는 픽업부재;를 포함하되,상기 제1구동부의 동작에 따라 상기 픽업부재가 회동되고, 상기 제2구동부의 동작에 따라 상기 픽업부재가 승ㆍ하강되는 것을 특징으로 하는 반도체 패키지의 스트립 픽커 장치.
- 제 1항에 있어서,상기 제1구동부는,상기 픽업부재와 연결되어 수직으로 설치되는 샤프트;를 더 포함하되,상기 샤프트 내부에 중공부가 형성되고, 상기 제1구동부와 연결된 전원공급부의 배선이 상기 중공부에 위치되는 것을 특징으로 하는 상기 반도체 패키지의 스트립 픽커 장치.
- 제 1항에 있어서,상기 본체는,일부분이 외측으로 돌출 형성되고, 내부에는 나사산이 형성된 승ㆍ하강안내부;를 더 포함하고,상기 제2구동부는,상기 승하강안내부 내에 위치되면서 수직으로 설치되는 볼스크류;를 더 포함하는 것을 특징으로 하는 상기 반도체 패키지의 스트립 픽커 장치.
- 삭제
- 제 2항에 있어서,상기 제1구동부와 연결된 주동기어;상기 주동기어와 맞물리고, 상기 샤프트에 결합되는 종동기어;를 더 포함하되,상기 주동기어와 상기 종동기어는 감속기어로 구비된 것을 특징으로 하는 상기 반도체 패키지의 스트립 픽커 장치.
- 제 5항에 있어서,상기 본체에 구비된 스토퍼;상기 픽업부재에 구비된 걸림부;를 더 포함하되,상기 제1구동부의 동작에 따라 상기 픽업부재가 회동되면 상기 걸림부가 상기 스토퍼에 밀착되는 것을 특징으로 하는 상기 반도체 패키지의 스트립 픽커 장치.
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KR1020060080468A KR100793270B1 (ko) | 2006-08-24 | 2006-08-24 | 반도체 패키지의 스트립 픽커 장치 |
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KR1020060080468A KR100793270B1 (ko) | 2006-08-24 | 2006-08-24 | 반도체 패키지의 스트립 픽커 장치 |
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KR100793270B1 true KR100793270B1 (ko) | 2008-01-10 |
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KR1020060080468A KR100793270B1 (ko) | 2006-08-24 | 2006-08-24 | 반도체 패키지의 스트립 픽커 장치 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101394496B1 (ko) * | 2009-09-25 | 2014-05-14 | 세메스 주식회사 | 멀티픽커장치 및 이를 이용한 반도체소자흡착방법 |
KR101534107B1 (ko) * | 2014-06-10 | 2015-07-09 | 순천향대학교 산학협력단 | 반도체 패키지 검사 및 교체 장치 |
KR101560306B1 (ko) | 2010-11-26 | 2015-10-14 | 한미반도체 주식회사 | 기판 이송 어셈블리 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05183022A (ja) * | 1991-12-26 | 1993-07-23 | Emutetsuku Kk | チップ自動選別搬送装置 |
JPH0745644A (ja) * | 1993-07-26 | 1995-02-14 | Shinkawa Ltd | チップボンデイング方法及び装置 |
JPH09298210A (ja) * | 1996-05-07 | 1997-11-18 | Matsushita Electric Ind Co Ltd | ダイボンディング装置 |
KR20020029556A (ko) * | 2000-10-13 | 2002-04-19 | 박종섭 | 반도체 칩 이송용 픽커 |
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- 2006-08-24 KR KR1020060080468A patent/KR100793270B1/ko active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05183022A (ja) * | 1991-12-26 | 1993-07-23 | Emutetsuku Kk | チップ自動選別搬送装置 |
JPH0745644A (ja) * | 1993-07-26 | 1995-02-14 | Shinkawa Ltd | チップボンデイング方法及び装置 |
JPH09298210A (ja) * | 1996-05-07 | 1997-11-18 | Matsushita Electric Ind Co Ltd | ダイボンディング装置 |
KR20020029556A (ko) * | 2000-10-13 | 2002-04-19 | 박종섭 | 반도체 칩 이송용 픽커 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101394496B1 (ko) * | 2009-09-25 | 2014-05-14 | 세메스 주식회사 | 멀티픽커장치 및 이를 이용한 반도체소자흡착방법 |
KR101560306B1 (ko) | 2010-11-26 | 2015-10-14 | 한미반도체 주식회사 | 기판 이송 어셈블리 |
KR101534107B1 (ko) * | 2014-06-10 | 2015-07-09 | 순천향대학교 산학협력단 | 반도체 패키지 검사 및 교체 장치 |
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