KR100786126B1 - Scribe method of cutting object by sustenance contactless flatness and scribe head apparatus of cutting object by sustenance contactless flatness - Google Patents

Abstract

A scribe head apparatus for an object to be cut off which sustains contactless flatness by means of gas floating and a method of scribing using the apparatus are provided to minimize the speed difference of answer under feedback control system for improving process efficiency. A scribe head apparatus which sustains contactless flatness, equipped on both the upper and the lower sides of the object to be cut off for sequential cutting of the object while moving along X axis and Y axis on both sides comprises: the 1, 2 head driving modules(1a,1b) which are equipped on both the upper and the lower sides of the object to be cut off and to be driven forward the object coming in contact with the object for cutting process; and the 1, 2 modules for sustaining contactless flatness(2a,2b) which are equipped in both sides of the 1, 2 head driving modules(1a,1b) for sustaining the flatness in the cut section of the object to be cut off by means of gas floating. The 1, 2 head driving modules(1a,1b) consist of the 1, 2 scribe heads(120a, 120b) which are supported at both ends for rotation; and the 1, 2 head driving parts(130a,130b) which drive the 1, 2 scribe head(120a, 120b) for or against the object to be cut off. The 1, 2 modules for sustaining contactless flatness(2a,2b) consist of the 1, 2 plates for sustaining flatness(140a,140b) having numerous nozzles for spraying gas from the upper and lower parts toward the center in the modules; and the 1, 2 gas suppliers(150a,150b) for supplying pressured gas inside the 1, 2 plates for sustaining flatness(140a,140b). The method of scribing an object using the apparatus comprises the steps of: loading an object to be cut off, of which flatness is not sustained; spraying gas along the section to be cut off in the object; floating the object to be cut off by means of gas for sustaining flatness; and sequentially scribing the object while moving along X axis and Y axis on both sides of the object while sustaining the flatness at every cut section of the object to be cut off.

Description

SCRIBE METHOD OF CUTTING OBJECT BY SUSTENANCE CONTACTLESS FLATNESS AND SCRIBE HEAD APPARATUS OF CUTTING OBJECT BY SUSTENANCE CONTACTLESS FLATNESS}

The present invention relates to a scribe head device for maintaining the flatness of the cutting object by a non-contact method, and a scribing method thereof. More particularly, the flattening display device and the like have a flatness maintained by gas support in the cutting section. The scribe head device which maintains the flatness of the cutting object by the non-contact method which can control based on the main control part which cuts both sides sequentially in X and Y direction afterwards, and the process yield increases according to speed shape and defect rate reduction. It relates to a scribe method.

In general, the scribe head is provided on a table or a belt of scribe equipment that cuts a large number of one cut object such as glass and a flat panel display element (FPD) in a small size so that the wheel cutter is in the X and Y directions along the cut object. It is a component that plays an important role when the cutting process is performed while moving sequentially.

The conventional scribing equipment which performs a cutting process by scribing a flat panel display (hereinafter, referred to as 'glass') among the to-be-cut objects is rotated along the X and Y axis directions of the upper and lower surfaces of the glass. Upper / lower scribe heads each provided with a scribe wheel so as to sequentially cut the belt; a belt seated with a glass on the surface of the lower side of the scribe head; and moving the scribe wheel up and down of the glass to press against the surface of the glass. It consists of a drive unit provided with a servo motor and moving means for moving the scribe wheel of the scribe head in the X, Y direction along the surface of the glass.

Here, the belt is mounted on the glass instead of the adsorption table, and arranged in a number of X, Y direction according to the size of the glass and moving both the upper and lower scribe wheel between the belt to cut both sides of the glass at the same time X-axis, Y-axis It cut in order also in the direction.

At this time, the upper and lower scribe head (10a, 10b) is composed of a scribe wheel (20a, 20b), the driving unit (30a, 30b), the control unit (40a, 40b) and the calculation unit 50 as shown in FIG.

The scribe wheels 20a and 20b are driven to be moved up and down by the driving units 30a and 30b, and the driving units 30a and 30b are controlled by the control units AMP 40a and 40b and the control units 40a and 40b. The arithmetic unit 50 is provided to feed back the scribe pressures of the driving units 30a and 30b, which are servo motors, to control within the set range.

On the other hand, since the glass G does not maintain flatness, the glass G has an error ( ₁ ) of flatness with respect to the surface and the position of the glass G according to the flatness error ( ₁ ) in the curved portion of the glass G. Negative (-) corrections were required at the protruding parts of the and positive (+) corrections were made at the depressions.

That is, when the scribe wheels 20a and 20b positioned in the upper and lower portions gradually move in the glass G directions, and preferentially contact, the loads (scribe pressure) generated in the scribe wheels 20a and 20b are controlled by the controller ( The scribe wheel 20a is recognized by the output signal outputted at the moment when 40a and 40b contacts each other, and the generated load of the scribe wheels 20a and 20b which are subsequently contacted is recognized by the controller 40a and 40b as the contact instantaneous output signal. 20b) is transmitted to the drive units 30a and 30b.

However, when the flatness of the glass G is not maintained, a difference in communication reaction speed between the operation unit 50, the controllers 40a and 40b, and the driving units 30a and 30b is generated. In consideration of the moving speeds of the scribe heads 20a and 20b moving in the X and Y directions in the process of receiving the control signals transmitted by the operation unit 50 from each of the driving units 30a and 30b, they are corrected at the position to be corrected. Since the value is not applied and is applied at the difference distance (l ₂ ) between the input value of the scribe pressure and the actual correction value, the reaction position error (l ₁ ) is generated by this difference distance (l ₂ ).

As a result, torque inputs to the scribe pressure may be varied depending on the communication speed difference between the head driving units 30a and 30b, the control units 40a and 40b, and the calculation unit 50, and the moving speeds of the scribe heads 20a and 20b. The difference between the input and the torque output occurs, which causes the glass to be cut in a state where the flatness of the glass G is not maintained, thereby preventing accurate cutting.

Therefore, as in the prior art, when both sides of the glass are simultaneously cut and the cutting in the X and Y axis directions is sequentially performed, there is a problem due to the method of maintaining the glass flatness in the cutting section and the difference in the response speed between the mechanism of the feedback control system and the electrical signal processing. The solution is urgent.

The present invention has been made in order to solve the above problems, the object of the present invention is to maintain the flatness of the flat panel display device and the cutting object in the cutting section by maintaining the flatness by cutting the both sides in the X, Y direction sequentially A scribe head device and a scribing method for maintaining flatness of the cutting object by a non-contact method that can improve the performance of the equipment and the process yield due to the reduction of the defective rate by solving the problem caused by the difference in the response speed between the mechanism and the electrical signal processing. In providing.

In order to achieve the above object, the present invention is provided in each of the upper and lower portions of the to-be-cut object, the scribe head device for sequential cutting while moving both sides in the X, Y direction, respectively, provided on the upper and lower sides of the to-be-cut object First and second head driving modules which come in contact with each other while cutting in driving directions; And first and second flatness maintaining modules respectively provided on both sides of the first and second head driving modules to maintain the flatness of the cut section of the cutting object by gas support. In this case, the cutting quality is improved because the flatness of the cutting section is maintained by non-contact gas injection during cutting of the cutting object.

The scribe head device and the scribing method for maintaining the flatness of the to-be-cut by the non-contact method of the present invention as described above, after maintaining the flatness by gas support in the cutting section of the flat panel display device and the like, X, By sequentially cutting in the Y direction and eliminating the response speed problem that may occur in the feedback control system, the process yield is improved due to improved line operation and reduced defect rate.

Hereinafter, with reference to the accompanying drawings, a scribe head device and a scribing method for maintaining the flatness of the object to be cut by the non-contact method of the present invention will be described as follows.

According to an exemplary embodiment of the present invention, the scribe head apparatus for maintaining the flatness of the cut object by the non-contact method may include the first and second head driving modules 1a and 1b and the first as shown in FIGS. 2 and 3. And 2 flatness maintaining modules 2a and 2b, respectively, and are arranged in a plurality of rows so as to be spaced apart in the X and Y directions while having a predetermined interval under the upper and lower scriber head devices. X and Y axis for moving the upper and lower scriber head device so that the belt (110) is transported in order to sequentially cut the glass (G) in the X-axis, Y-axis direction while moving in the X, Y direction A conveying device such as a linear motor (not shown in the figure) is provided in the spaced apart space of the belt 110 in a state of crossing.

The first and second head driving modules 1a and 1b are each provided with a pair of upper and lower sides of the glass G, and are individually or uniformly driven in the glass G direction to cut the glass G. And the first and second scribe heads 120a and 120b, the first and second head drivers 130a and 130b, and a control unit (not shown).

The first and second scribe heads 120a and 120b are wheel-shaped scribers whose ends are supported, and radial protrusions are formed on an outer circumferential surface thereof.

The first and second head driving units 130a and 130b also transfer the upper and lower scribe head devices provided on the upper and lower sides of the glass G uniformly or individually toward the glass G direction or the opposite direction thereof. Let's do it.

The control unit is provided to uniformly control the feed direction and the feed rate of the first and second scribe heads 120a and 120b, respectively, and to sequentially and automatically control the feed.

The first and second flatness maintaining modules 2a and 2b are provided up and down on both sides of the first and second head driving modules 1a and 1b, respectively, and the glass G is supported in a non-contact manner by gas injection. The flatness of the cutting section of the glass G can be maintained.

The first and second flatness maintaining modules 2a and 2b may be divided into first and second flatness maintaining plates 140a and 140b and first and second gas supply parts 150a and 150b.

The first and second flatness maintaining plates 140a and 140b are provided with a plurality of nozzles for injecting gas toward the center from the upper and lower surfaces of the inner wall facing up and down, and the upper and lower sides are moved up and down uniformly, respectively. A spacing controller (not shown) is provided to adjust the spacing with the driving modules 1a and 1b uniformly or individually.

Furthermore, when the first and second flatness maintaining plates 140a and 140b are provided in plural or plural numbers on both sides of the first and second head driving modules 1a and 1b, the glass may be provided at various points. The flatness of (G) can be maintained. In this case, it is preferable that the first and second flatness maintaining plates 140a and 140b are provided at both sides.

The flatness of the glass G may be controlled by adjusting the injection pressure of the gas injected into the first and second flatness maintaining plates 140a and 140b, and the first and second gas supply units 150a. Automatic control is possible by controlling the injection pressure at 150b).

On the other hand, the first and second flatness maintaining plate (140a, 140b), the distance between the first and second head drive module (1a, 1b) is uniformly or individually adjusted, for example, the interval adjustment, such as a linear motor A part (not shown in the figure) is further provided.

In this case, the gap adjusting unit controls the distance between the first and second head driving modules 1a and 1b by this driving, and thus the size of the glass G is maintained in the area where the flatness of the glass G can be maintained. It can be adjusted according to the configuration, or can be configured as a unit without a gap adjustment.

The first and second gas supply units 150a and 150b are media for separately supplying gas into the first and second flatness maintaining plates 140a and 140b on both sides to which the first and second gas supply units 150a and 150b are connected. In the lower part, the gas is supplied in a variable type, respectively, and the intensity can be adjusted individually or uniformly. In addition, the strength of the gas can be adjusted individually within each flatness maintaining plate.

Here, the gas supplied from the first and second gas supply units 150a and 150b may supply a gas or the like in addition to air.

In the scribe method for maintaining the flatness of the cut object by the non-contact method according to the present invention, as shown in Figure 4, the step of loading the cut material is not maintained flatness (S200), gas injection pressure and gas injection interval Adjusting the step (S210), the step of spraying the gas along the cutting portion of the cutting (S220), the flatness is maintained while the cutting is suspended by the gas (S230), the cutting of the cutting And sequential scribing in the X and Y directions simultaneously with both surfaces while maintaining the flatness for each part (S240) and the cutting object unloading step (S250).

The step of loading the cut object not maintained with the flatness (S200) is performed when the cutting process is performed by transferring the glass G, the cut object not maintained with the flatness, by the driving of the adjacent belt 110. It is a step of loading onto the belt 110 serving as a table function.

Here, the method may further include arranging the glass G before performing the loading of the cut material in which the flatness is not maintained (S200).

Adjusting the gas injection pressure and the gas injection interval (S210) is a uniform or individually variable gas in each of the first and second gas supply unit (150a, 150b) to the glass (G) loaded on the belt 110 Simultaneously or individually adjusting the spacing of the first and second flatness maintaining plates 140a and 140b on both sides of the first and second head driving modules 1a and 1b at the same time. to be.

Injecting the gas along the cut portion of the cutting object (S220) is a high pressure supplied from the first and second gas supply parts 150a and 150b connected to the first and second flatness maintaining plates 140a and 140b. Along the cutting area of the glass G to be cut by the area to maintain the flatness, that is, the first and second scribe heads 120a and 120b of the first and second head drive modules 1a and 1b. Injecting gas.

At this time, in the step of injecting gas along the cut portion of the cutting object (S220), the glass (G) at both upper and lower sides of the first and second scribe heads (120a, 120b) respectively provided above and below the glass (G). Spraying is performed through the nozzles of the first and second flatness maintaining plates 140a and 140b.

The step of maintaining the flatness while the cutting object is lifted by the gas (S230) is the image / of the glass (G) on both sides of the first, second scribe head (120a, 120b) when cutting the glass (G) First and second flatness maintaining modules 2a and 2b are provided to inject gas toward the bottom surface, which is an important condition in the cutting section of glass G by the first and second flatness maintaining modules 2a and 2b. Flatness can be maintained.

Here, the flatness of the glass G is controlled by the driving of the first and second head drives 130a and 130b toward the glass G before the flatness is maintained in the spaced apart state. , 120b) is brought into contact with the glass G. The gas of high pressure is moved up and down inside the first and second flatness maintaining plates 140a and 140b provided at both sides of the upper and lower first and second scribe heads 120a and 120b by a transfer means such as a linear motor. While spraying toward the glass G, it transfers to X and Y directions.

Thereafter, the glass G is supported by the gas injected up and down of the glass G, and the flatness is precisely adjusted by adjusting the injection pressure of the gas through the first and second gas supply parts 150a and 150b. To be maintained.

The step S240 of sequentially cutting both surfaces and simultaneously in the X and Y directions while maintaining the flatness for each cut portion of the cutting object is carried out by a scriber head device, such as a linear motor, between adjacent gaps of the belt 110. The glass G is sequentially cut in the X and Y axis directions while sequentially moving in the X and Y axis directions.

As a result, the first and second scribe heads 120a and 120b contact the glass G and move the glass G in the X-axis or Y-axis direction by moving means such as a linear motor. High pressure gas is injected from the first and second flatness maintaining plates 140a and 140b located at both sides of the first and second scribe heads 120a and 120b when the first direction is cut first and then the other direction is cut. Thereby maintaining the flatness of the glass G in the cutting zone.

The cutting object unloading step (S250) is a step of being unloaded after being cut by both surfaces of the glass G in the X and Y-axis directions and driven by the neighboring belt 110.

The present invention is not limited to the embodiments described above, and various modifications and changes can be made by those skilled in the art, which are included in the spirit and scope of the present invention as defined in the appended claims.

1 is a view schematically showing a scriber head device for cutting a conventional large flat panel display device.

2 and 3 are views illustrating the operation of the scriber head device having a substrate flatness maintaining function according to the non-contact method of the present invention.

4 is a flowchart illustrating a scribing method of maintaining flatness of a cut object by a non-contact method of the present invention.

<Description of Symbols for Main Parts of Drawings>

1a and 1b: first and second head drive modules

2a and 2b: first and second flatness maintaining modules

120a, 120b: first and second scribe heads

130a, 130b: first and second head drives

140a, 140b: first and second flatness maintaining plates

150a, 150b: first and second gas supply parts

Claims (10)

In the scribe head device which is provided in the upper and lower parts of the to-be-cut object, and cut | disconnects sequentially, moving both surfaces in X and Y directions, First and second head driving modules respectively provided on upper and lower sides of the to-be-cut object, and which are cut in contact with each other while being driven in the direction of the cut object; And First and second flatness maintaining modules respectively provided at both sides of the first and second head driving modules to maintain the flatness of the cut section of the cutting object by gas support; The scribe head device for maintaining the flatness of the cutting object by a non-contact method comprising a. The method of claim 1, wherein the first and second head drive module, First and second scribe heads supported at both ends to rotate; And First and second head driving units driving the first and second scribe heads in the direction to be cut or in the opposite direction; A scribe head device for maintaining the flatness of the to-be-cut by the non-contact system, characterized in that consisting of. The method of claim 1, wherein the first and second flatness maintaining module, First and second flatness maintaining plates provided with a plurality of nozzles for injecting gas in a center direction from above and below the inside thereof; And First and second gas supply parts configured to supply high pressure gas into the first and second flatness maintaining plates; A scribe head device for maintaining the flatness of the to-be-cut by the non-contact system, characterized in that consisting of. The method of claim 3, wherein And the first and second gas supply units respectively supply a gas to the upper and lower parts of the to-be-cut to each other in a variable type. The method of claim 3, wherein The first and second flatness maintaining plates further maintain a flatness of the to-be-cut by the non-contact method, characterized in that the gap adjusting part for adjusting the intervals with the first and second head driving modules uniformly or individually is further provided. Scribe head device. The method of claim 5, The first and second flatness maintaining plate is a scribe head device for maintaining the flatness of the to-be-cut by the non-contact method, characterized in that a single or a plurality is provided on both sides of the first, second head drive module. 1) loading the cuttings whose flatness is not maintained; 2) injecting gas along the cut portion of the cutting object; 3) maintaining the flatness while the cutting object is supported by a gas; And 4) sequentially scribing both surfaces simultaneously in the X and Y directions while maintaining flatness for each cut portion of the cutting object; The scribing method of maintaining the flatness of the cutting object by a non-contact method comprising a. The method of claim 7, wherein step 2) A scribe method for maintaining the flatness of the to-be-cut by the non-contact method, characterized in that the gas is injected from each of the upper and lower sides of the cutting of the cutting. The method of claim 7, wherein After performing step 1), the step of uniformly or individually adjusting the gas injection pressure by varying, respectively, is further performed to maintain the flatness of the cut material by a non-contact method. The method of claim 7, wherein After the step 1) performing the step of uniformly or individually adjusting the interval between the cutting site and the gas injection site scribe method for maintaining the flatness of the cut material by a non-contact method.

Images